| ASPE Proceedings, October 15 –
October 20, 2006, Monterey, California
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Technical and Poster Sessions Session
I, Optics & Interferometry
Tuesday, October 17, 2006, 8:30 AM - 10:00 AM
Session Chair: Senajith B. Rekawa (Lawrence Berkeley National Laboratory)
and Allen Y. Yi (The Ohio State University)
- Precision Interferometric Metrology (Invited Paper)
Evans, C. J. (Zygo Corporation)
Optics & Interferometry/Oral/No Abstract
Available/2006 Annual
- Phase-shifting Diffraction Interferometer
for Inspecting NIF Ignition-target Shells
Montesanti, R. C.; Johnson, M. A.; Mapoles, E. R.; Atkinson, D. P.;
Hughes, J. D.; Reynolds, J.L. (Lawrence Livermore National Laboratory)
Optics & Interferometry/Oral/Abstract/2006
Annual
- A 1 m Swing-arm Profilometer
for Large Telescope Mirror Elements
King, C. W.; Callender, M.; Efstathiou, A.; Gee, A. E. (University College,
London); Walker, D. (University College, London / Zeeko Ltd.); and Lewis,
A. J.; Oldfield, S.; Steel, R. (UK National Physical Laboratory)
Optics & Interferometry/Oral/Abstract/2006
Annual
- Thin Film Extraction from Scanning
White Light Interferometry
Mansfield, D. I. (Taylor Hobson, Ltd.)
Optics & Interferometry/Oral/Abstract/2006
Annual
Session II, Fabrication
Tuesday, October 17, 2006, 10:30 AM - 12:00 PM
Session Chair: Michele H. Miller (Michigan Technological University) and
Bradley H. Jared (3M Precision Optics)
- Reactive Atom Plasma (RAP™)
Processing of Optical Surfaces
Subrahmanyan, P. K.; Gardopee, G.; Fiske, P. S.; Chang, A. (RAPT Industries,
Inc.)
Fabrication/Oral/Abstract/2006 Annual
- Two-dimensional Encoder with Picometer
Resolution Using Multi-tunneling Probes Scanning Tunneling Microscope
and Regular Crystalline Surface
Aketagawa, M.; Honda, H.; Ishige, M.; Patamaporn, C. (Nagaoka University
of Technology)
Fabrication/Oral/Abstract/2006 Annual
- Manufacturing the Dragonfly Eye
Multi-layer, Compound Optic Array
Gill, D. D.; Sweatt, W. C.; Claudet, A. A.; Adams, D. P.; Vasile, M.
J.; Hodges, V. C. (Sandia National Laboratories)
Fabrication/Oral/Abstract/2006 Annual
- Load Force Compensation for Direct
Drives in Machine Tools
Zirn, O.; Hoos, A. (FH Giessen-Friedberg); and Hiller, B. (Hübner
AG)
Fabrication/Oral/Abstract/2006 Annual
Session III, Thermal Considerations
Wednesday, October 18, 2006, 8:30 AM - 10:00 AM
Session Chair: Hans-Jochen Trost (MicroFab Technologies, Inc.) and Don
L. Martin (Lion Precision)
- In-situ Calibration of Temperature
Compensation Systems Using Differential Length Measurements
Salsbury, J. G.; Inloes, M. (Mitutoyo America Corporation)
Thermal Considerations/Oral/Abstract/2006 Annual
- High-stability Temperature Control
System for LISA
Higuchi, S.; DeBra, D. B. (Stanford University)
Thermal Considerations/Oral/Abstract/2006 Annual
- Sub-millidegree-stability Air
Thermal Control for a Large-volume Lithography Enclosure
Zhao, Y.; Trumper, D. L.; Heilmann, R. K.; Schattenburg, M. L. (Massachusetts
Institute of Technology)
Thermal Considerations/Oral/Abstract/2006 Annual
- The Design, Calibration and
Use of an Ultrasonic Thickness Probe on a CMM
Orchard, N.; Whiteside, D. (Rolls-Royce / Aero Engines)
Thermal Considerations/Oral/Abstract/2006 Annual
Session IV, Metrology I
Wednesday, October 18, 2006, 10:30 AM - 12:00 PM
Session Chair: Thomas A. Dow (North Carolina State University) and Keith
Carlisle (Lawrence Livermore National Laboratory)
- An Overview of the Latest Metrology Advances at NPL (Invited
Paper)
Leach, R. (National Physical Laboratory)
Metrology I/Oral/No Abstract Available/2006
Annual
- Moment of Inertia Measurement
Using a Five-wire Torsion Pendulum and Optical Sensing
Swank, A. J.; Sun, K.-X.; DeBra, D. B. (Stanford University); and Hardham,
C. (Squid Labs)
Metrology I/Oral/No Abstract Available/2006
Annual
- Self-calibration for Air-bearing
Rotary Encoders
Lu, X. (The University of British Columbia); and Trumper, D. L. (Massachusetts
Institute of Technology)
Metrology I/Oral/No Abstract Available/2006
Annual
- Rapid High Resolution Absolute
2-D Encoding by Low Resolution Digital Imaging of a Mathematically Generated
3-tone Target
Chu, D. C.; Trujillo, H.; Whitney, E.; Young, J. (Agilent Technologies,
Inc.)
Metrology I/Oral/No Abstract Available/2006
Annual
Session V, Metrology II
Wednesday, October 18, 2006, 3:30 PM - 5:00 PM
Session Chair: Byron R. Knapp (Olympic Precision, Inc.) and Richard C.
Montesanti (Lawrence Livermore National Laboratory)
- Utraprecision Microscale Hole
Scanning Metrology
Bauza, M. B.; Woody, S. C. (InsituTec, Inc.); and Smith, S. T.; Hocken,
R. J. (University of North Carolina at Charlotte)
Metrology II/Oral/Abstract/2006 Annual
- Ring Gauge for Evaluation of
CMM Dynamics
Garrard, K. P.; Dow, T. A. (North Carolina State University); and Folkert,
K. F. (Consolidated Diesel)
Metrology II/Oral/Abstract/2006 Annual
- Speckle Correlation Method
for 3D-deflection Measurement of the Tactile-optical Microprobe
Wissmann, M.; Schwenke, H. I.; Neuschaefer-Rube, U. (Physikalisch-Technische
Bundesanstalt (PTB))
Metrology II/Oral/Abstract/2006 Annual
- Enhanced Capabilities of the
NIST Fiber Probe for Micro Feature Metrology
Muralikrishnan, B. (University of North Carolina at Charlotte); and
Stone Jr., J. A.; Stoup, J. R. (National Institute of Standards and
Technology)
Metrology II/Oral/Abstract/2006 Annual
Session VI, Machining
Thursday, October 19, 2006, 8:30 AM - 10:00 AM
Session Chair: Vivek G. Badami (Zygo Corporation) and Stefan Rakuff (GE
Global Research)
- Tunable, Ultrasonic, Vibration
Assisted Diamond Turning
Overcash, J. L.; Cuttino, J. F. (University of North Carolina at Charlotte)
Machining/Oral/Abstract/2006 Annual
- Modeling of Vibration in Single-point
Diamond Turning
Sohn, A.; Lamonds, L.; Garrard, K. (North Carolina State University)
Machining/Oral/Abstract/2006 Annual
- Optimizing Machining Processes
for Precision: An Example Using Calculated Cutting Forces
Rhorer, R. L. (National Institute of Standards and Technology)
Machining/Oral/Abstract/2006 Annual
- A Comparative Study of Part Error
Contributors in High-speed Machining
Canning, J. S.; Zapata, R. E.; Ziegert, J. C.; Schmitz, T. L. (University
of Florida)
Machining/Oral/Abstract/2006 Annual
Session VII, Nanotechnology
Thursday, October 19, 2006, 10:30 AM - 12:00 PM
Session Chair: Alex Sohn (North Carolina State University) and Anthony
E. Gee (University College, London)
- Characterization of Nano-structured Materials Using FIB and STEM
Techniques (Invited Paper)
Jarausch, K. (Hitachi High Technologies America)
Nanotechnology/Oral/No Abstract Available/2006
Annual
- A Mechanism for Creating Variable
Nanometer Gaps
Ma, H.; Slocum, A. H. (Massachusetts Institute of Technology)
Nanotechnology/Oral/No Abstract Available/2006
Annual
- Optical Near-field Directed Patterning
of Submicron-sized Particles
Morii, H.; Ooi, T.; Tsuchiya, K.; Hamaguchi, T.; Nakao, M. (The University
of Tokyo)
Nanotechnology/Oral/No Abstract Available/2006
Annual
- Development of a Nano-stereolithography
System Using Evanescent Light for Submicron Fabrication
Kajihara, Y.; Takeuchi, T.; Takahashi, S.; Takamasu, K. (The University
of Tokyo)
Nanotechnology/Oral/No Abstract Available/2006
Annual
Session VIII, Design
Thursday, October 19, 2006, 1:30 PM - 3:00 PM
Session Chair: Pradeep K. Subrahmanyan (RAPT Industries, Inc.) and Mark
A. Stocker (Corning Incorporated)
- Design and Modeling of a Precision
6 DOF MEMS-based Parallel Kinematic TEM Sample Manipulator
Brouwer, D. M.; de Jong, B. R.; Soemers, H. M. J. R. (University of
Twente)
Design/Oral/Abstract/2006 Annual
- Moving-magnet Planar Actuator
with Integrated Active Magnetic Bearing
Jansen, J. W.; van Lierop, C. M. M.; Lomonova, E. A.; Vandenput, A.
J. A. (Eindhoven University of Technology)
Design/Oral/Abstract/2006 Annual
- Design of a Robot-based Detector
Manipulator for a Hard X-ray Nanoprobe Instrument System
Shu, D.; Maser, J.; Holt, M.; Preissner, C.; Lai, B.; Vogt, S.; Winarski,
R.; Stephenson, G. B. (Argonne National Laboratory)
Design/Oral/Abstract/2006 Annual
- Seven-axis Tester with Servo-controlled
Fly-height for Magnetic Recording Metrology
Crawford, T. M.; van de Veerdonk, R. J. M.; Bedillion, M. D.; Koelmans,
W.; Langzettel, A. K. (Seagate Research); O'Connor, B. P.; Novotnak,
R. (Aerotech, Inc.); and Lane, B. (Key Technologies, Inc.)
Design/Oral/Abstract/2006 Annual
Poster Sessions
Tuesday, October 17, 2006, 3:30 PM - 5:00 PM
Session Chair: Session I: David E. Brehl (North Carolina State University)
and David D. Gill (Sandia National Laboratories)
Wednesday, October 18, 2006, 1:30 PM - 3:00 PM
Session Chair: Session II: Robin L. Hibbard (Lawrence Livermore National
Laboratory), and Eric R. Marsh (The Pennsylvania State University)
Equipment, Machines & Instruments
Analysis & Modeling
- Frequency Response Prediction
for Rotating Tool-holder-spindle Assemblies
Cheng, C.; Duncan, G. S.; Schmitz, T. L. (University of Florida)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- Flexure-based Meso-level
Stages Driven by Linear Piezo Motors
Heamawatanachai, S.; Corbin, B.; Emig, L.; Bamberg, E. (University of
Utah)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- A Quantitative, Constraint-based
Design Method for Multi-axis Flexure Stages for Precision Positioning
Equipment
Hopkins, J.; Culpepper, M. L. (Massachusetts Institute of Technology)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- Analysis of Temperature
Distribution and Optimization of the Configuration at Heating Tool in
the Chip Bonding Process at Camera Module of Mobile Phone
Kim, I.; Kweon, S.-H.; Yang, S.-H. (Kyungpook National University)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- Synthesis of the Intelligent
Sensing System Using Current Signals for Manufacturing Systems
Kim, S.-C.; Chung, S.-C. (Hanyang University); Chung, S. (The University
of Western Ontario); and Kim, K.-D. (Small Business Corporation)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- Improved Analytical
Chip Thickness Model
Kumanchik, L.; Schmitz, T. L. (University of Florida)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- Dynamic Characterization
of a Head Unit with a Small High Speed Spindle in Meso-scale Machine
Tools
Lee, J.-H.; Yang, S.-H. (Kyungpook National University)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- Calibration of a Parallel
Manipulator with Restricted Degrees of Freedom by Means of a Redundancy
Matrix
Meyer, P. J.; van Eijk, J. (Philips Applied Technologies)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- Tool-holder Connection
Modeling for Frequency Response Prediction in Milling
Powell, K. B.; Won, D.; Schmitz, T. L.; Duncan, G. S.; Sawyer, W. G.;
Ziegert, J. C. (University of Florida)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- A General Geometric
Model for Determining Optimal Shapes of Planar Elastic Pivots
Vallance, R. R.; Haghighian, B. (The George Washington University);
and Marsh, E. R. (The Pennsylvania State University)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
- Fractal Roundness Modeling
of Experimental Profile in Turning
Yoon, M. C.; Chin, D. H. (Pukyong National University); and Jung, J.
S. (Workers Accident Medical Corporation/Korea Orthopaedics & Rehabilitation
Engineering Center)
Equipment, Machines & Instruments/Analysis
& Modeling/Poster/Abstract/2006 Annual
Controls
- Control of a 2 DOF Long-range
and 6 DOF Short-range Stages for Nanometer Positioning
Buice, E. S.; Yang, H.; Smith, S. T.; Hocken, R. J. (University of North
Carolina at Charlotte); Otten, D.; Trumper, D. L. (Massachusetts Institute
of Technology); and Seugling, R. M. (Lawrence Livermore National Laboratory)
Equipment, Machines & Instruments/Controls/Poster/Abstract/2006
Annual
- Active Control of Pneumatic
Isolation Table by Model Following Control Using Pressure Differentiator
Kato, T. (Tokyo Metropolitan College of Industrial Technology); and
Kawashima, K.; Kagawa, T. (Tokyo Institute of Technology)
Equipment, Machines & Instruments/Controls/Poster/Abstract/2006
Annual
- A New Mode Switching
Control for Fast Settling and High Precision Positioning
Kim, J.-J.; Choi, Y.-M.; Kim, K.-H.; Gweon, D.-G. (Korea Advanced Institute
of Science & Technology)
Equipment, Machines & Instruments/Controls/Poster/Abstract/2006
Annual
- Precise Position Control
of a Pneumatic Servo Table System Consideration Dynamic Characteristics
of Pneumatic Servo Valves
Miyajima, T.; Ogiso, T.; Kawashima, K.; Kagawa, T. (Tokyo Institute
of Technology); and Fujita, T. (Tokyo Denki University)
Equipment, Machines & Instruments/Controls/Poster/Abstract/2006
Annual
- Design and Control for
the Pneumatic Cylinder Precision Positioning Under Vertical Loading
Tsai, M.-H.; Cheng, C.-N.; Shih, M. C. (National Cheng Kung University)
Equipment, Machines & Instruments/Controls/Poster/Abstract/2006
Annual
Design & Testing
- Design and Evaluation
of a Prototype Instrument for Measuring Roundness Profiles of Micro
Shafts
Barraja, M.; Vallance, R. R.; Loychik, N. (The George Washington University);
Marsh, E. R. (The Pennsylvania State University); and Arneson, D. A.
(Professional Instruments Company, Inc.)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Microdrive and Telemetry
System for Multi-Unit Extracellular Studies
Caballero-Ruiz, A.; Ruiz-Huerta, L.; Kussul, E. (Universidad Autónoma
de México); and Heredia, F. (Universidad Autónoma de Yucatán)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Development of Ultra
Precision Machine with High Positioning Resolution
Fukuta, M.; Nishioka, M. (Toshiba Machine Co., Ltd.); and Suzuki, H.
(Kobe University)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Development of a Hydrostatic
Journal Bearing with Slit-step Compensation
Hale, L. C. (Innovative Machine Solutions); Castro, C.; Chung, C.; Hopkins,
D. J. (Lawrence Livermore National Labs.); and Donaldson, R. R. (P.E.
Consultant)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Development of Active
Mounts for Improved Accuracy of Large Machine Tools
Horiuchi, O.; Kato, T.; Yamaguchi, Y.; Shibata, T; (Toyohashi University
of Technology)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Development of Mechanisms
and Frame Structures for a Laboratory-scale Compact Soft X-ray Microscopy
Kang, S.-H.; Kang, D.-W.; Gweon, D.-G. (Korea Advanced Institute of
Science & Technology (KAIST)); Min, J. Y. (Wonkwang University);
and Yoon, K. H. (LISTEM, Co., Ltd.)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Development of a Tool
Alignment System in Shearing Process
Kibe, Y.; Mitsui, K. (Keio University)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Precision Measurement
of Small Diameter Hole in a Metallic Object
Lee, K. S.; Chow, K. H.; Chan, C. K.; Chan, L. S.; Chau, W. C.; Chow,
W. Y. (The Hong Kong University of Science and Technology)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- High Precision Modular
Long Range Travel Vertical Axis
Lotz, M.; Hackel, T.; Frank, T.; Tröbs, A.; Höhne, G.; Theska,
R.; Zimmermann, K. (Technical University of Ilmenau)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Development of a Design
Tool Supporting Conceptual Design of Machine Tools
Mishima, N. (Advanced Manufacturing Research Institution (AIST))
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Design of Air Drive
Spindle
Nakao, Y.; Mizoi, T.; Minowa, Y. (Kanagawa University)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Development of a Precision,
Low-cost, Small Footprint Wire Electron Discharge Machine (WEDM)
Orino, C.; Rakwal, D. R.; Bamberg, E. (University of Utah); and Jorgensen,
J. D. (Optimation, Inc.)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
- Axiomatic Design Method
Applied to a Parallelogram Micromachine for Low Cost Micromechanics
Ruiz-Huerta, L.; Caballero-Ruiz, A. (Universidad Nacional Autónoma
de México)
Equipment, Machines & Instruments/Design
& Testing/Poster/Abstract/2006 Annual
Mechatronics
- Non-contact Bio Cell
Manipulation by Nonlinear Micro Flow Around the Vibrated Pipette on
Micro Robot
Aoyama, H.; Chiba, N.; Fuchiwaki, O. (University of Electro-Communications);
Misaki, D. (Shizuoka Institute of Science & Technology); and Usuda,
T. (National Institute of Advanced Industrial Science and Technology)
Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006
Annual
- New Hybrid Actuator
Design with Nanometer Resolution
Gloess, R. (Physik Instrumente (PI) GmbH & Co.KG)
Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006
Annual
- Optimal Tuning of a
Biaxial Servomechanism Using a Cross-coupled Controller and Disturbance
Observers
Jang, M.-S.; Kim, S.-C.; Chung, S.-C. (Hanyang University)
Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006
Annual
- Fabrication of a New
Position Surveying System for the Underground Pipes Using Rotary Encoders
Hamano, T.; Kato, S. (Nippon Institute of Technology); and Ono, M. (Tokyo
Metropolitan College of Technology)
Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006
Annual
- An In-pipe Mobile Inspection
Robot Provided an Artificial Intelligence and Passable at Several T-junctions
Kato, S.; Suzuki, T. (Nippon Institute of Technology); and Ono, M. (Tokyo
Metropolitan College of Technology)
Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006
Annual
- Fabrication of a Snake
Type In-pipe Mobile Robot Corresponding to the Different Diameters
Ono, M.; Tanaka, M.; Ito, S.; Ikeda, S. (Tokyo Metropolitan College
of Technology); and Kato, S. (Nippon Institute of Technology)
Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006
Annual
- Implementation of a Real-time
Hysteresis Compensation for Electromagnetic Actuators
Volkert, R.; Radler, O.; Ströhla, T. (Technical University of Ilmenau);
and Zöppig, V. (STZ Mechatronik)
Equipment, Machines & Instruments/Mechatronics/Poster/Abstract/2006
Annual
MEMS, LIGA & Nanotechnology
- Rotational Precision
MEMS-based Clamping Mechanism for Stable Fixation of Elastic Mechanisms
Brouwer, D. M.; de Jong, B. R.; de Boer, M. J.; Soemers, H. M. J. R.
(University of Twente)
Equipment, Machines & Instruments/MEMS,
LIGA & Nanotechnology/Poster/Abstract/2006 Annual
- Design of a High-speed
Micro-scale Fast Scanning Stage for Two-photon Endomicroscopy
Chen, S.-C.; Choi, H.; Kim, D.; Munro, L.; Culpepper, M. L.; So, P.
(Massachusetts Institute of Technology)
Equipment, Machines & Instruments/MEMS,
LIGA & Nanotechnology/Poster/Abstract/2006 Annual
- Formation of Micro-scale
Precision Flexures Via Molding of Metallic Glass
Chen, S.-C.; Culpepper, M. L. (Massachusetts Institute of Technology);
and Bardt, J.; Ziegert, J. C. (University of Florida)
Equipment, Machines & Instruments/MEMS,
LIGA & Nanotechnology/Poster/Abstract/2006 Annual
- Application of Input
Shaping® and Hyperbit™ Control to Improve the Dynamic Performance
of a Six-axis MEMS Nanopositioner
Chen, S.-C.; Culpepper, M. L. (Massachusetts Institute of Technology);
and Jordan, S. (PI (Physik Instrumente) LP)
Equipment, Machines & Instruments/MEMS,
LIGA & Nanotechnology/Poster/Abstract/2006 Annual
- Active Mask UV Lithography
System for MEMS and µ-TAS Applications
Hayashi, T. (Osaka University); Shibata, T.; Kawashima, T. (Toyohashi
University of Technology); Makino, E.; Mineta, T. (Hirosaki University);
and Masuzawa, T. (Ibaraki University)
Equipment, Machines & Instruments/MEMS,
LIGA & Nanotechnology/Poster/Abstract/2006 Annual
- Nanometer-scale Deposition
of Photo-curing Resin Using a Scanning Nanopipette Probe Microscope
Iwata, F.; Ushiro, Y.; Sasaki, A. (Shizuoka University)
Equipment, Machines & Instruments/MEMS,
LIGA & Nanotechnology/Poster/Abstract/2006 Annual
- Recent Advances in Improving
Static and Dynamic Accuracy of Nanopositioning Systems
Jordan, S. (PI (Physik Instrumente) LP)
Equipment, Machines & Instruments/MEMS,
LIGA & Nanotechnology/Poster/Abstract/2006 Annual
- A Novel Microfabrication
Technique for Three-dimensional Metal Structures by Photocatalysis
Okuno, M.; Takahashi, S.; Takamasu, K. (The University of Tokyo); and
Aso, T. (Nomura Research Institute, Ltd.)
Equipment, Machines & Instruments/MEMS,
LIGA & Nanotechnology/Poster/Abstract/2006 Annual
- Kinematic Assembly of
Soft-polymer Biofluidic Circuits
Trinkle, C. A.; Lee, L. P. (University of California at Berkeley); and
Morgan, C. J. (University of Kentucky)
Equipment, Machines & Instruments/MEMS,
LIGA & Nanotechnology/Poster/Abstract/2006 Annual
Novel Systems
- Design of a Miniature
Dual-purpose Positioner-fixture for Six-axis Scanning and Detachable
Fixturing in Nano-instrumentation
Culpepper, M. L. ; Varadarajan, K.; (Massachusetts Institute of Technology)
Equipment, Machines & Instruments/Novel
Systems/Poster/Abstract/2006 Annual
- A Scalable Six-axis
Electromagnetically-driven Nanopositioner for Nanomanufacturing
Golda, D.; Culpepper, M. L. (Massachusetts Institute of Technology)
Equipment, Machines & Instruments/Novel
Systems/Poster/Abstract/2006 Annual
- Near-field Polarimetry
Using Scanning Probe Microscope with Sub-wavelength Aperture Cantilever
Tsuchiya, K.; Muragishi, T.; Ooi, T.; Morii, H.; Hamaguchi, T.; Nakao,
M. (The University of Tokyo)
Equipment, Machines & Instruments/Novel
Systems/Poster/Abstract/2006 Annual
Metrology
Analysis & Modeling
- A Study of Pattern and
Feature Analysis of Surface Generation in Fast Tool Servo Machining
of Optical Microstructures
Cheung, C.-F.; To, S. S.; Lee, W.-B.; Li, H. (The Hong Kong Polytechnic
University); and Jiang, X.-Q. (University of Huddersfield)
Metrology/Analysis & Modeling/Poster/Abstract/2006
Annual
- Dimensional Study of
an Interference Fit Allograft
Mauntler, N. A.; Ziegert, J. C. ; Schmitz, T. L. (University of Florida)
Metrology/Analysis & Modeling/Poster/Abstract/2006
Annual
Form & Geometry
- 50 m Linear Measuring
Interferometer for Calibration of Surveying Tape
Joung, D. Y.; Suh, H. S.; Kim, J. A.; Kim, J. W.; Eom, T. B. (Korea
Research Institute of Standards and Science)
Metrology/Form & Geometry/Poster/Abstract/2006
Annual
- A Diameter Measuring
System with Laser Interferometer
Eom, T. B.; Kim, M. S.; Kang, C. S.; Kim, J. W. (Korea Research Inst.
of Standards and Science)
Metrology/Form & Geometry/Poster/Abstract/2006
Annual
- Development and Analysis
of an Optical Capability for the Measurement of Arrays
Gill, D. D.; Claudet, A. A.; Southwell, L. M. (Sandia National Laboratories)
Metrology/Form & Geometry/Poster/Abstract/2006
Annual
- Fast Three-dimensional
Shape Measurement by Using Color-coded Illumination
Song, C. K. (Korea Institute of Machinery and Materials); Kim, J. S.
(Kafus Co., Ltd.); and Joo, B. G.; Kang, M. G. (Intekplus Co., Ltd.)
Metrology/Form & Geometry/Poster/Abstract/2006
Annual
Instrumentation, Design & Testing
- Gravitational Reference
Mass Center Determination by Velocity Modulation
Conklin, J. W.; DeBra, D. B.; Sun, K.-X. (Stanford University)
Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006
Annual
- An Instrument for Nanoindentation
Without Frame Stiffness Dependency
Ellis, J. D.; Smith, S. T.; Hocken, R. J. (University of North Carolina
at Charlotte)
Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006
Annual
- Optical Measuring Device
for Radial Error of Micro-spindle Using High-speed Photo-amplifiers
Fujimaki, K.; Mitsui, K. (Keio University)
Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006
Annual
- Mechanical Properties
of Silicon Carbide Films Prepared by RF Magnetron Sputtering Using Targets
with Different Carbon Contents
Fujiyama, H. (Fukuoka Institute of Technology); Nakamura, M.; Sumomogi,
T. (Hiroshima Kokusai Gakuin University)
Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006
Annual
- Nano-linear Encoder
Investigation Using Dual Fiber and Grating System
Karodkar, D. (University of North Carolina at Charlotte)
Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006
Annual
- Analysis and Performance
of a Parallel-axis Flatness Measuring Instrument
Marsh, E. R. (The Pennsylvania State University); and Vallance, R. R.
(The George Washington University)
Metrology/Instrumentation, Design & Testing/Poster/Abstract/2006
Annual
Machine Tool Metrology
- The Estimation for
Errors of a Planar XY Stage from Profiles Measurement of Guide-ways
Hwang, J.; Park, C. H. (Korea Institute of Machinery and Materials);
Kim, S. W. (Korea Advanced Institute of Science and Technology (KAIST))
Metrology/Machine Tool Metrology/Poster/Abstract/2006
Annual
- Development of a Trigger
System to Measure a Tool Position in Planetary Milling
Kamiya, K.; Nomura, T.; Tashiro, H. (Toyama University); and Yazawa,
T. (Nagasaki University)
Metrology/Machine Tool Metrology/Poster/Abstract/2006
Annual
- Application of 3D Optical
Scanning Systems for the Measurement of Spheric and Aspheric Surfaces
Sun, W.; McBride, J. W.; Hill, M. (University of Southampton)
Metrology/Machine Tool Metrology/Poster/Abstract/2006
Annual
Measurement Uncertainty
- Determination of Temperature
Probability Distribution in Measurement Uncertainty
Fang, C. Y.; Sung, C. K. (National Tsing Hua University); and Hung,
C. Y.; Lui, K. W. (Center for Measurement Standards / ITRI)
Metrology/Measurement Uncertainty/Poster/Abstract/2006
Annual
- Cross Calibration for
Primary Angle Standards by a Precision Goniometer with a Small Angle
Interferometer
Liou, H.-C.; Lin, C.-M.; Chen, C.-J.; Chang, L.-C. (Center for Measurement
Standards/Industrial Technology Research Institute)
Metrology/Measurement Uncertainty/Poster/Abstract/2006
Annual
- Uncertainty Analysis
for a Silicon Bulk Micromachined Dimensional Metrology Artifact
Shilling, K. M.; Claudet, A. A.; Oliver, A. D.; Tran, H. D. (Sandia
National Laboratories)
Metrology/Measurement Uncertainty/Poster/Abstract/2006
Annual
Surface & Subsurface
- A Serious Kinematic Coupling
Gleason Jr., E. A. (Bal-tec)
Metrology/Surface & Subsurface/Poster/Abstract/2006
Annual
- The Effect of Gaussian
Filter Long Wavelength Cutoff É…c in Topography Measurements
and Comparisons
Song, J. J.; Ma, L.; Vorburger, T. V. (National Institute of Standards
and Technology)
Metrology/Surface & Subsurface/Poster/Abstract/2006
Annual
- Study on Nano-scale Mechanical
Properties of Ultra High-purity Aluminum by Nanoindentation
Yoshida, M.; Nakamura, M.; Sumomogi, T.; Endo, T. (Hiroshima Kokusai
Gakuin University)
Metrology/Surface & Subsurface/Poster/Abstract/2006
Annual
Optics
Optical Fabrication
- Manufacturing of Glass
Diffractive Optics by Use of Compression Molding Process
Chen, Y.; Yi, A. Y. (The Ohio State University); and Klocke, F.; Pongs,
G.; Demmer, A. (Fraunhofer Institute for Production Technology (IPT))
Optics/Optical Fabrication/Poster/Abstract/2006
Annual
- Direct Machining of
Inner Reflecting Surface for a Soft X-ray Microscope
Chon, K. S.; Yoon, K. H. (Wonkwang University); and Namba, Y. (Chubu
University)
Optics/Optical Fabrication/Poster/Abstract/2006
Annual
- Aspherizing the Sphere:
Using Focused Ion Beam Machining to Create Aspherical Diamond Mills
for Micro Optics
Hodges, V. C; Adams, D. P.; Claudet, A. A.; Gill, D. D.; Sweatt, W.;
Vasile, M. J. (Sandia National Laboratories)
Optics/Optical Fabrication/Poster/Abstract/2006
Annual
- Manufacturing of Replicated
Pt/C Multilayer Mirrors for Hard X-ray Telescopes
Namba, Y.; Fushiki, A. (Chubu University); and Kunieda, H.; Ogasaka,
Y.; Tawara, Y.; Yamashita, K. (Nagoya University)
Optics/Optical Fabrication/Poster/Abstract/2006
Annual
- A Magnetorheological
Polishing Based Approach for Studying Magnetic/Nonmagnetic WC Hard Metals
Shafrir, S. N.; Lambropoulos, J. C.; Jacobs, S. D. (University of Rochester)
Optics/Optical Fabrication/Poster/Abstract/2006
Annual
- Damage-free Processing
of Silicon Carbide Optics
Verma, Y.; Fiske, P. S.; Subrahmanyan, P. K.; Gardopee, G. (RAPT Industries,
Inc.)
Optics/Optical Fabrication/Poster/Abstract/2006
Annual
Optics / Interferometry
- Control of the Interference
Fringes in a Point Diffraction Interferometer Using an Optical Saturable
Absorber
Furuhashi, H.; Uchida, Y. (Aichi Institute of Technology); Matsuda,
K. (National Institute of Advanced Industrial Science and Technology);
and Kono, A. (Nagoya University)
Optics/Optics Interferometry/Poster/Abstract/2006
Annual
- Digital Periodic Error
Correction: Further Testing and Results
Schmitz, T. L.; Houck III, L. (University of Florida); and Chu, D. (Agilent
Technologies, Inc.)
Optics/Optics Interferometry/Poster/Abstract/2006
Annual
- Phase Modulation Homodyne
Interferometer with Picometer Resolution Using Tunable Laser Diode
Ishige, M.; Matsuura, F.; Kawasugi, M.; Aketagawa, M. (Nagaoka University
of Technology)
Optics/Optics Interferometry/Poster/Abstract/2006
Annual
- Grazing Incidence Metrology
Using a Lateral Shearing Interferometer
Kolipaka, J. P. S.; Snyder, J. J. (University of North Carolina at Charlotte);
and Kuriyama, Y. (Mitutoyo Corporation)
Optics/Optics Interferometry/Poster/Abstract/2006
Annual
- Stitching Interferometry
for Flexible Asphere Metrology
O'Donohue, S.; Murphy, P. E.; Fleig, J.; DeVries, G. (QED Technologies)
Optics/Optics Interferometry/Poster/Abstract/2006
Annual
Other
Precision Assembly
- Assembly of Thin Gratings
for Soft X-ray Telescopes
Akilian, M.; Heilmann, R.K.; Schattenburg, M. L. (Massachusetts Institute
of Technology)
Other/Precision Assembly/Poster/Abstract/2006
Annual
- Passively Aligned 100-port
Micro-fluidic Connector
Forest, C. R.; Beltran, M. J.; Hunter, I. W. (Massachusetts Institute
of Technology)
Other/Precision Assembly/Poster/Abstract/2006
Annual
- Fabrication of Periodic
Nano-structures Using DNA Fractions
Hatsuzawa, T.; Yanagida, Y. (Tokyo Institute of Technology)
Other/Precision Assembly/Poster/Abstract/2006
Annual
- Precision Design Verification
System of Injection Molds Using Web-based 3D Viewing Technology
Song, I.-H.; Chung, S.-C. (Hanyang University); and Chung, S. (The University
of Western Ontario)
Other/Precision Assembly/Poster/Abstract/2006
Annual
- An XML-based Digital
Mock-up System for Heterogeneous Assembly
Song, I.-H.; Chung, S.-C. (Hanyang University); and Kim, K.-D. (Small
Business Corporation)
Other/Precision Assembly/Poster/Abstract/2006
Annual
- Design and Testing of
a Tribometer for in situ Microscopy
Mauntler, N. A.; Dunn, A. C.; Schmitz, T. L.; Sawyer, W. G. (University
of Florida)
Other/Precision Assembly/Poster/Abstract/2006
Annual
Processes
Grinding
- Monitoring of Roundness-errors
in Continuous Path Controlled Crankshaft Grinding Processes
Denkena, B.; Kramer, N. J. (Hannover University)
Processes/Grinding/Poster/Abstract/2006 Annual
- Trueing of Micro-grinding
Wheels by Diamond Tools
Hoffmeister, H.-W.; Hlavac, M. (Technical University of Braunschweig)
Processes/Grinding/Poster/Abstract/2006 Annual
- High Performance Grinding
Wheels with Boron Doped Diamond Grits Enabling Electrical Conductivity
and High Thermal Stability on Cutting Edges
Iwai, M.; Nakagawa, K.; Uematsu, T. (Toyama Prefectural University);
Sano, S. (Sodick Co.,Ltd.); Tanaka, K. (Toshiba Machine Co., Ltd.);
Wang, M. (OSG Co., Ltd.); and Suzuki, K. (Nippon Institute of Technology)
Processes/Grinding/Poster/Abstract/2006 Annual
- Study on Micro Machining
of Lithium Niobate Using Single Abrasive Grinding
Kurihara, R.; Nakamura, M.; Yoshida, M.; Sumomogi, T. (Hiroshima Kokusai
Gakuin University)
Processes/Grinding/Poster/Abstract/2006 Annual
- Development of a 3-D
Measuring Equipment for Surface Geometries of Grinding Wheel Surfaces
Lee, H.-S.; Yamada, T.; Kobayashi, M. (Nihon University)
Processes/Grinding/Poster/Abstract/2006 Annual
- The Role of Crystallographic
Orientation on the Forces Generated in Ultra-precision Grinding of Anisotropic
Materials such as Monocrystalline Silicon
Marsh, E. R. (The Pennsylvania State University); and Vallance, R. R.
(The George Washington University)
Processes/Grinding/Poster/Abstract/2006 Annual
- Wheel Wear During
Intermittent Grinding
Miller, M. H.; Fan, X. (Michigan Technological University)
Processes/Grinding/Poster/Abstract/2006 Annual
- Studies on Slicing
Characteristics of Vibratory OD-blade Slicing
Uneda, M.; Tsukada, H.; Ishikawa, K.; Suwabe, H. (Kanazawa Institute
of Technology)
Processes/Grinding/Poster/Abstract/2006 Annual
- Study on the Contact
Stiffness of Grinding Wheels Due to the Difference of Dressing Condition
Yamada, T.; Lee, H.-S.; Morita, H. (Nihon University)
Processes/Grinding/Poster/Abstract/2006 Annual
- Development of Cross
and Parallel Mode Grinding Machine for High NA Aspherical Mold and Die
Yamamoto, Y.; Suzuki, H.; Moriwaki, T.; Okino, T.; Hijikata, Y. (Kobe
University); Roblee, J. W. (Precitech, Inc.); and Miyashita, T. (Taylor
Hobson Japan Ltd.)
Processes/Grinding/Poster/Abstract/2006 Annual
- Ultra-smoothness Grinding
of Cemented Carbide Using Newly Developed Vertical Grinder
Yasui, H.; Yamamoto, Y.; Miyamoto, K.; Furuya, S.; Sakamoto, R. (Kumamoto
University)
Processes/Grinding/Poster/Abstract/2006 Annual
Machining
- Review of Vibration-assisted
Machining Methods for Precision Fabrication
Brehl, D. E.; Dow, T. A. (North Carolina State University)
Processes/Machining/Poster/Abstract/2006 Annual
- Micro-structure Fabrication
Using Elliptical Vibration-assisted Machining (EVAM)
Brehl, D. E.; Dow, T. A.; Garrard, K. P.; Sohn, A. (North Carolina State
University)
Processes/Machining/Poster/Abstract/2006 Annual
- Fabrication of Micro-components
Using Vibration-assisted Micro-EDM
Endo, T.; Tsuijimoto, T.; Mitsui, K. (Keio University)
Processes/Machining/Poster/Abstract/2006 Annual
- Polishing of Single
Point Diamond Tool Based on Thermo-chemical Reaction with Copper
Higuchi, M.; Yamaguchi, T. (Kansai University); Shimada, S. (Osaka Electro-Communication
University); and Obata, K. (A.L.M.T. Corporation)
Processes/Machining/Poster/Abstract/2006 Annual
- Tunable Holder for
Boring Bars
Houck III, L.; Schmitz, T. L. (University of Florida); and Smith, K.
S. (University of North Carolina at Charlotte)
Processes/Machining/Poster/Abstract/2006 Annual
- Development of Cutting
Load Prediction System Using Monitoring Data in Micro Machining
Ikeda, N.; Kondo, M.; Kobayashi, Y.; Shirai, K. (Nihon University)
Processes/Machining/Poster/Abstract/2006 Annual
- Manufacturing of Micro
V-groove with an Electrically Conductive Diamond Electrode in EDM
Iwai, M.; Uematsu, T. (Toyama Prefectural University); Sano, S. (Sodick
Co.,Ltd.); Pan, W; Itagaki, K.; Suzuki, K. (Nippon Institute of Technology);
and Murakami, Y.; Wang, M. (OSG Co., Ltd.)
Processes/Machining/Poster/Abstract/2006 Annual
- Condition Monitoring
of Micro-drilling Processes on Glass by Using Machine Vision
Kim, H.-H.; Kim, S.-C.; Chung, S.-C. (Hanyang University); Chung, S.
(The University of Western Ontario); and Jee, W.-H. (Shinhan Diamond,
Inc.)
Processes/Machining/Poster/Abstract/2006 Annual
- Machining Parameter
Selection Based on Cost-based Objective Function and Process Stability
Kurdi, M. H.; Schmitz, T. L.; Haftka, R. T. (University of Florida)
Processes/Machining/Poster/Abstract/2006 Annual
- Creation of V-shaped
Curved Microgrooves with Two Flat-ends by Non-rotational Cutting Tools
Moriya, T.; Ishida, T.; Teramoto, K.; Takeuchi, Y. (Osaka University)
Processes/Machining/Poster/Abstract/2006 Annual
- Ultraprecision Turning
with Binderless cBN
Oberschmidt, D.; Uhlmann, E. (Fraunhofer Institute for Production Systems
and Design Technology); and Kurz, M. (Technical University Berlin)
Processes/Machining/Poster/Abstract/2006 Annual
- Chatter Stability Boundary
Analysis Using Neural Network
Oh, M. S.; Sim, S. B.; Yoon, M. C. (Pukyong National University); and
Jung, J. S. (Workers Accident Medical Corporation/Korea Orthopaedics
& Rehabilitation Engineering Center)
Processes/Machining/Poster/Abstract/2006 Annual
- Optimizing Saw Teeth
Deflection and Lumber Thickness Variation Through Precision Engineering
Approach
Okai, R. (University of Education- Winneba)
Processes/Machining/Poster/Abstract/2006 Annual
- Characteristics of
Mechanical Micromilling Using Tungsten Carbide Tools
Ozdoganlar, B. O.; Filiz, S. (Carnegie Mellon University)
Processes/Machining/Poster/Abstract/2006 Annual
- Effect of Low Cutting
Speed on Ultra-precision Cutting of Titanium Alloy with Coated-cemented-carbide
Tool
Yasui, H.; Shinozaki, A.; Toyama, A.; Sakamoto, S.; Kajiwara, Y. (Kumamoto
University)
Processes/Machining/Poster/Abstract/2006 Annual
Manufacturing
- Self-adjustment Module
for Phone Camera Lens Assembly
Lee, C.-W.; Song, J.-Y. (Korea Institute of Machinery and Materials)
Processes/Manufacturing/Poster/Abstract/2006
Annual
- A Study on the Ultra
Precision Progressive Die Making for Sheet Metal Forming by Computer
Simulation
Sim, S. B.; Kim, C. H.; Park, G. Y. (Pukyuong National University)
Processes/Manufacturing/Poster/Abstract/2006
Annual
Non-conventional
- A Single Discharge
Study of Micro-EDM
Moylan, S. P. (National Institute of Standards and Technology); and
Chandrasekar, S. (Purdue University)
Processes/Non-conventional/Poster/Abstract/2006
Annual
- Improvent of Machining
Accuracy in Wire Electrical Discharge Machine
Sakai, Y.; Goto, A.; Nakashima, T.; Taneda, A.; Magara, T.; Hashimoto,
T. (Mitsubishi Electric Corporation)
Processes/Non-conventional/Poster/Abstract/2006
Annual
- On the Temperature
Analysis of Superfinishing Alloy Steel Using Flexible Magnetic Abrasive
Grinding (FMAG)
Singh, D. K. (M.M.M. Engineering College Gorakhpur); and Jain, V. K.;
Raghuram, V. (Indian Institute of Technology, Kanpur)
Processes/Non-conventional/Poster/Abstract/2006
Annual
- A Study on the Performance
of Copper-graphite as Tool Material in Micromachining by Micro Electro
Discharge Machining
Sundaram, M. M.; Rajurkar, K. P. (University of Nebraska-Lincoln)
Processes/Non-conventional/Poster/Abstract/2006
Annual
- A New Precision Magnetic
Field Assisted Finishing Process for Ferromagnetic Metallic Materials
Using Plural Permanent Magnets as a Tool
Zou, Y.; Shinmura, T. (Utsunomiya University)
Processes/Non-conventional/Poster/Abstract/2006
Annual
Polishing, Lapping & ECM
- Development of a
Structure-controlled Fixed-abrasive Pad for Finishing of an Optical
Glass
Enomoto, T.; Fujita, T. (The University of Tokyo) and Tominaga, S.;
Suzuki, M. (Roki Techno Co., Ltd.)
Processes/Polishing, Lapping & ECM/Poster/Abstract/2006
Annual
- Novel CMP Technique
for Copper Surface Finishing with Fullerene Nano-particle
Tanada, H.; Miyoshi, T.; Takaya, Y.; Hayashi, T. (Osaka University);
and Suzuki, K. (Nitta Haas Incorporated)
Processes/Polishing, Lapping & ECM/Poster/Abstract/2006
Annual
- Studies on Oscillation
Controlled Lapping Using Small Diameter Lap Tool
Uneda, M.; Ishikawa, K.; Suwabe, H.; Tsukada, H. (Kanazawa Institute
of Technology)
Processes/Polishing, Lapping & ECM/Poster/Abstract/2006
Annual
- Real Time Measurement
of Axial Force and Torque During Polishing
Williams, W. B.; Mullany, B. A. (University of North Carolina at Charlotte)
Processes/Polishing, Lapping & ECM/Poster/Abstract/2006
Annual
- Polisher Life in
Ultra-smoothness Polishing of Magnetic Disk Substrate Using New Double
Side Surface Polishing Machine
Yasui, H.; Yamaguchi, K.; Niki, T.; Otsuka, S.; Nagata, T. (Kumamoto
University)
Processes/Polishing, Lapping & ECM/Poster/Abstract/2006
Annual
Replication
- Large Area Optical
Devices with Glass-pressed/Metal-embedded Subwavelength Grating
Tsuchiya, K.; Komiya, A.; Suzuki, H.; Ooi, T.; Morii, H.; Hamaguchi,
T.; Nakao, M. (The University of Tokyo)
Processes/Replication/Poster/Abstract/2006 Annual
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