Precision Interferometric Metrology

April 7-9, 1992
Westward Look Resort
Tucson, AZ

PDF versions of the abstracts of the 1992 Spring Topical Meeting Proceedings are not available. Contact ASPE to purchase a copy of the Proceedings. ASPE does not sell individual copies of abstracts.


Evening Session
Tuesday, April 7, 7:00 p.m.

  1. Sub-nanometer Metrology for Space-based Stellar Interferometry (Invited Paper)
    M. Shao (Jet Propulsion Laboratory)
    Precision Interferometric Metrology/Oral/Abstract/1992 Spring

Session I
Surface Finish and Texture
Wednesday, April 8, 8:30 - 10:00 a.m.

  1. Interferometric Metrology of Surface Finish Below 1 Angstrom RMS
    J. A. Meiling (Micromap Corporatin)
    Precision Interferometric Metrology - Surface Finish and Texture/Oral/Abstract/1992 Spring
  2. Interferometry Combined with a Mechanical Probe, The New Atomic Force Microscopes
    M. R. Rodgers and V. B. Elings (Digital Instruments, Inc.)
    Precision Interferometric Metrology - Surface Finish and Texture/Oral/Abstract/1992 Spring
  3. Laser Doppler Displacement Meter for Surface Figure and Finish Measurement
    C. P. Wang (Optodyne, Inc.)
    Precision Interferometric Metrology - Surface Finish and Texture/Oral/Abstract/1992 Spring

Session II
High Resolution Phase Measurement
Wednesday, April 8, 10:30 a.m. - 12:00 p.m.

  1. Enhancing Fiber Optic Interferometer Precision Using Electro-optic Feedback and Common-mode Compensation
    B. H. Tyrone, Jr. (University of Texas) and A. J. Seltzer and A. B. Buckman (University of Texas and Research Applications, Inc.)
    Precision Interferometric Metrology - High Resolution Phase Measurement/Oral/Abstract/1992 Spring
  2. Direct Optical-to-Electrical Phase Conversion in a Fiber Optic Interferometer
    L. C. Giulianelli and A. B. Buckman (University of Texas and Research Applications, Inc.)
    Precision Interferometric Metrology - High Resolution Phase Measurement/Oral/Abstract/1992 Spring
  3. Homodyne High Resolutin Axial Interferometer
    M. Hercher and G. Wyntjes (OPTRA, Inc.)
    Precision Interferometric Metrology - High Resolution Phase Measurement/Oral/Abstract/1992 Spring

Session III
New Interferometric Sensors
Wednesday, April 8 1:30 - 3:00 p.m.

  1. An Interferometric Sensor for Absolute Position Metrology
    J. D. Blum and C. F. Ferrara (W. J. Schafer Associates)
    Precision Interferometric Metrology - New Interferometric Sensors/Oral/Abstract/1992 Spring
  2. Qualification and Performance Analysis of an Interferometric Sensor
    T. A. Sebring, C. F. Ferrara (W. J. Schafer Associates) and D. Youden, M. Gershman (Rank Taylor Hobson)
    Precision Interferometric Metrology - New Interferometric Sensors/Oral/Abstract/1992 Spring
  3. A DMI System with Advancements for Measurement and Control of Moving Stages
    A. H. Field (Zygo Corporation)
    Precision Interferometric Metrology - New Interferometric Sensors/Oral/Abstract/1992 Spring

Session IV
Accuracy Limits of Distance Measuring Interferometry
Wednesday, April 8, 3:30 - 5:00 p.m.

  1. Some Contributions to Interferometric Length Measurement with High Resolution and High Accuracy (Invited Paper)
    G. Wilkening (Physikalisch-Technische Bundesanstalt)
    Accuracy Limits of Distance Measuring Interferometry/Oral/Abstract/1992 Spring
  2. Sub-Nanometer Metrology for X-ray and Gamma-ray Wavelength Measurements
    E. G. Kessler, Jr. (NIST)
    Accuracy Limits of Distance Measuring Interferometry/Oral/Abstract/1992 Spring
  3. Elimination of Polarization Mixing Errors in Single Frequency Distance Measuring Interferometers
    W. Augustyn (CMX Systems, Inc.) and P. Davis (Worcester Polytechnic Institute)
    Accuracy Limits of Distance Measuring Interferometry/Oral/Abstract/1992 Spring

Evening Session
Wednesday, April 8, 7:00 p.m.

  1. Research on Laser Length Standards in the Precision Engineering Division, NIST (Invited Paper)
    J. A. Stone (NIST), S. Zushan (Shanghai Institute of Metrological Technology) and A. Stejskal (Institute of Scientific Instruments, Czechoslovakia)
    Precision Interferometric Metrology/Oral/Abstract/1992 Spring

Session V
On-Line Figure Metrology
Thursday, April 9, 8:30 - 10:00 a.m.

  1. Interferometric Measurement of Rotating Test-pieces
    A. E. Gee (Cranfield Institute of Technology)
    Precision Interferometric Metrology - On-line Figure Metrology/Oral/Abstract/1992 Spring
  2. Differential Interferometry for On-Process Aspheric Metrology
    L. C. Maxey (ORNL)
    Precision Interferometric Metrology - On-line Figure Metrology/Oral/Abstract/1992 Spring

Session VI
Figure Metrology for Optical Systems
Thursday, April 9, 10:30 a.m. - 12:00 p.m.

  1. Precision Figure Metrology for Fabrication of the AXAF Mirrors (Invited Paper)
    D. A. Zweig (Hughes Danbury Optical Systems, Inc.)
    Precision Interferometric Metrology - Figure Metrology for Optical Systems/Oral/Abstract/1992 Spring
  2. Interferometric Metrology in Optics
    R. P. Grosso and F. Zernike (SVG Lithography Systems, Inc.)
    Precision Interferometric Metrology - Figure Metrology for Optical Systems/Oral/No Abstract Available/1992 Spring
  3. Environmental Effects of the Testing of Large Astronomical Mirrors
    H. M. Martin, J. H. Burge and S. C. West (University of Arizona)
    Precision Interferometric Metrology - Figure Metrology for Optical Systems/Oral/Abstract/1992 Spring

Session VII
Figure Metrology for Aspheric Optics
Thursday, April 9, 1:30 - 3:00 p.m.

  1. Status of the NIST Program in Optical Figure Metrology
    C. J. Evans and W. T. Estler (NIST) and R. E. Parks (University of Arizona)
    Precision Interferometric Metrology - Figure Metrology for Aspheric Optics/Oral/No Abstract Available/1992 Spring
  2. Analysis of Cone Error in Off-axis Optics
    R. E. Parks (University of Arizona) and L-Z. Shao (Tucson Optical Research Corp.)
    Precision Interferometric Metrology - Figure Metrology for Aspheric Optics/Oral/Abstract/1992 Spring
  3. Testing Cylindrical Surfaces: Alignment Considerations
    K. Creath (University of Arizona) and J. C. Wyant (WYKO Corporation)
    Precision Interferometric Metrology - Figure Metrology for Aspheric Optics/Oral/Abstract/1992 Spring

Session VIII
Aspheres and Scale Encoders
Thursday, April 9, 3:30 - 5:00 p.m.

  1. An Interferometer for Aspheric Testing: Calibration and Error Compensation
    S. M. Arnold (APA Optics, Inc.)
    Precision Interferometric Metrology - Aspheres and Scale Encoders/Oral/Abstract/1992 Spring
  2. Aspects of Scale Encoders Based on Grating Interferometer Technology (Invited Paper)
    A. Teimel (Dr. Johannes Heidenhain GmbH)
    Precision Interferometric Metrology - Aspheres and Scale Encoders/Oral/Abstract/1992 Spring

Evening Session
Thursday, April 9, 7:00 p.m.

  1. Precision Measurement of Particle Size Using Bright Field Interferometry (Invited Paper)
    J. S. Batchelder and M. A. Taubenblatt (IBM T. J. Watson Research Center)
    Precision Interferometric Metrology/Oral/Abstract/1992 Spring