ASPE Proceedings, October 26-31, 2003, Portland Oregon
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Technical and Poster Sessions
Session I, Micro Manufacturing
Tuesday, October 28, 2003, 8:15 AM - 10:00 AM
Session Chair: E. Clayton Teague (National Science and Technology Council/NIST)
- Achieving Precision Through System
Engineering (Invited Paper)
van Eijk, J. (Delft University of Technology/Philips CFT); Soemers,
H. M. J. R. (Twente University of Technology/Philips CFT); and Franse,
J. (Philips CFT)
Micromanufacturing/Oral/Abstract/2003 Annual
- Dimensional
Challenges in Printhead Micromachining and Inkjet Writing Systems
(Invited Paper)
Saul, K. (Hewlett Packard Corporation)
Micromanufacturing/Oral/PRESENTATION AVAILABLE/2003
Annual
- Microtechnology-based Energy and
Chemical Systems and Multi-scale Fabrication (Invited Paper)
Paul, B. K.; Drost, K. M. (Oregon State University)
Micromanufacturing/Oral/Abstract/2003 Annual
Session II, Optical Systems and Metrology
Tuesday, October 28, 2003, 10:30 AM - 12:00 PM
Session Chair: Vivek G. Badami (Corning Tropel Corporation)
- High-NA Interference Microscopy
of Complex Surface Structures (Invited Paper)
de Groot, Peter J.; Colonna de Lega, X.; Grigg, David A. (Zygo Corporation)
Optical Systems and Metrology/Oral/Abstract/2003
Annual
- Interferometric Thickness Measurement
of Free Form Silicon Wafers
Jansen, M.; Haitjema, H.; Schellekens, P. H. J. (Eindhoven University
of Technology)
Optical Systems and Metrology/Oral/Abstract/2003
Annual
- Roundness, Angle, Straightness and
Waviness Measurements on Recessed Cones Using Scanning White-light Interferometry
Colonna de Lega, X.; de Groot, P. J. (Zygo Corporation)
Optical Systems and Metrology/Oral/Abstract/2003
Annual
- Stabilization for Atomic Tracking
Control of the Scanning Tunneling Microscope Tip by Referring Regular
Crystalline Surface
Aketagawa, M.; Rerkkumsup, P.; Takada, K.; Togawa, Y.; Thinh, N. T.;
Kozuma, Y. (Nagaoka University of Technology)
Optical Systems and Metrology/Oral/Abstract/2003
Annual
Session III, Equipment Design
Wednesday, October 29, 2003, 8:30 AM - 10:00 AM
Session Chair: Anthony E. Gee (University College, London)
- Lens Mounting Technology for Precision Lithography Optics
(Invited Paper)
Watson, D. (Nikon Research Corporation of America)
Equipment Design/Oral/ABSTRACT NOT AVAILABLE/2003
Annual
- Thin Glass Optic and Silicon Wafer
Deformation and Kinematic Constraint
Forest, C. R.; Akilian, M.; Vincent, G.; Lamure, A.; Schattenburg, M.
L. (Massachusetts Institute of Technology)
Equipment Design/Oral/Abstract/2003 Annual
- Dynamic Friction Coefficient Measurements:
Device and Uncertainty Analysis
Schmitz, T. L.; Action, J.; Ziegert, J.C.; Sawyer, W. G. (University
of Florida)
Equipment Design/Oral/Abstract/2003 Annual
- Design of Detachable Precision
Fixtures which Utilize Hard and Lubricant Coatings to Mitigate Wear
and Reduce Friction Hysteresis
Culpepper, M. L.; Slocum, A. H.; Dibiaso, C. M. (Massachusetts Institute
of Technology)
Equipment Design/Oral/Abstract/2003 Annual
Session IV, Interferometry
Wednesday, October 29, 2003, 10:30 AM - 12:00 PM
Session Chair: David D. Gill (Sandia National Laboratories)
- Fabry-Perot Displacement Metrology with a Femtosecond Laser
(Invited Paper)
Lawall, J. R. (National Institute of Standards and Technology)
Interferometry/Oral/ABSTRACT NOT AVAILABLE/2003
Annual
- A Laser Speckle Sensor for Compound
Rotary-linear Motion Metrology
Shilpiekandula, V.; Trumper, D. L. (Massachusetts Institute of Technology)
Interferometry/Oral/Abstract/2003 Annual
- Developing Atomic-resolution Measurements
Using a Tunable Diode Laser-based Interferometer
Zhou, H.; Damazo, B. N.; Silver, R. (National Institute of Standards
and Technology); and Gonda, S. (Advanced Semiconductor Research Center)
Interferometry/Oral/Abstract/2003 Annual
- New Heterodyne Interferometric
Method of Displacement Measure and Control with a Sub-nanometric Precision
Over a Range of Several Millimeters
Haddad, D.; Topçu, S.; Chassagne, L.; Alayli, Y. (Universite
de Versailles); and Juncar, P. (BNM-INM/CNAM)
Interferometry/Oral/Abstract/2003 Annual
Session V, Precision Machining
Wednesday, October 29, 2003, 3:30 PM - 5:00 PM
Session Chair: Thomas A. Dow (North Carolina State University), and Hashimoto
Hiroshi (Kanagawa Institute of Technology)
- Dynamic Material Properties for
Machining Simulation Using the NIST Pulse-heated Kolsky Bar
Rhorer, R. L. (National Institute of Standards and Technology)
Precision Machining/Oral/Abstract/2003 Annual
- Direct Single Point Diamond Cutting
of Stavax Assisted with Ultrasonic Vibration to Produce Optical Quality
Surface Finish
Liu, X. D.; Ding, X.; Lee, L. C.; Fang, F. Z.; Lim, G. C. (Singapore
Institute of Manufacturing Technology)
Precision Machining/Oral/Abstract/2003 Annual
- Characterizing Residual Stress
in Scribes on Silicon Using Deflection Measurements
Randall, T.; Scattergood, R. O. (North Carolina State University)
Precision Machining/Oral/Abstract/2003 Annual
- Effect of Machining Parameters
on Machining Performance of Micro EDM and Surface Integrity
Yu, Z.; Rajurkar, K. P.; Narasimhan, J. (University of Nebraska-Lincoln)
Precision Machining/Oral/Abstract/2003 Annual
Session VI, Advanced Machines
Thursday, October 30, 2003, 8:30 AM - 10:00 AM
Session Chair: Allen Y. Yi (Ohio State University), and Werner R. Preuss
(Bremen University)
- Ultra-precision Surface Machining by Ion Beams and Plasma Jets
(Invited Paper)
Schindler, A. (Leibniz-Institut für Oberflaechenmodifizierung e.V.
- IOM )
Advanced Machines/Oral/ABSTRACT NOT AVAILABLE/2003
Annual
- An Ultra-high Speed Spindle for
Micro-milling
Ziegert, J. C.; Pathak, J. P. (University of Florida); and Jokiel Jr.,
B. (Sandia National Laboratories)
Advanced Machines/Oral/Abstract/2003 Annual
- Fundamental Analysis on the Novel
3-D Probing Technique for Microparts Using the Optical Fiber Trapping
Hashimoto, T.; Takaya, Y.; Miyoshi, T.; Nakajima, R. (Osaka University)
Advanced Machines/Oral/Abstract/2003 Annual
- Rotary Type Micro-Engineered Tool
Akimoto, K.; Hashimoto, H. (Kanagawa Institute of Technology)
Advanced Machines/Oral/Abstract/2003 Annual
Session VII, Novel Applications
Thursday, October 30, 2003, 10:30 AM - 12:00 PM
Session Chair: Andrew J. Hazelton (Nikon Research Corporation of America),
and Aoyama Hiusayuki (University of Electro-Communications)
- LIGA Fabrication Technology for Micro Systems (Invited Paper)
Henderson, C. C. (Sandia National Laboratories/Livermore)
Novel Applications/Oral/ABSTRACT NOT AVAILALBE/2003
Annual
- Fabrication of a Precision Mandrel
for Replicating Wölter x-ray Optics
Nederbragt, W. W. (Lawrence Livermore National Laboratory)
Novel Applications/Oral/Abstract/2003 Annual
- Pinpoint Chemical Vapor Deposition
of Carbon Nanowire for Nanometer-scale Electronic Devices
Ooi, T.; Kasuya, K.; Tsuchiya, K.; Hamaguchi, T.; Nakao, M. (The University
of Tokyo)
Novel Applications/Oral/Abstract/2003 Annual
- Manufacturing and Quality Control
of the NIST Reference Material 8240 Standard Bullet
Whitenton, E. P.; Johnson, C. E.; Kelly, D. R.; Clary, R.; Dutterer,
B. S.; Ma, L.; Song, J.-F.; Vorburger, T. V. (National Institute of
Standards and Technology)
Novel Applications/Oral/Abstract/2003 Annual
Session VIII, Equipment and Controls
Thursday, October 30, 2003, 1:30 PM - 3:00 PM
Session Chair: Stephen J. Ludwick (Aerotech, Inc.)
- Electromagnetically Driven Fast
Tool Servo
Lu, X.; Trumper, D. L. (Massachusetts Institute of Technology)
Equipment and Controls/Oral/Abstract/2003 Annual
- Error Compensation Using Inverse
Actuator Dynamics
Panusittikorn, W.; Garrard, K. P.; Dow, T. A. (North Carolina State
University)
Equipment and Controls/Oral/Abstract/2003 Annual
- Machining of Freeform Optical Surfaces
by Slow Slide Servo Method
Tohme, Y. F.; Lowe, J. A. (Moore Nanotechnology Systems, Inc.)
Equipment and Controls/Oral/Abstract/2003 Annual
- High Bandwidth Short Stroke Rotary
Fast Tool Servo
Montesanti, R. C. (Lawrence Livermore National Laboratory); and Trumper,
D. L. (Massachusetts Institute of Technology)
Equipment and Controls/Oral/Abstract/2003 Annual
Poster Session
Tuesday, October 28, 2003, 3:30 PM - 5:00 PM
Wednesday, October 29, 2003, 1:30 PM - 3:00 PM
Session Chair: Bradley J. Jared (3M Precision Optics)
Biomedical
- Fabrication of a Microrobot
Movable in Flexible Pipes Like the Large Intestine
Ono, M.; Sasazaki, T.; Kato, N.; Kato, S. (Nippon Institute of Technology)
Biomedical/Poster/Abstract/2003 Annual
Equipment, Machines & Instruments
Analysis & Modeling
- Design and Analysis of Nano-positioning
Stage Driven by Piezoelectric Elements
Choi, K.-B.; Ryu, S. H.; Han, C.-S. (Korea Institute of Machinery &
Materials (KIMM))
Equipment, Machines & Instruments - Analysis
& Modeling/Poster/Abstract/2003 Annual
- Theoretical and Experimental
Study on Surface Finish for Multi-axis CNC Milling
Sahasrabudhe, A.; Liu, X.; Zhang, X.; Yamazaki, K. (University of California-Davis)
Equipment, Machines & Instruments - Analysis
& Modeling/Poster/Abstract/2003 Annual
- Development of an Internet-based
Platform for High-speed Milling Process Parameter Selection
Schmitz, T. L.; Tummond, M.; Duncan, G.; Zahner, C. (University of Florida);
and Snyder, J. P. (TechSolve, Inc.)
Equipment, Machines & Instruments - Analysis
& Modeling/Poster/Abstract/2003 Annual
- Modeling and Investigation
on a Jet Pipe Electrohydraulic Flow Control Servovalve
Somashekhar, S. H.; Singaperumal, M.; Krishnakumar, R. (Indian Institute
of Technology Madras)
Equipment, Machines & Instruments - Analysis
& Modeling/Poster/Abstract/2003 Annual
- Computational Accuracy Analysis
of a Coordinate Measuring Machine Under Static Load
Sousa, A. R.; Bento, D. A. (Federal Center for Technological Education
- Santa Catarina)
Equipment, Machines & Instruments - Analysis
& Modeling/Poster/Abstract/2003 Annual
Controls
- Adaptive Feedforward Cancellation
Viewed from an Oscillator Amplitude Control Perspective
Cattell, J. H.; Byl, M. F.; Trumper, D. L. (Massachusetts Institute
of Technology)
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
- Development of an Electro-dynamic
Planar Motor
Compter, J. C. (Philips CFT); Frissen, P. C. M.; Peijnenburg, A. T.
(Philips CFT NA)
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
- Model-based Control Input
Compensation for Parallel Kinematic Machine Tools
Hadorn, Michael C. (Institute of Machine Tools and Mfg. [IWF-ETH])
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
- Force Feedback Control of
Tool Deflection in Miniature Ball End Milling
Hood, D. W.; Buckner, G. D.; Dow, T. A. (North Carolina State University)
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
- Numerical Control with Surface
Driven Interpolation
Kato, K. (Tokyo University of Science); and Takahashi, N.; Iriguchi,
K. (Mitsubishi Electric Corporation)
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
- Compensatory Control of Thermal
Errors for High-Speed Machine Tools
Kim, K.-D.; Chung, S.-C. (Hanyang University)
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
- Identification of Nonlinear
Characteristics for Precision Servomechanisms
Kim, M.-S.; Chung, S.-C. (Hanyang University)
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
- A Fuzzy Logic Based Adaptive
Feedforward PI Controller for Nanometer Positioning
Lu, X.; Tran, H. D. (University of New Mexico)
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
- Waveform Determination and
Positioning Control of the NanoSlider with Inertial Sliding and Stick-positioning
Shim, J. Y.; Gweon, D.-G. (Korea Advanced Institute of Science &
Technology - KAIST)
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
- Development of Controlled
Surface Acoustic Wave Planar Actuators
Vermeulen, M. M. P. A.; Peeters, F. G. P.; (Philips CFT); and Peijnenburg,
A. T. (Philips CFT NA)
Equipment, Machines & Instruments - Controls/Poster/Abstract/2003
Annual
Design & Testing
- Differentiating Guidance from
Support Functions in Ultra Precision Mechanism Design
Gee, A. E. (University College, London)
Equipment, Machines & Instruments - Design
& Testing/Poster/Abstract/2003 Annual
- Ultraprecision XY Stage with
Millimetre Travel Range Using Leaf-spring Mechanism and Voice-coil Motor
Kang, D.-W.; Kim, D.-M.; Kim, K.-H.; Shim, J.-Y.; Gweon, D.-G. (Korea
Advanced Institute of Science & Technology - KAIST)
Equipment, Machines & Instruments - Design
& Testing/Poster/Abstract/2003 Annual
- Control and Design of a Dual
Servo with Fine 6-axis Stage
Kim, K.-H.; Lee, M.-G.; Kim, D.-M.; Gweon, D.-G. (Korea Advanced Institute
of Science & Technology)
Equipment, Machines & Instruments - Design
& Testing/Poster/Abstract/2003 Annual
- Integrated Design Methodology
for High-Precision/Speed Servomechanisms
Kim, M.-S.; Chung, S.-C. (Hanyang University)
Equipment, Machines & Instruments - Design
& Testing/Poster/Abstract/2003 Annual
- Conceptual Design Support
and Prototyping of a Miniature Machine Tool
Mishima, N. (National Institute of Advanced Industrial Science &
Technology)
Equipment, Machines & Instruments - Design
& Testing/Poster/Abstract/2003 Annual
- Water Energy Drive Spindle
Supported by Water Hydrostatic Bearing for Ultra-precision Machine Tool
Nakao, Y.; Mimura, M.; Kobayashi, F. (Kanagawa University)
Equipment, Machines & Instruments - Design
& Testing/Poster/Abstract/2003 Annual
- Design and Characterization
of an Aerostatic Spherical Bearing
Robertson, A. P.; Slocum, A. H. (Massachusetts Institute of Technology)
Equipment, Machines & Instruments - Design
& Testing/Poster/Abstract/2003 Annual
- Theoretical and Experimental
Determination of the Stiffness Properties of a Capstan Drive
Werkmeister, J. B.; Slocum, A. H. (Massachusetts Institute of Technology)
Equipment, Machines & Instruments - Design
& Testing/Poster/Abstract/2003 Annual
- Experimental Determination
of Kinematic Coupling Repeatability in Industrial and Laboratory Conditions
Willoughby, P. J.; Hart, A. J.; Slocum, A. H. (Massachusetts Institute
of Technology)
Equipment, Machines & Instruments - Design
& Testing/Poster/Abstract/2003 Annual
Mechatronics
- Design and Development of
a High Precision Lens Focussing Mechanism Using Flexure Bearings
Gaunekar, A. S.; Widdowson, G. P.; Srikanth, N.; Guangneng, W. (ASM
Technology Singapore Pte. Ltd.)
Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003
Annual
- Synthesis of the 3D Linux-Based
CNC System for Precision Machines
Kang, B.-K.; Kim, M.-S.; Chung, S.-C. (Hanyang University)
Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003
Annual
- Fabrication of an Inch-worm
Type Mobile Microrobot Movable in Different Diameter and Long Pipes
Kato, S.; Ono, M.; Aizawa, Y.; Nakamura, H. (Nippon Institute of Technology)
Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003
Annual
- Fine Motion Performance of
L-shaped Seal Mechanism with 3 Degrees of Freedom
Kawagoe, K.; Furutani, K. (Toyota Technological Institute)
Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003
Annual
- Design and Developement of
Micro Hopping Robot for Rescue Operation
Misumi, R.; Kurata, S.; Aoyama, H. (University of Electro-Communications)
Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003
Annual
- A Simple Hybrid Positioning
Stage With <1nm Resolution
Okazaki, Y. (National Institute of Advanced Industrial Science &
Technology); Ichikawa, S. (Sigma Tech Co. Ltd.); and Otsuka, J. (Sizuoka
Institute of Science and Technology)
Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003
Annual
- Fabrication of an Artificial
Earthworm Type Mobile Inspection Robot Movable in 100 m Long Pipes
Ono, M.; Kato, M.; Naito, T.; Sasazaki, T.; Kato, S. (Nippon Institute
of Technology)
Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003
Annual
- Nonlinear Friction Behavior
of Discontinuity at Stroke End in a Ball Guide Way
Tsuruta, K.; Futami, S. (Yaskawa Electric Corporation); and Murakami,
T. (Kyushu University)
Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003
Annual
- Global Tele-operation for
Micro-assembly Tasks
Zaeh, M. F.; Ehrenstrasser, M.; Schilp, J. (Technische Universität
München)
Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2003
Annual
MEMS & Nanotechnology
- Multi-axis Nano Positioning
Flexure Stage Using Magnetically Preloaded PZT Actuator
Han, C.-S.; Baek, S. (Korea Institute of Machinery & Materials [KIMM]);
Kang, J. O.; Hong, S. W. (Kumoh National Institute of Technology); and
Noh, M. D. (Chungnam National University)
Equipment, Machines & Instruments - MEMS
& Nanotechnology/Poster/Abstract/2003 Annual
- Developemnt of a Micro Screw
Thread and a Micro Gear Utilized Extra Fine Wires
Honda, S. (Tokyo Metropolitan Institute of Technology)
Equipment, Machines & Instruments - MEMS
& Nanotechnology/Poster/Abstract/2003 Annual
- A Dual Stage Compliant Positioning
System with Integrated Planar Optical Grating for Position Feedback
Mueller, U. (Optomech)
Equipment, Machines & Instruments - MEMS
& Nanotechnology/Poster/Abstract/2003 Annual
- The Application of Surface
Mount Technology to Multi-Scale Process Intensification
Sharma, N.; Paul, B. K. (Oregon State University)
Equipment, Machines & Instruments - MEMS
& Nanotechnology/Poster/Abstract/2003 Annual
- A Comparison of the Mass Transfer
Performance of Conventional and Micromanufactured Porous Membranes
Tseng, C. H.; Paul, B. K. (Oregon State University)
Equipment, Machines & Instruments - MEMS
& Nanotechnology/Poster/Abstract/2003 Annual
Novel Systems
- Novel Ultraprecise Tool Alignment
Setup for Contour Boring and Ball-end Milling
Brinksmeier, E.; Gläbe, R.; Autschbach, L. (Bremen University)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
- A New Kind of Parallel Mechanism
Machine Tools with an Integrated Cartesian Guiding and Metrology Mechanism
Chen, J.-S.; Hsu, W.-Y. (National Chung Cheng University)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
- Large Displacement Flexure
Based Nano-Precision Motion Stage for Vacuum Environments
Choi, Y.-J.; Sreenivasan, S. V. (The University of Texas at Austin)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
- Design of Precision Manipulators
Using Binary Actuation and Differential Compliant Mechanisms
Culpepper, M. L.; Chen, S.-C. (Massachusetts Institute of Technology)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
- Design of Low-cost Kinematic
Couplings Using Formed Balls and Grooves in Sheet Metal Parts
Culpepper, M. L.; Slocum, A. H.; Bailey, P. (Massachusetts Institute
of Technology)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
- Precise Manipulation Control
on Three Versatile Micro Robots for Flexible Micro Handling
Fuchiwaki, O.; Aoyama, H. (University of Electro-Communications)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
- Micro Turning System 3: A
Super Small CNC Precision Lathe for Microfactories
Ito, S.; Iijima, D.; Hayashi, A. (Nano Corporation); Aoyama, H. (University
of Electro-Communications); and Yamanaka, M. (Tohoku University)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
- An Inchworm Type In-pipe
Mobile Microrobot Driven by Three Gas-liquid Phase-change Actuators
Kato, S.; Naito, T.; Ono, M.; Matsuda, S. (Nippon Institute of Technology)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
- Structured Surfaces Damping
Enhancements at Mechanical Interfaces
Larsen, E. R.; Davies, M. A.; Smith, K. S.; Nuttall, M. (University
of North Carolina-Charlotte)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
- Machine for Precision High-speed
Cutting of Semiconductor Wafers
Wells, A. B.; Subrahmanyan, P. K. (Electro Scientific Industries, Inc.)
Equipment, Machines & Instruments - Novel
Systems/Poster/Abstract/2003 Annual
Metrology
Analysis & Modeling
- Traceable Calibration of
Non-linearities in Laser Interferometers
Cosijns, S.; Haitjema, H.; Schellekens, P. H. J. (Eindhoven University
of Technology)
Metrology - Analysis & Modeling/Poster/Abstract/2003
Annual
- Investigation of Optical
Clean Zone Boundaries Using Phoenics
Gao, Y.; Tse, S.; Woon, S.; Tao, Z. (Hong Kong University of Science
& Technology)
Metrology - Analysis & Modeling/Poster/Abstract/2003
Annual
- Design and Analysis of Shrink
and Press Fit Joints
Morrisey, P.; Eischen, J.; Dow, T. A. (North Carolina State University)
Metrology - Analysis & Modeling/Poster/Abstract/2003
Annual
- Time Series Modelling of
Endmilling Process for Mode Estimation
Yoon, M. C.; Kim, B. T. (Pukyong National University); and Park, D.
S. (Incheon University)
Metrology - Analysis & Modeling/Poster/Abstract/2003
Annual
Form & Geometry
- Defining the Measurand in
Radius of Curvature Measurements
Davies, A. D. (University of North Carolina-Charlotte); and Schmitz,
T. L. (University of Florida)
Metrology - Form & Geometry/Poster/Abstract/2003
Annual
- Alternative Artifacts for
Evaluating Scanning CMM Performance
Morse, E. P.; Farooqui, S. A. (University of North Carolina-Charlotte)
Metrology - Form & Geometry/Poster/Abstract/2003
Annual
- Study on Support Method in
Sori Measurement of 300mm Silicon Wafer
Natsu, W.; Ito, Y.; Kunieda, M. (Tokyo University of Agriculture &
Technology); and Naoi, K. (Kuroda Precision Industries Ltd.)
Metrology - Form & Geometry/Poster/Abstract/2003
Annual
- Optical Polygon Calibration
Using Only One Autocollimator
Nava-Sandoval, R.; Díaz-Uribe, R. (Universidad Nacional Autonoma
de Mexico)
Metrology - Form & Geometry/Poster/Abstract/2003
Annual
Instrumentation, Design & Testing
- Optimal Design of High Stiffness
XYZ 3-axis Stage for AFM System
Kim, D.-M.; Kang, D.-W.; Shim, J.-Y.; Gweon, D.-G. (Korea Advanced Institute
of Science & Technology - KAIST); and Eom, C. I. (Korea Institute
of Standard and Science - KRISS)
Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003
Annual
- Artifacts and Test Procedures
for Contour Measuring Instruments
Neugebauer, M.; Jusko, O. E.; Neuschaefer-Rube, U.; Wäldele, F.
(Physikalisch-Technische Bundesanstalt)
Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003
Annual
- Development of Ultraprecise
Gear Measuring Instrument / First Report: Evaluation on the Accuracy
of Principal Axis
Ogasawara, H.; Maeda, N.; Ogasawara, M.; Shibuya, Y. (Ogasawara Precision
Laboratory Ltd.)
Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003
Annual
- Laser Tracker Compensation
Using Displacement Interferometry
Sawyer, D. S.; Fronczek Jr., C. (National Institute of Standards and
Technology)
Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003
Annual
- Tip Waviness Compensation
in a Polar Profilometer
Sohn, A.; Garrard, K. P. (North Carolina State University)
Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003
Annual
- Web-based Precision Dimensional
Verification System for Rapid Design and Manufacture
Song, I.-H.; Chung, S.-C. (Hanyang University)
Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003
Annual
- A Study on Laser-CCD Spindle
Error Measurement System
Su, I.; Zhang, X.; Liu, X.; Yamazaki, K. (University of California-Davis)
Metrology - Instrumentation, Design & Testing/Poster/Abstract/2003
Annual
Machine Tool Metrology
- Performance Evaluation of
a Prototype Machine Tool for Machining Meso-scaled Parts
Damazo, B. N.; Donmez, A.; McGlauflin, M. L.; Soons, J. A. (Nat'l Institute
of Standards & Technology); Bryant, S. C. (University of North Carolina-Charlotte);
and Werkmeister, J. B.; Slocum, A. H. (Massachusetts Institute of Technology)
Metrology - Machine Tool Metrology/Poster/Abstract/2003
Annual
- Measurement of Systematic
Geometric Errors in Coordinate Measuring Machines
Hernández, O. I. (Centro Nacional de Metrología [CENAM]);
and Trapet, E. (UNIMETRIK S.A.)
Metrology - Machine Tool Metrology/Poster/Abstract/2003
Annual
- Data Mining of Conditions
for Machine Tools Based on Machining Information
Saito, M.; Kobayashi, Y.; Shirai, K. (Nihon University)
Metrology - Machine Tool Metrology/Poster/Abstract/2003
Annual
Measurement Uncertainty
- Inspection Strategy for LIGA
Microstructures Using a Programmable Optical Microscope
Ceremuga, J. T.; Aigeldinger, G. (Sandia National Laboratories)
Metrology - Measurement Uncertainty/Poster/Abstract/2003
Annual
- Measurement Uncertainty in
Scanning Instruments Due to Data Acquisition Methods
Kummailil, J.; Geiger, D. J.; Bergstrom, T.; Varbanova, V.; Brown, C.
A. (Worcester Polytechnic Institute)
Metrology - Measurement Uncertainty/Poster/Abstract/2003
Annual
- Uncertainty of Measurements
Using MultiSensor CMMs
Morse, E. P.; Bhamidi, K. P. (University of North Carolina-Charlotte)
Metrology - Measurement Uncertainty/Poster/Abstract/2003
Annual
- A New Method to Measure Runout
of Motorized End-milling Spindles at Very High Speed Rotations
Nakkiew, W.; Lin, C. W.; Tu, J. F. (Purdue University)
Metrology - Measurement Uncertainty/Poster/Abstract/2003
Annual
- Evaluation of Measurement
Uncertainty in Gear Measuring Instruments by Using the Monte Carlo Simulation
Tanaka, H. (National Metrology Institute of Japan); Shimojo, M.; Kajitani,
M. (The University of Electro-Communications); Sato, T.; Takeda, R.
(Osaka Seimitsu Kikai Co.,Ltd.); Kojima, M. (Kanzaki Kokyukoki Mfg.
Co.,Ltd.); Yuzaki, M. (Tokyo Technical Instruments Inc.); Kato, S. (Asano
Gear Co.,Ltd.); Shibuya, Y. (Ogasawara Precision Hob Laboratory Ltd.);
and Kondo, T. (AIST)
Metrology - Measurement Uncertainty/Poster/Abstract/2003
Annual
Surface & Subsurface
- Surface Metrology Software
Variability in Two-Dimensional Measurements
Bui, S. H.; Vorburger, T. V. (National Institute of Standards &
Technology); and Muralikrishnan, B.; Raja, J. (University of North Carolina-Charlotte)
Metrology - Surface & Subsurface/Poster/Abstract/2003
Annual
- Large Field-of-view Scanning
White-light Interferometers
Colonna de Lega, X.; Biegen, J. F.; de Groot, P. J. (Zygo Corporation);
and Häusler, G.; Andretzky, P. (University Erlangen)
Metrology - Surface & Subsurface/Poster/Abstract/2003
Annual
- Accuracy Assessment for a
Lateral Shearing Interferometer
Liu, X.; Gao, Y. (Hong Kong University of Science & Technology)
Metrology - Surface & Subsurface/Poster/Abstract/2003
Annual
- A Surface Texture Toolbox
for Turning Process Diagnostics
Muralikrishnan, B.; Raja, J. (University of North Carolina-Charlotte);
and Dawson, T.; Kurfess, T. R. (Georgia Institute of Technology)
Metrology - Surface & Subsurface/Poster/Abstract/2003
Annual
- UV Raman Scattering in 6H-SiC
Indents
Huening, J. J.; Nemanich, R. J. (North Carolina State University); Jang
, J.-I.; Pharr, G. M. (The University of Tennessee); and Chen, X.-B.;
Bergman, L. (University of Idaho)
Metrology - Surface & Subsurface/Poster/Abstract/2003
Annual
- Scale-space Analysis of Line
Edge Roughness on 193 nm Lithography Test Structures
Orji, N. G., Raja, J. (University of North Carolina-Charlotte); and
Vorburger, T. V.; Gu, X. (National Institute of Standards and Technology)
Metrology - Surface & Subsurface/Poster/Abstract/2003
Annual
Optics
Optical Fabrication
- Fabrication of Micro Grooves
Fang, F. Z.; Wu, H.; Liu, X. D.; Lim, G. C.; Liu, Y. C.; Ng, S. T. (Singapore
Institute of Manufacturing Technology)
Optics - Optical Fabrication/Poster/Abstract/2003
Annual
- Corrective Figuring of
Optical Glass by Nano-abrasion Machining
Horiuchi, O.; Y.; Yamaguchi, S.; Suyama, A.; Shibutani, H.; Suzuki,
H. (Toyohashi University of Technology)
Optics - Optical Fabrication/Poster/Abstract/2003
Annual
Processes
Grinding
- Simulating Vibration Assisted
Grinding with Segmented Wheels
Fan, X.; Miller, M. H. (Michigan Technological University)
Processes - Grinding/Poster/Abstract/2003 Annual
- Investigations Regarding the
Interdependence of Spindle Load and Machine Performance During Slicing
Gatzen, H. H.; Morsbach, C.; Karyazin, A.; Günzel, G. (Hanover
University); and Jones, G. M. (Seagate Technology)
Processes - Grinding/Poster/Abstract/2003 Annual
- Creep Feed Profile Grinding
of High Speed Tool Steels with Ultrafine-Polycrystalline cBN Abrasives
Ichida, Y.; Sato, R.; Morimoto, Y.; Inoue, Y. (Utsunomiya University)
Processes - Grinding/Poster/Abstract/2003 Annual
- Enhancement of Grinding Performance
Based on Improvement of Uniformity in Structure in Vitrified Bonded
cBN Wheels
Kajino, H.; Ichida, Y.; Sato, R.; Kiminami, H. (Utsunomiya University);
and Hoshino, K.; Sato, M. (Mitsui Mining & Smelting Co., Ltd.)
Processes - Grinding/Poster/Abstract/2003 Annual
- Effect of Grinding Fluid Supply
on Ultra-smoothness Grinding of Fine Ceramics
Yasui, H.; Sawa, T. (Kumamoto University)
Processes - Grinding/Poster/Abstract/2003 Annual
- Quantitative Analysis of the
Cutting Edge Behavior on Wheel Surface in Long Grinding Process
Yasui, H.; Hiraki, Y.; Sakata, M.; Terakawa, R. (Kumamoto University)
Processes - Grinding/Poster/Abstract/2003 Annual
- Grinding Wheel Loading With
and Without Vibration Assistance
Zhang, P.; Miller, M. H. (Michigan Technological University)
Processes - Grinding/Poster/Abstract/2003 Annual
Machining
- Closed Loop Control of Tool
Deflection
Clayton, S.; Freitag, K.; Dow, T. A. (North Carolina State University)
Processes - Machining/Poster/Abstract/2003 Annual
- An Investigation of the Dynamic
Absorber Effect in High-Speed Machining
Duncan, G. S., Tummond, M.; Schmitz, T. L. (University of Florida)
Processes - Machining/Poster/Abstract/2003 Annual
- Machining of Hard Coatings
in Optical Quality
Grimme, D.; Preuss, W. R.; Brinksmeier, E.; (Bremen University)
Processes - Machining/Poster/Abstract/2003 Annual
- Temperature Effects in Micro-machinability
of Plastics
Horio, K.; Kuwan, L.; Takezawa, H.; Yamazaki, T. (Saitama University)
Processes - Machining/Poster/Abstract/2003 Annual
- Study on Slurry Actions in
Slicing Groove and Slicing Characteristics at Multi-Wire Saw
Ishikawa, K.; Suwabe, H.; Itoh, S. (Kanazawa Institute of Technology)
Processes - Machining/Poster/Abstract/2003 Annual
- Effects of Nitrogen Gas Atmosphere
in Oxygen-free Copper Precision Cutting
Kaneeda, T.; Hayashi, J.; Anthony, L. (Okayama University of Science);
Yokomizo, S. (Industrial Technology Center of Okayama Prefecture); Shimada,
S. (Osaka Electro-Communication University); and Higuchi, M. (Kansai
University)
Processes - Machining/Poster/Abstract/2003 Annual
- Application of the Run Length
Encoding Algorithm to the Fabrication of Non-rotationally Symmetric
Surfaces
Kim, H.-S.; Lee, D.-H.; Lee, J.-S. (Inst. for Advanced Engineering (IAE))
Processes - Machining/Poster/Abstract/2003 Annual
- Nanostructured Yttrium-stabilized
Zirconia/Alumina (YSZA) Cutting Insert for Machining High-speed M1 Tool
Steel
Liu, X.; Zhang, B.; Zhou, Z. (University of Connecticut)
Processes - Machining/Poster/Abstract/2003 Annual
- Nonlinear Effects in Precision
Machining Engineering Materials
Luo, X.; Cheng, K. (Leeds Metropolitan University)
Processes - Machining/Poster/Abstract/2003 Annual
- Elliptical Vibration Assisted
Diamond Turning
Negishi, N.; Dow, T. A. (North Carolina State University)
Processes - Machining/Poster/Abstract/2003 Annual
- Analysis of Accuracy and Cutting
Forces in Groove Cutting
Onozuka, H.; Asakawa, Y.; Yamanaka, T.; Maeda, Y. (Hitachi, Ltd.)
Processes - Machining/Poster/Abstract/2003 Annual
- Development of a Tunable Ultrasonic
Vibration-assisted Diamond Turning Instrument
Overcash, J. L.; Cuttino, J. F. (University of North Carolina-Charlotte)
Processes - Machining/Poster/Abstract/2003 Annual
- Electrical and Optical Detection
and Heating of the High Pressure Metallic Phase of Silicon In-situ During
Scratching with Diamond and its Effect on the Material’s Hardness
Patten, J. A. (Western Michigan University); and Dong, L.; Miller, J.
A. (University of North Carolina-Charlotte)
Processes - Machining/Poster/Abstract/2003 Annual
- Chucking Parts for Ultra-precision
Diamond Turning
Sivignon, E. (INSA Lyon); and Dutterer, B. S.; McGlauflin, M. L. (National
Institute of Standards and Technology)
Processes - Machining/Poster/Abstract/2003 Annual
- Ductile Mode Cutting with
Torsional Vibration for Glass Material
Tangpornprasert, P.; Nunokawa, K.; Warisawa, S.; Mitsuishi, M. (The
University of Tokyo)
Processes - Machining/Poster/Abstract/2003 Annual
- Edge Rounding Method by Means
of Water Jet for Cylindrical Rollers of Bearing
Warisawa, S.; Akamatsu, H. (The University of Tokyo)
Processes - Machining/Poster/Abstract/2003 Annual
- Inspection of Micro-drilling
Processes by Using the On-machine Vision
Yoon , H.-S.; Chung, S.-C. (Hanyang University)
Processes - Machining/Poster/Abstract/2003 Annual
Manufacturing
- Fabrication of the Double Shell
2 Laser Targets Via the Bonding of Hemispheres
Bono, M. J.; Hibbard, R. L.; Davis, P. J. (Lawrence Livermore National
Laboratory)
Processes - Manufacturing/Poster/Abstract/2003
Annual
- Precision Manufacturing of
Inertial Confinement Fusion Double Shell Laser Targets
Hibbard, R. L.; Bono, M. J.; Amendt, P. A.; Bennett, D. W.; Castro,
C. (Lawrence Livermore National Laboratory)
Processes - Manufacturing/Poster/Abstract/2003
Annual
- Finite-Element Simulation of
the Uniaxial Die Pressing of Ceramic Powder
Kok, C. K.; Kwon, P. Y.; Rachedi, R. R.; Klenow, B. A. (Michigan State
University)
Processes - Manufacturing/Poster/Abstract/2003
Annual
- Precise Gastight Sealing for
Bio/chemical Microchip
Tsuchiya, K.; Ooi, T.; Yamaji, A.; Wakamatsu, K.; Ishii, H.; Hamaguchi,
T.; Nakao, M. (The University of Tokyo)
Processes - Manufacturing/Poster/Abstract/2003
Annual
- Algorithm to Establish Manufacturing
Process of New Functional Materials
Watanabe, T. (FT Design Laboratory)
Processes - Manufacturing/Poster/Abstract/2003
Annual
Non-conventional
- Experimental Analysis of Deposition
Process of Lubricant Surface by Electrical Discharge Machining with
Molybdenum Disulfide Powder Suspended in Working Oil
Furutani, K.; Shimizu, Y. (Toyota Technological Institute)
Processes - Non-conventional/Poster/Abstract/2003
Annual
- Investigations on Feasibility
of Sub-micrometer Order Manufacturing Using Micro-EDM
Han, F.; Yamada, Y.; Kawakami, T.; Kunieda, M. (Tokyo University of
Agriculture & Technology)
Processes - Non-conventional/Poster/Abstract/2003
Annual
- Silicon on Insulator (SOI)
Wafer Polishing Using Magnetorheological Finishing (MRF) Technology
Mooney, J. T.; Tricard, M.; Dumas, P. R.; Golini, D. (QED Technologies)
Processes - Non-conventional/Poster/Abstract/2003
Annual
- Surface Modification of EDMed
Surface by Wide-area Electron Beam Irradiation
Okada, A.; Uno, Y. (Okayama University); Uemura, K.; Raharjo , P. (Nagata
Seiki Co. Ltd.); and Furukawa, T. (Sodick Co., Ltd.)
Processes -Non-conventional/Poster/Abstract/2003
Annual
- Superfinishing of Alloy Steels
Using Magnetic Abrasive Finishing Process
Singh, D. K.; Jain, V. K.; Raghuram, V. (Indian Institute of Technology
- Kanpur)
Processes - Non-conventional/Poster/Abstract/2003
Annual
- Internal Magnetic Abrasive
Finishing for Austenitic Stainless Steel Tubes Bent Using High Frequency
Induction Bending
Yamaguchi, H.; Shinmura, T.; Yokoo, H.; Aizawa, T. (Utsunomiya University)
Processes - Non-conventional/Poster/Abstract/2003
Annual
Polishing, Lapping & ECM
- Lapping of Flat Surfaces
with Two-Metallic Tools
Barylski, A. W. (Technical University of Gdansk)
Processes - Polishing, Lapping & ECM/Poster/Abstract/2003
Annual
- Chemical-mechanical Planarization
of a SU-8/Copper Combination for MEMS
Gatzen, H. H.; Morsbach, Caspar; Kourouklis, C. (Hannover University)
Processes - Polishing, Lapping & ECM/Poster/Abstract/2003
Annual
- Polishing Processes for Structured
Surfaces
Gessenharter, A.; Riemer, O.; Brinksmeier, E. (Bremen University)
Processes - Polishing, Lapping & ECM/Poster/Abstract/2003
Annual
- Pad Contact Area Characterization
in Chemical Mechanical Planarization Using Micro Molding Technology
Lee, S.; Kim, H.; Dornfeld, D. A. (University of California at Berkeley);
and Jeong, H. D. (Pusan National University)
Processes - Polishing, Lapping & ECM/Poster/Abstract/2003
Annual
- Development of Cavitation
Aided Machining for Finishing Fine Surface
Ohashi, K.; Tsukamoto, S.; Nakajima, T. (Okayama University)
Processes - Polishing, Lapping & ECM/Poster/Abstract/2003
Annual
- A New Lapping Film with Agglomerative
Super Fine Abrasives for Large-diameter Workpiece Surface Finishing
Zhang, J., Endo, H. (Ricoh Company, Ltd.); and Enomoto, T. (The University
of Tokyo)
Processes - Polishing, Lapping & ECM/Poster/Abstract/2003
Annual
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