ASPE Proceedings, November 10 - 15, 2001, Crystal City, Virginia

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Technical and Poster Sessions

Session I
Instrumentation Design and Testing
Monday, November 12, 2001, 8:15 AM - 10:00 AM
Session Co-Chairs: Vivek G. Badami (Corning Tropel Corporation) and Andrew D. Woodfin (Corning Inc.)

1. Scanning Beam Interference Lithography (Invited Paper)
   Konkola, P. T.; Chen, C. G.; Heilmann, R. K.; Pati, G. S.; Schattenburg, M. L. (Massachusetts Institute of Technology)
   Instrumentation Design and Testing/Oral/Abstract/2001 Annual
2. Molecular Measuring Machine Design and Performance
   Kramar, J. A.; Jun, J.; Penzes, W. B.; Scheuerman, V. P.; Scire, F. E.; Teague, E. C. (National Institute of Standards and Technology)
   Instrumentation Design and Testing/Oral/Abstract/2001 Annual
3. Nanomeasuring Technology -- Nanomeasuring Machine
   Jäger, G.; Menske, E.; Hausotte, T.; Büchner, H.-J.; Grünwald, R., Schott, W. (Technical University of Ilmenau)
   Instrumentation Design and Testing/Oral/Abstract/2001 Annual
4. The Polar Profilometer "Polaris"
   Sohn, A.; Garrard, K. P.; Dow, T. A. (North Carolina State University)
   Instrumentation Design and Testing/Oral/Abstract/2001 Annual

Session II
Novel Systems
Monday, November 12, 2001, 10:30 AM - 12:00 PM
Session Co-Chairs: Joseph D. Drescher (UTC-Pratt & Whitney), and Helen E. Fawcett (Axsun Technologies)

1. Planar and Spatial Three-degree-of-freedom Micro-stages in Silicon MEMS
   Jokiel, Jr., B.; Benavides, G. L.; Bieg, L. F.; Allen, J. J. (Sandia National Laboratories)
   Novel Systems/Oral/Abstract/2001 Annual
2. Micro Screw Pump to Discharge Effusion from Human Middle Ear
   Nakao, M.; Okusa, T.; Rahim, A.; Matsumoto, K.; Hatamura, Y. (The University of Tokyo)
   Novel Systems/Oral/Abstract/2001 Annual
3. High Precision Assembly and Metrology of X-ray Foil Optics
   Mongrard, O.; Butler, N.; Chen, C. G.; Heilmann, R. K.; Konkola, P. T.; McGuirk, M.; Monnelly, G.; Pati, G. S.; Ricker, G. R.; Schattenburg, M. L. (Massachusetts Institute of Technology); and Cohen, L. (Harvard-Smithsonian Astrophysical Observatory)
   Novel Systems/Oral/Abstract/2001 Annual

Session III
Surface and Form Metrology
Monday, November 12, 2001, 3:30 PM - 10:00 AM
Session Co-Chairs: S. Hossein Cheraghi (Wichita State University), and Kenneth P. Garrard (North Carolina State University)

1. Precision Relational Metrology of Flatness, Thickness, Parallelism and Step Height
   Colonna de Lega, X.; de Groot, P. J.; Grigg, D. A. (Zygo Corporation)
   Surface and Form Metrology/Oral/Abstract/2001 Annual
2. A Recommendation Inspection to Control Sub-Surface Damage in Sapphire*
   Polvani, R. S. (National Institute of Standards and Technology)
   Surface and Form Metrology/Oral/Abstract/2001 Annual
3. Development of Intelligent Precision Vision Inspection System for Micro Optics Parts Using New Optical Probe Implemented to Have Multiple Fields of Views and Mutual Calibration Scheme
   Pahk, H. J.; Lee, I.-H. (Seoul National University)
   Surface and Form Metrology/Oral/Abstract/2001 Annual

Session IV
Precision Fabrication Processes
Tuesday, November 13, 2001, 10:30 AM - 12:00 PM
Session Co-Chairs: Jeffrey W. Carr (Lawrence Livermore NationalLaboratory), and Michele H. Miller (Michigan Technological University)

1. High Throughput Surface Structuring in Solar Cell Manufacture
   Weck, M.; Leifhelm, B. (Fraunhofer-Institut für Produktionstechnologie (IPT))
   Precision Fabrication Processes/Oral/Abstract/2001 Annual
2. Superabrasive Grinding Process Optimization Through Force Measurement
   Knapp, B. R.; Marsh, E. R.; Grejda, R. D.; Schalcosky, D. (The Pennsylvania State University)
   Precision Fabrication Processes/Oral/Abstract/2001 Annual
3. Development of Automatic Image Processing System for Evaluation of Wheel Surface Condition in Ultra-smoothness Grinding
   Yasui, H.; Hiraki, Y.; Sakata, M. (Kumamoto University)
   Precision Fabrication Processes/Oral/Abstract/2001 Annual
4. Replication of Precision Optical Features Through Injection Molding
   Gill, D. D.; Dow, T. A.; Sohn, A. (North Carolina State University)
   Precision Fabrication Processes/Oral/Abstract/2001 Annual

Session V
Large Scale Dimensional Metrology
Tuesday, November 13, 2001, 3:30 PM - 5:15 PM
Session Co-Chairs: James G. Salsbury (Mitutoyo America Corporation), and Edward P. Morse (University of North Carolina at Charlotte)

1. Good Things Come in Small Packages -- A Table Top CMM with Sub Micron Capability (Invited Paper)
   Youden, D. H. (Eastman Kodak Company)
   Large Scale Dimensional Metrology/Oral/Abstract/2001 Annual
2. Design and Testing of a One Dimensional Measuring Machine for Determining the Length of Ball Bars
   Ziegert, J. C.; Rea, D. (University of Florida); and Phillips, S. D.; Borchardt, B. R.; Stoup, J. (National Institute of Standards and Technololgy)
   Large Scale Dimensional Metrology/Oral/Abstract/2001 Annual
3. An Alternative Technique to the Geometric Test of Machining Centers
   de Sousa, A. R.; Schneider, C. A. (Federal University of Santa Catarina)
   Large Scale Dimensional Metrology/Oral/Abstract/2001 Annual
4. The Grid Bar, Calibration and Application
   Weikert, S.; Knapp, W. (Swiss Federal Institute of Technology (ETHZ))
   Large Scale Dimensional Metrology/Oral/Abstract/2001 Annual

Session VI
Machining
Wednesday, November 14, 2001, 8:30 AM - 10:00 AM
Session Co-Chairs: Alex Sohn (North Carolina State University), and Bradley H. Jared (Corning Inc.)

1. Vibration Assisted Diamond Turning Using Elliptical Tool Motion
   Dow, T. A.; Cerniway, M. A.; Sohn, A.; Negishi, N. (North Carolina State University)
   Machining/Oral/Abstract/2001 Annual
2. Numerical Simulation of Ductile Machining of Silicon Nitride
   Kumbera, T. G.; Patten, J. A.; Cherukuri, H. P. (University of North Carolina-Charlotte); and Brand, C. J.; Marusich, T.D. (Third Wave Systems, Inc.)
   Machining/Oral/Abstract/2001 Annual
3. Effects of Rotating Unbalance on Turning Precision: Analytical and Experimental Investigations and Real-Time Compensation
   Winzenz, W., Dyer, S. W. (BalaDyne Corporation)
   Machining/Oral/Abstract/2001 Annual
4. Micro-machinability of Plastics
   Horio, K.; Tomita, Y.; Yamazaki, T. (Saitama University)
   Machining/Oral/Abstract/2001 Annual

Session VII
Optics
Wednesday, November 14, 2001, 10:30 AM - 12:00 PM
Session Co-Chairs: Vivek G. Badami (Corning Tropel Corporation) and Andrew D. Woodfin (Corning Inc.)

1. Techniques for the Reduction of Cyclic Errors in Laser Metrology Gauges for the Space Interferometry Mission (Invited Paper)
   Halverson, P. G.; Zhao, F.; Spero, R.; Shaklan, S. B.; Lay, O. P.; Dubovitsky, S.; Diaz, R. T.; (California Institute of Technology, Jet Propulsion Laboratory); and Bell, R.; Ames, L.; Dutta, K. (Lockheed Martin Advanced Technology Center)
   Optics/Oral/Abstract/2001 Annual
2. Compact Absolute Length Measuring Machine by Combining Regular Crystalline Surface and Laser Interferometry
   Aketagawa, M.; Rerkkumsup, P.; Takada, K.; Takagi, T.; Watanabe, T. (Nagaoka University of
   Technology)
   Optics/Oral/Abstract/2001 Annual
3. Laser-CCD Based Sensor System for Real Time Detection of Motion Linearity
   Kagawa, Y.; Yamazaki, K.; Yang, Y. (University of California-Davis); and Matsumiya, S. (Mitutoyo Corporation)
   Optics/Oral/Abstract/2001 Annual
4. Measurements Using Fourier Transform Phase Shifting Interferometry
   Deck, L. L. (Zygo Corporation)
   Optics/Oral/Abstract/2001 Annual

Session VIII
Novel Actuators
Wednesday, November 14, 2001, 1:30 PM - 3:00 PM
Session Co-Chairs: John C. Ziegert (University of Florida) and Anthony E. Gee (Cranfield University)

1. Picometer Positioning System Using Aerostatic Guideway as Motion-Reduction Mechanism
   Mizumoto, H.; Arii, S. (Tottori University); and Yabuya, M.; Kami, Y. (Nachi-Fujikoshi Corporation)
   Novel Actuators/Oral/Abstract/2001 Annual
2. Design of a Linear High Precision Ultrasonic Piezoelectric Motor
   Bauer, M. G.; Dow, T. A. (North Carolina State University)
   Novel Actuators/Oral/Abstract/2001 Annual
3. A Micromachined Thermoelastic Inchworm Actuator
   Kwon, H. N.; Lee, J. H.; Jeong, S. H.; Lee, S. K. (Kwang-Ju Institute of Science & Technology
   (K-JIST))
   Novel Actuators/Oral/Abstract/2001 Annual
4. Rotary-Linear Hybrid Axes for Meso-scale Machining
   Liebman, M. K. (Novalux, Inc.); Vona, M. A. (Jet Propulsion Laboratory); and Trumper, D. L.
   (Massachusetts Institute of Technology)
   Novel Actuators/Oral/Abstract/2001 Annual

Poster Sessions
Monday, November 12, 2001, 3:30 PM - 5:00 PM
Tuesday, November 13, 2001, 1:30 PM - 3:00 PM

Equipment, Machines & Instruments

Analysis & Modeling

1. Kinematic Modeling and Analysis of a Planar Micro-positioner
   Dagalakis, N. G.; Kramar, J. A.; Amatucci, E. G.; Bunch, R. (National Institute of Standards and
   Technology)
   Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/2001 Annual
2. Modeling, Identification, and Control of Ballscrew Drives
   Varanasi, K. K.; Nayfeh, S. A. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/2001 Annual
3. Preliminary Design of a Very Low Frequency Vibration Calibration System*
   Rhorer, R. L.; Payne, B. F. (National Institute of Standards and Technology)
   Equipment, Machines & Instruments - Analysis & Modeling/Poster/Abstract/2001 Annual

Controls

1. A Study on Model-based Analysis of the Dynamic Motion Accuracy of CNC Machine Tools
   Johnston, G.; Kagawa, Y.; Yamazaki, K. (University of California-Davis); Liu, J. (Digital Technology Laboratory (DTL)); and Mori, M. (Mori Seiki Co., Ltd.)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2001 Annual
2. Precision Manufacturing and Electronic Gaseous Fuel Injection System Reduces Emission While Improving Fuel Economy for SI Engine
   Kumarappa, S. (Bapuji Institute of Engineering and Technology); Prabhukumar, G. P. (University
   B.D.T College of Engineering)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2001 Annual
3. Development of Nanometer Positioning System Driven by Force Operational Water Hydraulic Actuator with Rigid Slide Guide-way - Simulation and Experimental Evaluation of Non-linear Positioning Characteristics -
   Tsukahara, S.; Hara, K.; Tomita, Y.; Isobe, S. (Sumitomo Heavy Industries, Ltd.); Kanai, A.
   (Ashikaga Institute of Technology); and Miyashita, M. (Nano-Tec Associates)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2001 Annual

Design & Testing

1. Long Range Stage for the Metrological Atomic Force Microscope
   Eom, T. B.; Kim, J. Y. (Korea Research Institute of Standards and Science); and Choi, H. S.;
   Lee, S.-K. (Kwang-Ju Institute of Science & Technology (K-JIST))
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
2. A Study on a Novel 5-Axis Machine Tool Using Direct Drive
   Fitsos, P.; Yamazaki, K. (University of California-Davis); Sugimoto, Y.; Mori, M. (Mori Seiki Co.,Ltd.)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
3. Nanometer Cutting Machine Employing Parallel Mechanism
   Furutani, K.; Kudoh, R.; Mohri, N. (Toyota Technological Institute)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
4. Ball Screw as Thermal Error Compensator
   Gim, T.; Hah, J.-Y.; Lee, J.-Y. (Daewoo Heavy Industries, Ltd.); Lee, C.-H. (Korea Institute of Machinery and Materials); and Ko, T. J. (Yeungnam University)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
5. Design of a Kinematic Spindle for Low-force, Low-speed Applications
   Hii, K.-F.; Wolsing, E.; Vallance, R. R. (University of Kentucky)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
6. Fabrication of a Position Surveying Microrobot in the Underground Pipe
   Kato, S.; Hamano, T.; Ono, M.; Kato, N.; Kabasawa, Y.; Matsuda, I. (Nippon Institute ofTechnology)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
7. Error Compensation of the Maglev Stage Supported by Permanent Magnet Biased Magnetic Bearing
   Lee, S.-H.; Chang, J.-U.; Lee, S.-W.; Kim, O.-S.; Han, D.-C. (Seoul National University); Chang, I.-B.; (Kangwon National University)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
8. Design of Ultraprecision Modular, Freeform® Machine Tool
   Koning, R. J.; Walter, M. M. (Precitech, Inc.)
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
9. Absolute Strain Measurement for Fiber Bragg Grating Sensor Using a String Resonator With High Accuracy
   Lee, Y.-K.; Song, I.-C.; Jeong, S.-H.; Lee, B.-H.; Lee, S.-K. (Kwang-Ju Institute of Science and
   Technology (K-JIST))
   Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
10. Development of a Design Tool for Conceptual Design Stages of Machine Tools
    Mishima, N. (Institute for Mechanical Systems Engineering)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
11. A New Optimal Design Technique for the Pneumatic Vibration Isolation System Implementing the Full Mathematical Analysis and Nonlinear Modeling
    Moon, J. H.; Pahk, H. J. (Seoul National University)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
12. Desk-top NC Milling Machine With 200 krpm Spindle
    Okazaki, Y. (National Institute of Advanced Industrial Science and Technology); Mori, T. (Tokyo Metropolitan Industrial Technology Research Institute); and Morita, N. (Chiba University)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
13. Development of an In-pipe Inspection Robot Movable for a Long Distance
    Ono, M.; Hamano, T.; Kato, S. (Nippon Institute of Technology)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual
14. Development of a High-Speed Micro-Machining System for Brittle Materials
    Warisawa, S.; Karino, T.; Takenaka, R.; Mitsuishi, M. (The University of Tokyo)
    Equipment, Machines & Instruments - Design & Testing/Poster/Abstract/2001 Annual

Mechatronics

1. Kinematic Modeling of a 6 Degree of Freedom Tri-Stage Micro-Positioner
   Dagalakis, N. G.; Amatucci, E. G. (National Institute of Standards and Technology)
   Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2001 Annual
2. Design and Control of Versatile Micro Robot for Microscopic Manipulation
   Fuchiwaki, O.; Aoyama, H. (University of Electro-Communications)
   Equipment, Machines & Instruments - Mechatronics/Poster/Abstract/2001 Annual

MEMS & Nanotec

1. Development of a Micro-screw and a Micro-pitch-rack Utilized Tungsten Wires
   Honda, S. (Tokyo Metropolitan Institute of Technology)
   Equipment, Machines & Instruments - MEMS & Nanotec/Poster/Abstract/2001 Annual
2. Polishing TiN for Nanotube Synthesis
   Smith, P.; Trinkle, C.; Vallance, R. R. (University of Kentucky); and Gaillard, J.; Sadanand, B.; Rao, A. M. (Clemson University)
   Equipment, Machines & Instruments - MEMS & Nanotec/Poster/Abstract/2001 Annual
   

Novel Systems

1. A Novel Sub-microradian Beam Diagnostic and Alignment System
   Chen, C. G.; Heilmann, R. K.; Konkola, P. T.; Pati, G. S.; Schattenburg, M. L. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2001 Annual
2. Experimental Ductile Grinding of Glass Specimens on the Cranfield Tetraform C Machine
   Gee, A. E.; Delalandre, J.; Corbett, J.; Stephenson, D. J. (Cranfield University)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2001 Annual
3. Development of Miniature Actuator for Cryogenic Applications
   Heinrich, M. D.; Dow, T. A. (North Carolina State University)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2001 Annual
4. Precision Robot Calibration Using Kinematically Placed Inclinometers
   Robertson, A. P. (ABB Robotics); and Willoughby, P. J.; Slocum, A. H. (Massachusetts Institute
   of Technology)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2001 Annual
5. A Novel Single Degree-of-freedom Active Vibration Isolation System
   Sato, T. (Toshiba Corporation); and Trumper, D. L. (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2001 Annual

Metrology

Analysis & Modeling

1. A Statistically-based Proposal for Checking the Need of CMM Calibration
   Abackerli, A. J.; Martinez Orrego, R. M. (Univerisdade Metodista de Piracicaba); Camargo, C. A. (Starrett Indústria e Comércio Ltda.)
   Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
2. Deriving the Parametric Errors of a Co-ordinate Measuring Machine from the Mathematical Models Fitted to Represent the Volumetric Error Components
   Bosco de Aquino Silva, J. (Federal University of Paraiba)
   Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
3. An Examination of the Effect of Variation in Datum Targets' Locations on Part Acceptance
   Gardner, T. E. (Boeing Commercial Aircraft Group); and Cheraghi, S. H. (Wichita State University)
   Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
4. Wavelet Analysis with Different Wavelet Bases for Engineering Surfaces
   Fu, S.; Liu, X.; Muralikrishnan, B.; Raja, J. (University of North Carolina-Charlotte)
   Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
5. Translating Machine Tool Errors Into Part Errors by Enhanced Virtual Machining for Sculptured Surfaces
   Lin, Y.; Shen, Y.-L. (The George Washington University)
   Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
6. Modeling of Coolant Flows for In-process Optical Measurement
   Tao, Z.; Gao, Y. (Hong Kong University of Science and Technology)
   Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
7. Nonlinear Error in Eight-pass Heterodyne Interferometers
   Wang, C.; Hocken, R. J. (University of North Carolina-Charlotte)
   Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
8. Systematic Error Estimation Based on Grey Relational Analysis
   Wang, Z. (Luoyang Institute of Technology); Gao, Y.; Tse, S. (Hong Kong University of Science and Technology); and Qin, P. (Xi'an Jiaotong University)
   Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
9. Uncertainty Assessment for the Roundness Measurement of Crankshafts Using a Virtual Gaging System
   Zhang, X.; Cole, A. D. (ADCOLE Corporation)
   Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
10. Software Frameworks for Integrated Measurement Processes
    Zhao, X.; Wilhelm, R. G.; Martin, O. A.; Bullock, J. B. (University of North Carolina-Charlotte)
    Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual
11. 2D Extension of Gap Space Model for Tolerance Analysis
    Zou, Z.; Morse, E. P. (University of North Carolina-Charlotte)
    Metrology - Analysis & Modeling/Poster/Abstract/2001 Annual

Form & Geometry

1. Geometric Quality Analysis and Process Control for Ultra-precision Laser Micromachining
   Bordatchev, E. V.; Nikumb, S. K. (National Research Council of Canada)
   Metrology - Form & Geometry/Poster/Abstract/2001 Annual
2. In-situ Self-calibration of Two-dimensional Angle Probe for Profile Mesaurement of Large Silicon Wafers
   Gao, W.; Yamada, T.; Kiyono, S. (Tohoku University); and Huang, P. S. (SUNY at Stony Brook)
   Metrology - Form & Geometry/Poster/Abstract/2001 Annual
3. Systematic Form Error Estimation for Circular Parts Using Fourier Components
   Desta, M. T.; Feng, H.-Y. (The University of Western Ontario)
   Metrology - Form & Geometry/Poster/Abstract/2001 Annual
4. Form Error Measurement by Comparison with a Reference Object
   Horikawa, O. (University of São Paulo)
   Metrology - Form & Geometry/Poster/Abstract/2001 Annual
5. Evaluation of Cylindricity Error Based on MRS, LSC, MCC, and MIC
   Jiang, G.; Cheraghi, S. H. (Wichita State University)
   Metrology - Form & Geometry/Poster/Abstract/2001 Annual
6. Evaluation of Variations Specified by Non-uniform Profile Tolerance Boundaries
   Kethara Pasupathy, T. M.; Wilhelm, R. G.; Morse, E. P.; Hetland, G. A. (University of North
   Carolina-Charlotte)
   Metrology - Form & Geometry/Poster/Abstract/2001 Annual
7. Development of a Cylindricity Measurement System for Parallel Rollers Based on a V-Block Method
   Mitsui, K.; Katsurada, K. (Keio University); and Hayashi, A. (Nano Corporation)
   Metrology - Form & Geometry/Poster/Abstract/2001 Annual
8. Measurement of Drilling Burr by Image Pocessing Technique
   Nakao, Y. (Kanagawa University)
   Metrology - Form & Geometry/Poster/Abstract/2001 Annual
9. Methods for Correcting the Group Index of Refraction at the PPM Level for Outdoor Electronic Distance Measurements
   Parker, D. H. (The National Radio Astronomy Observatory)
   Metrology - Form & Geometry/Poster/Abstract/2001 Annual
10. A Study on Evaluation of Sphericity and Related Features of Shaft with Spherical End Faces
    Takahashi, M. (Institute of Technologists); Sasajima, K. (Tokyo Institute of Technology); and Tsukada, T. (Meiji University)
    Metrology - Form & Geometry/Poster/Abstract/2001 Annual
11. Optical Metrology of Micro-Electro-Mechanical Torsional Mirrors
    Zhang, X.; Shen, Y.-L.; Nagel, D. J. (The George Washington University); and Rensing, N. M. (Micro Optical Engineering Corporation)
    Metrology - Form & Geometry/Poster/Abstract/2001 Annual

Instrumentation, Design & Testing

1. Calibration of CMM by 3-Dimensional Coordinate Comparison
   Abbe, M. (Mitutoyo Corporation); Takamasu, K. (The University of Tokyo); and Ozono, S. (Tokyo Denki University)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/2001 Annual
2. First Generation Micro-machine Tool Characterization
   Caballero-Ruiz, A. (Universidad Autónoma de México)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/2001 Annual
3. Use of Fluid Beams to Establish a Clean Zone for In-process Optical Measurement
   Gao, Y. (Hong Kong University of Science and Technology)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/2001 Annual
4. Measurement of 3-D Tool Wear Based on Focus Error and Micro-coordinate Measuring System
   Ng, K. W.; Moon, K. S. (Michigan Technological University)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/2001 Annual
5. A New Surface Encoder for Multi-Axis Position Detection
   Shimizu, Y.; Gao, W.; Kiyono, S. (Tohoku University)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/2001 Annual
6. Correlation of Spindle Errors to Piece-Part Accuracy
   Wang, K.; Morse, E. P. (University of North Carolina-Charlotte)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/2001 Annual
7. A Nanometer Profiling Device with Contact Force Controlled at the Level of Millinewtons
   Yang, L., Xie, T. (Huazhong University of Science and Technology); and Gao, Y. (Hong Kong University of Science and Technology)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/2001 Annual
8. Demonstration of Sub-Angstrom Cyclic Nonlinearity Using Wavefront-division Sampling with a Common-path Laser Heterodyne Interferometer
   Zhao, F. (Jet Propulsion Laboratory)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/2001 Annual
9. Development of Sub-nanometer Racetrack Laser Metrology for External Triangulation Measurement for the Space Interferometry Mission
   Zhao, F.; Diaz, R. T.; Dumont, P.; Halverson, P. G.; Shaklan, S. B.; Spero, R. (Jet Propulsion Laboratory); and Ames, L.; Barrett, S.; Barrett, R.; Bell, R.; Benson, R.; Cross, G.; Dutta, K.; Kvamme, T.; Holmes, B.; Leary, D.; Perkins, P.; Scott, M.; Stubbs, D. (Lockheed Martin Advanced Technology Center)
   Metrology - Instrumentation, Design & Testing/Poster/Abstract/2001 Annual

Machine Tool Metrology

1. Evaluating the Tool Point Dynamic Repeatability for High-speed Machining Applications
   Medicus, K. M; Schmitz, T. L. (National Institute of Standards and Technology)
   Metrology - Machine Tool Metrology/Poster/Abstract/2001 Annual
2. De-Coupling of an Optical Grating Based Measurement Normal from the Machine Tool Structure
   Mueller, U.; Kagawa, Y.; Yamazaki, K. (University of California-Davis)
   Metrology - Machine Tool Metrology/Poster/Abstract/2001 Annual

Measurement Uncertainty

1. Uncertainty Evaluation of Calibration of the Optical Projector
   Fang, C.-Y.; Lui, K.-W.; Chang, K.-M. (Center for Measurement Standards / ITRI)
   Metrology - Measurement Uncertainty/Poster/Abstract/2001 Annual

Surface & Subsurface

1. Laser Digitizer Based Strain Measurement
   Chan, H.-L.; Spence, A. D.; Sklad, M. P. (McMaster University)
   Metrology - Surface & Subsurface/Poster/Abstract/2001 Annual
2. 3-D Measurement and Quantitative Description of Disk Micro-Waviness
   Hara, S. (Tokyo Institute of Technology); Oosone, T. (Union Tool Company); and Yanagi, K. (Nagaoka University of Technology)
   Metrology - Surface & Subsurface/Poster/Abstract/2001 Annual
3. Effects of Fusion Defects on the Wear of Ultra High Molecular Weight Polyethylene Component Used in Artificial Knee Joints
   Kaneeda, T.; Torigoe, Y. (Okayama University of Science); Utsumi, M. (Chiba University); and Mori, A.; Kuramoto, K. (Nakashima Propeller Co. Ltd.)
   Metrology - Surface & Subsurface/Poster/Abstract/2001 Annual
4. Surface Roughness Profile Measurement Based on Microscopic Shearing Interferometry
   Liu, X.; Gao, Y. (Hong Kong University of Science and Technology)
   Metrology - Surface & Subsurface/Poster/Abstract/2001 Annual
5. Scale-space and Multi-resolution Techniques for Outlier Analysis in Surface Metrology
   Muralikrishnan, B.; Fu, S. Y.; Orji, N. G.; Raja, J. (University of North Carolina-Charlotte)
   Metrology - Surface & Subsurface/Poster/Abstract/2001 Annual

Optics

Optics / Interferometry

1. Off-axis White Light Scatter Interferometry with 0.5m Transmissive Optical Elements
   Gee, A. E. (Cranfield University)
   Optics - Optics - Interferometry/Poster/Abstract/2001 Annual
2. Zone Plate Interferometer Using a Liquid Crystal Panel as a Diffraction Grating -- Proposal on the Compensation Method of Systematic Error -
   Kamiya, K.; Nomura, T.; Okuda, S. (Toyama Prefectural University); and Tashiro, H.; Yoshikawa, K. (Toyama University)
   Optics - Optics - Interferometry/Poster/Abstract/2001 Annual

Processes

Grinding

1. A Study of Grinding Marks in Semiconductor Wafer Grinding
   Chidambaram , S.; Pei, Z. J. (Kansas State University)
   Processes - Grinding/Poster/Abstract/2001 Annual
2. Optimization of Cooling Effect in the Grinding with Mist Type Coolant
   Choi, H. Z.; Lee, S. W.; Kim, D. J. (Korea Institute of Industrial Technology (KITECH))
   Processes - Grinding/Poster/Abstract/2001 Annual
3. Grinding Temperature Measurement in MgO-PSZ Using Infrared Spectrometry
   Curry, A. C.; Shih, A. J.; Kong, J.; Scattergood, R. O. (North Carolina State University); and McSpadden, S. B.; Dinwiddie, R. B. (Oak Ridge National Labotatory)
   Processes - Grinding/Poster/Abstract/2001 Annual
4. Force Modeling in Vibration Assisted Cutting
   Fan, X; Miller, M. H. (Michigan Technological University)
   Processes - Grinding/Poster/Abstract/2001 Annual
5. Water Jet Assisted In-Process Cleaning and Dressing of Grinding Wheels
   Gho, L. M.; Miller, M. H. (Michigan Technological University)
   Processes - Grinding/Poster/Abstract/2001 Annual
6. Abrasive Wear and Forces in Grinding of Silicon Carbide
   Handigund, P. B.; Miller, M. H. (Michigan Technological University)
   Processes - Grinding/Poster/Abstract/2001 Annual
7. Study on a Measuring Method for Grain Cutting Edges in Grinding Wheel Surface
   Izumi, M. (Hiroshima Institute of Technology); Lee, H.-S. (Nihon University); and Inoue, S. (Makino Seiki Co., Ltd.)
   Processes - Grinding/Poster/Abstract/2001 Annual
8. In-situ Three-dimensional Observation of Active Abrasive Grains on a Grinding Wheel During Grinding of Brittle Materials
   Kanai, A.; Inaba, F. (Ashikaga Institute of Technology); and Miyashita, M. (Nano-Tec Associates)
   Processes - Grinding/Poster/Abstract/2001 Annual
9. Fighting Surface Damages of Silicon Wafers - Fine-tuned Wafer Processing with Rotational Grinding
   Klocke, F.; Pähler, D. (Fraunhofer Institut für Produktionstechnologie-IPT)
   Processes - Grinding/Poster/Abstract/2001 Annual
10. Wire Electrical Discharge Truing of Metal Bond Diamond Grinding Wheels
    Rhoney, B. K.; Shih, A. J.; Scattergood, R. O. (North Carolina State University); McSpadden, S. B.; Ott, R. (Oak Ridge National Laboratory); Akemon, J. A.; Gust, D. J.; Yonushonis, T. M.; Grant, M. B. (Cummins, Inc.)
    Processes - Grinding/Poster/Abstract/2001 Annual
11. Machining of Aspherical Opto-device Utilizing Parallel Grinding Method
    Saeki, M.; Kuriyagawa, T.; Syoji, K. (Tohoku University); and Lee, J.-S. (Nambu University)
    Processes - Grinding/Poster/Abstract/2001 Annual
12. Precision Grinding of Micro Fresnel Shape and Precision Glass Molding of Micro Fresnel Lens
    Suzuki, H.; Shibutani, H.; Horiuchi, O. (Toyohashi University of Technology); Higuchi, T. (University of Tokyo); Nishioka, M. (Toshiba Machine Tool); and Kitajima, T.; Yui, A.; Okuyama, S. (The National Defense Academy)
    Processes - Grinding/Poster/Abstract/2001 Annual
13. Evaluation of Grinding Conditions Using Dynamic Components of Grinding Force in Centerless Grinding
    Wu, Y.; Kato, M. (Akita Prefectural University); Syoji, K.; Kuriyagawa, T. (Tohoku University); and Tachibana, T. (Micron Machinery Co., Ltd.)
    Processes - Grinding/Poster/Abstract/2001 Annual
14. Development of Dead-end Grinding Machine with Linear Motor Driven Table
    Yui, A.; Okuyama, S.; Kitajima, T. (The National Defense Academy); and Kosugi, K. (Okamoto Mashine Tool Works, Ltd.)
    Processes - Grinding/Poster/Abstract/2001 Annual

Machining

1. Material Development of SI3N4-SiC Composites for Machining Application
   Kwon, W. T.; Park, J. S.; Kim, K. J.; Kim, Y.-W. (University of Seoul)
   Processes - Machining/Poster/Abstract/2001 Annual
2. Burr Formation in Micro-milling
   Lee, K.; Dornfeld, D. A. (University of California at Berkeley); and Essel, I. (University of Technology at Aachen (RWTH))
   Processes - Machining/Poster/Abstract/2001 Annual
3. Reduction of Tensile Residual Stress and Cutting Force Under High Speed Cutting
   Nakao, M.; Chen, Y.; Konno, J. (The University of Tokyo); Hatamura, Y. (Kogakuin University); and Morita, N. (Chiba University)
   Processes - Machining/Poster/Abstract/2001 Annual
4. Single-Point Diamond Machining of Silicon
   O'Connor, B. P.; Grejda, R. D.; Knapp, B. R.; Marsh, E. R. (The Pennsylvania State University)
   Processes - Machining/Poster/Abstract/2001 Annual
5. Profile Generation for Brittle Materials by Using Ultra-precision Lathe with On-machine Measurement System
   Ogura, I.; Okazaki, Y. (National Institute of Advanced Industrial Science and Technology)
   Processes - Machining/Poster/Abstract/2001 Annual
6. Micromachining by CNC Slotting Using a Steered Tool
   Schaller, T.; Schubert, K. (Forschungszentrum Karlsruhe GmbH)
   Processes - Machining/Poster/Abstract/2001 Annual
7. Burr Formation in Micro-drilling
   Stirn, B. (University of Technology at Aachen (RWTH)); and Lee, K.; Dornfeld, D. A. (University of California at Berkeley)
   Processes - Machining/Poster/Abstract/2001 Annual
8. A Basic Study on Slurry Actions and Slicing Characteristics of Multi-wire Saw
   Suwabe, H.; Ishikawa, K.; Kitajima, A. (Kanazawa Institute of Technology); and Uneda, M. (Japan Defense Agency)
   Processes - Machining/Poster/Abstract/2001 Annual
9. Chatter Modeling and its Diagnostics in Endmilling
   Yoon, M.-C.; Kim, Y. G. (Pukyong National University); Cho, H. D. (Kyungil University); and Kim, S. K. (Hoseo University)
   Processes - Machining/Poster/Abstract/2001 Annual

Manufacturing

1. Compensation of Spindle Unbalance-induced Vibration using an Electromagnetic Exciter
   Ahn, J. S.; Kim, S. M.; Mahalik, N. P.; Lee, S. K. (Kwang-Ju Institute of Science & Technology (K-JIST))
   Processes - Manufacturing/Poster/Abstract/2001 Annual
2. Errors in Aluminum Micro-Scale Grooves Produced with Wire EDM for Subsequent Grinding
   Barraja, M.; Rachakonda, P. K.; Vallance, R. R. (University of Kentucky)
   Processes - Manufacturing/Poster/Abstract/2001 Annual
3. The Fabrication of Nano-roughness Standards for the Calibration of Atomic Force Microscopes
   Gatzen, H. H.; Kourouklis, C. (Hannover University)
   Processes - Manufacturing/Poster/Abstract/2001 Annual
4. Analysis of Cutting Forces in Ball End Milling
   Onozuka, H.; Asakawa, Y.; Sawa, M.; Yamanaka, T.; Maeda, Y. (Hitachi , Ltd.); and Watanabe, K.; Tajima, T. (Hitachi Via Mechanics, Ltd.)
   Processes - Manufacturing/Poster/Abstract/2001 Annual
5. Cylindrical Wire Electrical Discharge Machining Process Development
   Qu, J.; Shih, A. J.; Scattergood, R. O. (North Carolina State University); and McSpadden, S. B. (Oak Ridge National Laboratory)
   Processes - Manufacturing/Poster/Abstract/2001 Annual
   

Manufacturing (precision mass production)

1. Dimensional Control for Composite Manufacturing
   Dong, C.; Zhang, C.; Wang, B. (Florida A&M University - Florida State University)
   Processes - Manufacturing (precision mass production)/Poster/Abstract/2001 Annual
2. 2D Error Models and Monte Carlo Simulations for Budgeting Variation in Optical-Fiber ArrayConnectors
   Rachakonda, P. K.; Barraja, M.; Vallance, R. R. (University of Kentucky); and Kiani, S.; Lehman,J. (Teradyne, Inc.)
   Processes - Manufacturing (precision mass production)/Poster/Abstract/2001 Annual
3. Basis for Micro-Factory: CNC Micromachine Tools
   Ruiz-Huerta, L. (Universidad Autónoma de México)
   Processes - Manufacturing (precision mass production)/Poster/Abstract/2001 Annual

Non-conventional

1. An Internet Based Collaborative Filtering Scheme for Surface and Form Metrology Information
   Bui, S. H.; Raja, J. (University of North Carolina-Charlotte)
   Processes - Non-conventional/Poster/Abstract/2001 Annual
2. Abrasive Process for Reclaiming Semiconductor Wafers
   Kremen, G. Z.; Igelshteyn, L.; Feigyn, S. (Scientific Manufacturing Technology Inc.); McSpadden, S. B.; Parten, R.; Bai, J. M. (Oak Ridge National Laboratory)
   Processes - Non-conventional/Poster/Abstract/2001 Annual
3. Micro Ultrasonic Abrasive Machining for Three-dimensional Milli-structures of Hard-brittle Materials
   Kuriyagawa, T.; Syoji, K. (Tohoku University); Shirosawa, T. (Hitachi Cable, Ltd.); and Saito, O. (Tohoku Gakuin University)
   Processes - Non-conventional/Poster/Abstract/2001 Annual
4. Productive Anisotropic Etching with Excimer Laser Assist
   Moronuki, N.; Uchiyama, K.; Takayama, A. (Tokyo Metropolitan University)
   Processes - Non-conventional/Poster/Abstract/2001 Annual
5. Using Drop-on-Demand Technology for Manufacturing GRIN Lenses
   Trost, H.-J.; Ayers, S.; Chen, T.; Cox, W. R.; Grove, M. E.; Hoenigman, R. (MicroFab Technologies, Inc.)
   Processes - Non-conventional/Poster/Abstract/2001 Annual

Polishing, Lapping and ECM

1. Charging of Cast Iron with Abrasive During Lapping
   Barylski, A. W. (Technical University of Gdansk)
   Processes - Polishing, Lapping and ECM/Poster/Abstract/2001 Annual
2. Laser Assisted Chemical Mechanical Polishing for Planarization
   Kimura, K. (Sony Corporation); and Miyoshi, T.; Takaya, Y.; Takahashi, S. (Osaka University)
   Processes - Polishing, Lapping and ECM/Poster/Abstract/2001 Annual
3. Digital Polishing Method for CMP System Using a Smaller Diameter Polishing Pad
   Uda, Y.; Senga, T.; Ishikawa, A.; Yamamoto, E.; Mitsui, T.; Hoshino, S. (Nikon Corporation)
   Processes - Polishing, Lapping and ECM/Poster/Abstract/2001 Annual
4. High Removal Rate Ultra-Smoothness Polishing of NiP Plated Aluminum Magnetic Disk Substrate with Colloidal Silica
   Yasui, H.; Fukamachi, T.; Sakamoto, S. (Kumamoto University)
   Processes - Polishing, Lapping and ECM/Poster/Abstract/2001 Annual