ASPE Proceedings, October 15 – October 20, 2006, Monterey, California

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Technical and Poster Sessions

Session I, Optics & Interferometry
Tuesday, October 17, 2006, 8:30 AM - 10:00 AM
Session Chair: Senajith B. Rekawa (Lawrence Berkeley National Laboratory) and Allen Y. Yi (The Ohio State University)

  1. Precision Interferometric Metrology (Invited Paper)
    Evans, C. J. (Zygo Corporation)
    Optics & Interferometry/Oral/No Abstract Available/2006 Annual
  2. Phase-shifting Diffraction Interferometer for Inspecting NIF Ignition-target Shells
    Montesanti, R. C.; Johnson, M. A.; Mapoles, E. R.; Atkinson, D. P.; Hughes, J. D.; Reynolds, J.L. (Lawrence Livermore National Laboratory)
    Optics & Interferometry/Oral/Abstract/2006 Annual
  3. A 1 m Swing-arm Profilometer for Large Telescope Mirror Elements
    King, C. W.; Callender, M.; Efstathiou, A.; Gee, A. E. (University College, London); Walker, D. (University College, London / Zeeko Ltd.); and Lewis, A. J.; Oldfield, S.; Steel, R. (UK National Physical Laboratory)
    Optics & Interferometry/Oral/Abstract/2006 Annual
  4. Thin Film Extraction from Scanning White Light Interferometry
    Mansfield, D. I. (Taylor Hobson, Ltd.)
    Optics & Interferometry/Oral/Abstract/2006 Annual

Session II, Fabrication
Tuesday, October 17, 2006, 10:30 AM - 12:00 PM
Session Chair: Michele H. Miller (Michigan Technological University) and Bradley H. Jared (3M Precision Optics)

  1. Reactive Atom Plasma (RAP™) Processing of Optical Surfaces
    Subrahmanyan, P. K.; Gardopee, G.; Fiske, P. S.; Chang, A. (RAPT Industries, Inc.)
    Fabrication/Oral/Abstract/2006 Annual
  2. Two-dimensional Encoder with Picometer Resolution Using Multi-tunneling Probes Scanning Tunneling Microscope and Regular Crystalline Surface
    Aketagawa, M.; Honda, H.; Ishige, M.; Patamaporn, C. (Nagaoka University of Technology)
    Fabrication/Oral/Abstract/2006 Annual
  3. Manufacturing the Dragonfly Eye Multi-layer, Compound Optic Array
    Gill, D. D.; Sweatt, W. C.; Claudet, A. A.; Adams, D. P.; Vasile, M. J.; Hodges, V. C. (Sandia National Laboratories)
    Fabrication/Oral/Abstract/2006 Annual
  4. Load Force Compensation for Direct Drives in Machine Tools
    Zirn, O.; Hoos, A. (FH Giessen-Friedberg); and Hiller, B. (Hübner AG)
    Fabrication/Oral/Abstract/2006 Annual

Session III, Thermal Considerations
Wednesday, October 18, 2006, 8:30 AM - 10:00 AM
Session Chair: Hans-Jochen Trost (MicroFab Technologies, Inc.) and Don L. Martin (Lion Precision)

  1. In-situ Calibration of Temperature Compensation Systems Using Differential Length Measurements
    Salsbury, J. G.; Inloes, M. (Mitutoyo America Corporation)
    Thermal Considerations/Oral/Abstract/2006 Annual
  2. High-stability Temperature Control System for LISA
    Higuchi, S.; DeBra, D. B. (Stanford University)
    Thermal Considerations/Oral/Abstract/2006 Annual
  3. Sub-millidegree-stability Air Thermal Control for a Large-volume Lithography Enclosure
    Zhao, Y.; Trumper, D. L.; Heilmann, R. K.; Schattenburg, M. L. (Massachusetts Institute of Technology)
    Thermal Considerations/Oral/Abstract/2006 Annual
  4. The Design, Calibration and Use of an Ultrasonic Thickness Probe on a CMM
    Orchard, N.; Whiteside, D. (Rolls-Royce / Aero Engines)
    Thermal Considerations/Oral/Abstract/2006 Annual

Session IV, Metrology I
Wednesday, October 18, 2006, 10:30 AM - 12:00 PM
Session Chair: Thomas A. Dow (North Carolina State University) and Keith Carlisle (Lawrence Livermore National Laboratory)

  1. An Overview of the Latest Metrology Advances at NPL (Invited Paper)
    Leach, R. (National Physical Laboratory)
    Metrology I/Oral/No Abstract Available/2006 Annual
  2. Moment of Inertia Measurement Using a Five-wire Torsion Pendulum and Optical Sensing
    Swank, A. J.; Sun, K.-X.; DeBra, D. B. (Stanford University); and Hardham, C. (Squid Labs)
    Metrology I/Oral/No Abstract Available/2006 Annual
  3. Self-calibration for Air-bearing Rotary Encoders
    Lu, X. (The University of British Columbia); and Trumper, D. L. (Massachusetts Institute of Technology)
    Metrology I/Oral/No Abstract Available/2006 Annual
  4. Rapid High Resolution Absolute 2-D Encoding by Low Resolution Digital Imaging of a Mathematically Generated 3-tone Target
    Chu, D. C.; Trujillo, H.; Whitney, E.; Young, J. (Agilent Technologies, Inc.)
    Metrology I/Oral/No Abstract Available/2006 Annual

Session V, Metrology II
Wednesday, October 18, 2006, 3:30 PM - 5:00 PM
Session Chair: Byron R. Knapp (Olympic Precision, Inc.) and Richard C. Montesanti (Lawrence Livermore National Laboratory)

  1. Utraprecision Microscale Hole Scanning Metrology
    Bauza, M. B.; Woody, S. C. (InsituTec, Inc.); and Smith, S. T.; Hocken, R. J. (University of North Carolina at Charlotte)
    Metrology II/Oral/Abstract/2006 Annual
  2. Ring Gauge for Evaluation of CMM Dynamics
    Garrard, K. P.; Dow, T. A. (North Carolina State University); and Folkert, K. F. (Consolidated Diesel)
    Metrology II/Oral/Abstract/2006 Annual
  3. Speckle Correlation Method for 3D-deflection Measurement of the Tactile-optical Microprobe
    Wissmann, M.; Schwenke, H. I.; Neuschaefer-Rube, U. (Physikalisch-Technische Bundesanstalt (PTB))
    Metrology II/Oral/Abstract/2006 Annual
  4. Enhanced Capabilities of the NIST Fiber Probe for Micro Feature Metrology
    Muralikrishnan, B. (University of North Carolina at Charlotte); and Stone Jr., J. A.; Stoup, J. R. (National Institute of Standards and Technology)
    Metrology II/Oral/Abstract/2006 Annual

Session VI, Machining
Thursday, October 19, 2006, 8:30 AM - 10:00 AM
Session Chair: Vivek G. Badami (Zygo Corporation) and Stefan Rakuff (GE Global Research)

  1. Tunable, Ultrasonic, Vibration Assisted Diamond Turning
    Overcash, J. L.; Cuttino, J. F. (University of North Carolina at Charlotte)
    Machining/Oral/Abstract/2006 Annual
  2. Modeling of Vibration in Single-point Diamond Turning
    Sohn, A.; Lamonds, L.; Garrard, K. (North Carolina State University)
    Machining/Oral/Abstract/2006 Annual
  3. Optimizing Machining Processes for Precision: An Example Using Calculated Cutting Forces
    Rhorer, R. L. (National Institute of Standards and Technology)
    Machining/Oral/Abstract/2006 Annual
  4. A Comparative Study of Part Error Contributors in High-speed Machining
    Canning, J. S.; Zapata, R. E.; Ziegert, J. C.; Schmitz, T. L. (University of Florida)
    Machining/Oral/Abstract/2006 Annual

Session VII, Nanotechnology
Thursday, October 19, 2006, 10:30 AM - 12:00 PM
Session Chair: Alex Sohn (North Carolina State University) and Anthony E. Gee (University College, London)

  1. Characterization of Nano-structured Materials Using FIB and STEM Techniques (Invited Paper)
    Jarausch, K. (Hitachi High Technologies America)
    Nanotechnology/Oral/No Abstract Available/2006 Annual
  2. A Mechanism for Creating Variable Nanometer Gaps
    Ma, H.; Slocum, A. H. (Massachusetts Institute of Technology)
    Nanotechnology/Oral/No Abstract Available/2006 Annual
  3. Optical Near-field Directed Patterning of Submicron-sized Particles
    Morii, H.; Ooi, T.; Tsuchiya, K.; Hamaguchi, T.; Nakao, M. (The University of Tokyo)
    Nanotechnology/Oral/No Abstract Available/2006 Annual
  4. Development of a Nano-stereolithography System Using Evanescent Light for Submicron Fabrication
    Kajihara, Y.; Takeuchi, T.; Takahashi, S.; Takamasu, K. (The University of Tokyo)
    Nanotechnology/Oral/No Abstract Available/2006 Annual

Session VIII, Design
Thursday, October 19, 2006, 1:30 PM - 3:00 PM
Session Chair: Pradeep K. Subrahmanyan (RAPT Industries, Inc.) and Mark A. Stocker (Corning Incorporated)

  1. Design and Modeling of a Precision 6 DOF MEMS-based Parallel Kinematic TEM Sample Manipulator
    Brouwer, D. M.; de Jong, B. R.; Soemers, H. M. J. R. (University of Twente)
    Design/Oral/Abstract/2006 Annual
  2. Moving-magnet Planar Actuator with Integrated Active Magnetic Bearing
    Jansen, J. W.; van Lierop, C. M. M.; Lomonova, E. A.; Vandenput, A. J. A. (Eindhoven University of Technology)
    Design/Oral/Abstract/2006 Annual
  3. Design of a Robot-based Detector Manipulator for a Hard X-ray Nanoprobe Instrument System
    Shu, D.; Maser, J.; Holt, M.; Preissner, C.; Lai, B.; Vogt, S.; Winarski, R.; Stephenson, G. B. (Argonne National Laboratory)
    Design/Oral/Abstract/2006 Annual
  4. Seven-axis Tester with Servo-controlled Fly-height for Magnetic Recording Metrology
    Crawford, T. M.; van de Veerdonk, R. J. M.; Bedillion, M. D.; Koelmans, W.; Langzettel, A. K. (Seagate Research); O'Connor, B. P.; Novotnak, R. (Aerotech, Inc.); and Lane, B. (Key Technologies, Inc.)
    Design/Oral/Abstract/2006 Annual

Poster Sessions

Tuesday, October 17, 2006, 3:30 PM - 5:00 PM
Session Chair: Session I: David E. Brehl (North Carolina State University) and David D. Gill (Sandia National Laboratories)

Wednesday, October 18, 2006, 1:30 PM - 3:00 PM
Session Chair: Session II: Robin L. Hibbard (Lawrence Livermore National Laboratory), and Eric R. Marsh (The Pennsylvania State University)

Equipment, Machines & Instruments
Analysis & Modeling

  1. Frequency Response Prediction for Rotating Tool-holder-spindle Assemblies
    Cheng, C.; Duncan, G. S.; Schmitz, T. L. (University of Florida)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  2. Flexure-based Meso-level Stages Driven by Linear Piezo Motors
    Heamawatanachai, S.; Corbin, B.; Emig, L.; Bamberg, E. (University of Utah)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  3. A Quantitative, Constraint-based Design Method for Multi-axis Flexure Stages for Precision Positioning Equipment
    Hopkins, J.; Culpepper, M. L. (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  4. Analysis of Temperature Distribution and Optimization of the Configuration at Heating Tool in the Chip Bonding Process at Camera Module of Mobile Phone
    Kim, I.; Kweon, S.-H.; Yang, S.-H. (Kyungpook National University)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  5. Synthesis of the Intelligent Sensing System Using Current Signals for Manufacturing Systems
    Kim, S.-C.; Chung, S.-C. (Hanyang University); Chung, S. (The University of Western Ontario); and Kim, K.-D. (Small Business Corporation)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  6. Improved Analytical Chip Thickness Model
    Kumanchik, L.; Schmitz, T. L. (University of Florida)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  7. Dynamic Characterization of a Head Unit with a Small High Speed Spindle in Meso-scale Machine Tools
    Lee, J.-H.; Yang, S.-H. (Kyungpook National University)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  8. Calibration of a Parallel Manipulator with Restricted Degrees of Freedom by Means of a Redundancy Matrix
    Meyer, P. J.; van Eijk, J. (Philips Applied Technologies)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  9. Tool-holder Connection Modeling for Frequency Response Prediction in Milling
    Powell, K. B.; Won, D.; Schmitz, T. L.; Duncan, G. S.; Sawyer, W. G.; Ziegert, J. C. (University of Florida)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  10. A General Geometric Model for Determining Optimal Shapes of Planar Elastic Pivots
    Vallance, R. R.; Haghighian, B. (The George Washington University); and Marsh, E. R. (The Pennsylvania State University)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual
  11. Fractal Roundness Modeling of Experimental Profile in Turning
    Yoon, M. C.; Chin, D. H. (Pukyong National University); and Jung, J. S. (Workers Accident Medical Corporation/Korea Orthopaedics & Rehabilitation Engineering Center)
    Equipment, Machines & Instruments/Analysis & Modeling/Poster/Abstract/2006 Annual

Controls

  1. Control of a 2 DOF Long-range and 6 DOF Short-range Stages for Nanometer Positioning
    Buice, E. S.; Yang, H.; Smith, S. T.; Hocken, R. J. (University of North Carolina at Charlotte); Otten, D.; Trumper, D. L. (Massachusetts Institute of Technology); and Seugling, R. M. (Lawrence Livermore National Laboratory)
    Equipment, Machines & Instruments/Controls/Poster/Abstract/2006 Annual
  2. Active Control of Pneumatic Isolation Table by Model Following Control Using Pressure Differentiator
    Kato, T. (Tokyo Metropolitan College of Industrial Technology); and Kawashima, K.; Kagawa, T. (Tokyo Institute of Technology)
    Equipment, Machines & Instruments/Controls/Poster/Abstract/2006 Annual
  3. A New Mode Switching Control for Fast Settling and High Precision Positioning
    Kim, J.-J.; Choi, Y.-M.; Kim, K.-H.; Gweon, D.-G. (Korea Advanced Institute of Science & Technology)
    Equipment, Machines & Instruments/Controls/Poster/Abstract/2006 Annual
  4. Precise Position Control of a Pneumatic Servo Table System Consideration Dynamic Characteristics of Pneumatic Servo Valves
    Miyajima, T.; Ogiso, T.; Kawashima, K.; Kagawa, T. (Tokyo Institute of Technology); and Fujita, T. (Tokyo Denki University)
    Equipment, Machines & Instruments/Controls/Poster/Abstract/2006 Annual
  5. Design and Control for the Pneumatic Cylinder Precision Positioning Under Vertical Loading
    Tsai, M.-H.; Cheng, C.-N.; Shih, M. C. (National Cheng Kung University)
    Equipment, Machines & Instruments/Controls/Poster/Abstract/2006 Annual

Design & Testing

  1. Design and Evaluation of a Prototype Instrument for Measuring Roundness Profiles of Micro Shafts
    Barraja, M.; Vallance, R. R.; Loychik, N. (The George Washington University); Marsh, E. R. (The Pennsylvania State University); and Arneson, D. A. (Professional Instruments Company, Inc.)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  2. Microdrive and Telemetry System for Multi-Unit Extracellular Studies
    Caballero-Ruiz, A.; Ruiz-Huerta, L.; Kussul, E. (Universidad Autónoma de México); and Heredia, F. (Universidad Autónoma de Yucatán)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  3. Development of Ultra Precision Machine with High Positioning Resolution
    Fukuta, M.; Nishioka, M. (Toshiba Machine Co., Ltd.); and Suzuki, H. (Kobe University)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  4. Development of a Hydrostatic Journal Bearing with Slit-step Compensation
    Hale, L. C. (Innovative Machine Solutions); Castro, C.; Chung, C.; Hopkins, D. J. (Lawrence Livermore National Labs.); and Donaldson, R. R. (P.E. Consultant)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  5. Development of Active Mounts for Improved Accuracy of Large Machine Tools
    Horiuchi, O.; Kato, T.; Yamaguchi, Y.; Shibata, T; (Toyohashi University of Technology)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  6. Development of Mechanisms and Frame Structures for a Laboratory-scale Compact Soft X-ray Microscopy
    Kang, S.-H.; Kang, D.-W.; Gweon, D.-G. (Korea Advanced Institute of Science & Technology (KAIST)); Min, J. Y. (Wonkwang University); and Yoon, K. H. (LISTEM, Co., Ltd.)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  7. Development of a Tool Alignment System in Shearing Process
    Kibe, Y.; Mitsui, K. (Keio University)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  8. Precision Measurement of Small Diameter Hole in a Metallic Object
    Lee, K. S.; Chow, K. H.; Chan, C. K.; Chan, L. S.; Chau, W. C.; Chow, W. Y. (The Hong Kong University of Science and Technology)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  9. High Precision Modular Long Range Travel Vertical Axis
    Lotz, M.; Hackel, T.; Frank, T.; Tröbs, A.; Höhne, G.; Theska, R.; Zimmermann, K. (Technical University of Ilmenau)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  10. Development of a Design Tool Supporting Conceptual Design of Machine Tools
    Mishima, N. (Advanced Manufacturing Research Institution (AIST))
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  11. Design of Air Drive Spindle
    Nakao, Y.; Mizoi, T.; Minowa, Y. (Kanagawa University)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  12. Development of a Precision, Low-cost, Small Footprint Wire Electron Discharge Machine (WEDM)
    Orino, C.; Rakwal, D. R.; Bamberg, E. (University of Utah); and Jorgensen, J. D. (Optimation, Inc.)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual
  13. Axiomatic Design Method Applied to a Parallelogram Micromachine for Low Cost Micromechanics
    Ruiz-Huerta, L.; Caballero-Ruiz, A. (Universidad Nacional Autónoma de México)
    Equipment, Machines & Instruments/Design & Testing/Poster/Abstract/2006 Annual

Mechatronics

  1. Non-contact Bio Cell Manipulation by Nonlinear Micro Flow Around the Vibrated Pipette on Micro Robot
    Aoyama, H.; Chiba, N.; Fuchiwaki, O. (University of Electro-Communications); Misaki, D. (Shizuoka Institute of Science & Technology); and Usuda, T. (National Institute of Advanced Industrial Science and Technology)
    Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006 Annual
  2. New Hybrid Actuator Design with Nanometer Resolution
    Gloess, R. (Physik Instrumente (PI) GmbH & Co.KG)
    Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006 Annual
  3. Optimal Tuning of a Biaxial Servomechanism Using a Cross-coupled Controller and Disturbance Observers
    Jang, M.-S.; Kim, S.-C.; Chung, S.-C. (Hanyang University)
    Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006 Annual
  4. Fabrication of a New Position Surveying System for the Underground Pipes Using Rotary Encoders
    Hamano, T.; Kato, S. (Nippon Institute of Technology); and Ono, M. (Tokyo Metropolitan College of Technology)
    Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006 Annual
  5. An In-pipe Mobile Inspection Robot Provided an Artificial Intelligence and Passable at Several T-junctions
    Kato, S.; Suzuki, T. (Nippon Institute of Technology); and Ono, M. (Tokyo Metropolitan College of Technology)
    Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006 Annual
  6. Fabrication of a Snake Type In-pipe Mobile Robot Corresponding to the Different Diameters
    Ono, M.; Tanaka, M.; Ito, S.; Ikeda, S. (Tokyo Metropolitan College of Technology); and Kato, S. (Nippon Institute of Technology)
    Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006 Annual
  7. Implementation of a Real-time Hysteresis Compensation for Electromagnetic Actuators
    Volkert, R.; Radler, O.; Ströhla, T. (Technical University of Ilmenau); and Zöppig, V. (STZ Mechatronik)
    Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006 Annual

MEMS, LIGA & Nanotechnology

  1. Rotational Precision MEMS-based Clamping Mechanism for Stable Fixation of Elastic Mechanisms
    Brouwer, D. M.; de Jong, B. R.; de Boer, M. J.; Soemers, H. M. J. R. (University of Twente)
    Equipment, Machines & Instruments/MEMS, LIGA & Nanotechnology/Poster/Abstract/2006 Annual
  2. Design of a High-speed Micro-scale Fast Scanning Stage for Two-photon Endomicroscopy
    Chen, S.-C.; Choi, H.; Kim, D.; Munro, L.; Culpepper, M. L.; So, P. (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments/MEMS, LIGA & Nanotechnology/Poster/Abstract/2006 Annual
  3. Formation of Micro-scale Precision Flexures Via Molding of Metallic Glass
    Chen, S.-C.; Culpepper, M. L. (Massachusetts Institute of Technology); and Bardt, J.; Ziegert, J. C. (University of Florida)
    Equipment, Machines & Instruments/MEMS, LIGA & Nanotechnology/Poster/Abstract/2006 Annual
  4. Application of Input Shaping® and Hyperbit™ Control to Improve the Dynamic Performance of a Six-axis MEMS Nanopositioner
    Chen, S.-C.; Culpepper, M. L. (Massachusetts Institute of Technology); and Jordan, S. (PI (Physik Instrumente) LP)
    Equipment, Machines & Instruments/MEMS, LIGA & Nanotechnology/Poster/Abstract/2006 Annual
  5. Active Mask UV Lithography System for MEMS and µ-TAS Applications
    Hayashi, T. (Osaka University); Shibata, T.; Kawashima, T. (Toyohashi University of Technology); Makino, E.; Mineta, T. (Hirosaki University); and Masuzawa, T. (Ibaraki University)
    Equipment, Machines & Instruments/MEMS, LIGA & Nanotechnology/Poster/Abstract/2006 Annual
  6. Nanometer-scale Deposition of Photo-curing Resin Using a Scanning Nanopipette Probe Microscope
    Iwata, F.; Ushiro, Y.; Sasaki, A. (Shizuoka University)
    Equipment, Machines & Instruments/MEMS, LIGA & Nanotechnology/Poster/Abstract/2006 Annual
  7. Recent Advances in Improving Static and Dynamic Accuracy of Nanopositioning Systems
    Jordan, S. (PI (Physik Instrumente) LP)
    Equipment, Machines & Instruments/MEMS, LIGA & Nanotechnology/Poster/Abstract/2006 Annual
  8. A Novel Microfabrication Technique for Three-dimensional Metal Structures by Photocatalysis
    Okuno, M.; Takahashi, S.; Takamasu, K. (The University of Tokyo); and Aso, T. (Nomura Research Institute, Ltd.)
    Equipment, Machines & Instruments/MEMS, LIGA & Nanotechnology/Poster/Abstract/2006 Annual
  9. Kinematic Assembly of Soft-polymer Biofluidic Circuits
    Trinkle, C. A.; Lee, L. P. (University of California at Berkeley); and Morgan, C. J. (University of Kentucky)
    Equipment, Machines & Instruments/MEMS, LIGA & Nanotechnology/Poster/Abstract/2006 Annual

Novel Systems

  1. Design of a Miniature Dual-purpose Positioner-fixture for Six-axis Scanning and Detachable Fixturing in Nano-instrumentation
    Culpepper, M. L. ; Varadarajan, K.; (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments/Novel Systems/Poster/Abstract/2006 Annual
  2. A Scalable Six-axis Electromagnetically-driven Nanopositioner for Nanomanufacturing
    Golda, D.; Culpepper, M. L. (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments/Novel Systems/Poster/Abstract/2006 Annual
  3. Near-field Polarimetry Using Scanning Probe Microscope with Sub-wavelength Aperture Cantilever
    Tsuchiya, K.; Muragishi, T.; Ooi, T.; Morii, H.; Hamaguchi, T.; Nakao, M. (The University of Tokyo)
    Equipment, Machines & Instruments/Novel Systems/Poster/Abstract/2006 Annual

Metrology
Analysis & Modeling

  1. A Study of Pattern and Feature Analysis of Surface Generation in Fast Tool Servo Machining of Optical Microstructures
    Cheung, C.-F.; To, S. S.; Lee, W.-B.; Li, H. (The Hong Kong Polytechnic University); and Jiang, X.-Q. (University of Huddersfield)
    Metrology/Analysis & Modeling/Poster/Abstract/2006 Annual
  2. Dimensional Study of an Interference Fit Allograft
    Mauntler, N. A.; Ziegert, J. C. ; Schmitz, T. L. (University of Florida)
    Metrology/Analysis & Modeling/Poster/Abstract/2006 Annual

Form & Geometry

  1. 50 m Linear Measuring Interferometer for Calibration of Surveying Tape
    Joung, D. Y.; Suh, H. S.; Kim, J. A.; Kim, J. W.; Eom, T. B. (Korea Research Institute of Standards and Science)
    Metrology/Form & Geometry/Poster/Abstract/2006 Annual
  2. A Diameter Measuring System with Laser Interferometer
    Eom, T. B.; Kim, M. S.; Kang, C. S.; Kim, J. W. (Korea Research Inst. of Standards and Science)
    Metrology/Form & Geometry/Poster/Abstract/2006 Annual
  3. Development and Analysis of an Optical Capability for the Measurement of Arrays
    Gill, D. D.; Claudet, A. A.; Southwell, L. M. (Sandia National Laboratories)
    Metrology/Form & Geometry/Poster/Abstract/2006 Annual
  4. Fast Three-dimensional Shape Measurement by Using Color-coded Illumination
    Song, C. K. (Korea Institute of Machinery and Materials); Kim, J. S. (Kafus Co., Ltd.); and Joo, B. G.; Kang, M. G. (Intekplus Co., Ltd.)
    Metrology/Form & Geometry/Poster/Abstract/2006 Annual

Instrumentation, Design & Testing

  1. Gravitational Reference Mass Center Determination by Velocity Modulation
    Conklin, J. W.; DeBra, D. B.; Sun, K.-X. (Stanford University)
    Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006 Annual
  2. An Instrument for Nanoindentation Without Frame Stiffness Dependency
    Ellis, J. D.; Smith, S. T.; Hocken, R. J. (University of North Carolina at Charlotte)
    Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006 Annual
  3. Optical Measuring Device for Radial Error of Micro-spindle Using High-speed Photo-amplifiers
    Fujimaki, K.; Mitsui, K. (Keio University)
    Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006 Annual
  4. Mechanical Properties of Silicon Carbide Films Prepared by RF Magnetron Sputtering Using Targets with Different Carbon Contents
    Fujiyama, H. (Fukuoka Institute of Technology); Nakamura, M.; Sumomogi, T. (Hiroshima Kokusai Gakuin University)
    Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006 Annual
  5. Nano-linear Encoder Investigation Using Dual Fiber and Grating System
    Karodkar, D. (University of North Carolina at Charlotte)
    Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006 Annual
  6. Analysis and Performance of a Parallel-axis Flatness Measuring Instrument
    Marsh, E. R. (The Pennsylvania State University); and Vallance, R. R. (The George Washington University)
    Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006 Annual

Machine Tool Metrology

  1. The Estimation for Errors of a Planar XY Stage from Profiles Measurement of Guide-ways
    Hwang, J.; Park, C. H. (Korea Institute of Machinery and Materials); Kim, S. W. (Korea Advanced Institute of Science and Technology (KAIST))
    Metrology/Machine Tool Metrology/Poster/Abstract/2006 Annual
  2. Development of a Trigger System to Measure a Tool Position in Planetary Milling
    Kamiya, K.; Nomura, T.; Tashiro, H. (Toyama University); and Yazawa, T. (Nagasaki University)
    Metrology/Machine Tool Metrology/Poster/Abstract/2006 Annual
  3. Application of 3D Optical Scanning Systems for the Measurement of Spheric and Aspheric Surfaces
    Sun, W.; McBride, J. W.; Hill, M. (University of Southampton)
    Metrology/Machine Tool Metrology/Poster/Abstract/2006 Annual

Measurement Uncertainty

  1. Determination of Temperature Probability Distribution in Measurement Uncertainty
    Fang, C. Y.; Sung, C. K. (National Tsing Hua University); and Hung, C. Y.; Lui, K. W. (Center for Measurement Standards / ITRI)
    Metrology/Measurement Uncertainty/Poster/Abstract/2006 Annual
  2. Cross Calibration for Primary Angle Standards by a Precision Goniometer with a Small Angle Interferometer
    Liou, H.-C.; Lin, C.-M.; Chen, C.-J.; Chang, L.-C. (Center for Measurement Standards/Industrial Technology Research Institute)
    Metrology/Measurement Uncertainty/Poster/Abstract/2006 Annual
  3. Uncertainty Analysis for a Silicon Bulk Micromachined Dimensional Metrology Artifact
    Shilling, K. M.; Claudet, A. A.; Oliver, A. D.; Tran, H. D. (Sandia National Laboratories)
    Metrology/Measurement Uncertainty/Poster/Abstract/2006 Annual

Surface & Subsurface

  1. A Serious Kinematic Coupling
    Gleason Jr., E. A. (Bal-tec)
    Metrology/Surface & Subsurface/Poster/Abstract/2006 Annual
  2. The Effect of Gaussian Filter Long Wavelength Cutoff É…c in Topography Measurements and Comparisons
    Song, J. J.; Ma, L.; Vorburger, T. V. (National Institute of Standards and Technology)
    Metrology/Surface & Subsurface/Poster/Abstract/2006 Annual
  3. Study on Nano-scale Mechanical Properties of Ultra High-purity Aluminum by Nanoindentation
    Yoshida, M.; Nakamura, M.; Sumomogi, T.; Endo, T. (Hiroshima Kokusai Gakuin University)
    Metrology/Surface & Subsurface/Poster/Abstract/2006 Annual

Optics
Optical Fabrication

  1. Manufacturing of Glass Diffractive Optics by Use of Compression Molding Process
    Chen, Y.; Yi, A. Y. (The Ohio State University); and Klocke, F.; Pongs, G.; Demmer, A. (Fraunhofer Institute for Production Technology (IPT))
    Optics/Optical Fabrication/Poster/Abstract/2006 Annual
  2. Direct Machining of Inner Reflecting Surface for a Soft X-ray Microscope
    Chon, K. S.; Yoon, K. H. (Wonkwang University); and Namba, Y. (Chubu University)
    Optics/Optical Fabrication/Poster/Abstract/2006 Annual
  3. Aspherizing the Sphere: Using Focused Ion Beam Machining to Create Aspherical Diamond Mills for Micro Optics
    Hodges, V. C; Adams, D. P.; Claudet, A. A.; Gill, D. D.; Sweatt, W.; Vasile, M. J. (Sandia National Laboratories)
    Optics/Optical Fabrication/Poster/Abstract/2006 Annual
  4. Manufacturing of Replicated Pt/C Multilayer Mirrors for Hard X-ray Telescopes
    Namba, Y.; Fushiki, A. (Chubu University); and Kunieda, H.; Ogasaka, Y.; Tawara, Y.; Yamashita, K. (Nagoya University)
    Optics/Optical Fabrication/Poster/Abstract/2006 Annual
  5. A Magnetorheological Polishing Based Approach for Studying Magnetic/Nonmagnetic WC Hard Metals
    Shafrir, S. N.; Lambropoulos, J. C.; Jacobs, S. D. (University of Rochester)
    Optics/Optical Fabrication/Poster/Abstract/2006 Annual
  6. Damage-free Processing of Silicon Carbide Optics
    Verma, Y.; Fiske, P. S.; Subrahmanyan, P. K.; Gardopee, G. (RAPT Industries, Inc.)
    Optics/Optical Fabrication/Poster/Abstract/2006 Annual

Optics / Interferometry

  1. Control of the Interference Fringes in a Point Diffraction Interferometer Using an Optical Saturable Absorber
    Furuhashi, H.; Uchida, Y. (Aichi Institute of Technology); Matsuda, K. (National Institute of Advanced Industrial Science and Technology); and Kono, A. (Nagoya University)
    Optics/Optics Interferometry/Poster/Abstract/2006 Annual
  2. Digital Periodic Error Correction: Further Testing and Results
    Schmitz, T. L.; Houck III, L. (University of Florida); and Chu, D. (Agilent Technologies, Inc.)
    Optics/Optics Interferometry/Poster/Abstract/2006 Annual
  3. Phase Modulation Homodyne Interferometer with Picometer Resolution Using Tunable Laser Diode
    Ishige, M.; Matsuura, F.; Kawasugi, M.; Aketagawa, M. (Nagaoka University of Technology)
    Optics/Optics Interferometry/Poster/Abstract/2006 Annual
  4. Grazing Incidence Metrology Using a Lateral Shearing Interferometer
    Kolipaka, J. P. S.; Snyder, J. J. (University of North Carolina at Charlotte); and Kuriyama, Y. (Mitutoyo Corporation)
    Optics/Optics Interferometry/Poster/Abstract/2006 Annual
  5. Stitching Interferometry for Flexible Asphere Metrology
    O'Donohue, S.; Murphy, P. E.; Fleig, J.; DeVries, G. (QED Technologies)

    Optics/Optics Interferometry/Poster/Abstract/2006 Annual

Other
Precision Assembly

  1. Assembly of Thin Gratings for Soft X-ray Telescopes
    Akilian, M.; Heilmann, R.K.; Schattenburg, M. L. (Massachusetts Institute of Technology)
    Other/Precision Assembly/Poster/Abstract/2006 Annual
  2. Passively Aligned 100-port Micro-fluidic Connector
    Forest, C. R.; Beltran, M. J.; Hunter, I. W. (Massachusetts Institute of Technology)
    Other/Precision Assembly/Poster/Abstract/2006 Annual
  3. Fabrication of Periodic Nano-structures Using DNA Fractions
    Hatsuzawa, T.; Yanagida, Y. (Tokyo Institute of Technology)
    Other/Precision Assembly/Poster/Abstract/2006 Annual
  4. Precision Design Verification System of Injection Molds Using Web-based 3D Viewing Technology
    Song, I.-H.; Chung, S.-C. (Hanyang University); and Chung, S. (The University of Western Ontario)
    Other/Precision Assembly/Poster/Abstract/2006 Annual
  5. An XML-based Digital Mock-up System for Heterogeneous Assembly
    Song, I.-H.; Chung, S.-C. (Hanyang University); and Kim, K.-D. (Small Business Corporation)
    Other/Precision Assembly/Poster/Abstract/2006 Annual
  6. Design and Testing of a Tribometer for in situ Microscopy
    Mauntler, N. A.; Dunn, A. C.; Schmitz, T. L.; Sawyer, W. G. (University of Florida)
    Other/Precision Assembly/Poster/Abstract/2006 Annual

Processes
Grinding

  1. Monitoring of Roundness-errors in Continuous Path Controlled Crankshaft Grinding Processes
    Denkena, B.; Kramer, N. J. (Hannover University)
    Processes/Grinding/Poster/Abstract/2006 Annual
  2. Trueing of Micro-grinding Wheels by Diamond Tools
    Hoffmeister, H.-W.; Hlavac, M. (Technical University of Braunschweig)
    Processes/Grinding/Poster/Abstract/2006 Annual
  3. High Performance Grinding Wheels with Boron Doped Diamond Grits Enabling Electrical Conductivity and High Thermal Stability on Cutting Edges
    Iwai, M.; Nakagawa, K.; Uematsu, T. (Toyama Prefectural University); Sano, S. (Sodick Co.,Ltd.); Tanaka, K. (Toshiba Machine Co., Ltd.); Wang, M. (OSG Co., Ltd.); and Suzuki, K. (Nippon Institute of Technology)
    Processes/Grinding/Poster/Abstract/2006 Annual
  4. Study on Micro Machining of Lithium Niobate Using Single Abrasive Grinding
    Kurihara, R.; Nakamura, M.; Yoshida, M.; Sumomogi, T. (Hiroshima Kokusai Gakuin University)
    Processes/Grinding/Poster/Abstract/2006 Annual
  5. Development of a 3-D Measuring Equipment for Surface Geometries of Grinding Wheel Surfaces
    Lee, H.-S.; Yamada, T.; Kobayashi, M. (Nihon University)
    Processes/Grinding/Poster/Abstract/2006 Annual
  6. The Role of Crystallographic Orientation on the Forces Generated in Ultra-precision Grinding of Anisotropic Materials such as Monocrystalline Silicon
    Marsh, E. R. (The Pennsylvania State University); and Vallance, R. R. (The George Washington University)
    Processes/Grinding/Poster/Abstract/2006 Annual
  7. Wheel Wear During Intermittent Grinding
    Miller, M. H.; Fan, X. (Michigan Technological University)
    Processes/Grinding/Poster/Abstract/2006 Annual
  8. Studies on Slicing Characteristics of Vibratory OD-blade Slicing
    Uneda, M.; Tsukada, H.; Ishikawa, K.; Suwabe, H. (Kanazawa Institute of Technology)
    Processes/Grinding/Poster/Abstract/2006 Annual
  9. Study on the Contact Stiffness of Grinding Wheels Due to the Difference of Dressing Condition
    Yamada, T.; Lee, H.-S.; Morita, H. (Nihon University)
    Processes/Grinding/Poster/Abstract/2006 Annual
  10. Development of Cross and Parallel Mode Grinding Machine for High NA Aspherical Mold and Die
    Yamamoto, Y.; Suzuki, H.; Moriwaki, T.; Okino, T.; Hijikata, Y. (Kobe University); Roblee, J. W. (Precitech, Inc.); and Miyashita, T. (Taylor Hobson Japan Ltd.)
    Processes/Grinding/Poster/Abstract/2006 Annual
  11. Ultra-smoothness Grinding of Cemented Carbide Using Newly Developed Vertical Grinder
    Yasui, H.; Yamamoto, Y.; Miyamoto, K.; Furuya, S.; Sakamoto, R. (Kumamoto University)
    Processes/Grinding/Poster/Abstract/2006 Annual

Machining

  1. Review of Vibration-assisted Machining Methods for Precision Fabrication
    Brehl, D. E.; Dow, T. A. (North Carolina State University)
    Processes/Machining/Poster/Abstract/2006 Annual
  2. Micro-structure Fabrication Using Elliptical Vibration-assisted Machining (EVAM)
    Brehl, D. E.; Dow, T. A.; Garrard, K. P.; Sohn, A. (North Carolina State University)
    Processes/Machining/Poster/Abstract/2006 Annual
  3. Fabrication of Micro-components Using Vibration-assisted Micro-EDM
    Endo, T.; Tsuijimoto, T.; Mitsui, K. (Keio University)
    Processes/Machining/Poster/Abstract/2006 Annual
  4. Polishing of Single Point Diamond Tool Based on Thermo-chemical Reaction with Copper
    Higuchi, M.; Yamaguchi, T. (Kansai University); Shimada, S. (Osaka Electro-Communication University); and Obata, K. (A.L.M.T. Corporation)
    Processes/Machining/Poster/Abstract/2006 Annual
  5. Tunable Holder for Boring Bars
    Houck III, L.; Schmitz, T. L. (University of Florida); and Smith, K. S. (University of North Carolina at Charlotte)
    Processes/Machining/Poster/Abstract/2006 Annual
  6. Development of Cutting Load Prediction System Using Monitoring Data in Micro Machining
    Ikeda, N.; Kondo, M.; Kobayashi, Y.; Shirai, K. (Nihon University)
    Processes/Machining/Poster/Abstract/2006 Annual
  7. Manufacturing of Micro V-groove with an Electrically Conductive Diamond Electrode in EDM
    Iwai, M.; Uematsu, T. (Toyama Prefectural University); Sano, S. (Sodick Co.,Ltd.); Pan, W; Itagaki, K.; Suzuki, K. (Nippon Institute of Technology); and Murakami, Y.; Wang, M. (OSG Co., Ltd.)
    Processes/Machining/Poster/Abstract/2006 Annual
  8. Condition Monitoring of Micro-drilling Processes on Glass by Using Machine Vision
    Kim, H.-H.; Kim, S.-C.; Chung, S.-C. (Hanyang University); Chung, S. (The University of Western Ontario); and Jee, W.-H. (Shinhan Diamond, Inc.)
    Processes/Machining/Poster/Abstract/2006 Annual
  9. Machining Parameter Selection Based on Cost-based Objective Function and Process Stability
    Kurdi, M. H.; Schmitz, T. L.; Haftka, R. T. (University of Florida)
    Processes/Machining/Poster/Abstract/2006 Annual
  10. Creation of V-shaped Curved Microgrooves with Two Flat-ends by Non-rotational Cutting Tools
    Moriya, T.; Ishida, T.; Teramoto, K.; Takeuchi, Y. (Osaka University)
    Processes/Machining/Poster/Abstract/2006 Annual
  11. Ultraprecision Turning with Binderless cBN
    Oberschmidt, D.; Uhlmann, E. (Fraunhofer Institute for Production Systems and Design Technology); and Kurz, M. (Technical University Berlin)
    Processes/Machining/Poster/Abstract/2006 Annual
  12. Chatter Stability Boundary Analysis Using Neural Network
    Oh, M. S.; Sim, S. B.; Yoon, M. C. (Pukyong National University); and Jung, J. S. (Workers Accident Medical Corporation/Korea Orthopaedics & Rehabilitation Engineering Center)
    Processes/Machining/Poster/Abstract/2006 Annual
  13. Optimizing Saw Teeth Deflection and Lumber Thickness Variation Through Precision Engineering Approach
    Okai, R. (University of Education- Winneba)
    Processes/Machining/Poster/Abstract/2006 Annual
  14. Characteristics of Mechanical Micromilling Using Tungsten Carbide Tools
    Ozdoganlar, B. O.; Filiz, S. (Carnegie Mellon University)
    Processes/Machining/Poster/Abstract/2006 Annual
  15. Effect of Low Cutting Speed on Ultra-precision Cutting of Titanium Alloy with Coated-cemented-carbide Tool
    Yasui, H.; Shinozaki, A.; Toyama, A.; Sakamoto, S.; Kajiwara, Y. (Kumamoto University)
    Processes/Machining/Poster/Abstract/2006 Annual

Manufacturing

  1. Self-adjustment Module for Phone Camera Lens Assembly
    Lee, C.-W.; Song, J.-Y. (Korea Institute of Machinery and Materials)
    Processes/Manufacturing/Poster/Abstract/2006 Annual
  2. A Study on the Ultra Precision Progressive Die Making for Sheet Metal Forming by Computer Simulation
    Sim, S. B.; Kim, C. H.; Park, G. Y. (Pukyuong National University)
    Processes/Manufacturing/Poster/Abstract/2006 Annual

Non-conventional

  1. A Single Discharge Study of Micro-EDM
    Moylan, S. P. (National Institute of Standards and Technology); and Chandrasekar, S. (Purdue University)
    Processes/Non-conventional/Poster/Abstract/2006 Annual
  2. Improvent of Machining Accuracy in Wire Electrical Discharge Machine
    Sakai, Y.; Goto, A.; Nakashima, T.; Taneda, A.; Magara, T.; Hashimoto, T. (Mitsubishi Electric Corporation)
    Processes/Non-conventional/Poster/Abstract/2006 Annual
  3. On the Temperature Analysis of Superfinishing Alloy Steel Using Flexible Magnetic Abrasive Grinding (FMAG)
    Singh, D. K. (M.M.M. Engineering College Gorakhpur); and Jain, V. K.; Raghuram, V. (Indian Institute of Technology, Kanpur)
    Processes/Non-conventional/Poster/Abstract/2006 Annual
  4. A Study on the Performance of Copper-graphite as Tool Material in Micromachining by Micro Electro Discharge Machining
    Sundaram, M. M.; Rajurkar, K. P. (University of Nebraska-Lincoln)
    Processes/Non-conventional/Poster/Abstract/2006 Annual
  5. A New Precision Magnetic Field Assisted Finishing Process for Ferromagnetic Metallic Materials Using Plural Permanent Magnets as a Tool
    Zou, Y.; Shinmura, T. (Utsunomiya University)
    Processes/Non-conventional/Poster/Abstract/2006 Annual

Polishing, Lapping & ECM

  1. Development of a Structure-controlled Fixed-abrasive Pad for Finishing of an Optical Glass
    Enomoto, T.; Fujita, T. (The University of Tokyo) and Tominaga, S.; Suzuki, M. (Roki Techno Co., Ltd.)
    Processes/Polishing, Lapping & ECM/Poster/Abstract/2006 Annual
  2. Novel CMP Technique for Copper Surface Finishing with Fullerene Nano-particle
    Tanada, H.; Miyoshi, T.; Takaya, Y.; Hayashi, T. (Osaka University); and Suzuki, K. (Nitta Haas Incorporated)
    Processes/Polishing, Lapping & ECM/Poster/Abstract/2006 Annual
  3. Studies on Oscillation Controlled Lapping Using Small Diameter Lap Tool
    Uneda, M.; Ishikawa, K.; Suwabe, H.; Tsukada, H. (Kanazawa Institute of Technology)
    Processes/Polishing, Lapping & ECM/Poster/Abstract/2006 Annual
  4. Real Time Measurement of Axial Force and Torque During Polishing
    Williams, W. B.; Mullany, B. A. (University of North Carolina at Charlotte)
    Processes/Polishing, Lapping & ECM/Poster/Abstract/2006 Annual
  5. Polisher Life in Ultra-smoothness Polishing of Magnetic Disk Substrate Using New Double Side Surface Polishing Machine
    Yasui, H.; Yamaguchi, K.; Niki, T.; Otsuka, S.; Nagata, T. (Kumamoto University)
    Processes/Polishing, Lapping & ECM/Poster/Abstract/2006 Annual

Replication

  1. Large Area Optical Devices with Glass-pressed/Metal-embedded Subwavelength Grating
    Tsuchiya, K.; Komiya, A.; Suzuki, H.; Ooi, T.; Morii, H.; Hamaguchi, T.; Nakao, M. (The University of Tokyo)

  2. Processes/Replication/Poster/Abstract/2006 Annual