ASPE Proceedings, October 19 - October 24, 2008, Portland, Oregon

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Session I Machine Design I
Tuesday, October 21, 2008, 8:30 am - 10:00 am
Session Chair: Keith Carlisle (Lawrence Livermore National Laboratory) and Hans-Jochen Trost (MicroFab Technologies, Inc.)

  1. Robotic System for Precision Assembly of NIF Ignition Targets
    Montesanti, R. C.; Seugling, R. M.; Klingmann, J. L.; Dzenitis, E. G.; Miller, G. L.; Kent, R. A.; Castro, C.; Reynolds, J. L.; Carrillo, M. A. (Lawrence Livermore National Laboratory); and Alger, E. T. (General Atomics)
    Machine Design I/Oral/Abstract/2008 Annual
  2. Rotary-axial Spindles for Precision Manufacturing
    Lu, X.; Paone, M.; Usman, I. (The University of British Columbia); Slocum, A. H. (Massachusetts Institute of Technology); and Yui, A. (The National Defense of Academy)
    Machine Design I/Oral/Abstract/2008 Annual
  3. Design and Test of a 2-D Precision Weak-link Stage System with Sub-centimeter Travel Range and Sub-nanometer Resolution
    Shu, D.; Maser, J. (Argonne National Laboratory)
    Machine Design I/Oral/Abstract/2008 Annual
  4. Design, Realization and Testing of the NANOMEFOS Non-contact Measurement Machine for Freeform Optics
    Henselmans, R.; Rosielle, P. C. J. N.; Steinbuch, M. (Eindhoven University of Technology); and Cacace, L. (AC Optomechanix)
    Machine Design I/Oral/Abstract/2008 Annual

Session II Novel Systems
Tuesday, October 21, 2008, 10:30 am - 12:00 pm
Session Chair: Pradeep K. Subrahmanyan (RAPT Industries, Inc.) and Mark Kosmowski (Electro Scientific Industries, Inc.)

  1. The Thirty Meter Telescope Project: Designing and Building the World's Largest Telescope (Invited Paper)
    Nelson, J. (Center for Adaptive Optics, University of California)
    Novel Systems/Oral/Abstract/2008 Annual
  2. Precision Material Removal Using the Electrokinetic Phenomenon
    Leo, C. S.; Yang, C.; Butler, D. L. (Nanyang Technological University); Blackburn, T. L.; Danyluk, S. (Georgia Institute of Technology); and Ng, S. H. (Singapore Institute of Manufacturing Technology)
    Novel Systems/Oral/Abstract/2008 Annual
  3. Open Loop Fast Tool Servo with Nanometer Accuracy for Diamond Machining of Diffractive Structures
    Brinksmeier, E.; Lünemann, B.; Gläbe, R. (Bremen University); and von Kopylow, C.; Falldorf, C.; Dankwart, C. (Bremer Institut für Angewandte Strahltechnik (BIAS))
    Novel Systems/Oral/Abstract/2008 Annual
  4. Pneumatic Servo Bearing Actuator for Ultraprecise Positioning -- Part 1: Principle and Basic Performance
    Hirayama, T.; Kitagawa, T.; Kadotani, M.; Danjyo, H.; Matsuoka, T. (Doshisha University); Sasaki, K. (Pneumatic Servo Controls, Ltd.); and Yabe, H. (Kyoto University)
    Novel Systems/Oral/Abstract/2008 Annual
  5. Grinding of Microstructured Functional Surfaces - A Novel Strategy for Dressing of Microprofiles on Vitrified Grinding Wheels
    Denkena, B.; Boehnke, D.; Wang, B. (Leibniz Universität Hannover)
    Novel Systems/Oral/Abstract/2008 Annual

Session III State of the Art Precision and Ultra-Precision Machining
Wednesday, October 22, 2008, 8:30 am - 10:00 am
Session Chair: Toshiyuki Enomoto (Osaka University) and Hideo Takino (Nikon Corporation)

  1. The Current State of Art in Ultraprecision Cutting Technology in Japan
    Takeuchi, Y. (Osaka University)
    State of the Art Precision and Ultra-Precision Machining/Oral/Abstract/2008 Annual
  2. The Current State of Art in Nano-precision Micro/Meso Mechanical Manufacturing (M4) Processes
    Kuriyagawa, T.; Yoshihara, N. (Tohoku University)
    State of the Art Precision and Ultra-Precision Machining/Oral/Abstract/2008 Annual
  3. Challenges to Miniaturization in Micro EDM
    Kunieda, M. (Tokyo University of Agriculture & Technology)
    State of the Art Precision and Ultra-Precision Machining/Oral/Abstract/2008 Annual
  4. Microfactory -- Novel Manufacturing Systems for Precision Machining --
    Mishima, N.; Kondoh, S.; Nakano, S.; Ashida, K.; Masui, K. (Advanced Manufacturing Research Institute (AIST))
    State of the Art Precision and Ultra-Precision Machining/Oral/Abstract/2008 Annual

Session IV Highlights from the European Precision Engineering Field
Wednesday, October 22, 2008, 10:30 am - 12:00 pm
Session Chair: Theresa Burke (euspen) and Henny Spaan (IBS Precision Engineering BV)

  1. Precision Engineering: The European Way
    Van Brussel, H. (Katholieke Universiteit Leuven); van Eijk, J. (Technical University Delft); Spaan, H. A.M. (IBS Precision Engineering BV); and Brinksmeier, E. (Bremen University)
    Highlights from the European Precision Engineering Field/Oral/Abstract/2008 Annual
  2. Advancements in Displacement Metrology Based on Encoder Systems
    Holzapfel, W. (Dr. Johannes Heidenhain GmbH)
    Highlights from the European Precision Engineering Field/Oral/Abstract/2008 Annual
  3. Ultra Precision Surfaces
    Shore, P. (Cranfield University Precision Engineering Centre)
    Highlights from the European Precision Engineering Field/Oral/Abstract/2008 Annual
  4. Manufacturing Better Chips at Lower Cost
    Loopstra, E. R.; Ockwell, D C.; Butler, H.; Levasier, L. (ASML)
    Highlights from the European Precision Engineering Field/Oral/Abstract/2008 Annual

Session V Machining
Wednesday, October 22, 2008, 1:30 pm - 3:00 pm
Session Chair: David D. Gill (Sandia National Laboratories) and Allen Y. Yi (The Ohio State University)

  1. The Milling Dynamics "Super Diagram": Combining Stability and Surface Location Error
    Zapata Ramos, R. E.; DeMarco, C.; Schmitz, T. L. (University of Florida)
    Machining/Oral/Abstract/2008 Annual
  2. Sub-surface Damage Evaluation in Grinding of Large Optics
    Tonnellier, X.; Shore, P.; Morantz, P. (Cranfield University Precision Engineering Centre)
    Machining/Oral/Abstract/2008 Annual
  3. Ultrasonic Assisted Turning of Hardened Steel with Mono-crystalline Diamond
    Klocke, F.; Dambon, O.; Bulla, B.; Heselhaus, M. (Fraunhofer Institute for Production Technology)
    Machining/Oral/Abstract/2008 Annual
  4. Diamond Micro Chiseling of Molding Inserts for Optical Micro Structures
    Flucke, C.; Gläbe, R.; Brinksmeier, E. (Bremen University)
    Machining/Oral/Abstract/2008 Annual
  5. Machining Behaviour of Monocrystalline Diamond End Mills
    Uhlmann, E.; Oberschmidt, D. (Fraunhofer Institute for Production Systems and Design Technology)
    Machining/Oral/Abstract/2008 Annual

Session VI Sensors and Controls
Wednesday, October 22, 2008, 5:30 pm - 6:30 pm
Session Chair: Jeffrey W. Roblee (AMETEK-Precitech, Inc.) and Steven Williams (QED Technologies, International)

  1. Control of a Fast, Long Range Actuator (FLORA)
    Chen, Q.; Dow, T. A.; Garrard, K. P.; Sohn, A. (North Carolina State University); and Richardson, D. (Precision MicroDynamics, Inc.)
    Sensors and Controls/Oral/Abstract/2008 Annual
  2. Evaluation of Harmonic Distortions in Precision Inertial Sensors
    Spiewak, S. A. (University of Calgary); Hauer, G. (ARAM Systems, Ltd.); and Ludwick, S. J. (Aerotech, Inc.)
    Sensors and Controls/Oral/Abstract/2008 Annual
  3. High Accuracy Atomic Force Microscope for Dimensional Metrology
    Ljubicic, D. M.; Trumper, D. L. (Massachusetts Institute of Technology); and Hocken, R. J.; Overcash, J. L. (University of North Carolina at Charlotte)
    Sensors and Controls/Oral/Abstract/2008 Annual
  4. Error Motions of a Non-orthogonal Rotary Axis
    McGlauflin, M. L.; Moylan, S. P. (National Institute of Standards and Technology)
    Sensors and Controls/Oral/Abstract/2008 Annual

Session VII Metrology
Thursday, October 23, 2008, 8:30 am - 10:30 am
Session Chair: Byron R. Knapp (Olympic Precision, Inc.) and Henny A. M. Spaan (ISB Precision Engineering BV)

  1. Comparison of NIST Si Force Scale to NPL Si Mass Scale
    Jones, C. W.; Davidson, S.; Leach, R. K. (National Physical Laboratory); and Kramar, J. A.; Pratt, J. R. (National Institute of Standards and Technology)
    Metrology/Oral/Abstract/2008 Annual
  2. Investigating Scaling Limits of a Fiber Based Resonant Probe for Metrology Applications
    Seugling, R. M.; Darnell, I.; Florando, J. (Lawrence Livermore National Laboratory); Woody, S. C.; Bauza, M. B. (InsituTec, Inc.); and Smith, S. T. (University of North Carolina at Charlotte)
    Metrology/Oral/Abstract/2008 Annual
  3. A Comparison of Optical Sensing Methods for the High Precision 3D Surface Profile Measurement of Grooved Surfaces
    McBride, J. W.; Zhao, Z.; Boltryk, P. (University of Southampton)
    Metrology/Oral/Abstract/2008 Annual
  4. Design and Fabrication of a Multifunctional Scanning Probe with Integrated Tip Changer for Fully Automated Nanofabrication
    Leang, K. (University of Nevada-Reno); and Taylor, C. (University of Florida)
    Metrology/Oral/Abstract/2008 Annual
  5. Two-dimensional Displacement Measurement Using the Six-point Atomic Encoder Technique
    Chaikool, P.; Aketagawa, M. (Nagaoka University of Technology); and Okuyama, E. (Akita University)
    Metrology/Oral/Abstract/2008 Annual

Session VIII Interferometry
Thursday, October 23, 2008, 10:30 am - 12:00 pm
Session Chair: Robert D. Grejda (Corning Tropel Corporation) and Byron R. Knapp (Olympic Precision, Inc.)

  1. A New Heterodyne Interferometer with Zero Periodic Error and Tunable Beat Frequency
    Kim, H. S.; Schmitz, T. L.; Rueff, M. C. (University of Florida); and Beckwith, J. F. (Lawrence Livermore National Laboratory)
    Interferometry/Oral/Abstract/2008 Annual
  2. Uncertainty Considerations for Interferometric Stability Testing
    Ellis, J. D.; Joo, K.-N.; Spronck, J. W.; Munnig Schmidt, R.-H. (Delft University of Technology); and Verlaan, A. (TNO Science and Industry)
    Interferometry/Oral/Abstract/2008 Annual
  3. Measurement of the Absolute Distance Between Two Partially Reflective Surfaces
    Badami, V. G.; Deck, L. L.; Selberg, L. A. (Zygo Corporation)
    Interferometry/Oral/Abstract/2008 Annual
  4. Measuring Machines with Interferometrical Stylus for Form Measurement of Precise Mechanical Parts
    Drabarek, P.; Gnausch, T.; Fleischer, M. (Robert Bosch GmbH)
    Interferometry/Oral/Abstract/2008 Annual
  5. Absolute Length (Thickness) Measurements Using Wavelength Scanning Interferometry
    Suratkar, A. R.; Davies, A. D.; Farahi, F. (University of North Carolina at Charlotte)
    Interferometry/Oral/Abstract/2008 Annual

Session IX Machine Design II
Thursday, October 23, 2008, 1:30 pm - 3:00 pm
Session Chair: Deming Shu (Argonne National Laboratory) and Mark A. Stocker (Cranfield Precision, Division of Cinetic Landis Grinding, Ltd.)

  1. Parallel-kinematics MEMS Stages for High Precision Nanopositioning and Manipulation
    Dong, J.; Mukhopadhyay, D.; Pengwang, E.; Ferreira, P. M. (University of Illinois Urbana-Champaign)
    Machine Design II/Oral/Abstract/2008 Annual
  2. Novel Split Stage Architecture
    Kosmowski, M. T. (Electro Scientific Industries, Inc. (ESI))
    Machine Design II/Oral/Abstract/2008 Annual
  3. Design of a Fast Long Range Actuator - FLORA II
    Zdanowicz, E. M.; Eischen, J. W.; Dow, T. A. (North Carolina State University)
    Machine Design II/Oral/Abstract/2008 Annual
  4. Simulation and Prediction of the Thermally Induced Deformations on Machine Tools Caused by Moving Linear Axis Using the FDEM Simulation Approac
    Mayr, J.; Ess, M.; Weikert, S.; Wegener, K. (Swiss Federal Institute of Technology (ETHZ))
    Machine Design II/Oral/Abstract/2008 Annual
  5. Component Placement Robot with Wireless Energy and Data Transfer
    Jansen, G. L. M.; Sahin, F. (Philips Applied Technologies)
    Machine Design II/Oral/Abstract/2008 Annual

Poster Session
Tuesday, October 21, 2008, 3:30 pm - 4:30 pm
Wednesday, October 22, 2008, 3:50 pm - 5:00 pm
Session Chair: Bradley H. Jared (Sandia National Laboratories) and Eric S. Buice (Delft University of Technology)

Applications of Precision Engineering in Manufacturing

  1. Model for Cutting Edge Tools in Order to Evaluate Plastic Deformation and Friction Forces at High Speed Machining
    Amarandei, D.; Ionescu, R.; Petrariu, V. (University Stefan cel Mare)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  2. Three-dimensional Internal Information Acquisition System Based on Consecutive Precision Machining and Cross-sectional Observation -- Development of the System and its Applications --
    Furushiro, N. (Kansai University); Yokota, H.; Yamagata, Y.; Himeno, R.; Makinouchi, A. (RIKEN -The Institute of Physical and Chemical Research); Fujisaki, K. (Hokkaido University); Kokubo, M. (Toshiba Machine Co., Ltd.); and Higuchi, T. (The University of Tokyo)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  3. Fabrication of a New Three Dimensional Position Surveying System for the Underground Pipes Using Four Rotary Encoders
    Hamano, T.; Kato, S. (Nippon Institute of Technology); and Ono, M. (Tokyo Metropolitan College of Industrial Technology)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  4. Synthesis of Semi-solid Casting Processes for Optimal Fabrication of Thin-walled Parts
    Hong, S.-H.; Lee, K.-J.; Chung, S.-C. (Hanyang University)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  5. Optical Closed Loop Control for the Precision Grinding of Micro-EDM Electrodes
    Howe, M.; Bamberg, E. (University of Utah)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  6. The Lubricant Applying Effect in Ti Alloy Ti-6AI-4V Cutting
    Kaneeda, T.; Kinugawa, K. (Okayama University of Science)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  7. Storing Period Effects on Wear Properties in UHMWPE Inserts for Artificial Joints
    Kaneeda, T.; Miyata, Y. (Okayama University of Science); and Fujiwara, K. (Nakashima Propeller Co., Ltd.)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  8. Deviated-deep-hole Boring for Avoiding an Existing Reinforcing Member
    Katsuki, A.; Onikura, H. (Kyushu University); and Horita, K.; Horiuchi, T. (Japan Fine Tech Co., Ltd.)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  9. Generating Method of Micro Grooves by Micro EDM
    Lee, H. S.; Mikami, H.; Yamada, T. (Nihon University)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  10. 3D Reconstruction for the 3D Engraving System From 2D Images
    Lee, W.-S.; Song, I.-H.; Chung, S.-C. (Hanyang University)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  11. Fabrication of Fused Silica Optical Quality Pin Chuck Using a Wet Etching Process
    Lemmons, T. D.; Ozturk, O.; Hocken, R. J. (University of North Carolina at Charlotte and Center for Scalable and Integrated Nanomanufacturing (SINAM)); and Fesperman Jr., R. R. (Moore Tool Company, Inc.)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  12. The Zeeko Corrective Polishing Techniques as Applied to the Finishing of Semiconductor Thin Films
    Morton, R. K. (Zeeko Ltd.)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  13. Minimum Quantity Lubrication Turning Using Tools with Oil Holes
    Ozawa, M.; Hosokawa, A.; Tanaka, R.; Furumoto, T.; Ueda, T. (Kanazawa University)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  14. Flexure-based Mechanism for Precision Guidance and Angular Alignment Under Large Loads
    Shilpiekandula, V.; Youcef-Toumi, K. (Massachusetts Institute of Technology)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  15. Improvement of Chip Controllability of Carbon Steel in Turning by Laser Heat Treatment
    Tanaka, R.; Hosokawa, A.; Ueda, T.; Furumoto, T.; Kusano, T.; Lin, Y. (Kanazawa University)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual
  16. Intelligent-speed-increasing Spindle Using Traction Drive
    Yamanaka, M.; Inoue, K. (Tohoku University); and Sugimoto, K. (Sony Corporation)
    Applications of Precision Engineering/Poster/Abstract/2008 Annual

Control of Precision Machines and Processes

  1. High Resolution, High Speed Real-Time Digital Control System For Precision Applications
    Gawlik, A.; MacKenzie, R. I.; Otten, D.; Trumper, D. L. (Massachusetts Institute of Technology)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  2. Integrated Tuning of a Robust Controller for Linear Servomechanisms
    Hong, S.-H.; Kim, S.-C.; Chung, S.-C. (Hanyang University)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  3. Precision-limit Positioning of an Ultra Precision Table Using HSMC
    Hsieh, C.; Yang, C.-C. (National Cheng Kung University)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  4. Piezo Driven XY Stage With Nano-manipulators for SEM Operation
    Kanegae, S.; Hiroyuki, C.; Irie, Y.; Aoyama, H. (University of Electro-Communications); Iwata, F. (Shizuoka University); and Ushiki, T. (Niigata University)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  5. Novel Switching Control of the Ball-screw Driven Stage for Nano Positioning
    Kim, G-H.; Kim, W.-S.; Lee, S.-K. (Gwangju Institute of Science and Technology (GIST); and Cho, S.-G. (Hyundai Steel Company)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  6. Development of Intelligent Encoder
    Kitawaki, J.; Kanamori, C. (The University of Electro-Communications)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  7. Optimized Production of Complex Shaped Optical Components via Precision Glass Molding
    Klocke, F.; Dambon, O.; Sarikaya, H.; Wang, F. (Fraunhofer Institute for Production Technology)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  8. Detection of Micro Tool Wear in Diamond Turning of Large Area Micro-lens Array by In-process Cutting Force Measurement
    Noh, Y. J.; Arai, Y.; Gao, W. (Tohoku University)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  9. Motion Control and Optimization for Nano Lithography
    Ruben, S.; Tsao, T.-C. (University of California - Los Angeles)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  10. Characteristics of PVAJT Trajectory Generator and its Implementation
    Shin, D. (Kumoh National Institute of Technology); and Choi, S.-H. (Ajinextek Co. Ltd.)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual
  11. Control Strategies for a Dynamic Positioning Machine at Nanometer Level
    Yang, R. H.; Smith, S. T. (University of North Carolina at Charlotte); Teo, C. S. (Singapore Institute of Manufacturing Technology); Buice, E. S. (Delft University of Technology); and Liu, X. P.; Wang, W. L. (University of Warwick)
    Control of Precision Machines and Processes/Poster/Abstract/2008 Annual

Design and Fabrication of Structured Surfaces

  1. Improvement on Adhesive Strength of Ti-doped DLC Films by Heat Treatment in Vacuum
    Kohzaki, M. (Tokai University)
    Design and Fabrication of Structured Surfaces/Poster/Abstract/2008 Annual
  2. Investigation on Laser Interaction in Annealing of Amorphous Silicon Films by Pulsed Nd 3+: Yag Laser
    Palani, I. A.; Vasa, N. J.; Singaperumal, M. (Indian Institute of Technology Madras)
    Design and Fabrication of Structured Surfaces/Poster/Abstract/2008 Annual

Design of Precision Machines and Instruments

  1. Selection of Precision Actuators by Novel Function-structure-correspondences
    Erbe, T.; Król, J.; Ströhla, T.; Theska, R. (Technical University of Ilmenau)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  2. Mineral Casting as Material for Machine Base-Frames of Precision Machines
    Erbe, T.; Król, J.; Theska, R. (Technical University of Ilmenau)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  3. Micro-positioning for Precise Ink Jet Delivery
    Gatica, A. W. (M3 Design Inc.)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  4. Application of Planar Air Bearing Concept for Precision Machine Tool Design
    Gorniak, J.; Erkorkmaz, K. (University of Waterloo)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  5. Fabrication of a Green Caterpillar Type In-pipe Mobile Inspection Microrobot Driven by Pneumatic and Vacuum Pressures
    Goto, Y.; Kato, S.; Hamano, T. (Nippon Institute of Technology); and Ono, M. (Tokyo Metropolitan College of Industrial Technology)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  6. A Platform for Observing the Behavior of AFM Cantilevers During Quasi-static Loading
    Kumanchik, L. M.; Schmitz, T. L. (University of Florida); and Pratt, J. R. (National Institute of Standards and Technology)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  7. A Compact, Compound Actuator for the Molecular Measuring Machine
    Li, J.; Shen, Y.-L. (The George Washington University); Jeong, J. (Korea University & NIST); Scire, F. E.; Kramar, J. A. (National Institute of Standards and Technology)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  8. Fabrication of a Snake Type In-pipe Mobile Robot Passable T-junction
    Ono, M.; Ito, S. (Tokyo Metropolitan College of Industrial Technology); and Goto, Y.; Hamano, T.; Kato, S. (Nippon Institute of Technology)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  9. Updating the Sub-atomic Measuring Machine
    Overcash, J. L.; Stroup Jr., C. G.; Hocken, R. J. (University of North Carolina at Charlotte)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  10. Multi-scale Alignment Positioning System for NIL
    Ozturk, O.; Caskey, G. W.; Hocken, R. J. (University of North Carolina at Charlotte); and Fesperman, R. R. (Moore Tool Company, Inc.)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  11. Pneumatic Servo Bearing Actuator for Ultraprecise Positioning -- Part 2: A New Approach to Ultra-precision Motion Control
    Sasaki, K; (Pneumatic Servo Controls, Ltd.); Hirayama, T. (Doshisha University); and Yabe, H. (Kyoto University)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  12. Design of a High Frequency MEMS Scanning Mirror
    Soemers, H.; van Lierop, D. (Philips Applied Technologies); and Krastev, K. (Yacht)
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual
  13. Efficient Evaluation of Early Machine Concepts in the Frequency Domain Including Control Issues
    Weikert, S.; Jäger, C.; Bossoni, S.; Wegener, K. (Swiss Federal Institute of Technology (ETHZ))
    Design of Precision Machines and Instruments/Poster/Abstract/2008 Annual

Dimensional Metrology

  1. Microscale Metrology Using Standing Wave Probes
    Bauza, M. B.; Woody, S. C. (InsituTec, Inc.); Smith, S. T. (University of North Carolina at Charlotte); and Seugling, R. M.; Darnell, I. M.; Florando, J. N. (Lawrence Livermore National Laboratory)
    Dimensional Metrology/Poster/Abstract/2008 Annual
  2. Field-of-view Distortion Calibration and Compensation for Ultrahigh Accuracy Video-based Metrology Systems
    Ding, Y.; Tobiason, J. D. (Micro Encoder, Inc.)
    Dimensional Metrology/Poster/Abstract/2008 Annual
  3. Performance of a 2D Speckle Displacement Sensor with Various Measurement Surfaces
    Harsila, S. A.; Jones, B. K.; Masreliez, K. (Micro Encoder, Inc.)
    Dimensional Metrology/Poster/Abstract/2008 Annual
  4. Comparison of Fringe Pattern Obtained by Scanning Polished Metal Cylinders and Sharp-edged Objects with Laser Beam
    Jablonski, R. T.; Makowski, J. (Warsaw University of Technology)
    Dimensional Metrology/Poster/Abstract/2008 Annual
  5. Development of the Primary Nanoparticle Measurement Standard by the Electro-gravitational Aerosol Balance
    Lin, C.-M.; Chen, C.-J.; Pan, S.-P.; Weng, H.-F.; Yu, T.-C. (Center for Measurement Standards/Industrial Technology Research Institute)
    Dimensional Metrology/Poster/Abstract/2008 Annual
  6. Development of a Measuring System for a Micro Hole Using an Optical Fiber Probe
    Murakami, H. (Fukuoka Industrial Technology Center); and Katsuki, A.; Onikura, H.; Sajima, T. (Kyushu University)
    Dimensional Metrology/Poster/Abstract/2008 Annual
  7. Precision Measurement of Motion Accuracy for Development of Micro Measurement Center
    Ogura, I.; Okazaki, Y. (National Institute of Advanced Industrial Science and Technology)
    Dimensional Metrology/Poster/Abstract/2008 Annual
  8. Profile Measurement of Micro-aspheric Surface by a Small-scale Measuring Instrument
    Shibuya, A.; Arai, Y.; Yoshikawa Y.; Gao, W. (Tohoku University)
    Dimensional Metrology/Poster/Abstract/2008 Annual
  9. Subnanometer Displacement Measurement Using Common-path Grating Interferometry
    Wu, C.-C.; Hsu, C.-C.; Chen, C.-J. (Center for Measurement Standards/Industrial Technology Research Institute); and Lee, J.-Y. (National Central University)
    Dimensional Metrology/Poster/Abstract/2008 Annual

Grinding, Polishing, and Lapping

  1. Precision Grinding of Silicon
    Konneh, M.; Alao, A.-R. (International Islamic University)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  2. Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM)
    Cvetkovic, S.; Saalfeld, H.; Gatzen, H. H. (University of Hannover)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  3. Ultrasonic Assisted Grinding of Brittle Materials - Surface Topography and Process Forces
    Denkena, B.; de Leon, L.; Hahmann, D. (Leibniz Universität Hannover)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  4. Nano-Indentation and Scratch Tests on Optical Fiber Material to Determine Ductile Mode Critical Depth of Cut
    Gharbia, Y. A. (Dhofar Univeristy)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  5. Mechanochemical Diamond Stone Containing BaSO4 Abrasive
    Higuchi, M.; Furushiro, N.; Yamaguchi, T.; Sugimoto, T. (Kansai University); Matsumori, N.; Ogura, H. (Mizuho Co., Ltd.); and Shimada, S. (Osaka Electro-Communication University)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  6. Achievement of High Flatness of Large Diameter Silicon Wafer in Double-Sided Polishing -- Optimization of Polishing Conditions Based on Kinematical Analysis --
    Hirose, K.; Enomoto, T. (Osaka University)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  7. Optimization of Quality of the Cylindrical Superfinished Surfaces
    Ionescu, R.; Amarandei, D. (University Stefan cel Mare)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  8. Corrective Polishing of Complex Ceramics Geometries
    Klocke, F.; Brecher, C.; Zunke, R.; Tuecks, R. (Fraunhofer Institute for Production Technology)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  9. Polishing-Grinding -- An Innovation for Manufacturing of High Precision Optics
    Klocke, F.; Gruntzig, A.; Hollstegge, D.; Volker, C.; Dambon, O.; Herben, M.; Bulla, B.; Czarlay, D.; Reigel, J. (Fraunhofer Institute for Production Technology)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  10. Characterisation on the Surface Quality and Removal of Wafer with Variable Machining Conditions in the Wafer Polishing System
    Lee, J. T.; Won, J. K.; Lee, E. S. (INHA University)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  11. Influence of Polisher Surface Structure on Ultra-smoothness Polishing Characteristic of Magnetic Disk Substrate
    Takagi, M.; Yasui, H.; Kusaba, K.; Fukakusa, N. (Kumamoto University)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  12. Development of Nano-precision Synergistic Finishing Process Integrated ELID-grinding and MRF
    Ohmori , H.; Uehara, Y. (The Institute of Physical and Chemical Research); Yin, S. (Hunan University); and Ishida, S. (The Nexsys Corporation)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  13. Engineering a Next Generation Water-based Grinding Fluid
    Hug, P. (Recombinant Innovation, LLC); Nelson, A. (ARN Engineering Ltd.); and Salmon, S. C (Next Generation Technology Group, Inc.)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  14. Characterisation of Pad Materials in Abrasive Profile Polishing
    Schulte, H.; Riemer, O.; Glabe, R.; Brinksmeier, E. (University of Bremen)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  15. A Metrological Study on Hardened Steel Surface Finishing Using a Diamond Burnishing Tool
    Tanaka, H.; Yanagi, K. (Nagaoka University of Technology); and Tabuto, H. (Fuji Heavy Industries Ltd.)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  16. Continuous Phase Plate Polishing Using Magnetorheological Finishing
    Tricard, M.; Dumas, P. R. (QED Technologies, Inc.); and Menapace, J. (Lawrence Livermore National Laboratories)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  17. Characterizing Quantum Dots for Use in Detecting Subsurface Damage
    Williams, W.B.; Mullany, B. A.; Moyer, P. J.; Parker, W. C. (University of North Carolina at Charlotte); and Randles, M. H. (Northrop Grumman Synoptics)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  18. Contact Stiffness of Vitrified and Resinoid Grinding Wheels Taking Into Account of the Dressing Condition
    Yamada, T.; Lee, H.-S.; Takemoto, K. (Nihon University)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  19. Influence of Normal Feed on Surface Roughness in Newly Developed Ultra-smoothness Grinding Method
    Yasui, H.; Sakamoto, R.; Tanaka, Y.; Yoshimura, T. (Kumamoto University)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual
  20. An Investigation on In-Process Dressing Method Developed for New Ultra-Smoothness Grinding Method Using Super Abrasive Wheel
    Yasui, H.; Tanaka, Y.; Sakamoto, R.; Matsuda, K. ( Kumamoto University)
    Grinding, Polishing and Lapping/Poster/Abstract/2008 Annual

Machine Tool Metrology

  1. Machine Vision with Spindle Metrology Using a CCD Camera
    Deakyne, T. R.; Marsh, E. R. (The Pennsylvania State University); and Lehman, J.; Bartlett, B. (Confero Solutions)
    Machine Tool Metrology/Poster/Abstract/2008 Annual
  2. Measurement and Compensation of a 4 Axis Ultra Precision Machine Tool for Generating Micro Patterns on the Large Surfaces
    Hwang, J.; Song, Y.-C.; Song, C.-K.; Park, C.-H. (Korea Institute of Machinery and Materials (KIMM))
    Machine Tool Metrology/Poster/Abstract/2008 Annual
  3. Detection of Orientation-dependent, Single-crystal Diamond Tool Edge Wear Using Cutting Force Sensors, While Spin-turning Silicon
    Marsh, E. R. (The Pennsylvania State University); and Kim, G. A.; Simonson, J. A. (Edge Technologies, Inc.)
    Machine Tool Metrology/Poster/Abstract/2008 Annual

Measurement Uncertainty

  1. Thermistor Bridge Performance in the 10 -4 to 1 Hz Range and its Applications in Gravitational Wave Detection Projects
    Higuchi, S.; Clark, D. E.; Lantz, B. T.; DeBra, D. B. (Stanford University)
    Measurement Uncertainty/Poster/Abstract/2008 Annual
  2. Test Uncertainty & Test Uncertainty Ratio (TUR)
    Khanam, S. A.; Morse, E. P. (University of North Carolina at Charlotte)
    Measurement Uncertainty/Poster/Abstract/2008 Annual
  3. Bayesian Updating of Stability Beliefs
    Zapata, R. E.; Schmitz, T. L. (University of Florida); and Traverso, M. G.; Abbas, A. E (Univerisity of Illinois at Urbana-Champagne)
    Measurement Uncertainty/Poster/Abstract/2008 Annual

Micro-Electromechanical Devices

  1. The Design and Optimization of Cascaded Chevron Flexures and Actuators for Precision Motion Guidance
    Chen, S.-C. (Massachusetts General Hospital-Harvard Medical School); and Culpepper, M. L. (Massachusetts Institute of Technology)
    Micro-Electromechanical Devices/Poster/Abstract/2008 Annual
  2. Design and Fabrication of a Microrobot Movable in Human's Large Intestine Model
    Kato, S.; Goto, Y.; Hamano, T. (Nippon Institute of Technology); and Ono, M. (Tokyo Metropolitan College of Industrial Technology)
    Micro-Electromechanical Devices/Poster/Abstract/2008 Annual
  3. Comparison of Anchor Designs for MEMS Resonant Mass Sensor
    Li, C.; Miller, M. H. (Michigan Technological University)
    Micro-Electromechanical Devices/Poster/Abstract/2008 Annual
  4. Investigation of Air Damping and Q in a MEMS Resonant Mass Sensors
    Li, C.; Miller, M. H. (Michigan Technological University)
    Micro-Electromechanical Devices/Poster/Abstract/2008 Annual

Nanotechnology

  1. Nanometer-scale Ultrasonic Cutter Using an Atomic Force Microscope Controlled by a Haptic Device
    Iwata, F.; Ohara, K.; Kawanishi, S. (Shizuoka University); Aoyama, H. (University of Electro-Communications); and Ushiki, T. (Niigata University)
    Nanotechnology/Poster/Abstract/2008 Annual
  2. The Discrete Polystyrene-gold Core-shell Nanoparticles Array and their Surface Plasmonic Properties
    Zettsu, N.; Uchida, S.; Yamamura, K. (Osaka University)
    Nanotechnology/Poster/Abstract/2008 Annual

Novel Equipment and Processes

  1. Experimental Study of Micro Ultrasonic Machining Process
    Cheruku, S.; Sundaram, M. M.; Rajurkar, K. P. (University of Nebraska-Lincoln)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual
  2. Combination Machining of Wire-sawing with Electro-chemical Discharge Machining
    Furutani, K. (Toyota Technological Institute); and Tomoto, M. (Toray Engineering Co., Ltd.)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual
  3. New Approaches of Bevel Shape Generation for Quartz Crystal
    Horio, K.; Kaneko, J.; Yamazaki, T. (Saitama University)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual
  4. Local Synthesis of Cabon Nanotubes by Electron Beam-heating Chemical Vapor Deposition
    Kaito, H.; Nagato, K.; Tsuchiya, K.; Hamaguchi, T.; Nakao, M. (The University of Tokyo); and Kasuya, K. (Hitachi, Ltd.)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual
  5. Development of a Precise and Quick Response Pneumatic Pressure Regulator and its Application to Pneumatic Vibration Isolator
    Kato, T. (Tokyo Metropolitan College of Industrial Technology); Tadano, K.; Kawashima, K.; Kagawa,T. (Tokyo Institute of Technology); and Yamamoto, N. (Tokyo Meter Co., Ltd.)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual
  6. Multisectional Synthesis of Tungsten Oxide Nanowires Using Micropatterned Layer for Field-emission Displays
    Moritani, H.; Nagato, K.; Kojima, Y.; Furubayashi, M.; Hamaguchi, T.; Nakao, M. (The University of Tokyo); and Kasuya, K. (Hitachi, Ltd.)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual
  7. Micro and Nano Assembly Tools Utilizing Standing Wave Technology
    Nowakowski, B. K.; Smith, S. T. (University of North Carolina at Charlotte); and Woody, S. C. (InsituTec, Inc.)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual
  8. Development of Multi-wire EDM Slicing Method for Silicon Ingot
    Okamoto, Y.; Uno, Y.; Okada, A.; Ohshita, S. (Okayama University); Hirano, T. (Toyo Advanced Technologies Corporation); and Takata, S. (Makino Milling Machine Corporation)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual
  9. A Cutting Tool with Nano/Micro-textured Surface for High Anti-adhesive Effects
    Sugihara, T.; Enomoto, T. (Osaka University)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual
  10. Improvement of Thickness Uniformity of Silicon and SOI Wafer by Numerically Controlled Local Wet Etching
    Yamamura, K.; Mitani, T.; Zettsu, N. (Osaka University)
    Novel Equipment and Processes/Poster/Abstract/2008 Annual

Optics and Interferometry

  1. Manufacture and Measurement of a Precision Milli-scale Germanium Optics Array for Novel Thermal Imaging Systems
    Davies, M. A.; Dutterer, B. S.; Suleski, T. J.; Barkman, M. L. (University of North Carolina at Charlotte)
    Optics and Interferometry/Poster/Abstract/2008 Annual
  2. Manufacture of Large Optics: Materials and Processes
    Brooks, D.; Gee, A. E. (University College London)
    Optics and Interferometry/Poster/Abstract/2008 Annual
  3. A Two-degree-of-freedom Linear Encoder for Measurement of Position and Straightness
    Kimura, A.; Arai, Y.; Gao, W. (Tohoku University)
    Optics and Interferometry/Poster/Abstract/2008 Annual
  4. Development of a Sensitive 3-Axis Angle Sensor Based on Laser Autocollimation
    Saito, Y.; Arai, Y.; Gao, W. (Tohoku University)
    Optics and Interferometry/Poster/Abstract/2008 Annual
  5. Design, Fabrication and Testing of Kinoform Lenses
    Garrard, K. P.; Sohn, A.; Dow, T. A. (North Carolina State University)
    Optics and Interferometry/Poster/Abstract/2008 Annual
  6. The Development of an Offset-locked Frequency Stabilized Heterodyne Laser Source for Precision Metrology
    Stroup, C. G.; Overcash, J. L.; Hocken, R. J. (University of North Carolina at Charlotte)
    Optics and Interferometry/Poster/Abstract/2008 Annual

Precision Fabrication and Assembly

  1. Automated Part Centering Through Impulse Actuation
    Furst, S. J.; Dow, T. A.; Sohn, A.; Garrard, K. P. (North Carolina State University)
    Precision Fabrication and Assembly/Poster/Abstract/2008 Annual
  2. Fabrication of Micro Aspherical Lens Array Using Fast Tool Servo with Tool Path Compensation
    Hsu, W.-Y.; Chen, F.-Z.; Kuo, C.-H.; Cheng, Y.-C.; Lin, W.-L. (Instrument Technology Research Center, National Applied Research Laboratories)
    Precision Fabrication and Assembly/Poster/Abstract/2008 Annual
  3. Experimental Study on Microassembly by Using Liquid Surface Tension
    Kato, Y.; Mizuno, T.; Takagi, H.; Ishino, Y.; Takasaki, M. (Saitama University)
    Precision Fabrication and Assembly/Poster/Abstract/2008 Annual
  4. Rapid Shape Comparison Method for 3D Virtual Manufacturing Systems
    Song, I.-H.; Lee, W.-S.; Chung, S.-C. (Hanyang University)
    Precision Fabrication and Assembly/Poster/Abstract/2008 Annual

Scanning Probe Microscopy

  1. High-scan Rate Positioner for Scanned Probe Microscopy
    MacKenzie, R. I.; Gawlik, A. J.; Trumper, D. L. (Massachusetts Institute of Technology)
    Scanning Probe Microscopy/Poster/Abstract/2008 Annual
  2. Performance Improvements in the Measurements of a Large Range Scanning Probe Microscope
    Rachakonda, P. K.; Kramar, J. A. (National Institute of Standards and Technology)
    Scanning Probe Microscopy/Poster/Abstract/2008 Annual

Surface Metrology

  1. Characterization of Microstructure Freeform Surfaces Using a Pattern Matching Analysis
    Cheung, C. F.; Kong, L. B.; Lee, W. B.; To, S. (The Hong Kong Polytechnic University)
    Surface Metrology/Poster/Abstract/2008 Annual
  2. Analysis of Surface Accuracy by End Milling
    Ikeda, N.; Kobayashi, Y.; Shirai, K. (Nihon University); and Tozawa, K. (Nissan Motor Co., Ltd.)
    Surface Metrology/Poster/Abstract/2008 Annual
  3. Modeling of Cylinder Surface Topography
    Pawlus, P. (Rzeszów University of Technology); and Reizer, R. (University of Rzeszów)
    Surface Metrology/Poster/Abstract/2008 Annual
  4. Optimizing a Gaussian Filter Long Wavelength Cutoff for Improving 3D Ballistics Signature Correlations
    Song, J.-F.; Ma, L.; Vorburger, T. V., Ballou, S. (National Institute of Standards and Technology)
    Surface Metrology/Poster/Abstract/2008 Annual
  5. Study of an Interpolation of Flatness Data Measured by Successive Differential Laser Auto-collimation
    Uda, Y.; Shimada, S. (Osaka Electro-Communication University); and Go, Y. (Nagase Integrex Co., Ltd.)
    Surface Metrology/Poster/Abstract/2008 Annual

Ultraprecision Machining

  1. Ultra Fine Tool Servo System
    Gan, S. W.; Rahman, M. (National University of Singapore); and Lim, H. S. (Mikrotools Pte. Ltd.)
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  2. Machining Technology of Micro Waved V-Pattern Using Shaping Process
    Je, T.-J.; Choi, D.-S.; Lee, K.-W.; Park, K.-T.; Whang, K. H. (Korea Institute of Machinery & Materials (KIMM))
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  3. Factors Affecting Changes in Removal Rate of Elastic Emission Machining
    Kanaoka, M.; Takino, H.; Nomura, K. (Nikon Corporation); and Mimura, H.; Yamauchi, K., Mori, Y. (Osaka University)
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  4. Ultra Precision Machine Integrated Measurement of Spheres and Aspheres with a Twyman-Green Interferometer
    Uhlmann, E.; Kurz, M.; Oberschmidt, D. (Technical University Berlin); and Bluemel, T.; Neubert, R. (FISBA OPTIK GmbH)
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  5. Ultra Precision Machining Disturbance Frequency Extraction from Finished Surface Metrology
    Meyer, P. A.; Veldhuis, S. C.; Elbestawi, M. A. (McMaster University)
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  6. Development of CAPP/CAM System for Ultraprecision Micromachining
    Oba, T.; Ishida, T.; Takeuchi, Y. (Osaka University)
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  7. Historical Note on Dynamic Strain Measurements
    Rhorer, R. L. (National Institute of Standards and Technology)
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  8. Application of Magnetorheological Jet (MR JET®) in Precision Finishing
    Shorey, A. B.; Tracey, J. P.; Kordonski, W. I. (QED Technologies Inc.)
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  9. Surface Generation in Ultra Precision Single Point Diamond Turning of Aluminum
    Tauhiduzzaman, M.; Veldhuis, S. C. (McMaster University)
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  10. Machining of Glass Lens Mold with Minute Structures by Grinding and Cutting
    Yamamoto, S.; Fujii, T.; Ishida, T.; Takeuchi, Y. (Osaka University); Hirano, M. (JTEKT Corporation); and Shibukawa, T. (Mitsui Seiki Kogyo Co., Ltd.)
    Ultraprecision Machining/Poster/Abstract/2008 Annual
  11. Influence of Cutting Speed on Ultra-precision Cutting Characteristics of Stainless Steel with Coated-cemented-carbide Tool
    Yasui, H.; Kawabayashi, T.; Toyama, A.; Hayashi, H. (Kumamoto University); and Shinozaki, A. (Ariake National College of Technology)
    Ultraprecision Machining/Poster/Abstract/2008 Annual