ASPE Proceedings, October 20 - 25, 2002, St. Louis, Missouri

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Technical and Poster Sessions

Session I, New Directions in Precision Engineering
Tuesday, October 22, 2002, 8:00 AM - 10:00 AM
Session Chair: Michele H. Miller (Michigan Technological University)

1. Requirements for Precision Engineering in the Development of Miniaturized Diagnostic Systems  (Invited Paper)
   Müller, U. R.; Patno, T.; Cork, W.; Marla, S.; Storhoff, J. (Nanosphere, Inc.); and Bao, P.; Yuen, P. K. (Corning Inc.)
   New Directions in Precision Engineering/Oral/Abstract/2002 Annual
2. Precision Requirements in Photonics Automation and Assembly (Invited Paper)
   Formica, M. K. (Axsys Technologies, Inc.)
   New Directions in Precision Engineering/Oral/ABSTRACT NOT AVAILABLE/2002 Annual
3. To be Announced (Invited Paper)
   New Directions in Precision Engineering/Oral/ABSTRACT NOT AVAILABLE/2002 Annual

Session II, Manufacturing at the Small Scale
Tuesday, October 22, 2002, 10:30 AM - 12:00 PM
Session Chair: Bernhard Jokiel, Jr. (Sandia National Laboratories)

1. Development of Micro Grinding Process Using Micro EDM Trued Diamond Tools  (Invited Paper)
   Wada, T.; Masaki, T. (Matsushita Electric Industrial Co., Ltd); and Davis, D. W. (Precitech, Inc.)
   Manufacturing at the Small Scale/Oral/Abstract/2002 Annual
2. High Aspect Ratio SNOM Probe Fabricated Using Electron Beam Deposition and Focused Ion Beam
   Tsuchiya, K.; Ooi, T.; Sakamaki, Y.; Nakao, M. (The University of Tokyo)
   Manufacturing at the Small Scale/Oral/Abstract/2002 Annual
3. Smart Palm-size Injection Mold Using Zone-In-Cavity and Cycle-by-Cycle Process Controls to Precisely Replicate Miniature Products
   Yoda, M.; Nakao, M. (The University of Tokyo)
   Manufacturing at the Small Scale/Oral/Abstract/2002 Annual
4. Microscale Patterning of PZN-PT Single Crystals by Laser-induced Etching
   Moon, K. S.; Levy, M.; Hong, Y. K.; Ghimire, S. (Michigan Technological University)
   Manufacturing at the Small Scale/Oral/Abstract/2002 Annual

Session III, Precision in Wafer Scale Processing
Wednesday, October 23, 2002, 8:15 AM - 10:00 AM
Session Chair: R. Ryan Vallance (Unversity of Kentucky)

1. Advanced CMP Wafer Profile Control Using Multizone Carrier Technology (Invited Paper)
   Ferra, M.; Schlueter, J.; Korovin, N.; Shultz, S.; Tushingham, R.; Epshteyn, Y. (SpeedFam-IPEC)
   Precision in Wafer Scale Processing/Oral/ABSTRACT NOT AVAILABLE/2002 Annual
2. Investigation of Thermo-chemical Polishing and Laser Ablation of CVD Diamond Film
   Chao, C. L.; Liu, Y. H. (Tam-Kang University); Ma, K. J. (Chung-Hwa University); Chen, T. T. (Chung-Cheng Institute of Technology); and Lin, H. Y.; Chang, Y. M. (Industrial Technology Research Institute)
   Precision in Wafer Scale Processing/Oral/Abstract/2002 Annual
3. Corrective Planarization Method Using Chemical Mechanical Polishing Assisted by Laser Particle Trapping
   Kimura, K. (Sony EMCS Corporation); and Miyoshi, T.; Takaya, Y.; Takahashi, S. (Osaka University)
   Precision in Wafer Scale Processing/Oral/Abstract/2002 Annual
4. New Optical Measurement Technique for Si Wafer Surface Defects Using Annular Illumination with Crossed Nicols
   Takahashi, S.; Miyoshi, T.; Takaya, Y.; Abe, T. (Osaka University)
   Precision in Wafer Scale Processing/Oral/Abstract/2002 Annual

Session IV, Standards in Metrology
Wednesday, October 23, 2002, 10:30 AM - 12:00 PM
Session Chair: Vivek G. Badami (Corning Tropel Corporation)

1. A Tool for Determining Task-Specific Measurement Uncertainties in GD&T Parameters Obtained from Coordinate Measuring Machines
   Summerhays, K. D.; Henke, M. P.; Henke, R. P.; Baldwin, J. M. (MetroSage, LLC); and Brown, C. W. (Honeywell, Inc.)
   Standards in Metrology/Oral/Abstract/Annual_2002
2. White-light Interferometer with Internal Length Standard
   Schmit, J.; Novak, E.; Olszak, A. G. (Veeco Metrology)
   Standards in Metrology/Oral/Abstract/Annual_2002
3. Film Thickness Standards on the Nanometer Scale
   Hasche, K.; Ulm, G.; Herrmann, K.; Krumrey, M.; Ade, G.; Stümpel, J.; Busch, I.; Thomsen-Schmidt, P. (Physikalisch-Technische Bundesanstalt); Schädlich, S. (Fraunhofer Institute for Material and Beam Technology (IWS)); Schindler, A.; Frank, W. (Institute for Surface Modification (IOM)); and Procop, M.; Beck, U. (Federal Institute for Material Research and Testing (BAM))
   Standards in Metrology/Oral/Abstract/Annual_2002
4. Atomic Force Microscopy of Semiconductor Line Edge Roughness
   Orji, N. G.; Raja, J. (University of North Carolina-Charlotte); and Vorburger, T. V. (National Institute of Standards and Technology)
   Standards in Metrology/Oral/Abstract/Annual_2002

Session V, Optical Metrology
Wednesday, October 23, 2002, 3:30 PM - 5:00 PM
Session Chair: Anthony E. Gee (Cranfield University)

1. Miniature Interferometers for Precise Distance Measurements  (Invited Paper)
   Schott, W. (SIOS Meßtechnik GmbH); and Jäger, G. (Technical University of Ilmenau)
   Optical Metrology/Oral/Abstract/Annual 2002
2. Figure Metrology of a Free-Form Optical Surface
   Sohn, A.; Garrard, K. P. (North Carolina State University); and Ohl, R. G.; Mink, R.; Chambers, V. J. (NASA/Goddard Space Flight Center)
   Optical Metrology/Oral/Abstract/Annual 2002
3. A Metrological Atomic Force Microscope
   Stein, A. J.; Trumper, D. L. (Massachusetts Institute of Technology); and Hocken, R. J. (University of North Carolina-Charlotte)
   Optical Metrology/Oral/Abstract/Annual 2002
4. Effects of Varying Incident Angle on the Contrast of the Fringe Metrology Using a Fresnel Zone Plate
   Joo, C.; Pati, G. S.; Chen, C. G.; Konkola, P. T.; Heilmann, R. K.; Schattenburg, M. L. (Massachusetts Institute of Technology); and Liddle, A; Anderson, E. H. (Lawerence Berkeley National Laboratory)
   Optical Metrology/Oral/Abstract/Annual 2002

Session VI, Advances In Traditional Manufacturing
Thursday, October 24, 2002, 8:15 AM - 10:00 AM
Session Chair: James F. Cuttino (University of North Carolina at Charlotte)

1. Machining of Monolithic Aerospace Components (Invited Paper)
   Smith, S. (University of North Carolina at Charlotte)
   Advances in Traditional Manufacturing/Oral/ABSTRACT NOT AVAILABLE/Annual 2002
2. Fast Optical Form Measurements of Rough Cylindrical and Conical Surfaces in Diesel Fuel Injection Components
   Dunn, T. J.; Michaels, R.; Lee, S.; Tronolone, M. J.; Kulawiec, A. W. (Corning Tropel Corporation)
   Advances in Traditional Manufacturing/Oral/Abstract/Annual 2002
3. Piezoelectric Tool Actuator for Precision Machining on Conventional CNC Turning Centers
   Woronko, A.; Huang, J.; Altintas, Y. (The University of British Columbia)
   Advances in Traditional Manufacturing/Oral/Abstract/Annual 2002
4. Evaluation of One- and Two-Sided Geometric Fitting Algorithms in Industrial Software
   Shakarji, C. M. (National Institute of Standards and Technology)
   Advances in Traditional Manufacturing/Oral/Abstract/Annual 2002

Session VII, Precision Surfaces
Thursday, October 24, 2002, 10:30 AM - 12:00 PM
Session Chair: Bradley H. Jared (Corning Inc.)

1. Influences on the Polishing Process of Optical Glasses Using Synchrospeed-Kinematics
   Klocke, F.; Dambon, O. (Fraunhofer Institut für Produktionstechnologie)
   Precision Surfaces/Oral/Abstract/Annual 2002
2. Burnishing of Hardened Steel Components -- An Alternative Method of Finishing
   Luca, L.; Neagu-Ventzel, S.; Marinescu, I. D. (The University of Toledo)
   Precision Surfaces/Oral/Abstract/Annual 2002
3. Elliptical Vibration Assisted Diamond Turning
   Dow, T. A.; Negishi, N.; Sohn, A. (North Carolina State University)
   Precision Surfaces/Oral/Abstract/Annual 2002
4. High Precision Photomask Polishing with Magneto-Rheological Finishing (MRF)
   Tricard, M.; Golini, D. (QED Technologies)
   Precision Surfaces/Oral/Abstract/Annual 2002

Session VIII, Errors Sources in Precision Manufacturing
Thursday, October 24, 2002, 1:30 PM - 3:00 PM
Session Chair: Patrice G. Kerevel (Corning Inc.)

1. Error Budget as a Design Tool for Ultra-precision Diamond Turning Machines
   Walter, M. M.; Norlund, B.; Koning, R. J.; Roblee, J. W. (Precitech, Inc.)
   Errors Sources in Precision Manufacturing/Oral/Abstract/Annual 2002
2. Prediction of Surface Location Error by Time Finite Element Analysis and Euler Integration
   Schmitz, T. L. (University of Florida); Bayly, P. V. (Washington University in St. Louis); and Soons, J. A.; Dutterer, B. (National Institute of Standards and Technology)
   Errors Sources in Precision Manufacturing/Oral/Abstract/Annual 2002
3. Bonding Fixture Tolerances for High-Volume Metal Microlamination Based on Fin Buckling and Laminae Misalignment Behavior
   Wattanutchariya, W. (Chiangmai University); and Paul, B. K. (Oregon State University)
   Errors Sources in Precision Manufacturing/Oral/Abstract/Annual 2002
4. Six Degree of Freedom Optical Sensor for Dynamic Measurement of Linear Axes
   Kroll, J. J.; Patterson, S. R. (University of North Carolina-Charlotte)
   Errors Sources in Precision Manufacturing/Oral/Abstract/Annual 2002

Poster Session I
Tuesday, October 22, 2002, 3:30 PM - 5:00 PM

Equipment, Machines & Instruments

Analysis & Modeling

1. Visual Based Motion Error Compensation for Precise Vesatile Micro Robot
   Fuchiwaki, O.; Aoyama, H. (University of Electro-Communications)
   Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/Annual 2002
2. 2 DOF Dynamic Accuracy Monitoring for Robot and Machine Tool Manipulators
   Hanak, T.; Zirn, O.; Ruoff, W. (University of Applied Sciences Esslingen)
   Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/Annual 2002
3. Kinematic Coupling Interchangeability
   Hart, A. J.; Slocum, A. H. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/Annual 2002
4. Novel Linear Motor for High Precision Stage of Semiconductor Lithography System
   Lee, M-G.; Kim, K.; Gweon, D-G. (Korea Advanced Institute of Science & Technology)
   Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/Annual 2002
5. Construction and Alignment of a Kolsky Bar Apparatus
   Rhorer, R. L.; Kennedy, M. D.; Dutterer, B. S.; Burns, T. J. (Nat'l Institute of Standards & Technology); and Davies, M. A. (University of North Carolina-Charlotte)
   Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/Annual 2002
6. NanoSlider Modeling and Waveform Adaptation for Positioning Control
   Shim, J. Y.; Kim, K.; Gweon, D-G. (Korea Advanced Institute of Science & Technology)
   Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/Annual 2002

Controls

1. Track/Focus Control of Cantilever Type Near Field Optical Head for High Density and Fast Data Transfer Rate Data Storage Device
   Lee, S-Q.; Song, K-B.; Kim, J-H.; Kim, E-K.; Park, K-H. (Electronics and Telecommunications Research Institute (ETRI))
   Equipment, Machines & Instruments - Controls/Poster/Abstract/Annual 2002

Design & Testing

1. An Instrument for Characterizing Stiffness of Protruding Optical Fibers
   Carter II, J. A.; Shreve, S. M.; Vallance, R. R. (University of Kentucky); and Kiani, S.; Lehman, J. (Teradyne Connection Systems)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002
2. Precision Instrument for Characterizing Contraction and Extension of Nitinol Wire
   Chikkamaranahalli, S. B.; Vallance, R. R.; Rawasdeh, O. A; Lumpp, J. E.; Walcott, B. L. (University of Kentucky)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002
3. Segmented and Shielded Structures for Reduction of Thermal Expansion-Induced Tilt Errors
   Hart, A. J.; Slocum, A. H. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002
4. Design of a Dual Servo XYtheta Stage Using Double H Frame
   Kim, K. H.; Lee, M-G.; Kim, D. M.; Gweon, D-G. (Korea Advanced Institute of Science & Technology)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002
5. System Design Methodology for Precision Layout Machines
   Kim, M-S.; Chung, S-C. (Hanyang University)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002
6. A Study on Evaluation of Conceptual Designs of Machine Tools
   Mishima, N. (National Institute of Advanced Industrial Science & Technology)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002
7. Spindle Motor Driven by Fluid Energy for Ultra-precision Machine Tool
   Nakao, Y.; Mimura, M. (Kanagawa University)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002
8. New Die Design System for Injection Molding Using Multivariate Analysis
   Nitoh, S.; Kobayashi, Y.; Shirai, K. (Nihon University)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002
9. Measurement and Calibration of High Accuracy Spherical Joints
   Robertson, A. P.; Rzepniewski, A.; Slocum, A. H. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002
10. Guidelines for Design Low Cost Micromechanics
    Ruiz-Huerta, L.; Caballero-Ruiz, A.; Kussul, E. (Universidad Autónoma de México)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/Annual 2002

Mechatronics

1. Dynamic Displacement Measurement of PZN-PT Unimorph Microactuators Using Atomic Force Microscopy
   Moon, K. S.; Levy, M.; Hong, Y. K.; Ghimire, S. (Michigan Technological University)
   Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/Annual 2002

MEMS & Nanotechnology

1. A 2D Optical Displacement Transducer to Measure Nanometric Errors in Precision Machines
   Albertazzi Jr., A.; de Sousa, A. R.; Veiga, C. L.; Willemann, D. P. (Federal University of Santa Catarina)
   Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/Annual 2002
2. Precision Assembly and Metrology of X-ray Foil Optics
   Forest, C. R.; Spenko, M. J.; Sun, Y.; McGuirk, M.; Slocum, A. H.; Schattenburg, M. L. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/Annual 2002
3. Development of Thin Film Actuator Using Electrostrictive Phenomena
   Jung, Y.; Jeong, E.; Jeong, H. D.; Park, H.; Jo, N. (Pusan National University)
   Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/Annual 2002
4. Mesoscale Piezo-Motors: Scaling Issues and Performance Measurement
   Leinvuo, J. T.; Wilson, S. A.; Whatmore, R. W.; Gee, A. E. (Cranfield University)
   Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/Annual 2002
5. Precision Microcomb Design and Fabrication for Constellation-X spectroscopy X-ray Telescope Segmented Optic Assembly
   Sun, Y.; Heilmann, R. K.; Chen, C. G.; Spenko, M. J.; Forest, C. R.; Schattenburg, M. L. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/Annual 2002
6. Thermal Energy Conversion using a Microfabricated Shape Memory Alloy Structure
   Zhang, Y.; Tran, H. D. (University of New Mexico)
   Equipment, Machines & Instruments - MEMS & Nanotechnology/Poster/Abstract/Annual 2002

Novel Systems

1. Artificial Insemination System by Male and Female Micro Robots
   Aoyama, H.; Takubo, H. (University of Electro-Communications)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/Annual 2002
2. Precision Machining of Steel with Ultrasonically Driven Chilled Diamond Tools
   Brinksmeier, E.; Gläbe, R. (Bremen University)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/Annual 2002
3. Design of Accurate and Repeatable Kinematic Couplings
   Culpepper, M. L.; Araque, C. A.; Rodriguez, M. E. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/Annual 2002
4. HexFlex: A Planar Mechanism for Six-axis Manipulation and Alignment
   Culpepper, M. L.; Anderson, G. A.; Petri, P. A. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/Annual 2002
5. Kinematic and Stiffness Analysis of a Novel Ortho-guided Tripod Machine Tool
   Hsu, W-Y.; Chen, J-S. (National Chung-Cheng University)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/Annual 2002
6. Micro Turning System: A Super Small CNC Precision Lathe for Microfactories
   Ito, S.; Iijima, D.; Hayashi, A. (Nano Corporation); Aoyama, H. (University of Electro-Communications); and Yamanaka, M. (Tohoku University)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/Annual 2002
7. Operation and Analysis of a Nanopositioning and Nanomeasuring Machine
   Jäger, G.; Manske, E.; Hausotte, T. (Technical University of Ilmenau); and Schott, W. (SIOS Meßtechnik GmbH)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/Annual 2002
8. Linear Motion Carriage Driven and Guided by Elastically Supported and Preloaded Lead Screw Nuts
   Slocum, A. H.; Elmouelhi, A.; Lawrence, T.; How, P.; Cattell, J. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/Annual 2002
9. Development of a Micro Cutting and Deforming System for Glass Materials
   Warisawa, S.; Karino, T.; Tangpornprasert, P.; Mitsuishi, M. (The University of Tokyo)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/Annual 2002

Metrology

Analysis & Modeling

1. Design and Analysis of a Nano-Stepping Device
   Gao, Y.; Liu, X.; Yuen, K. (Hong Kong University of Science and Technology)
   Metrology - Analysis & Modeling/Poster/Abstract/Annual 2002
2. Gross Measurement Errors Identification Using the Grey System Theory
   Wang, Z. (Henan University of Science and Technology); Gao, Y.; Tse, S. (Hong Kong University of Science and Technology); and Qin, P. (Xi'an Jiaotong University)
   Metrology - Analysis & Modeling/Poster/Abstract/Annual 2002
3. Large Array Thermal Machine Monitor
   Zhang, S.; Patterson, S. R. (University of North Carolina-Charlotte)
   Metrology - Analysis & Modeling/Poster/Abstract/Annual 2002

Form & Geometry

1. Cutting Error Measurement of Harmonic Drive Gears Using Laser Probes
   Furukawa, M.; Gao, W.; Kiyono, S. (Tohoku University); and Yamazaki, H. (Harmonic Drive Systems Inc.)
   Metrology - Form & Geometry/Poster/Abstract/Annual 2002
2. In-process Measurement of Topography of Grinding Wheel by Using Hydrodynamic Pressure
   Furutani, K.; Ohguro, N.; Nguyen, H. T. (Toyota Technological Institute); and Nakamura, T. (Nagoya Institute of Technology)
   Metrology - Form & Geometry/Poster/Abstract/Annual 2002
3. Precision Measurement of Aircraft Control Surface Axis Alignment Over 1-3m Scales
   Gee, A. E. (Cranfield University)
   Metrology - Form & Geometry/Poster/Abstract/Annual 2002
4. Development of Spherical Form Errors Measuring System -- Design and Some Experimental Results
   Kawa, H.; Kanada, T.; Watanabe, T. (Kanto Gakuin University)
   Metrology - Form & Geometry/Poster/Abstract/Annual 2002
5. Development of Measuring Method for 3D Shapes and Dimensions of Micro-components
   Mitsui, K.; Shiramatsu, T.; Kawada, M. (Keio University)
   Metrology - Form & Geometry/Poster/Abstract/Annual 2002
6. Development of Micro Probe for Micro-CMM
   Ogura, I.; Okazaki, Y. (National Institute of Advanced Industrial Science & Technology)
   Metrology - Form & Geometry/Poster/Abstract/Annual 2002
7. Dimensional Stability of 17-7 Stainless Steel Springs
   Patterson, S. R.; Ren, D.; Lawton, K. M. (University of North Carolina-Charlotte); and Dalder, E. (Lawrence Livermore National Laboratory)
   Metrology - Form & Geometry/Poster/Abstract/Annual 2002
8. Stylus Profilometry and Qualifying Vee-Grooves for Optical Fiber Alignment
   Rachakonda, P. K.; Vallance, R. R. (University of Kentucky); and Kiani, S.; Hunsaker, B.; Lehman, J. (Teradyne Connection Systems)
   Metrology - Form & Geometry/Poster/Abstract/Annual 2002
9. A Self-calibration Method for Coordinate Measuring Machines
   Shimizu, H.; Kiyono, S.; Gao, W. (Tohoku University)
   Metrology - Form & Geometry/Poster/Abstract/Annual 2002
10. The Microprobe For Nano-positional Detection Using Optically Forced Vibration Method
    Takaya, Y.; Nishikawa, M.; Takahashi, S.; Miyoshi, T. (Osaka University)
    Metrology - Form & Geometry/Poster/Abstract/Annual 2002

Instrumentation, Design & Testing

1. Direct Measurement of Lattice Spacing on Crystalline Surface Using Scanning Tunneling Microscope and Laser Interferometry
   Aketagawa, M.; Rerkkumsup, P.; Takada, K.; Watanabe, T.; Sadakata, S. (Nagaoka University of Technology)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/Annual 2002
2. Micromachine Tool: Measurement and Control
   Caballero-Ruiz, A.; Ruiz-Huerta, L.; Kussul, E.; Baidyk, T.; Velasco-Herrera, G. (Universidad Autónoma de México)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/Annual 2002
3. Geometrically Compensated Measurement with a Laser Digitizer Equipped CMM
   Harris, J. O.; Spence, A. D. (McMaster University)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/Annual 2002
4. 2-D Self-Calibration for Scale Based Metrology in Nanolithography
   Lu, X.; Tran, H. D. (University of New Mexico)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/Annual 2002
5. Kinematic Spindles for Portable Roundness Instruments
   Wolsing, E.; Hii, K-F.; Vallance, R. R. (University of Kentucky)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/Annual 2002

Machine Tool Metrology

1. The Virtual-shape Approach for Modeling Volumetric Errors of Machine Tools
   Kim, K-D.; Chung, S-C. (Hanyang University)
   Metrology - Machine Tool Metrology/Poster/Abstract/Annual 2002
2. Implementation of the Estler Face Motion Reversal Technique Using a Single Probe
   Salsbury, J. G. (Mitutoyo America Corporation)
   Metrology - Machine Tool Metrology/Poster/Abstract/Annual 2002
3. Effective Measurement Method of Thermal Deformation of Machine Tools Caused by Linear Axis Motion
   Shimizu, S.; Imai, N. (Sophia University)
   Metrology - Machine Tool Metrology/Poster/Abstract/Annual 2002

Measurement Uncertainty

1. Phase-measuring Volumetric Interferometer for Three-dimensional Coordinate Metrology
   Kim, S-W.; Rhee, H-G.; Chu, J-Y. (Korea Advanced Institute of Science and Technology)
   Metrology - Measurement Uncertainty/Poster/Abstract/Annual 2002
2. Finite Element and Experimental Validation of Stiffness Analysis of Precision Feedback Spring and Fexure Tube of Jet Pipe Electrohydraulic Servovalve
   Singaperumal, M.; Somashekhar, H. S.; Krishna Kumar, R. (Indian Institute of Technology Madras)
   Metrology - Measurement Uncertainty/Poster/Abstract/Annual 2002
3. Evaluation of Task Specific Uncertainty for CMM Measurements
   Venkatachalam, S.; Raja, J. (University of North Carolina-Charlotte); and Uppliappan, Babu (Caterpillar, Inc.)
   Metrology - Measurement Uncertainty/Poster/Abstract/Annual 2002
4. A Study on a Novel Tool Temperature Measurement Method in High-Speed Machining of Titanium
   Zhang, X.; Yamazaki, K.; Yamaguchi, Y. (University of California, Davis)
   Metrology - Measurement Uncertainty/Poster/Abstract/Annual 2002
5. Uncertainty Analysis in Integrated Measurement Processes
   Zhao, X.; Wilhelm, R. G. (University of North Carolina-Charlotte)
   Metrology - Measurement Uncertainty/Poster/Abstract/Annual 2002

Surface & Subsurface

1. A proposal for a Common Language for Sharing Surface Texture Data
   Muralikrishnan, B.; Raja, J. (University of North Carolina-Charlotte)
   Metrology - Surface & Subsurface/Poster/Abstract/Annual 2002
2. A Fast and Accurate Non-contact Profiling Instrument for Assessing Areal Surface Texture and Flatness
   Saito, T.; Yanagi, K. (Nagaoka University of Technology); and Togawa, K. (Nagaoka National College of Technology)
   Metrology - Surface & Subsurface/Poster/Abstract/Annual 2002
3. A Study of Measurement Errors for Laser Beam Passing Through Flowing Parallel Layer for Surface Profile Measurement
   Tao, Z.; Gao, Y. (Hong Kong University of Science & Technology)
   Metrology - Surface & Subsurface/Poster/Abstract/Annual 2002
4. A Method for Fast Gaussian Filtering for 3D Roughness Evaluation
   Zeng, W.; Xie, T. (Huazhong University of Science & Technology); and Gao, Y.; O, K.; (Hong Kong University of Science and Technology)
   Metrology - Surface & Subsurface/Poster/Abstract/Annual 2002

Poster Session II
Wednesday, October 23, 2002, 1:30 PM - 3:00 PM

Optics

Optical Fabrication

1. Float Polishing of Calcium Fluoride Single Crystals for Deep Ultra Violet Applications
   Namba, Y.; Ohnishi, N.; Harada, K. (Chubu University); and Yoshida, K. (Osaka University of Technology)
   Optics - Optical Fabrication/Poster/Abstract/Annual 2002
2. Comparison of Two Instrument Designs for Non-contact Measurement of Gossamer Mirrors
   Smith, P. T.; Vallance, R. R. (University of Kentucky)
   Optics - Optical Fabrication/Poster/Abstract/Annual 2002

Optics / Interferometry

1. Displacement Sensor by a Common-path Interferometer
   Kamiya, K.; Nomura, T.; Hidaka, S. (Toyama Prefectural University); Tashiro, H. (Toyama University); Mino, M. (Tokushima Bunri University); and Okuda, S. (Computer Engineering & Consulting, Ltd.)
   Optics - Optics-Interferometry/Poster/Abstract/Annual 2002
2. Development of Shape Measuring System Using a Line Sensor in a Lateral Shearing Interferometer
   Nomura, T.; Kamiya, K.; Nagata, A. (Toyama Prefectural University); Tashiro, H. (Toyama University); and Okuda, S. (Computer Engineering & Consulting Ltd.)
   Optics - Optics-Interferometry/Poster/Abstract/Annual 2002
3. High Accuracy Measurement of Air Refractive Index in Real-time
   Wang, Y.; Xie, G. (Excel Precision Corporation)
   Optics - Optics-Interferometry/Poster/Abstract/Annual 2002
4. Optical Mixing Errors in a Fiber-optic Coupled Heterodyne Interferometer
   Zhang, L.; Patterson, S. R. (University of North Carolina-Charlotte)
   Optics - Optics-Interferometry/Poster/Abstract/Annual 2002

Optoelectronics

1. Allocating Tolerances for Vee-Groove Fiber Alignment
   Barraja, M.; Vallance, R. R. (University of Kentucky); and Kiani, S.; Lehman, J.; Hunsaker, B. (Teradyne Connection Systems)
   Optics - Optoelectronics/Poster/Abstract/Annual 2002

Processes

Grinding

1. The Application of an Empirical Tool Force Model on Vibration Assisted Cutting
   Fan, X.; Miller, M. H. (Michigan Technological University)
   Processes - Grinding/Poster/Abstract/Annual 2002
2. Grinding of Microstructures in Hardened Steel with CBN Tools
   Hoffmeister, H.-W.; Hlavac, M. (Technical University of Braunschweig)
   Processes - Grinding/Poster/Abstract/Annual 2002
3. Development of Chilled Air Cooling Technology for Precision Grinding: An Eco-Friendly Alternative
   Huang, H.; Ramesh, K.; Yin, L. (Singapore Institute of Manufacturing Technology); and Yui, A. (The National Defense Academy)
   Processes - Grinding/Poster/Abstract/Annual 2002
4. A Basic Study on Processing Characteristics of OD-blade Saw Using Ultrasonic Vibration
   Ishikawa, K.; Suwabe, H.; Nokura, K.; Uneda, M. (Kanazawa Institute of Technology); and Take, Y. (Takesho Co.)
   Processes - Grinding/Poster/Abstract/Annual 2002
5. Study on the Machining Accuracy of Round-Off Truing Method -- Experimental Analysis of Error Factors
   Kitajima, T.; Okuyama, S.; Wakatomo, T.; Yui, A. (The National Defense Academy); Suzuki, H. (Toyohashi University of Technology); and Hanasaki, S. (Osaka University)
   Processes - Grinding/Poster/Abstract/Annual 2002
6. A Study on the Micro Tool Fabrication Using Electrolytic In-process Dressing
   Lee, H. W.; Choi, J. Y.; Jeong, H. D. (Pusan National University); and Lee, S. W.; Choi, H-Z. (Korea Institute of Industrial Technology (KITECH))
   Processes - Grinding/Poster/Abstract/Annual 2002
7. Force and Temperature Measurements in Vibration Assisted Grinding
   Mahaddalkar, P. M.; Miller, M. H. (Michigan Technological University)
   Processes - Grinding/Poster/Abstract/Annual 2002
8. Identification of the Static Stiffness of Grinding Wheels with Resin Bond
   Yamada, T.; Lee, H-S; Shikauchi, T.; Matsushita, H. (Nihon University)
   Processes - Grinding/Poster/Abstract/Annual 2002
9. Relationship Between Stiffness of Grinding Systems and Depth of Affected Layers
   Yokoyama, S.; Lee, H-S.; Yamada, T. (Nihon University)
   Processes - Grinding/Poster/Abstract/Annual 2002
10. Grinding Wheel Condition Prediction and Improvement
    Zhang, P.; Miller, M. H. (Michigan Technological University)
    Processes - Grinding/Poster/Abstract/Annual 2002
11. 3D Kinematical Analysis of Large Scale Substrate Surface Grinding
    Zhou, L.; Shimizu, J.; Shinohara, K.; Eda, H. (Ibaraki University)
    Processes - Grinding/Poster/Abstract/Annual 2002

Machining

1. Generation of Large-area Microstructured Surface by Diamond Turning with a Fast Tool Servo
   Araki, T.; Gao, W.; Kiyono, S.; Mito, M. (Tohoku University); and Sudoh, M. (Nissan Motor Co.,Ltd.)
   Processes - Machining/Poster/Abstract/Annual 2002
2. Generation of Freeform Surfaces by Diamond Machining
   Brinksmeier, E.; Grimme, D.; Preuss, W. R. (Bremen University)
   Processes - Machining/Poster/Abstract/Annual 2002
3. A Framework of a Knowledge-based System for Predictive Characterization in Ultra-precision Diamond Turning
   Cheung, C-F.; Lee, W-B. (Hong Kong Polytechnic University)
   Processes - Machining/Poster/Abstract/Annual 2002
4. Chipping Minimization During Dicing and Slicing
   Gatzen, H. H.; Karyazin, A. (Hanover University); and Jones, G. M. (Seagate Technology)
   Processes - Machining/Poster/Abstract/Annual 2002
5. Dicing of Ultra-thin Silicon Wafers
   Gatzen, H. H.; Guenzel, G. (Hanover University)
   Processes - Machining/Poster/Abstract/Annual 2002
6. Mechanical Micromachining of High Aspect Ratio Micro-structures
   Gatzen, H. H.; Morsbach, C.; Karyazin, A. (Hannover University)
   Processes - Machining/Poster/Abstract/Annual 2002
7. Cutting Conditions of an Engineered Tool with the Ultrasonic Excitation
   Hashimoto, H., Imai, K.; Minami, K. (Kanagawa Institute of Technology)
   Processes - Machining/Poster/Abstract/Annual 2002
8. Lubrication at Tool-chip Interface by Oil Injection
   Kaneeda, T.; Matushita, S. (Okayama University of Science)
   Processes - Machining/Poster/Abstract/Annual 2002
9. Evaluation of Machining Characteristics of the Micro Grooving Machine for the Mold of PDP Barrier Rib
   Kim, N. H.; Lee, D. W. (Pusan National University); and Lee, E. S. (Inha University)
   Processes - Machining/Poster/Abstract/Annual 2002
10. Prediction and Simulation on the Machining Dynamics and Instability in Peripheral Milling
    Liu, X-W.; Cheng, K.; Webb, D. (Leeds Metropolitan University)
    Processes - Machining/Poster/Abstract/Annual 2002
11. Machining Phenomena in EDM for Surface Modification with TiC Semi-sintered Electrode
    Moro, T.; Goto, A.; Saito, N. (Mitsubishi Electric Corporation); Mohri, N. (The University of Tokyo); Akamatsu, K.; Yamada, H. (MC Machinery Systems, Inc.); and Sata, T. (Toyota Technological Institute)
    Processes - Machining/Poster/Abstract/Annual 2002
12. Surface Quality and Tool Wear in Interrupted Hard Turning of 1137 Steel Shafts
    Pavel, R.; Marinescu, I. D. (The University of Toledo); and Sinram, K.; Combs, D.; Deis, M. (Dana Corporation)
    Processes - Machining/Poster/Abstract/Annual 2002
13. Ultra-Precision Cutting of Stainless Steel by Using Coated Carbide Bite
    Sakamoto, S.; Yasui, H.; Fujimori, A.; Kondo, S. (Kumamoto University)
    Processes - Machining/Poster/Abstract/Annual 2002
14. Spectral Analysis of Acoustic Emission (AE) During the Ultraprecision Machining of Single Crystal InSb
    Silva, H. A. T.; Duduch, J.; Porto, A. J. V. (Universidade de São Paulo)
    Processes - Machining/Poster/Abstract/Annual 2002
15. Observing Tool and Workpiece Interaction in Diamond Turning Using Graphical Analysis of Acoustic Emission and Force
    Valente, C. M. O.; Gomes de Oliveira, J. F. (University of São Paulo); and Echizenya , D.; Dornfeld, D. A. (University of California at Berkeley)
    Processes - Machining/Poster/Abstract/Annual 2002
16. Microtools Shaped by Focused Ion Beam Milling and the Fabrication of Cylindrical Coils
    Vasile, M. J.; Adams, D. P. (Sandia National Laboratories); and Picard, Y. (University of Michigan)
    Processes - Machining/Poster/Abstract/Annual 2002

Manufacturing

1. Substrate Co-Molding of Micro and Meso Optics
   Gill, D. D.; Dow, T. A.; Sohn, A. (North Carolina State University)
   Processes - Manufacturing/Poster/Abstract/Annual 2002
2. Closed Loop Control of Milling Tool Deflection
   Hood, D.; Clayton, S.; Buckner, G. D.; Dow, T. A.; Garrard, K. P. (North Carolina State University)
   Processes - Manufacturing/Poster/Abstract/Annual 2002

Manufacturing (Precision Mass Production)

1. Modeling of Residual Stress on Blasted Surface Using Indenting Method
   Saito, H.; Masuda, M. (Niigata University)
   Processes - Manufacturing-Precision Mass Production/Poster/Abstract/Annual 2002

Non-conventional

1. An Experimental Investigation of Heat Pipes at Low Power Inputs
   Borundia, A.; Tran, H. D. (University of New Mexico)
   Processes - Non-conventional/Poster/Abstract/Annual 2002
2. Surface Texture Peer to Peer Data Sharing System
   Bui, S. H.; Raja, J. (University of North Carolina-Charlotte)
   Processes - Non-conventional/Poster/Abstract/Annual 2002
3. Fabrication of Grinding Wheel with Dispersed Hard Powder by Electrical Discharge Machining
   Furutani, K.; Sunada, H. (Toyota Technological Institute)
   Processes - Non-conventional/Poster/Abstract/Annual 2002
4. Nanoprobe Concepts for Field Emission Nanomachining
   Trinkle, C. A.; Vallance, R. R.; Mengüç, M. P. (University of Kentucky); Bah, A.; Javed, K. (Kentucky State University); Rao, A. M. (Clemson University); and Jin, S. (University of California San Diego)
   Processes - Non-conventional/Poster/Abstract/Annual 2002
5. Molecular Dynamics Simulation for EDM Die-sinking Erosion Process
   Zhao, Y.; Zhang, X.; Yamazaki, K. (University of California-Davis)
   Processes - Non-conventional/Poster/Abstract/Annual 2002

Polishing, Lapping & ECM

1. Charging of Cast Iron with Abrasive During Lapping
   Barylski, A. W. (Technical University of Gdansk)
   Processes - Polishing, Lapping & ECM/Poster/Abstract/Annual 2002
2. Development of a Lapping Film Utilizing Agglomerative Fine Abrasives for Finishing of Optical Glass
   Enomoto, T. (University of Tokyo); and Zhang, J. (Ricoh Company, Ltd.)
   Processes - Polishing, Lapping & ECM/Poster/Abstract/Annual 2002
3. Application of Fixed Abrasive Pad Using Hydrophilic Polymer in STI CMP
   Kim, H.; Park, B.; Jeong, H. (Pusan National University); Dornfeld, D. A. (University of California at Berkeley); and Lee, S. (Hynix Semiconductor)
   Processes - Polishing, Lapping & ECM/Poster/Abstract/Annual 2002
4. Generation of Quality Surface in Extrude Honing
   Narayanasamy, K.; Raju, H.P. (Indian Institute of Technology Madras)
   Processes - Polishing, Lapping & ECM/Poster/Abstract/Annual 2002
5. New Development of Combined Electrochemical Processes for Mirror-like Micro Grooves
   Park, J. W.; Moon, Y. H. (Pusan National University); and Lee, E. S. (Inha University)
   Processes - Polishing, Lapping & ECM/Poster/Abstract/Annual 2002
6. Material Removal Mechanisms in Abrasive Flow Machining
   Szulczynski, H.; Uhlmann, E. (Technical University Berlin)
   Processes - Polishing, Lapping & ECM/Poster/Abstract/Annual 2002
7. New Approach to Slicing and Lapping and Polishing in Precision Engineering
   Watanabe, T. (World Technology Instrument Co., Ltd.)
   Processes - Polishing, Lapping & ECM/Poster/Abstract/Annual 2002
8. High Removal Rate Ultra-Smoothness Polishing of NiP Plated Aluminum Magnetic Disk Substrate by Means of High Polishing Speed with High Polishing Pressure
   Yasui, H.; Fukamachi, T.; Sakamoto, S.; Takakura, S. (Kumamoto University)
   Processes - Polishing, Lapping & ECM/Poster/Abstract/Annual 2002