Precision Interferometric Metrology

May 10-12, 2000
Omni Tucson National Golf Resort & Spa
Tucson, Arizona

PDF versions of the abstacts of the 2000 Spring Topical Meeting Proceedings are not available. Contact ASPE to purchase a copy of the Proceedings. ASPE does not sell individual copies of abstracts.

Session I
Displacement Interferometry at the Limits
Wednesday, May 10, 8:30 a.m. - 10:00 a.m.

1. The Use of X-ray Interferometry to Investigate the Linearity of an Optical Interferometer
   A. Yacoot (National Physical Laboratory)
   Displacement Interferometry at the Limits/Oral/Abstract/2000 Spring
2. GAIA OPD Testbench - An Interferometer Able to Detect 50 Picometers
   J. P. Kappelhof (TNO Institute of Applied Physics)
   Displacement Interferometry at the Limits/Oral/Abstract/2000 Spring
3. Dual Target Metrology
   O. P. Lay, S. Dubovitsky (Jet Propulsion Laboratory)
   Displacement Interferometry at the Limits/Oral/Abstract/2000 Spring

Session II
Advanced Figure Metrology
Wednesday, May 10, 10:30 a.m. - 12:00 p.m.

1. The NIST X-ray optics CALIBration InterferometeR (XCALIBIR)
   A. D. Davies, C. J. Evans (National Institute of Standards and Technology) and R. Kestner, M. Bremer (SVG-Tinsley)
   Advanced Figure Metrology/Oral/Abstract/2000 Spring
2. Double-ended Fizeau Interferometers for High-accuracy Dimensional Measurements
   R. A. Nicolaus, G. Bonsch (Physikalisch-Technische Bundesanstalt PTB)
   Advanced Figure Metrology/Oral/Abstract/2000 Spring
3. Absolute Interferometric Surface Metrology at High Spatial Resolution
   K. Freischalad (ADE Phase Shift)
   Advanced Figure Metrology/Oral/Abstract/2000 Spring

Session III
New Applications of Figure Metrology
Wednesday, May 10, 1:30 p.m. - 3:00 p.m.

1. A Versatile Large Aperture Reflective Fizeau Interferometer Used to Measure a Variety of Large Convex Optical Surfaces
   S. Van Kerkhove (Tropel Corporation)
   New Applications of Figure Metrology/Oral/Abstract/2000 Spring
2. Cylinder Figure Metrology with Diffractive (CGH) Nulls
   S. M. Arnold (Diffraction International Ltd.) and L. Koudelka (Promet International, Inc.)
   New Applications of Figure Metrology/Oral/Abstract/2000 Spring
3. Symmetric Diffractive Grazing Incidence Interferometer for Industrial Metrology
   P. de Groot (Zygo Corporation)
   New Applications of Figure Metrology/Oral/Abstract/2000 Spring

Session IV
High-Accuracy Displacement Interferometry
Wednesday, May 10, 3:30 p.m. - 5:00 p.m.

1. Design of the Laser Interferometer of the PTB Nanometer Length Comparator
   J. Flugge (Physikalisch Technische Bundesanstalt-PTB)
   High-Accuracy Displacement Interferometry/Oral/Abstract/2000 Spring
2. A New Interferometer Family for Sub-nanometer Stage Metrology
   H. A. Hill (Zetetic Institute)
   High-Accuracy Displacement Interferometry/Oral/Abstract/2000 Spring
3. Interferometry with Angstrom Resolution
   C. Wang, R. J. Hocken (University of North Carolina at Charlotte)
   High-Accuracy Displacement Interferometry/Oral/Abstract/2000 Spring

Session V
Application Specific Issues
Thursday, May 11, 8:30 a.m. - 10:00 a.m.

1. Automated High Frame Rate Image Acquisition for Phase-shifting Interferometry
   L. Dettmann (University of Arizona)
   Application Specific Issues/Oral/Abstract/2000 Spring
2. Lateral Scanning White-light Profilometry
   A. Olszak (Veeco Process Metrology)
   Application Specific Issues/Oral/Abstract/2000 Spring
3. Sensitivity of Homogeneity Measurements to Sample Position, Focus and Beam Coherence
   A. D. Davies, C. J. Evans (National Institute of Standards and Technology)
   Application Specific Issues/Oral/Abstract/2000 Spring

Session VI
Uncertainty Sources in Phase Measuring Interferometry
Thursday, May 11, 10:30 a.m. - 12:00 p.m.

1. Roughness Induced Measurement Error in Non-null Interferometry
   G. Campbell, G. Sommargren, D. Phillion (Lawrence Livermore National Laboratory)
   Uncertainty Sources in Phase Measuring Interferometry/Oral/Abstract/2000 Spring
2. Estimating the RMS Wavefront Error from a Data Set and the Associated Measurement Uncertainty
   A. D. Davies, M. Levenson (National Institute of Standards and Technology)
   Uncertainty Sources in Phase Measuring Interferometry/Oral/Abstract/2000 Spring
3. Effect of Analysis Options in Phase Measuring Interferometry
   A. Stuart, S. M. Arnold (Diffraction International, Ltd.)
   Uncertainty Sources in Phase Measuring Interferometry/Oral/Abstract/2000 Spring

Session VII
Open Forum
Thursday, May 11, 7:00 p.m. - 10:00 p.m.

1. How Should Uncertainty be Specified for Phase Measurements and Does the Uncertainty Principle Have Much to Say?
   G. W. Forbes (QED Technologies)
   Uncertainty Sources in Phase Measuring Interferometry/Oral/Abstract/2000 Spring

Session VIII
Uncertainty Sources in Displacement Measuring Interferometry
Friday, May 12, 8:30 a.m. - 10:00 a.m.

1. Calibration of Non-linearity in Laser Interferometer Systems with Sub-nm Accuracy
   H. Haitjema, S. J. A. G. Cosijns, P. H. J. Schellekens (Eindhoven University of Technology)
   Uncertainty Sources in Displacement Measuring Interferometry/Oral/Abstract/2000 Spring
2. Elimination of Heterodyne Interferometer Nonlinearity by Carrier Phase Modulation
   S. Dubovitsky, O. P. Lay, D. J. Seidel (Jet Propulsion Laboratory)
   Uncertainty Sources in Displacement Measuring Interferometry/Oral/Abstract/2000 Spring
3. Air Turbulence Compensation for Sub-nanometer Displacement Measuring Interferometry
   H. A. Hill (Zetetic Institute) and P. de Groot (Zygo Corporation)
   Uncertainty Sources in Displacement Measuring Interferometry/Oral/Abstract/2000 Spring

Session IX
Issues in High-Accuracy Figure Metrology
Friday, May 12, 10:30 a.m. - 12:00 p.m.

1. Stitching of 2 and 3-D Subaperture Surface Topography Data
   R. E. Parks (Optical Perspectives Group LLC), L. Shao (Tucson Optical Research Corporation)
   Issues in High-Accuracy Figure Metrology/Oral/Abstract/2000 Spring
2. An Investigation of Uncertainties Limiting Radius Measurement Performance
   T. L. Schmitz, C. J. Evans, A. D. Davies (National Institute of Standards and Technology)
   Issues in High-Accuracy Figure Metrology/Oral/Abstract/2000 Spring
3. Interference Imaging for Non-null Aspheric Surface Testing
   P. E. Murphy, T. G. Brown, D. T. Moore (University of Rochester)
   Issues in High-Accuracy Figure Metrology/Oral/Abstract/2000 Spring