Machines and Processes for Microscale and Meso-scale Fabrication, Metrology and Assembly

January 22-23, 2003
J. Wayne Reitz Union, University of Florida
Gainesville, Florida

Keynote Presentation

1. Challenges in Applying Miniature Devices in a Number of Domains; Component Fabrication, Metrology, and Assembly Aspect
   Dr. Jan van Eijk, Brouwer, D. and Franse, J. (Phillips CFT, Eindhoven, Netherlands)
   Microscale and Mesoscale/Oral/Abstract/2003 Winter

Session I
Material Removal Processes
Wednesday, January 22, 2002, 8:30AM – 10:00AM

1. Cut it out. Shaping the Micrometer (Invited paper)
   Schaller, T., Pflegling, W., and Hlavac, M (Industrial Forum for Microfabrication Technologies (FIF) Karlsruhe Research Center)
   Material Removal Processes/Oral/Abstract/2003 Winter
2. Mesoscale and Microscale Manufacturing Processes: Challenges for Materials, Fabrication, and Metrology
   Dow, T., and Scattergood, R. (North Carolina State University)
   Material Removal Processes/Oral/Abstract/2003 Winter
3. Introducing Meso-scale Channels on Ceramics by Machining
   Shin, H.W., Kok, C.K., Case, E. and Kwon, P. (Michigan State University)
   Material Removal Processes/Oral/Abstract/2003 Winter
4. Precision of Micro Shafts Machines with Wire Electro-Discharge Grinding
   Morgan, C.J., Shreve, S., and Vallance, R. (University of Kentucky)
   Material Removal Processes/Oral/Abstract/2003 Winter

Session II
Forming, Molding, & Additive Processes
Wednesday, January 22, 2002, 10:30AM – 12:00PM

1. Mastering and Replication of Precision Micro-Structured Surfaces (Invited paper)
   Morris, G.M. (Corning Rochester Photonics)
   Forming, Molding & Additive Processes/Oral/Abstract/2003 Winter
2. Growing Up, Additive Processes in MEMS Fabrication and Packaging (Invited paper)
   Goetzen, R. ( microTEC mbh)
   Forming, Molding & Additive Processes/Oral/Abstract/2003 Winter
3. Material Behavior in Microforming at Elevated Temperatures
   Egerer, E. and Engel, U. (University of Erlangen-Nuremberg)
   Forming, Molding & Additive Processes/Oral/Abstract/2003 Winter
4. The Reliability of Dynamic Interfaces in LIGA Microsystems
   Prasad, S., Christenson, T., Dugger, J., Michael, J., and Vanacek, C. (Sandia National Laboratory)
   Forming, Molding & Additive Processes/Oral/Abstract/2003 Winter

Session III
Probe Based Metrology
Wednesday, January 22, 2002, 1:30PM – 3:00PM

1. Overview of Scaling Issues: Macro-to Meso-Scale Systems (Invited paper)
   Smith, S., and Seugling, R. (University of North Carolina at Charlotte)
   Probe Based Metrology/Oral/Abstract/2003 Winter
2. Measuring in Three Dimensions at the Mesoscopic Scale
   Peggs, G., Lewis, A., and Leach, R. (National Physical Laboratory)
   Probe Based Metrology/Oral/Abstract/2003 Winter
3. Uncertainty in Measurements of Micro-patterned Thin Film Thickness Using Nanometrological AFM
   Misumi, I., Gonda, S., et. al. (National Institute of Advanced Industrial Science and Technology)
   Probe Based Metrology/Oral/Abstract/2003 Winter
4. Probe Force Calibration Experiments Using the NIST Electrostatic Force Balance
   Pratt, J., Newell, D. et.al. (National Institute of Standards and Technology)
   Probe Based Metrology/Oral/Abstract/2003 Winter

Session IV
Machines, Sensors, & Actuators
Wednesday, January 22, 2002, 3:30PM – 5:00PM

1. Meso-Scale Metrology Tools: A Survey of Relevant Tools and a Discussion of Their Strengths and Weaknesses
   Hibbard, R., and Bono, M. (Lawrence Livermore National Laboratory)
   Machines, Sensors & Actuators/Oral/Abstract/2003 Winter
2. Micromachined Interferometer for MEMS Metrology
   Kim, B., Razavi, A., Degertekin, L., and Kurfess, T. (Georgia Institute of Technology)
   Machines, Sensors & Actuators/Oral/Abstract/2003 Winter
3. Design and Fabrication of the Meso-Mill: A Five-axis Milling Machine for Meso-scaled Parts
   Werkmeister, J., and Slocum, A. (Massachusetts Institute of Technology)
   Machines, Sensors & Actuators/Oral/Abstract/2003 Winter
4. Advances in Fast Nano-Precision Motion Technologies: Practical Parallel Kinematics
   Jordan, S. (Polytec PI, Inc.)
   Machines, Sensors & Actuators/Oral/Abstract/2003 Winter

Session V
Optical Metrology
Thursday, January 23, 2002, 8:30AM – 10:00AM

1. Interferometric Measuring Microscopy Applied to Miniature Machines, Structures and Surface Features (Invited paper)
   Roth, J., Felkel, E., and DeGroot, P. (Zygo Corporation)
   Optical Metrology/Oral/Abstract/2003 Winter
2. 3-D Analysis of Microstructures with Confocal Laser Scanning Microscopy
   Uhlmann, E., and Oberschmidt, D. (Technical University of Berlin)
   Optical Metrology/Oral/Abstract/2003 Winter
3. Silicon Wafer Thickness Variation Using Infrared Interferometry
   Schmitz, T., Davies, A., and Evans, C. (University of Florida)
   Optical Metrology/Oral/Abstract/2003 Winter
4. Dynamic MEMS Measurement Using a Strobed Interferometric System with Combined Coherence Sensing and Phase Information
   Novak, E., Wan, D., Unruh, P., and Schmit, J. (Veeco Instruments, Inc.)
   Optical Metrology/Oral/Abstract/2003 Winter

Session VI
Assembly
Thursday, January 23, 2002, 10:30AM – 12:00PM

1. Micro/meso Robotic Assembly (Invited paper)
   Stephanou, H. (Rennselaer Polytechnic Institute)
   Assembly/Oral/Abstract/2003 Winter
2. PZN Based Nanopositioning Systems
   Woody, S. (University of North Carolina at Charlotte)
   Assembly/Oral/Abstract/2003 Winter
3. Hybrid Micro-Assembly System for Tele-Operated and Automated Micro-Manipulation
   Zaeh, M., Jacob, D., Ehrenstrasser, M., and Schilp, J. (Technische Unversitaet München)
   Assembly/Oral/Abstract/2003 Winter
4. Production of Direct Drive Cylindrical Targets for Inertial Confinement Fusion Experiments
   Elliot, N., Day, R., et.al. (Los Alamos National Laboratory)
   Assembly/Oral/Abstract/2003 Winter

Session VII
Applications
Thursday, January 23, 2002, 1:30PM – 3:00PM

1. Non–destructive Characterization Technologies for Metrology of Micro/mesoscale Devices (Invited paper)
   Martz, H., and Albrecht, G. (Lawrence Livermore National Laboratory)
   Applications/Oral/Abstract/2003 Winter
2. Laser Contouring Method for Wall Thickness Metrology in OMEGA Shock Breakout Targets
   Sebring, R., Bartos, J., et.al. (Los Alamos National Laboratory)
   Applications/Oral/Abstract/2003 Winter
3. Manufacturing of Micro-asperities on Thrust Surfaces Using UV Photolithography
   Kortikar, S., Stephens, N., et.al. (University of Kentucky)
   Applications/Oral/Abstract/2003 Winter
4. Aluminide Microchannel Arrays for High-temperature Microreactors and Microscale Heat Exchangers
   Paul, B., and Kanlayasiri, K. (Oregon State University)
   Applications/Oral/Abstract/2003 Winter