ASPE Proceedings, October 31 - November 5, 1999, Monterey California

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Technical and Poster
Sessions

Session I
Large Scale Metrology
Tuesday, November 2, 1999, 8:30 a.m. - 10:00 a.m.
Session Chair: W. Tyler Estler (National Institute of Standards and Technology)

Welcome Remarks
I. F. Stowers, Annual Meeting Chairman (Lawrence Livermore National Laboratory)

  1. Self-compensation of Atmospheric-refraction Errors in Optical Metrology (Invited Paper)
    L. G. Shirley (MIT Lincoln Laboratory)
    Large Scale Metrology/Oral/Abstract/1999 Annual
  2. Metrology System for the Green Bank Telescope
    D. H. Parker, J. M. Payne (The National Radio Astronomy Observatory)
    Large Scale Metrology/Oral/Abstract/1999 Annual
  3. Precision Surveying of the National Ignition Facility
    W. S. Rorke, Jr. (Sandia National Laboratories)
    Large Scale Metrology/Oral/Abstract/1999 Annual
  4. The Implementation of Simultaneous Trilateration to Measure Dynamic Three-dimensional Contours Using the Laser Ball Bar
    T. L. Schmitz (Nat’l Institute of Standards and Technology) and J C. Ziegert (University of Florida)
    Large Scale Metrology/Oral/Abstract/1999 Annual

Session II
Mesoscale Manufacturing
Tuesday, November 2, 1999, 10:30 a.m. - 12:00 p.m.
Session Co-Chairs: E. Clayton Teague (National Institute of Standards and Technology), and P. A. McKeown (Pat McKeown Associates)

  1. Microsystems: Manufacturing and Packaging Challenges (Invited Paper)
    R. M. Mehalso (Microtec Associates)
    Mesoscale Manufacturing/Oral/Abstract/1999 Annual
  2. An Overview of Design for Manufacturing at Mesoscopic Scale (Invited Paper)
    B. Carlisle (Adept Robotics)
    Mesoscale Manufacturing/Oral/No Abstract Available/1999 Annual
  3. Fabrication of In-pipe Mobile Micromachines Driven by Pneumatic and Vacuum Pressure
    S. Kato, M. Shirakawa, M. Ohno, S. Fukumoto (Nippon Institute of Technology)
    Mesoscale Manufacturing/Oral/Abstract/1999 Annual
  4. DNA Extraction from Cell Nuclei and DNA Fishing Using a 3D Nano-probe
    M. Nakao, K. Matsumoto, T. Ooi, H. Hirayama, M. Otsubo, S. Shirakata, Y. Hatamura (The University of Tokyo)
    Mesoscale Manufacturing/Oral/Abstract/1999 Annual

Session III
Novel Processes and Techniques
Tuesday, November 2, 1999, 1:30 p.m. - 3:00 p.m.
Session Co-Chairs: T. A. Dow (North Carolina State University), and M. H. Miller (Michigan Technological University)

  1. Manufacturing Feasibility of Continuous Relief, Gray-scale Diffractive Optical Elements
    H. E. Fawcett, D. K. Mitchell, S. C. Fawcett, B. Thorburn (MicroE, Inc.)
    Novel Processes and Techniques/Oral/Abstract/1999 Annual
  2. Errors in Progressive Dies for Electronic Components
    S. Kiani (Teradyne Connection Systems), R. R. Vallance (University of Kentucky), and A. H. Slocum (Massachusetts Institute of Technology)
    Novel Processes and Techniques/Oral/Abstract/1999 Annual
  3. Three-dimensional Microforming by Metal Jet
    K. Yamaguchi, K. Sakai (Nagoya University)
    Novel Processes and Techniques/Oral/Abstract/1999 Annual
  4. Micro EDM and ECM in DI Water
    S. Campana, S. Miyazawa (Gintic Institute of Manufacturing Technology)
    Novel Processes and Techniques/Oral/Abstract/1999 Annual

Session IV
Machine Tool and CMM Metrology
Wednesday, November 3, 1999, 8:30 a.m.- 10:00 a.m.
Session Co-Chairs: J. Corbett (Cranfield University), and B. A. Damazo (Nat’l Institute of Standard and Technology)

  1. Advanced CMM Design (Invited Paper)
    G. N. Peggs (National Physical Laboratory)
    Machine Tool and CMM Metrology/Oral/No Abstract Available/1999 Annual
  2. A Fully Elastically Guided Three-dimensional CMM with a Measuring Volume of 1 cm3
    A. Jansen, N. Rosielle, P. H. J. Schellekens (Eindhoven University of Technology)
    Machine Tool and CMM Metrology/Oral/Abstract/1999 Annual
  3. Sequential Determination of Kinematic Parameters in Assembled Parallel Kinematic Mechanisms
    B. Jokiel, Jr. (Sandia National Laboratories), and J. C. Ziegert (University of Florida)
    Machine Tool and CMM Metrology/Oral/Abstract/1999 Annual
  4. Experimental Study on Dynamic Accuracy Behavior of a High Speed CNC Machine Tool with Semi-closed and Fully-closed Feedback Control
    K. Yamazaki, Y. Kawahara, J. Liu (University of California at Davis), J. Braasch (Johannes Heidenhain GmbH), and M. Fujishima (Mori Seiki Co., Ltd.)
    Machine Tool and CMM Metrology/Oral/Abstract/1999 Annual

Session V
Optical Metrology
Wednesday, November 3, 1999, 10:30 a.m. - 12:00 p.m.
Session Chair: A. E. Gee (Cranfield University)

  1. NIF Optical Specifications and Means to Quantify Mounting Stresses (Invited Paper)
    P. R. Wilkins, R. E. English, D. M. Aikens (Lawrence Livermore National Laboratory), and P. D. Knight, Jr. (University of North Carolina at Charlotte)
    Optical Metrology/Oral/Abstract/1999 Annual
  2. A Portable Grazing Incidence Interferometer for Measuring the Flatness of Slideways and Surface Plates
    A. W. Kulawiec, P. G. Dewa, R. S. Hordin, J. H. Bruning (Tropel Corporation)
    Optical Metrology/Oral/Abstract/1999 Annual
  3. Fringe Projection Method for Measuring Geometry and Wear of Cutting Tool Inserts
    A. Weckenmann (University Erlangen-Nuremberg), V. P. Radhakrishnan (Indian Institute of Technology), and S. Schmitz (Robert Bosch GmbH)
    Optical Metrology/Oral/Abstract/1999 Annual
  4. Optical Frequency Stabilization of a Compact Heterodyne Source for an Industrial Distance Measuring Interferometer System
    L. L. Deck, M. L. Holmes (Zygo Corporation)
    Optical Metrology/Oral/Abstract/1999 Annual

Session VI
Grinding
Wednesday, November 3, 1999, 1:30 p.m. - 3:00 p.m.
Session Chair: D. A. Lucca (Oklahoma State University)

  1. Influences on Surface and Subsurface During Ultrasonic Assisted Grinding of Advanced Ceramics
    G. Spur, E. Uhlmann, S.-E. Holl, N. A. Daus (Technical University Berlin)
    Grinding/Oral/Abstract/1999 Annual
  2. In-situ Three-dimensional Observation of Active Grain Distribution on a Grinding Wheel and Introduction of Experimentally Evaluated Parameters to Grain Depth of Cut
    A. Kanai, F. Inaba, A. Tajima (Ashikaga Institute of Technology), and M. Miyashita (Nano-Tec Associates)
    Grinding/Oral/Abstract/1999 Annual
  3. Study on Vibration OD-Blade Slicing with Air-Mist Working Fluid for Environment -- Effect of Applied Vibration Amplitude on Slicing Characteristics
    K. Ishikawa, H. Suwabe, M. Uneda (Kanazawa Institute of Technology)
    Grinding/Oral/Abstract/1999 Annual
  4. Wear and Self-dressing of Resin Bound Grinding Wheels
    M. H. Miller, T. S. Kakumanu (Michigan Technological University)
    Grinding/Oral/Abstract/1999 Annual

Session VII
Optical Quality Finishing
Wednesday, November 3, 1999, 8:30 a.m. - 10:00 a.m.
Session Co-Chairs: Y. Namba (Chubu University) and D. Golini (QED Technologies)

  1. Fixed Abrasive Vertical SpindleTM Process to Generate Mirror Finishes on a Variety of Advanced Ceramic Components
    T. Puthanangady, M. Tricard (Norton Company)
    Optical Quality Finishing/Oral/Abstract/1999 Annual
  2. Single Point Contributions to Free Abrasive Polishing
    A. E. Gee, D. F. Williams (Cranfield University)
    Optical Quality Finishing/Oral/Abstract/1999 Annual
  3. Nano-Abrasion Machining of Brittle Materials
    O. Horiuchi, F. Naruse, J. Ikeno (Toyohashi University of Technology)
    Optical Quality Finishing/Oral/Abstract/1999 Annual
  4. Finishing of Optical Materials Using Fluid Jet Polishing
    O. W. Fähnle (FISBA-Optik), and H. van Brug (Delft University of Technology)
    Optical Quality Finishing/Oral/Abstract/1999 Annual

Session VIII
Precision Engineering Methods
Wednesday, November 3, 1999, 10:30 a.m. - 12:00 p.m.
Session Co-Chairs: Y. Furukawa (Tokyo Metropolitan University), and D. H. Youden (Eastman Kodak Company)

  1. Overview of a Second Generation Large Aperture Deformable Mirror for the National Ignition Facility
    S. E. Winters, T. J. Arnold, E. S. Bliss, M. J. Dailey, P. M. Danforth, J. A. Koch, R. A. Sacks, C. J. Stolz, W. T. Whistler, B. W. Woods, R. A. Zacharias (Lawrence Livermore National Laboratory)
    Precision Engineering Methods/Oral/Abstract/1999 Annual
  2. Dynamic Analysis of Porous Air Bearings and Balanced Force Bearing Concept
    S. Nayfeh (Massachusetts Institute of Technology), and A. J. Devitt (New Way Machine Components, Inc.)
    Precision Engineering Methods/Oral/No Abstract Available/1999 Annual
  3. New Micro-assembly Technique of Three-dimensional Micro-structure by YAG Laser Beam
    D. Sawaki, J. Ikeno, O. Horiuchi (Toyohashi University of Technology)
    Precision Engineering Methods/Oral/Abstract/1999 Annual
  4. Nanoindentation by Using a Newly Developed Nanomachining Instrument
    W. Gao (Tohoku University), R. J. Hocken, J. Patten, J. Lovingood (University of North Carolina at Charlotte), and D. A. Lucca (Oklahoma State University)
    Precision Engineering Methods/Oral/Abstract/1999 Annual

Session IX
Coordinate Measuring Machines
Wednesday, November 3, 1999, 1:30 p.m. - 3:00 p.m.
Session Chair: D. Krulewich Born (Lawrence Livermore National Laboratory)

  1. A General Quantitative Method to Validate Instrument Calibration Techniques
    S. D. Phillips (Nat’l Institute of Standards and Technology)
    Coordinate Measuring Machines/Oral/Abstract/1999 Annual
  2. Performance Evaluation for Vision Coordinate Measuring Machines
    C.-C. Huang, X. D. Zhang (Cummins Engine Company, Inc.)
    Coordinate Measuring Machines/Oral/Abstract/1999 Annual
  3. Pixel Size Calibration for Video Probe Measuring Machines
    J. G. Salsbury (University of North Carolina at Charlotte)
    Coordinate Measuring Machines/Oral/Abstract/1999 Annual
  4. Vector Touch Sensor Probe
    S. C. Woody, S. T. Smith (University of North Carolina at Charlotte)
    Coordinate Measuring Machines/Oral/Abstract/1999 Annual

Session X
Precision Tooling
Thursday, November 4, 1999, 8:30 a.m. - 10:00 a.m.
Session Co-Chairs: E. Loewen (Spectronic Instruments Inc.), and S. C. Fawcett (MicroE, Inc.)

  1. Contour Mode Deteministic Microgrinding
    J. Ruckman, E. Fess, Y. Li (University of Rochester)
    Precision Tooling/Oral/Abstract/1999 Annual
  2. Compensation of Tool Forces in Small Diameter End Mills
    T. A. Dow, E. Miller, A. Sohn, K. P. Garrard (North Carolina State University), and T. Wright (Eastman Kodak Company)
    Precision Tooling/Oral/Abstract/1999 Annual
  3. Deterministic Design of “Engineered Tool” [A New Diamond Tool]
    T. Tatsumi, T. Ikeda (Komatsu Electronic Metals Co., Ltd.), K. Imai, H. Hashimoto (Kanagawa Institute of Technology), and T. Takeda, S. Hamada (Sumitomo Heavy Industries, Ltd.)
    Precision Tooling/Oral/Abstract/1999 Annual
  4. An Empirical Survey on the Influence of Machining Parameters on Tool Wear in Diamond Turning of Large Single Crystal Silicon Optics
    D. K. Born, C. Syn, P. Davis, M. Zimmermann, K. Blaedel, J. Carr, J. Haack (Lawrence Livermore National Laboratory), and M. R. McClellan, W. A. Goodman (Schafer Corporation)
    Precision Tooling/Oral/Abstract/1999 Annual

Session XI
Industrial Practice
Thursday, November 4, 10:30 a.m. - 12:00 p.m.
Session Co-Chairs: D. E. Luttrell (Corning Inc.), and E. Brinksmeier (Bremen University)

  1. Development of Ultraprecision Double-disk Grinding Machine for Silicon Wafer
    K. Hara, S. Isobe, H. Nagata, A. Iwase, Y. Tomita (Sumitomo Heavy Industries, Ltd.), A. Kanai (Ashikaga Institute of Technology), and M. Miyashita (Nano-Tec Associates)
    Industrial Practice/Oral/Abstract/1999 Annual
  2. A Precise Track-following Control Using a Single-stage Tracking Mechanism for Magneto-optical Disk Drives
    I. Watanabe, T. Kawabe, H. Kobayashi, J. Ichihara (Fujitsu Laboratories, Ltd.), and T. Ikeda, S. Otsuka (Fujitsu Limited)
    Industrial Practice/Oral/Abstract/1999 Annual
  3. Calibration and Control of a Rotary Fast Tool Servo
    S. J. Ludwick, D. A. Chargin, J. A. Calzaretta, D. L. Trumper (Massachusetts Institute of Technology)
    Industrial Practice/Oral/Abstract/1999 Annual
  4. Quasi-kinematic Couplings: A Low-cost Method for Precision Coupling of Product Components and The-like in Manufacturing Processes
    M. L. Culpepper, A. H. Slocum (Massachusetts Institute of Technology), and F. Z. Shaikh (Ford Scientific Research Labs.)
    Industrial Practice/Oral/Abstract/1999 Annual

Special Lunchtime Session
Thursday, November 4, 1999, 1:00 p.m. – 1:30 p.m.
Re-encasing the “Charters of Freedom” – A Precision Engineering Project?
C. J. Evans (Nat’l Institute of Standards and Technology)

Session XII
Lithography and Stage Design
Thursday, November 4, 1:30 p.m. - 3:00 p.m.
Session Chair: A. J. Hazelton (Nikon Research Corporation of America)

  1. Projection Optics Box Design for Extreme Ultraviolet Lithography
    H. Tajbakhsh, L. Hale, S. Jensen, T. Malsbury (Lawrence Livermore National Laboratory)
    Lithography and Stage Design/Oral/No Abstract Available/1999 Annual
  2. AFM Vibration Isolator with High Performance Using Eddy Current Damping
    G-H. Chung (Samsung Display Devices), and D-G. Gweon, H-W. Chung, J-Y. Shim (Korea Advanced Institute of Science and Technology)
    Lithography and Stage Design/Oral/Abstract/1999 Annual
  3. High Precision Systems Using Modern High Energy Permanent Magnet Materials
    H. Kube, E. Kallenbach (Technical University of Ilmenau), and B. Pawlowski, J. Toepfer (hitk e. V.)
    Lithography and Stage Design/Oral/Abstract/1999 Annual
  4. Magnetic Levitation Scanning Stage for Extreme Ultraviolet Lithography
    M. E. Williams, P. Faill (Equilibria, Inc.), S. P. Tracy, P. Bischoff (Ultratech Stepper), and J. Wronosky (Sandia National Laboratories)
    Lithography and Stage Design/Oral/Abstract/1999 Annual

Session XIII
Advances in Metrology
Thursday, November 4, 3:30 p.m. - 5:00 p.m.
Session Chair: D. Martin (Lion Precision)

  1. An Advance in Metrology and Manufacture – The Engineered Surface (Invited Paper)
    K. J. Stout, L. A. Blunt (University of Huddersfield)
    Advances in Metrology/Oral/Abstract/1999 Annual
  2. KGM-plus – Device for Simultaneous Measurement in Six Degrees of Freedom on Machine Tool Trajectories
    S. Weikert, W. Knapp (Swiss Federal Institute of Technology)
    Advances in Metrology/Oral/Abstract/1999 Annual
  3. Subsurface Damage Measurements as Tool for Process Monitoring
    R-J. M. van der Bijl (TNO Institute of Applied Physics), O. W. Fähnle (FISBA-Optik), and H. van Brug (Delft University of Technology)
    Advances in Metrology/Oral/Abstract/1999 Annual
  4. In-process Measurement of Wear of Grinding Wheel by Hydrodynamic Pressure
    K. Furutani, T. Katoh, N. Mohri (Toyota Technological Institute)
    Advances in Metrology/Oral/Abstract/1999 Annual

Poster Session
Tuesday, November 2, 1999, 5:00 p.m. – 6:30 p.m. and
Wednesday, November 3, 1999, 3:30 p.m. - 5:00 p.m.
Session Chair: Michele H. Miller (Michigan Technological University)

PROCESSES
Machining

  1. Ultraprecision Cutting for Gallium Arsenide
    F. Z. Fang, Z. J. Yuan (Harbin Institute of Technology)
    Processes - Machining/Poster/Abstract/1999 Annual
  2. Investigations on the Wear Profile of Dicing Wheels
    H. H. Gatzen, C. Morsbach (Hanover University), and G. M. Jones (Seagate Technology)
    Processes - Machining/Poster/Abstract/1999 Annual
  3. The Effects of High Feed Rate of Hardened Steel Milling Upon Tool Life
    T. Miyaguchi, M. Masuda, H. Iwabe (Niigata University), E. Takeoka (Industrial Research Institute of Niigata Prefecture), and B. L. Wegener (Otto-von-Guericke University Magdeburg)
    Processes - Machining/Poster/Abstract/1999 Annual
  4. Diamond Flycutting Machine for Producing Flat Surfaces on Half-meter Scale Diamond-turnable Optics
    R. C. Montesanti, S. F. Locke, S. L. Thompson (Lawrence Livermore National Laboratory)
    Processes - Machining/Poster/Abstract/1999 Annual
  5. Measurement of Cutting Tool Wear with Shape-from-focus (SFF) Method
    K. S. Moon, Z. K. Ling (Michigan Technological University)
    Processes - Machining/Poster/Abstract/1999 Annual
  6. Surface Generation Mechanism in Flat End Milling
    S. H. Ryu, C. N. Chu (Seoul National University), and D. K. Choi (Kangnung National University)
    Processes - Machining/Poster/Abstract/1999 Annual

Grinding

  1. Plate Topography Influence on the Nanogrinding Process
    H. H. Gatzen, H. Siekmann (Hanover University)
    Processes - Grinding/Poster/Abstract/1999 Annual
  2. Glass Grinding Using Structured Superabrasives
    R. D. Grejda, E. R. Marsh (The Pennsylvania State University)
    Processes - Grinding/Poster/Abstract/1999 Annual
  3. Studies on the Nature of Surface Quality in Precision Grinding of Carbon Steels
    K. H. P. Reddy, P. K. Nair, B. Ramamoorthy (Indian Institute of Technology)
    Processes - Grinding/Poster/Abstract/1999 Annual
  4. Water Jet In-process Dressing – First Report
    M. Hirao, M. Izawa, K. Ootani, T. Yasui (Kanazawa University), N. Iguchi (Kuroda Seiko Co., Ltd.) and K. Shirase (Osaka University)
    Processes - Grinding/Poster/Abstract/1999 Annual
  5. In-situ Characterization of Grinding Wheel Surface
    A. Hosokawa, K. Sakuma, T. Ueda (Kanazawa University)
    Processes - Grinding/Poster/Abstract/1999 Annual
  6. Truing and Dressing of Diamond Wheels for High Speed Grinding of Brittle Materials
    H. Huang (Gintic Institute of Manufacturing Technology)
    Processes - Grinding/Poster/Abstract/1999 Annual
  7. The Study of Ductile-brittle Transition on Micro-cutting of Single Crystal Silicon
    S. Kaji, T. Goto (Mitsubishi Heavy Industries, Ltd.), and T. Sumomogi, M. Nakamura (Hiroshima Kokusai Gakuin University)
    Processes - Grinding/Poster/Abstract/1999 Annual
  8. Cutting Performance of CVD Diamond Coated Tool in Machining of Green Body of Silicon Nitride Ceramics -- Wear Mechanism of Diamond Coated Tool to the Milling Operation
    H. Kato, K. Shintani (Kanazawa Institute of Technology), and H. Hanyu (OSG Corporation)
    Processes - Grinding/Poster/Abstract/1999 Annual
  9. Benefits of Variable Speed Grinding
    B. R. Knapp, E. R. Marsh (The Pennsylvania State University)
    Processes - Grinding/Poster/Abstract/1999 Annual
  10. The Effect of Parallel Modulation on Subsurface Damage
    W. Qu, M. H. Miller, A. Chandra (Michigan Technological University)
    Processes - Grinding/Poster/Abstract/1999 Annual
  11. The Mechanism of CBN Quill in Surface Grinding
    Q. Yan, (Shantou University), K. Tanaka, K. Syoji (Tohoku University), and T. Honoki (Mitsubishi Electric Corporation)
    Processes - Grinding/Poster/Abstract/1999 Annual
  12. Ultra-smoothness Grinding of Fine Ceramics with #104-Mesh Grain Size Diamond Wheel
    H. Yasui, G. Yamazaki, Y. Hiraki, S. Sakamoto, M. Sakata, M. Saeki (Kumamoto University), and A. Hosokawa (Kanazawa University)
    Processes - Grinding/Poster/Abstract/1999 Annual
  13. Precision Grinding Apparatus Specially Developed for Micro-cylindrical Components
    Yeo S. H., Zhou M., Tan B. H., Balon S. A. P. (Nanyang Technological University)
    Processes - Grinding/Poster/Abstract/1999 Annual

Polishing, Lapping and ECM

  1. Tribo-chemical Smoothing of Diamond Film
    K. Horio, M. Hyohdoh, T. Kasai (Saitama University)
    Processes - Polishing, Lapping and ECM/Poster/Abstract/1999 Annual
  2. CMP Interfacial Fluid Pressure and Modeling
    L. Shan, S. Danyluk (Georgia Institute of Technology)
    Processes - Polishing, Lapping and ECM/Poster/No Abstract Available/1999 Annual

Manufacturing (Precision Mass Production)

  1. Modeling of Geometric Errors of Manufactured Parts for Manufacturing Process Control
    X. D. Zhang (Cummins Engine Company), and C. Zhang, B. Wang (Florida A&M University)
    Processes - Manufacturing (Precision Mass Production)/Poster/Abstract/1999 Annual

Non-Conventional Processes

  1. Improvement of Micro-machining Accuracy by Two-dimensional Vibration Cutting
    J. H. Ahn, H-S. Lim, S-M. Son (Pusan National University)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  2. Improvement of Characteristics of Aluminum Casting Using Ceramic Porous Mold
    S-I. Chung, D-S. Jeong, Y-G. Im, H-D. Jeong, K-K. Cho (Pusan National University)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  3. Surface Modification by Electrical Discharge Machining with Titanium Powder Suspended in Working Fluid
    K. Furutani, A. Saneto, H. Takezawa, N. Mohri (Toyota Technological Institute), and H. Miyake (Mitsubishi Electric Corporation)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  4. Elliptical Vibration Cutting of Steel with Diamond Tools
    E. Brinksmeier, R. Gläbe (University of Bremen)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  5. Effects of Gamma Irradiation and Accelerated Aging on Wear Properties of UHMWPE Artificial Joint
    T. Kaneeda (Okayama University of Science), and M.Utsumi, E. Watanabe (Chiba University)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  6. Study on Force Controlled Micro Grooving Using Burnishing Tools
    M. Masuda, Y. Waki, A. Inada, A. Mutoh (Niigata University), and Y. Maeda (Hitachi Ltd.)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  7. Silicon Wafer Bonding Process for Preventing Intrinsic Bubbles After Low Temperature Thermal Treatment
    D-M. Moon, I-H. Cho, H-D. Jeong, W-S. Che (Pusan National University)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  8. Development of Water-soluble Coolant for Multi-wire Saw Slicing of 400 mm Diameter Silicon
    H. Oishi, K. Asakawa, J. Matsuzaki (Super Silicon Crystal Research Institute Corp.), and A. Ashida (Ohtomo Chemical Industrial Corp.)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  9. A Study on Thermal Strains in Plate Glass During Thermal Cutting Using Hot Air Jet
    E. S. Prakash, K. Sadashivappa (Bapuji Institute of Engineering and Technology), V. Joseph (University BDT College of Engineering), and M. Singaperumal (Indian Institute of Technology)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  10. Micro Drilling of Non-conducting Materials Using Electro Chemical Spark Machining (ESCM)
    S. H. Somashekhar, K. Sadashivappa (Bapuji Institute of Engineering and Technology)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual
  11. Influence of Redeposition Effect for Focused Ion Beam Three-dimensional Micromachining
    Y. Zhang, Y. Fu (Nanyang Technological University)
    Processes - Non-Conventional Processes/Poster/Abstract/1999 Annual

EQUIPMENT, MACHINES & INSTRUMENTS
Design and Testing

  1. Design of Orientation Stages for Step and Flash Imprint Lithography
    B. J. Choi, S. Johnson, M. Colburn, S. V. Sreenivasan, C. G. Willson (University of Texas at Austin)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/1999 Annual
  2. Effects of Active Balancing on High-speed Milling Precision
    S. W. Dyer (BalaDyne Corporation), and E. I. Al-Regib (The University of Michigan)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/1999 Annual
  3. Fabrication of a Microrobot Movable in the Small Intestine of a Pig
    S. Kato, M. Shirakawa, M. Ohno, M. Tabata (Nippon Institute of Technology)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/1999 Annual
  4. Design and Analysis of the National Ignition Facility Kinematic Pin (NIFKP) or Flexural Pivot
    K. K. Leung (Lawrence Livermore National Laboratory)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/1999 Annual
  5. System Modeling and Identification of a Precision Fast Tool Servo System
    G. Lu (University of California at Berkeley), J. F. Cuttino (University of North Carolina at Charlotte), D. Schinstock (The University of Tulsa), and T. Haskew (The University of Alabama)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/1999 Annual
  6. Development of Pin-type Vacuum Chuck for High Precision Machining
    S. Matsui, F. Ohira, Y. Ishikawa, K. Koyabu (NTT Telecommunications Energy Laboratories), and A. Une (The National Defense Academy)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/1999 Annual
  7. Development of a New Palm-size and Clean Spherical Mirror-finish Surface Processing Machine for the Fabrication of Optical Fiber Connectors
    K. Ohno, M. Mitsuhashi (NEC Corporation)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/1999 Annual
  8. Microfabrication of a Mold Insert Made of Hardened Steel and First Molding Results
    T. Schaller, M. Heckele, R. Ruprecht, K. Schubert (Forschungszentrum Karlsruhe GmbH)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/1999 Annual
  9. Development of an Ultraprecise Positioning Stage Engaged with Gratings
    T. Wada, S. Honda (Tokyo Metropolitan Institute of Technology)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/1999 Annual

Controls

  1. Identification and Compensatory Control of Time-varying Volumetric Errors in Machining Centers
    J-Y. Ahn, S-C. Chung (Hanyang University)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/1999 Annual
  2. Laser-material-removal Process as a Subject of Automatic Control
    E. V. Bordatchev, S. K. Nikumb (National Research Council of Canada)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/1999 Annual
  3. Micro-displacement/Capacitance Measurement and Control System with Phase-locked Loop
    S-B. Chang, B. C. S. Chou, J. J. Chang (National Science Council)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/1999 Annual
  4. Implementing Geometric Error Compensation Software in a PC-based Controller
    V. Graves (Oak Ridge National Laboratory)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/1999 Annual
  5. Robust Cutting Force Control Using Indirect Force and Disturbance Estimators in the End Milling Process
    S-C. Kim, S-C. Chung (Hanyang University)
    Equipment, Machines & Instruments - Controls/Poster/Abstract/1999 Annual
  6. A Discussion on Stability of Air Bearing Spindles
    Z. Shang, P. Greene, D. Bittner (Dover Instrument Corporation)

    Equipment, Machines & Instruments - Controls/Poster/Abstract/1999 Annual

Analysis and Modeling

  1. Basic Research on Development of Magnetostrictive Sensor for Detecting Cutting Force
    H. Aoyama, H. Murashita, T. Ishii (Keio University), and H. Ohzeki (Mitsubishi Materials Corporation)
    Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/1999 Annual
  2. Polygon-based Large Diameter Measurement with Modular Gauges
    Li B. (Southeast University)
    Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/1999 Annual
  3. Prediction of Temperature and Dimensional Changes During Soakout Using FEA
    B. Chakravarthy, H. P. Cherukuri, R. J. Hocken, R. G. Wilhelm (University of North Carolina at Charlotte)
    Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/1999 Annual
  4. CAD/CAM Integration of On-the-machine Measuring and Inspection System for Free-form Surfaces
    S-C. Chung (Hanyang University)
    Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/1999 Annual
  5. Magnetic Actuator Characterization for Nanometer-level Positioning
    T. N. Hinnerichs, H. D. Tran (University of New Mexico)
    Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/1999 Annual
  6. The Effects of Interstitial Media on Thermal Condition Monitoring
    Y. Huang (The University of Alabama), Z. Chen (Zhejiang University) and J. F. Cuttino (University of North Carolina at Charlotte)
    Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/1999 Annual
  7. The Calibration of Tilting and Refractive Index of Specimen in Confocal Scanning Microscopy
    J. W. Seo, S. L. Park, H. R. Oh, J. H. Lee, D-G. Gweon (Korea Advanced Institute of Science and Technology)
    Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/1999 Annual

Micro-Electro-Mechanical Systems and Nanotechnology

  1. Automatic Precise Micro-drilling System by Distributed Insect Robots
    H. Aoyama, S. Tadokoro, T. Shigeno, T. Ono (University of Electro-Communications)
    Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/Abstract/1999 Annual
  2. Development of a Tweezers Robot Equipped with Bimorph Piezoelectric Actuators
    T. Fujishita, S. Honda (Tokyo Metropolitan Institute of Technology)
    Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/Abstract/1999 Annual
  3. Linear Motion Microsystem Fabricated on a Silicon Wafer
    N. Moronuki, K. Uchiyama (Tokyo Metropolitan University)
    Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/Abstract/1999 Annual
  4. Optimization Design of Micro-diffuser/Nozzle Elements and Development of Implanted Drug Delivery Micropump
    Y. H. Mu, X. D. Wang, B. K. A. Ngoi, J. G. K. Gan (Nanyang Technological University)
    Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/Abstract/1999 Annual

Novel Systems

  1. The Design of a Capacitive Transducer for Operation with Non-grounded Targets
    B. Herndon, K. Lamppa, J. McCleskey, C. Fleddermann, H. D. Tran (University of New Mexico)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/1999 Annual
  2. An Object Transport System Using Traveling Waves Generated by Ultrasonic Flexural Vibrations
    B-G. Loh, P. I. Ro (North Carolina State University)
    Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/1999 Annual

METROLOGY
Instrumentation, Design and Testing

  1. Tolerance Allocations for Automated Insertion of Optical Components in the National Ignition Facility
    S. M. Bahowick, W. R. Horton, T. G. Sheridan, W. S. Rorke, Jr., D. S. Bartel (Lawrence Livermore National Laboratory)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/1999 Annual
  2. High-precision Dimension Measurement of Large Scale Workpiece by Laser
    Q. Feng (Northern Jiaotong University), and J. Liang, Q. Tian (Tsinghua University)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/1999 Annual
  3. Direct Measurement of Spindle Error Using a Double 2-point Method
    Y. J. Gao, B. K. A. Ngoi, L. E. N. Lim (Nanyang Technological University)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/1999 Annual
  4. Development of Three-dimensional profile Measuring Method for Microparts
    K. Mitsui (Keio University)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/1999 Annual
  5. Development of Noncontact Coordinate Measuring Machine Implementing High Precision Optics and Precision Image Processing Algorithms of Subpixel Accuracy
    H-J. Pahk, I. H. Lee (Seoul National University)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/1999 Annual
  6. Traceability of CMM Measurements
    B. W. J. J. A. van Dorp, F. L. M. Delbressine, H. Haitjema, P. H. J. Schellekens (Eindhoven University of Technology)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/1999 Annual
  7. A New Photo-electronic Length Measuring Instrument with 0.1nm Resolution and 110 mm Range
    Z-Q. Zou, W-Y. Zou, L-D. Hu, J-T. Chen, Y-C. Zhu (Beijing Institute of Ultraprecision Engineering)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/1999 Annual

Surface and Subsurface

  1. An Internet-based Surface Texture Analysis System
    S. H. Bui, V. Gopalan, J. Raja, K. R. Subramanian (University of North Carolina at Charlotte)
    Metrology -Surface and Subsurface/Poster/Abstract/1999 Annual
  2. Quantitative Stress-induced Birefringence Measurements of Large Optics by a Prototype Imaging Polarimeter
    P. D. Knight, Jr. (University of North Carolina at Charlotte), P. R. Wilkins (Lawrence Livermore National Laboratory)
    Metrology -Surface and Subsurface/Poster/Abstract/1999 Annual
  3. Optical Measurement of COP Defects on Silicon Wafer Surface by Laser Scattered Defect Pattern
    S. Takahashi, T. Miyoshi, Y. Takaya (Osaka University), and K. Shirai (Nihon University)
    Metrology -Surface and Subsurface/Poster/Abstract/1999 Annual
  4. A Scanning Phase-knife Technique for Quantitative Surface Slope Measurements and Defect Identification
    P. R. Wilkins, D. C. Pigg (Lawrence Livermore National Laboratory), and P. D. Knight, Jr. (University of North Carolina at Charlotte)
    Metrology -Surface and Subsurface/Poster/Abstract/1999 Annual

Form and Geometry

  1. The Three-dimensional Surface Topographic Characterization of Conventional and Superabrasive Grinding Wheels
    D. L. Butler (Nanyang Technological University), J. A. Webster (Unicorn International), and L. A. Blunt, K. J. Stout (University of Huddersfield)
    Metrology - Form and Geometry/Poster/Abstract/1999 Annual
  2. Surface Topography Assessment of Textured Mold and Aesthetic Quality of Injection Molded Plastic Surface
    S. Hara, K. Yanagi, T. Endoh (Nagaoka University of Technology)
    Metrology - Form and Geometry/Poster/Abstract/1999 Annual
  3. Optical Measurement for Flank Wear in Peripheral Cutting Edges in Endmills
    H-S. Lee, T. Nagashima, H. Haga, T. Wakabayashi (Nihon University)
    Metrology - Form and Geometry/Poster/Abstract/1999 Annual
  4. Volumetric Error Measurement and Compensation Using the Vector Method
    C. Wang, R. Griffin (Optodyne, Inc.), and J. Janeczko (Giddings & Lewis Machine Tools)
    Metrology - Form and Geometry/Poster/Abstract/1999 Annual
  5. Surface Roughness Limit for Super-machined Mirrors Measured with Scanning Probe Microscopy
    J. Yu, Y. Namba (Chubu University), and B. K. A. Ngoi, Z. W. Zhong (Nanyang Technological University)
    Metrology - Form and Geometry/Poster/Abstract/1999 Annual

Analysis and Modeling

  1. A Learning Quality Control Approach to Improve Manufacturing Quality in the Turning Process *
    C. Ament, G. Goch (Bremen University)
    Metrology - Analysis and Modeling/Poster/No Abstract Available/1999 Annual
  2. Anisotropic Artifacts Introduced by Horizontal Scanning Instruments in Surface Metrology
    T. S. Bergstrom, C. A. Brown (Worcester Polytechnic Institute)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  3. The Characterization of Engine Liner Wear Using Novel Bearing Area Curve Parameters
    D. L. Butler (Nanyang Technological University), L. A. Blunt, X. Jiang, K. J. Stout (University of Huddersfield)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  4. Geometric Error Analysis and Calibration of a Stewart Platform
    Chen J-S. (National Chung-Cheng University)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  5. Sampling and Measurement Uncertainty in Coordinate Metrology
    R. M. Edgeworth, R. G. Wilhelm (University of North Carolina at Charlotte)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  6. Thickness Correction for Edge Detection of Optical Coordinate Measuring Machines
    J. Fu, R. J. Hocken (University of North Carolina at Charlotte)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  7. Modeling of Low Order Temperature Dependant Errors of Machine Tools
    J. J. Kroll, S. R. Patterson (University of North Carolina at Charlotte)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  8. Improving Machine Tool Accuracy Through Auto Calibration
    M. C. Lee, P. M. Ferreira (University of Illinois at Urbana-Champaign)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  9. Experiences with the Master Axis Method for Measuring Spindle Error Motions
    E. R. Marsh, R. Grejda (The Pennsylvania State University), and D. Martin (Lion Precision)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  10. Foundation for Dynamic Metrology of Machine Tools
    J. A. Miller, R. J. Hocken, V. Ramanan, Q. Feng (University of North Carolina at Charlotte)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  11. A New Method for Characterization for the 5-DOF Spindle Volumetric Error Motions in Machine Tools
    H-J. Pahk, H-J. Shin (Seoul National University)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  12. Dynamic Error Characterization of a Scanning Coordinate Measuring Machine
    P. H. Pereira, R. J. Hocken (University of North Carolina at Charlotte)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  13. An Experimental Investigation into Spindle Error Motions Under Load
    A. K. Sharma (The Boeing Company), and S. R. Patterson (University of North Carolina at Charlotte)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual
  14. Study of Nano-tribology Using a Scanning Force Microscope
    T. Sumomogi, T. Endo, S. Matsuo (Hiroshima Kokusai Gakuin University)
    Metrology - Analysis and Modeling/Poster/Abstract/1999 Annual

Optics and Interferometry

  1. A Compact Industrial Distance Measuring Interferometer System
    M. L. Holmes, L. L. Deck, B. Shull, M. Samuels, S. Altieri, E. Ebert, J. Soobitsky, R. Gecewicz (Zygo Corporation)
    Metrology - Optics and Interferometry/Poster/Abstract/1999 Annual
  2. Arbitrary -step Algorithm for Removal of Higher Order Test Optics Errors
    S-W. Kim, H-G. Rhee, B-C. Kim (Korea Advanced Institute of Science and Technology)
    Metrology - Optics and Interferometry/Poster/Abstract/1999 Annual
  3. Sensitivity Analysis of a Cylindrical Interferometer
    P. D. Knight, Jr., S. R. Patterson (University of North Carolina at Charlotte)
    Metrology - Optics and Interferometry/Poster/Abstract/1999 Annual
  4. Non-contact Acousto Optic Scanning Laser Doppler Vibrometer
    B. K. A. Ngoi, K. Venkatakrishnan (Nanyang Technological University)
    Metrology - Optics and Interferometry/Poster/Abstract/1999 Annual
  5. A Low Coherence Interferometer for Absolute Distance Measurement
    A. D. Woodfin, F. Farahi, R. J. Hocken (University of North Carolina at Charlotte)
    Metrology - Optics and Interferometry/Poster/Abstract/1999 Annual
  6. In-situ Absolute Calibration of Interference Microscopes
    S. Zhang, M. Kanai, W. Gao, S. Kiyono (Tohoku University), and T. Aramaki (Nikon Corporation)

    Metrology - Optics and Interferometry/Poster/Abstract/1999 Annual