ASPE Proceedings, October 26-31, 2003, Portland Oregon

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Technical and Poster Sessions


Session I, Micro Manufacturing
Tuesday, October 28, 2003, 8:15 AM - 10:00 AM
Session Chair: E. Clayton Teague (National Science and Technology Council/NIST)

  1. Achieving Precision Through System Engineering  (Invited Paper)
    van Eijk, J. (Delft University of Technology/Philips CFT); Soemers, H. M. J. R. (Twente University of Technology/Philips CFT); and Franse, J. (Philips CFT)
    Micromanufacturing/Oral/Abstract/2003 Annual
  2. Dimensional Challenges in Printhead Micromachining and Inkjet Writing Systems (Invited Paper)
    Saul, K. (Hewlett Packard Corporation)
    Micromanufacturing/Oral/PRESENTATION AVAILABLE/2003 Annual
  3. Microtechnology-based Energy and Chemical Systems and Multi-scale Fabrication  (Invited Paper)
    Paul, B. K.; Drost, K. M. (Oregon State University)
    Micromanufacturing/Oral/Abstract/2003 Annual

Session II, Optical Systems and Metrology
Tuesday, October 28, 2003, 10:30 AM - 12:00 PM
Session Chair: Vivek G. Badami (Corning Tropel Corporation)

  1. High-NA Interference Microscopy of Complex Surface Structures  (Invited Paper)
    de Groot, Peter J.; Colonna de Lega, X.; Grigg, David A. (Zygo Corporation)
    Optical Systems and Metrology/Oral/Abstract/2003 Annual
  2. Interferometric Thickness Measurement of Free Form Silicon Wafers
    Jansen, M.; Haitjema, H.; Schellekens, P. H. J. (Eindhoven University of Technology)
    Optical Systems and Metrology/Oral/Abstract/2003 Annual
  3. Roundness, Angle, Straightness and Waviness Measurements on Recessed Cones Using Scanning White-light Interferometry
    Colonna de Lega, X.; de Groot, P. J. (Zygo Corporation)
    Optical Systems and Metrology/Oral/Abstract/2003 Annual
  4. Stabilization for Atomic Tracking Control of the Scanning Tunneling Microscope Tip by Referring Regular Crystalline Surface
    Aketagawa, M.; Rerkkumsup, P.; Takada, K.; Togawa, Y.; Thinh, N. T.; Kozuma, Y. (Nagaoka University of Technology)
    Optical Systems and Metrology/Oral/Abstract/2003 Annual

Session III, Equipment Design
Wednesday, October 29, 2003, 8:30 AM - 10:00 AM
Session Chair: Anthony E. Gee (University College, London)

  1. Lens Mounting Technology for Precision Lithography Optics  (Invited Paper)
    Watson, D. (Nikon Research Corporation of America)
    Equipment Design/Oral/ABSTRACT NOT AVAILABLE/2003 Annual
  2. Thin Glass Optic and Silicon Wafer Deformation and Kinematic Constraint
    Forest, C. R.; Akilian, M.; Vincent, G.; Lamure, A.; Schattenburg, M. L. (Massachusetts Institute of Technology)
    Equipment Design/Oral/Abstract/2003 Annual
  3. Dynamic Friction Coefficient Measurements: Device and Uncertainty Analysis
    Schmitz, T. L.; Action, J.; Ziegert, J.C.; Sawyer, W. G. (University of Florida)
    Equipment Design/Oral/Abstract/2003 Annual
  4. Design of Detachable Precision Fixtures which Utilize Hard and Lubricant Coatings to Mitigate Wear and Reduce Friction Hysteresis
    Culpepper, M. L.; Slocum, A. H.; Dibiaso, C. M. (Massachusetts Institute of Technology)
    Equipment Design/Oral/Abstract/2003 Annual

Session IV, Interferometry
Wednesday, October 29, 2003, 10:30 AM - 12:00 PM
Session Chair: David D. Gill (Sandia National Laboratories)

  1. Fabry-Perot Displacement Metrology with a Femtosecond Laser  (Invited Paper)
    Lawall, J. R. (National Institute of Standards and Technology)
    Interferometry/Oral/ABSTRACT NOT AVAILABLE/2003 Annual
  2. A Laser Speckle Sensor for Compound Rotary-linear Motion Metrology
    Shilpiekandula, V.; Trumper, D. L. (Massachusetts Institute of Technology)
    Interferometry/Oral/Abstract/2003 Annual
  3. Developing Atomic-resolution Measurements Using a Tunable Diode Laser-based Interferometer
    Zhou, H.; Damazo, B. N.; Silver, R. (National Institute of Standards and Technology); and Gonda, S. (Advanced Semiconductor Research Center)
    Interferometry/Oral/Abstract/2003 Annual
  4. New Heterodyne Interferometric Method of Displacement Measure and Control with a Sub-nanometric Precision Over a Range of Several Millimeters
    Haddad, D.; Topçu, S.; Chassagne, L.; Alayli, Y. (Universite de Versailles); and Juncar, P. (BNM-INM/CNAM)
    Interferometry/Oral/Abstract/2003 Annual

Session V, Precision Machining
Wednesday, October 29, 2003, 3:30 PM - 5:00 PM
Session Chair: Thomas A. Dow (North Carolina State University), and Hashimoto Hiroshi (Kanagawa Institute of Technology)

  1. Dynamic Material Properties for Machining Simulation Using the NIST Pulse-heated Kolsky Bar
    Rhorer, R. L. (National Institute of Standards and Technology)
    Precision Machining/Oral/Abstract/2003 Annual
  2. Direct Single Point Diamond Cutting of Stavax Assisted with Ultrasonic Vibration to Produce Optical Quality Surface Finish
    Liu, X. D.; Ding, X.; Lee, L. C.; Fang, F. Z.; Lim, G. C. (Singapore Institute of Manufacturing Technology)
    Precision Machining/Oral/Abstract/2003 Annual
  3. Characterizing Residual Stress in Scribes on Silicon Using Deflection Measurements
    Randall, T.; Scattergood, R. O. (North Carolina State University)
    Precision Machining/Oral/Abstract/2003 Annual
  4. Effect of Machining Parameters on Machining Performance of Micro EDM and Surface Integrity
    Yu, Z.; Rajurkar, K. P.; Narasimhan, J. (University of Nebraska-Lincoln)
    Precision Machining/Oral/Abstract/2003 Annual

Session VI, Advanced Machines
Thursday, October 30, 2003, 8:30 AM - 10:00 AM
Session Chair: Allen Y. Yi (Ohio State University), and Werner R. Preuss (Bremen University)

  1. Ultra-precision Surface Machining by Ion Beams and Plasma Jets  (Invited Paper)
    Schindler, A. (Leibniz-Institut für Oberflaechenmodifizierung e.V. - IOM )
    Advanced Machines/Oral/ABSTRACT NOT AVAILABLE/2003 Annual
  2. An Ultra-high Speed Spindle for Micro-milling
    Ziegert, J. C.; Pathak, J. P. (University of Florida); and Jokiel Jr., B. (Sandia National Laboratories)
    Advanced Machines/Oral/Abstract/2003 Annual
  3. Fundamental Analysis on the Novel 3-D Probing Technique for Microparts Using the Optical Fiber Trapping
    Hashimoto, T.; Takaya, Y.; Miyoshi, T.; Nakajima, R. (Osaka University)
    Advanced Machines/Oral/Abstract/2003 Annual
  4. Rotary Type Micro-Engineered Tool
    Akimoto, K.; Hashimoto, H. (Kanagawa Institute of Technology)
    Advanced Machines/Oral/Abstract/2003 Annual

Session VII, Novel Applications
Thursday, October 30, 2003, 10:30 AM - 12:00 PM
Session Chair: Andrew J. Hazelton (Nikon Research Corporation of America), and Aoyama Hiusayuki (University of Electro-Communications)

  1. LIGA Fabrication Technology for Micro Systems  (Invited Paper)
    Henderson, C. C. (Sandia National Laboratories/Livermore)
    Novel Applications/Oral/ABSTRACT NOT AVAILALBE/2003 Annual
  2. Fabrication of a Precision Mandrel for Replicating Wölter x-ray Optics
    Nederbragt, W. W. (Lawrence Livermore National Laboratory)
    Novel Applications/Oral/Abstract/2003 Annual
  3. Pinpoint Chemical Vapor Deposition of Carbon Nanowire for Nanometer-scale Electronic Devices
    Ooi, T.; Kasuya, K.; Tsuchiya, K.; Hamaguchi, T.; Nakao, M. (The University of Tokyo)
    Novel Applications/Oral/Abstract/2003 Annual
  4. Manufacturing and Quality Control of the NIST Reference Material 8240 Standard Bullet
    Whitenton, E. P.; Johnson, C. E.; Kelly, D. R.; Clary, R.; Dutterer, B. S.; Ma, L.; Song, J.-F.; Vorburger, T. V. (National Institute of Standards and Technology)
    Novel Applications/Oral/Abstract/2003 Annual

Session VIII, Equipment and Controls
Thursday, October 30, 2003, 1:30 PM - 3:00 PM
Session Chair: Stephen J. Ludwick (Aerotech, Inc.)

  1. Electromagnetically Driven Fast Tool Servo
    Lu, X.; Trumper, D. L. (Massachusetts Institute of Technology)
    Equipment and Controls/Oral/Abstract/2003 Annual
  2. Error Compensation Using Inverse Actuator Dynamics
    Panusittikorn, W.; Garrard, K. P.; Dow, T. A. (North Carolina State University)
    Equipment and Controls/Oral/Abstract/2003 Annual
  3. Machining of Freeform Optical Surfaces by Slow Slide Servo Method
    Tohme, Y. F.; Lowe, J. A. (Moore Nanotechnology Systems, Inc.)
    Equipment and Controls/Oral/Abstract/2003 Annual
  4. High Bandwidth Short Stroke Rotary Fast Tool Servo
    Montesanti, R. C. (Lawrence Livermore National Laboratory); and Trumper, D. L. (Massachusetts Institute of Technology)
    Equipment and Controls/Oral/Abstract/2003 Annual


Poster Session


Tuesday, October 28, 2003, 3:30 PM - 5:00 PM
Wednesday, October 29, 2003, 1:30 PM - 3:00 PM
Session Chair: Bradley J. Jared (3M Precision Optics)

Biomedical

  1. Fabrication of a Microrobot Movable in Flexible Pipes Like the Large Intestine
    Ono, M.; Sasazaki, T.; Kato, N.; Kato, S. (Nippon Institute of Technology)
    Biomedical/Poster/Abstract/2003 Annual

Equipment, Machines & Instruments

Analysis & Modeling

  1. Design and Analysis of Nano-positioning Stage Driven by Piezoelectric Elements
    Choi, K.-B.; Ryu, S. H.; Han, C.-S. (Korea Institute of Machinery & Materials (KIMM))
    Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/2003 Annual
  2. Theoretical and Experimental Study on Surface Finish for Multi-axis CNC Milling
    Sahasrabudhe, A.; Liu, X.; Zhang, X.; Yamazaki, K. (University of California-Davis)
    Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/2003 Annual
  3. Development of an Internet-based Platform for High-speed Milling Process Parameter Selection
    Schmitz, T. L.; Tummond, M.; Duncan, G.; Zahner, C. (University of Florida); and Snyder, J. P. (TechSolve, Inc.)
    Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/2003 Annual
  4. Modeling and Investigation on a Jet Pipe Electrohydraulic Flow Control Servovalve
    Somashekhar, S. H.; Singaperumal, M.; Krishnakumar, R. (Indian Institute of Technology Madras)
    Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/2003 Annual
  5. Computational Accuracy Analysis of a Coordinate Measuring Machine Under Static Load
    Sousa, A. R.; Bento, D. A. (Federal Center for Technological Education - Santa Catarina)
    Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/2003 Annual

Controls

  1. Adaptive Feedforward Cancellation Viewed from an Oscillator Amplitude Control Perspective
    Cattell, J. H.; Byl, M. F.; Trumper, D. L. (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual
  2. Development of an Electro-dynamic Planar Motor
    Compter, J. C. (Philips CFT); Frissen, P. C. M.; Peijnenburg, A. T. (Philips CFT NA)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual
  3. Model-based Control Input Compensation for Parallel Kinematic Machine Tools
    Hadorn, Michael C. (Institute of Machine Tools and Mfg. [IWF-ETH])
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual
  4. Force Feedback Control of Tool Deflection in Miniature Ball End Milling
    Hood, D. W.; Buckner, G. D.; Dow, T. A. (North Carolina State University)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual
  5. Numerical Control with Surface Driven Interpolation
    Kato, K. (Tokyo University of Science); and Takahashi, N.; Iriguchi, K. (Mitsubishi Electric Corporation)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual
  6. Compensatory Control of Thermal Errors for High-Speed Machine Tools
    Kim, K.-D.; Chung, S.-C. (Hanyang University)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual
  7. Identification of Nonlinear Characteristics for Precision Servomechanisms
    Kim, M.-S.; Chung, S.-C. (Hanyang University)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual
  8. A Fuzzy Logic Based Adaptive Feedforward PI Controller for Nanometer Positioning
    Lu, X.; Tran, H. D. (University of New Mexico)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual
  9. Waveform Determination and Positioning Control of the NanoSlider with Inertial Sliding and Stick-positioning
    Shim, J. Y.; Gweon, D.-G. (Korea Advanced Institute of Science & Technology - KAIST)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual
  10. Development of Controlled Surface Acoustic Wave Planar Actuators
    Vermeulen, M. M. P. A.; Peeters, F. G. P.; (Philips CFT); and Peijnenburg, A. T. (Philips CFT NA)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/2003 Annual

Design & Testing

  1. Differentiating Guidance from Support Functions in Ultra Precision Mechanism Design
    Gee, A. E. (University College, London)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2003 Annual
  2. Ultraprecision XY Stage with Millimetre Travel Range Using Leaf-spring Mechanism and Voice-coil Motor
    Kang, D.-W.; Kim, D.-M.; Kim, K.-H.; Shim, J.-Y.; Gweon, D.-G. (Korea Advanced Institute of Science & Technology - KAIST)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2003 Annual
  3. Control and Design of a Dual Servo with Fine 6-axis Stage
    Kim, K.-H.; Lee, M.-G.; Kim, D.-M.; Gweon, D.-G. (Korea Advanced Institute of Science & Technology)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2003 Annual
  4. Integrated Design Methodology for High-Precision/Speed Servomechanisms
    Kim, M.-S.; Chung, S.-C. (Hanyang University)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2003 Annual
  5. Conceptual Design Support and Prototyping of a Miniature Machine Tool
    Mishima, N. (National Institute of Advanced Industrial Science & Technology)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2003 Annual
  6. Water Energy Drive Spindle Supported by Water Hydrostatic Bearing for Ultra-precision Machine Tool
    Nakao, Y.; Mimura, M.; Kobayashi, F. (Kanagawa University)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2003 Annual
  7. Design and Characterization of an Aerostatic Spherical Bearing
    Robertson, A. P.; Slocum, A. H. (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2003 Annual
  8. Theoretical and Experimental Determination of the Stiffness Properties of a Capstan Drive
    Werkmeister, J. B.; Slocum, A. H. (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2003 Annual
  9. Experimental Determination of Kinematic Coupling Repeatability in Industrial and Laboratory Conditions
    Willoughby, P. J.; Hart, A. J.; Slocum, A. H. (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2003 Annual

Mechatronics

  1. Design and Development of a High Precision Lens Focussing Mechanism Using Flexure Bearings
    Gaunekar, A. S.; Widdowson, G. P.; Srikanth, N.; Guangneng, W. (ASM Technology Singapore Pte. Ltd.)
    Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003 Annual
  2. Synthesis of the 3D Linux-Based CNC System for Precision Machines
    Kang, B.-K.; Kim, M.-S.; Chung, S.-C. (Hanyang University)
    Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003 Annual
  3. Fabrication of an Inch-worm Type Mobile Microrobot Movable in Different Diameter and Long Pipes
    Kato, S.; Ono, M.; Aizawa, Y.; Nakamura, H. (Nippon Institute of Technology)
    Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003 Annual
  4. Fine Motion Performance of L-shaped Seal Mechanism with 3 Degrees of Freedom
    Kawagoe, K.; Furutani, K. (Toyota Technological Institute)
    Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003 Annual
  5. Design and Developement of Micro Hopping Robot for Rescue Operation
    Misumi, R.; Kurata, S.; Aoyama, H. (University of Electro-Communications)
    Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003 Annual
  6. A Simple Hybrid Positioning Stage With <1nm Resolution
    Okazaki, Y. (National Institute of Advanced Industrial Science & Technology); Ichikawa, S. (Sigma Tech Co. Ltd.); and Otsuka, J. (Sizuoka Institute of Science and Technology)
    Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003 Annual
  7. Fabrication of an Artificial Earthworm Type Mobile Inspection Robot Movable in 100 m Long Pipes
    Ono, M.; Kato, M.; Naito, T.; Sasazaki, T.; Kato, S. (Nippon Institute of Technology)
    Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003 Annual
  8. Nonlinear Friction Behavior of Discontinuity at Stroke End in a Ball Guide Way
    Tsuruta, K.; Futami, S. (Yaskawa Electric Corporation); and Murakami, T. (Kyushu University)
    Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003 Annual
  9. Global Tele-operation for Micro-assembly Tasks
    Zaeh, M. F.; Ehrenstrasser, M.; Schilp, J. (Technische Universität München)
    Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003 Annual

MEMS & Nanotechnology

  1. Multi-axis Nano Positioning Flexure Stage Using Magnetically Preloaded PZT Actuator
    Han, C.-S.; Baek, S. (Korea Institute of Machinery & Materials [KIMM]); Kang, J. O.; Hong, S. W. (Kumoh National Institute of Technology); and Noh, M. D. (Chungnam National University)
    Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/2003 Annual
  2. Developemnt of a Micro Screw Thread and a Micro Gear Utilized Extra Fine Wires
    Honda, S. (Tokyo Metropolitan Institute of Technology)
    Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/2003 Annual
  3. A Dual Stage Compliant Positioning System with Integrated Planar Optical Grating for Position Feedback
    Mueller, U. (Optomech)
    Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/2003 Annual
  4. The Application of Surface Mount Technology to Multi-Scale Process Intensification
    Sharma, N.; Paul, B. K. (Oregon State University)
    Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/2003 Annual
  5. A Comparison of the Mass Transfer Performance of Conventional and Micromanufactured Porous Membranes
    Tseng, C. H.; Paul, B. K. (Oregon State University)
    Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/2003 Annual

Novel Systems

  1. Novel Ultraprecise Tool Alignment Setup for Contour Boring and Ball-end Milling
    Brinksmeier, E.; Gläbe, R.; Autschbach, L. (Bremen University)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual
  2. A New Kind of Parallel Mechanism Machine Tools with an Integrated Cartesian Guiding and Metrology Mechanism
    Chen, J.-S.; Hsu, W.-Y. (National Chung Cheng University)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual
  3. Large Displacement Flexure Based Nano-Precision Motion Stage for Vacuum Environments
    Choi, Y.-J.; Sreenivasan, S. V. (The University of Texas at Austin)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual
  4. Design of Precision Manipulators Using Binary Actuation and Differential Compliant Mechanisms
    Culpepper, M. L.; Chen, S.-C. (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual
  5. Design of Low-cost Kinematic Couplings Using Formed Balls and Grooves in Sheet Metal Parts
    Culpepper, M. L.; Slocum, A. H.; Bailey, P. (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual
  6. Precise Manipulation Control on Three Versatile Micro Robots for Flexible Micro Handling
    Fuchiwaki, O.; Aoyama, H. (University of Electro-Communications)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual
  7. Micro Turning System 3: A Super Small CNC Precision Lathe for Microfactories
    Ito, S.; Iijima, D.; Hayashi, A. (Nano Corporation); Aoyama, H. (University of Electro-Communications); and Yamanaka, M. (Tohoku University)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual
  8. An Inchworm Type In-pipe Mobile Microrobot Driven by Three Gas-liquid Phase-change Actuators
    Kato, S.; Naito, T.; Ono, M.; Matsuda, S. (Nippon Institute of Technology)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual
  9. Structured Surfaces Damping Enhancements at Mechanical Interfaces
    Larsen, E. R.; Davies, M. A.; Smith, K. S.; Nuttall, M. (University of North Carolina-Charlotte)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual
  10. Machine for Precision High-speed Cutting of Semiconductor Wafers
    Wells, A. B.; Subrahmanyan, P. K. (Electro Scientific Industries, Inc.)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2003 Annual

Metrology

Analysis & Modeling

  1. Traceable Calibration of Non-linearities in Laser Interferometers
    Cosijns, S.; Haitjema, H.; Schellekens, P. H. J. (Eindhoven University of Technology)
    Metrology - Analysis & Modeling/Poster/Abstract/2003 Annual
  2. Investigation of Optical Clean Zone Boundaries Using Phoenics
    Gao, Y.; Tse, S.; Woon, S.; Tao, Z. (Hong Kong University of Science & Technology)
    Metrology - Analysis & Modeling/Poster/Abstract/2003 Annual
  3. Design and Analysis of Shrink and Press Fit Joints
    Morrisey, P.; Eischen, J.; Dow, T. A. (North Carolina State University)
    Metrology - Analysis & Modeling/Poster/Abstract/2003 Annual
  4. Time Series Modelling of Endmilling Process for Mode Estimation
    Yoon, M. C.; Kim, B. T. (Pukyong National University); and Park, D. S. (Incheon University)
    Metrology - Analysis & Modeling/Poster/Abstract/2003 Annual

Form & Geometry

  1. Defining the Measurand in Radius of Curvature Measurements
    Davies, A. D. (University of North Carolina-Charlotte); and Schmitz, T. L. (University of Florida)
    Metrology - Form & Geometry/Poster/Abstract/2003 Annual
  2. Alternative Artifacts for Evaluating Scanning CMM Performance
    Morse, E. P.; Farooqui, S. A. (University of North Carolina-Charlotte)
    Metrology - Form & Geometry/Poster/Abstract/2003 Annual
  3. Study on Support Method in Sori Measurement of 300mm Silicon Wafer
    Natsu, W.; Ito, Y.; Kunieda, M. (Tokyo University of Agriculture & Technology); and Naoi, K. (Kuroda Precision Industries Ltd.)
    Metrology - Form & Geometry/Poster/Abstract/2003 Annual
  4. Optical Polygon Calibration Using Only One Autocollimator
    Nava-Sandoval, R.; Díaz-Uribe, R. (Universidad Nacional Autonoma de Mexico)
    Metrology - Form & Geometry/Poster/Abstract/2003 Annual

Instrumentation, Design & Testing

  1. Optimal Design of High Stiffness XYZ 3-axis Stage for AFM System
    Kim, D.-M.; Kang, D.-W.; Shim, J.-Y.; Gweon, D.-G. (Korea Advanced Institute of Science & Technology - KAIST); and Eom, C. I. (Korea Institute of Standard and Science - KRISS)
    Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003 Annual
  2. Artifacts and Test Procedures for Contour Measuring Instruments
    Neugebauer, M.; Jusko, O. E.; Neuschaefer-Rube, U.; Wäldele, F. (Physikalisch-Technische Bundesanstalt)
    Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003 Annual
  3. Development of Ultraprecise Gear Measuring Instrument / First Report: Evaluation on the Accuracy of Principal Axis
    Ogasawara, H.; Maeda, N.; Ogasawara, M.; Shibuya, Y. (Ogasawara Precision Laboratory Ltd.)
    Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003 Annual
  4. Laser Tracker Compensation Using Displacement Interferometry
    Sawyer, D. S.; Fronczek Jr., C. (National Institute of Standards and Technology)
    Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003 Annual
  5. Tip Waviness Compensation in a Polar Profilometer
    Sohn, A.; Garrard, K. P. (North Carolina State University)
    Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003 Annual
  6. Web-based Precision Dimensional Verification System for Rapid Design and Manufacture
    Song, I.-H.; Chung, S.-C. (Hanyang University)
    Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003 Annual
  7. A Study on Laser-CCD Spindle Error Measurement System
    Su, I.; Zhang, X.; Liu, X.; Yamazaki, K. (University of California-Davis)
    Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003 Annual

Machine Tool Metrology

  1. Performance Evaluation of a Prototype Machine Tool for Machining Meso-scaled Parts
    Damazo, B. N.; Donmez, A.; McGlauflin, M. L.; Soons, J. A. (Nat'l Institute of Standards & Technology); Bryant, S. C. (University of North Carolina-Charlotte); and Werkmeister, J. B.; Slocum, A. H. (Massachusetts Institute of Technology)
    Metrology - Machine Tool Metrology/Poster/Abstract/2003 Annual
  2. Measurement of Systematic Geometric Errors in Coordinate Measuring Machines
    Hernández, O. I. (Centro Nacional de Metrología [CENAM]); and Trapet, E. (UNIMETRIK S.A.)
    Metrology - Machine Tool Metrology/Poster/Abstract/2003 Annual
  3. Data Mining of Conditions for Machine Tools Based on Machining Information
    Saito, M.; Kobayashi, Y.; Shirai, K. (Nihon University)
    Metrology - Machine Tool Metrology/Poster/Abstract/2003 Annual

Measurement Uncertainty

  1. Inspection Strategy for LIGA Microstructures Using a Programmable Optical Microscope
    Ceremuga, J. T.; Aigeldinger, G. (Sandia National Laboratories)
    Metrology - Measurement Uncertainty/Poster/Abstract/2003 Annual
  2. Measurement Uncertainty in Scanning Instruments Due to Data Acquisition Methods
    Kummailil, J.; Geiger, D. J.; Bergstrom, T.; Varbanova, V.; Brown, C. A. (Worcester Polytechnic Institute)
    Metrology - Measurement Uncertainty/Poster/Abstract/2003 Annual
  3. Uncertainty of Measurements Using MultiSensor CMMs
    Morse, E. P.; Bhamidi, K. P. (University of North Carolina-Charlotte)
    Metrology - Measurement Uncertainty/Poster/Abstract/2003 Annual
  4. A New Method to Measure Runout of Motorized End-milling Spindles at Very High Speed Rotations
    Nakkiew, W.; Lin, C. W.; Tu, J. F. (Purdue University)
    Metrology - Measurement Uncertainty/Poster/Abstract/2003 Annual
  5. Evaluation of Measurement Uncertainty in Gear Measuring Instruments by Using the Monte Carlo Simulation
    Tanaka, H. (National Metrology Institute of Japan); Shimojo, M.; Kajitani, M. (The University of Electro-Communications); Sato, T.; Takeda, R. (Osaka Seimitsu Kikai Co.,Ltd.); Kojima, M. (Kanzaki Kokyukoki Mfg. Co.,Ltd.); Yuzaki, M. (Tokyo Technical Instruments Inc.); Kato, S. (Asano Gear Co.,Ltd.); Shibuya, Y. (Ogasawara Precision Hob Laboratory Ltd.); and Kondo, T. (AIST)
    Metrology - Measurement Uncertainty/Poster/Abstract/2003 Annual

Surface & Subsurface

  1. Surface Metrology Software Variability in Two-Dimensional Measurements
    Bui, S. H.; Vorburger, T. V. (National Institute of Standards & Technology); and Muralikrishnan, B.; Raja, J. (University of North Carolina-Charlotte)
    Metrology - Surface & Subsurface/Poster/Abstract/2003 Annual
  2. Large Field-of-view Scanning White-light Interferometers
    Colonna de Lega, X.; Biegen, J. F.; de Groot, P. J. (Zygo Corporation); and Häusler, G.; Andretzky, P. (University Erlangen)
    Metrology - Surface & Subsurface/Poster/Abstract/2003 Annual
  3. Accuracy Assessment for a Lateral Shearing Interferometer
    Liu, X.; Gao, Y. (Hong Kong University of Science & Technology)
    Metrology - Surface & Subsurface/Poster/Abstract/2003 Annual
  4. A Surface Texture Toolbox for Turning Process Diagnostics
    Muralikrishnan, B.; Raja, J. (University of North Carolina-Charlotte); and Dawson, T.; Kurfess, T. R. (Georgia Institute of Technology)
    Metrology - Surface & Subsurface/Poster/Abstract/2003 Annual
  5. UV Raman Scattering in 6H-SiC Indents
    Huening, J. J.; Nemanich, R. J. (North Carolina State University); Jang , J.-I.; Pharr, G. M. (The University of Tennessee); and Chen, X.-B.; Bergman, L. (University of Idaho)
    Metrology - Surface & Subsurface/Poster/Abstract/2003 Annual
  6. Scale-space Analysis of Line Edge Roughness on 193 nm Lithography Test Structures
    Orji, N. G., Raja, J. (University of North Carolina-Charlotte); and Vorburger, T. V.; Gu, X. (National Institute of Standards and Technology)
    Metrology - Surface & Subsurface/Poster/Abstract/2003 Annual

Optics

Optical Fabrication

  1. Fabrication of Micro Grooves
    Fang, F. Z.; Wu, H.; Liu, X. D.; Lim, G. C.; Liu, Y. C.; Ng, S. T. (Singapore Institute of Manufacturing Technology)
    Optics - Optical Fabrication/Poster/Abstract/2003 Annual
  2. Corrective Figuring of Optical Glass by Nano-abrasion Machining
    Horiuchi, O.; Y.; Yamaguchi, S.; Suyama, A.; Shibutani, H.; Suzuki, H. (Toyohashi University of Technology)
    Optics - Optical Fabrication/Poster/Abstract/2003 Annual

Processes

Grinding

  1. Simulating Vibration Assisted Grinding with Segmented Wheels
    Fan, X.; Miller, M. H. (Michigan Technological University)
    Processes - Grinding/Poster/Abstract/2003 Annual
  2. Investigations Regarding the Interdependence of Spindle Load and Machine Performance During Slicing
    Gatzen, H. H.; Morsbach, C.; Karyazin, A.; Günzel, G. (Hanover University); and Jones, G. M. (Seagate Technology)
    Processes - Grinding/Poster/Abstract/2003 Annual
  3. Creep Feed Profile Grinding of High Speed Tool Steels with Ultrafine-Polycrystalline cBN Abrasives
    Ichida, Y.; Sato, R.; Morimoto, Y.; Inoue, Y. (Utsunomiya University)
    Processes - Grinding/Poster/Abstract/2003 Annual
  4. Enhancement of Grinding Performance Based on Improvement of Uniformity in Structure in Vitrified Bonded cBN Wheels
    Kajino, H.; Ichida, Y.; Sato, R.; Kiminami, H. (Utsunomiya University); and Hoshino, K.; Sato, M. (Mitsui Mining & Smelting Co., Ltd.)
    Processes - Grinding/Poster/Abstract/2003 Annual
  5. Effect of Grinding Fluid Supply on Ultra-smoothness Grinding of Fine Ceramics
    Yasui, H.; Sawa, T. (Kumamoto University)
    Processes - Grinding/Poster/Abstract/2003 Annual
  6. Quantitative Analysis of the Cutting Edge Behavior on Wheel Surface in Long Grinding Process
    Yasui, H.; Hiraki, Y.; Sakata, M.; Terakawa, R. (Kumamoto University)
    Processes - Grinding/Poster/Abstract/2003 Annual
  7. Grinding Wheel Loading With and Without Vibration Assistance
    Zhang, P.; Miller, M. H. (Michigan Technological University)
    Processes - Grinding/Poster/Abstract/2003 Annual

Machining

  1. Closed Loop Control of Tool Deflection
    Clayton, S.; Freitag, K.; Dow, T. A. (North Carolina State University)
    Processes - Machining/Poster/Abstract/2003 Annual
  2. An Investigation of the Dynamic Absorber Effect in High-Speed Machining
    Duncan, G. S., Tummond, M.; Schmitz, T. L. (University of Florida)
    Processes - Machining/Poster/Abstract/2003 Annual
  3. Machining of Hard Coatings in Optical Quality
    Grimme, D.; Preuss, W. R.; Brinksmeier, E.; (Bremen University)
    Processes - Machining/Poster/Abstract/2003 Annual
  4. Temperature Effects in Micro-machinability of Plastics
    Horio, K.; Kuwan, L.; Takezawa, H.; Yamazaki, T. (Saitama University)
    Processes - Machining/Poster/Abstract/2003 Annual
  5. Study on Slurry Actions in Slicing Groove and Slicing Characteristics at Multi-Wire Saw
    Ishikawa, K.; Suwabe, H.; Itoh, S. (Kanazawa Institute of Technology)
    Processes - Machining/Poster/Abstract/2003 Annual
  6. Effects of Nitrogen Gas Atmosphere in Oxygen-free Copper Precision Cutting
    Kaneeda, T.; Hayashi, J.; Anthony, L. (Okayama University of Science); Yokomizo, S. (Industrial Technology Center of Okayama Prefecture); Shimada, S. (Osaka Electro-Communication University); and Higuchi, M. (Kansai University)
    Processes - Machining/Poster/Abstract/2003 Annual
  7. Application of the Run Length Encoding Algorithm to the Fabrication of Non-rotationally Symmetric Surfaces
    Kim, H.-S.; Lee, D.-H.; Lee, J.-S. (Inst. for Advanced Engineering (IAE))
    Processes - Machining/Poster/Abstract/2003 Annual
  8. Nanostructured Yttrium-stabilized Zirconia/Alumina (YSZA) Cutting Insert for Machining High-speed M1 Tool Steel
    Liu, X.; Zhang, B.; Zhou, Z. (University of Connecticut)
    Processes - Machining/Poster/Abstract/2003 Annual
  9. Nonlinear Effects in Precision Machining Engineering Materials
    Luo, X.; Cheng, K. (Leeds Metropolitan University)
    Processes - Machining/Poster/Abstract/2003 Annual
  10. Elliptical Vibration Assisted Diamond Turning
    Negishi, N.; Dow, T. A. (North Carolina State University)
    Processes - Machining/Poster/Abstract/2003 Annual
  11. Analysis of Accuracy and Cutting Forces in Groove Cutting
    Onozuka, H.; Asakawa, Y.; Yamanaka, T.; Maeda, Y. (Hitachi, Ltd.)
    Processes - Machining/Poster/Abstract/2003 Annual
  12. Development of a Tunable Ultrasonic Vibration-assisted Diamond Turning Instrument
    Overcash, J. L.; Cuttino, J. F. (University of North Carolina-Charlotte)
    Processes - Machining/Poster/Abstract/2003 Annual
  13. Electrical and Optical Detection and Heating of the High Pressure Metallic Phase of Silicon In-situ During Scratching with Diamond and its Effect on the Material’s Hardness
    Patten, J. A. (Western Michigan University); and Dong, L.; Miller, J. A. (University of North Carolina-Charlotte)
    Processes - Machining/Poster/Abstract/2003 Annual
  14. Chucking Parts for Ultra-precision Diamond Turning
    Sivignon, E. (INSA Lyon); and Dutterer, B. S.; McGlauflin, M. L. (National Institute of Standards and Technology)
    Processes - Machining/Poster/Abstract/2003 Annual
  15. Ductile Mode Cutting with Torsional Vibration for Glass Material
    Tangpornprasert, P.; Nunokawa, K.; Warisawa, S.; Mitsuishi, M. (The University of Tokyo)
    Processes - Machining/Poster/Abstract/2003 Annual
  16. Edge Rounding Method by Means of Water Jet for Cylindrical Rollers of Bearing
    Warisawa, S.; Akamatsu, H. (The University of Tokyo)
    Processes - Machining/Poster/Abstract/2003 Annual
  17. Inspection of Micro-drilling Processes by Using the On-machine Vision
    Yoon , H.-S.; Chung, S.-C. (Hanyang University)
    Processes - Machining/Poster/Abstract/2003 Annual

Manufacturing

  1. Fabrication of the Double Shell 2 Laser Targets Via the Bonding of Hemispheres
    Bono, M. J.; Hibbard, R. L.; Davis, P. J. (Lawrence Livermore National Laboratory)
    Processes - Manufacturing/Poster/Abstract/2003 Annual
  2. Precision Manufacturing of Inertial Confinement Fusion Double Shell Laser Targets
    Hibbard, R. L.; Bono, M. J.; Amendt, P. A.; Bennett, D. W.; Castro, C. (Lawrence Livermore National Laboratory)
    Processes - Manufacturing/Poster/Abstract/2003 Annual
  3. Finite-Element Simulation of the Uniaxial Die Pressing of Ceramic Powder
    Kok, C. K.; Kwon, P. Y.; Rachedi, R. R.; Klenow, B. A. (Michigan State University)
    Processes - Manufacturing/Poster/Abstract/2003 Annual
  4. Precise Gastight Sealing for Bio/chemical Microchip
    Tsuchiya, K.; Ooi, T.; Yamaji, A.; Wakamatsu, K.; Ishii, H.; Hamaguchi, T.; Nakao, M. (The University of Tokyo)
    Processes - Manufacturing/Poster/Abstract/2003 Annual
  5. Algorithm to Establish Manufacturing Process of New Functional Materials
    Watanabe, T. (FT Design Laboratory)
    Processes - Manufacturing/Poster/Abstract/2003 Annual

Non-conventional

  1. Experimental Analysis of Deposition Process of Lubricant Surface by Electrical Discharge Machining with Molybdenum Disulfide Powder Suspended in Working Oil
    Furutani, K.; Shimizu, Y. (Toyota Technological Institute)
    Processes - Non-conventional/Poster/Abstract/2003 Annual
  2. Investigations on Feasibility of Sub-micrometer Order Manufacturing Using Micro-EDM
    Han, F.; Yamada, Y.; Kawakami, T.; Kunieda, M. (Tokyo University of Agriculture & Technology)
    Processes - Non-conventional/Poster/Abstract/2003 Annual
  3. Silicon on Insulator (SOI) Wafer Polishing Using Magnetorheological Finishing (MRF) Technology
    Mooney, J. T.; Tricard, M.; Dumas, P. R.; Golini, D. (QED Technologies)
    Processes - Non-conventional/Poster/Abstract/2003 Annual
  4. Surface Modification of EDMed Surface by Wide-area Electron Beam Irradiation
    Okada, A.; Uno, Y. (Okayama University); Uemura, K.; Raharjo , P. (Nagata Seiki Co. Ltd.); and Furukawa, T. (Sodick Co., Ltd.)
    Processes -Non-conventional/Poster/Abstract/2003 Annual
  5. Superfinishing of Alloy Steels Using Magnetic Abrasive Finishing Process
    Singh, D. K.; Jain, V. K.; Raghuram, V. (Indian Institute of Technology - Kanpur)
    Processes - Non-conventional/Poster/Abstract/2003 Annual
  6. Internal Magnetic Abrasive Finishing for Austenitic Stainless Steel Tubes Bent Using High Frequency Induction Bending
    Yamaguchi, H.; Shinmura, T.; Yokoo, H.; Aizawa, T. (Utsunomiya University)
    Processes - Non-conventional/Poster/Abstract/2003 Annual

Polishing, Lapping & ECM

  1. Lapping of Flat Surfaces with Two-Metallic Tools
    Barylski, A. W. (Technical University of Gdansk)
    Processes - Polishing, Lapping & ECM/Poster/Abstract/2003 Annual
  2. Chemical-mechanical Planarization of a SU-8/Copper Combination for MEMS
    Gatzen, H. H.; Morsbach, Caspar; Kourouklis, C. (Hannover University)
    Processes - Polishing, Lapping & ECM/Poster/Abstract/2003 Annual
  3. Polishing Processes for Structured Surfaces
    Gessenharter, A.; Riemer, O.; Brinksmeier, E. (Bremen University)
    Processes - Polishing, Lapping & ECM/Poster/Abstract/2003 Annual
  4. Pad Contact Area Characterization in Chemical Mechanical Planarization Using Micro Molding Technology
    Lee, S.; Kim, H.; Dornfeld, D. A. (University of California at Berkeley); and Jeong, H. D. (Pusan National University)
    Processes - Polishing, Lapping & ECM/Poster/Abstract/2003 Annual
  5. Development of Cavitation Aided Machining for Finishing Fine Surface
    Ohashi, K.; Tsukamoto, S.; Nakajima, T. (Okayama University)
    Processes - Polishing, Lapping & ECM/Poster/Abstract/2003 Annual
  6. A New Lapping Film with Agglomerative Super Fine Abrasives for Large-diameter Workpiece Surface Finishing
    Zhang, J., Endo, H. (Ricoh Company, Ltd.); and Enomoto, T. (The University of Tokyo)
    Processes - Polishing, Lapping & ECM/Poster/Abstract/2003 Annual