ASPE Proceedings, October 22 - 27, 2000, Scottsdale, Arizona

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Technical and Poster
Sessions

Session I
Novel Systems
Tuesday, October 24, 2000, 8:30 a.m. - 10:15 a.m.
Session Co-Chairs: Steven C. Fawcett (Axsun Technologies, Inc.) and David H. Youden (Eastman Kodak Co.)

1. A Telecommunications Overview for Precision Engineers (Invited Paper)
   D. E. Luttrell (Corning Incorporated)
   Novel Systems/Oral/Abstract/2000 Annual
2. A Tactile Micro Gripper with Piezoelectric Actuator Based on Microsystem Technology
   F. Qiao, H. Wurmus (Technical University of Ilmenau)
   Novel Systems/Oral/Abstract/2000 Annual
3. Wafer-Level Assembly of Hybrid Microsystems
   B. J. Nelson, B. Vikramaditya, G. Yang, J Gaines (University of Minnesota), and E. Enikov (University of Arizona)
   Novel Systems/Oral/Abstract/2000 Annual
4. Instrument for Setting Radio Telescope Surfaces
   D. H. Parker, J. M. Payne, J. W. Shelton, T. L. Weadon (The National Radio Astronomy Observatory)
   Novel Systems/Oral/Abstract/2000 Annual

Session II
Surface Metrology – Forms
Tuesday, October 24, 2000, 10:45 a.m. - 12:30 p.m.
Session Co-Chairs: Debra Krulewich Born (Lawrence Livermore National Laboratory) and Don L. Martin (Lion Precision)

1. Recent Advances in Separation of Roughness, Waviness and Form (Invited Paper)
   J. Raja, B. Muralikrishnan, S. Fu, X. Liu (University of North Carolina-Charlotte)
   Surface Metrology - Forms/Oral/Abstract/2000 Annual
2. Measurement of the Absolute Diameter of Cylindrical Gages by Grazing Incidence Interferometry
   V. G. Badami, P. Venkataraman, A. W. Kulawiec, J. H. Bruning (Tropel Corporation)
   Surface Metrology - Forms/Oral/Abstract/2000 Annual
3. Development of 2D Angle Probe for Flatness Metrology of Large Silicon Wafer
   W. Gao, S. Kiyono (Tohoku University), E. T. Kanai (University of Washington), and P. S. Huang (SUNY at Stony Brook)
   Surface Metrology - Forms/Oral/Abstract/2000 Annual
4. Optical Reference Profilometer with Improved Thermal Stability
   S. R. Clark, J. E. Greivenkamp, R. M. Richard, J. M. Sasián (University of Arizona)
   Surface Metrology - Forms/Oral/Abstract/2000 Annual

Session III
Lithography
Wednesday, October 25, 2000, 8:30 a.m. – 10:15 a.m.
Session Co-Chairs: Andrew J. Hazelton (Nikon Research Corporation of America), and Hooman Tajbakhsh (ETEC Systems, Inc.)

1. Nikon Electron Projection Lithography System: Mechanical and Metrology Issues (Invited Paper)
   T. Novak, D. Watson (Nikon Research Corporation of America), and Y. Yoda (Nikon Corporation)
   Lithography/Oral/Abstract/2000 Annual
2. High-NA Camera for EUVL Microstepper
   L. C. Hale, R. M. Hudyma, J. S. Taylor, R. L. Thigpen, C. A. Chung (Lawrence Livermore National Laboratory)
   Lithography/Oral/Abstract/2000 Annual
3. Nullifying Acceleration Forces in Nano-positioning Stages for Sub-0.1 µm Lithography Tool for 300mm Wafers
   P. Y. B. Kwan, E. L. Loopstra (ASM Lithography B.V.)
   Lithography/Oral/Abstract/2000 Annual
4. Development of a Vertical Wafer Stage for High-vacuum Applications*
   E. Beckert, A. Hoffmann, C. Schäffel (IMMS GmbH), E. Saffert (Technical University of Ilmenau), and U.-C. Kirschstein (Leica Lithography Systems GmbH)
   Lithography/Oral/NO ABSTRACT AVAILABLE/2000 Annual

Session IV
CMM Metrology
Wednesday, October 25, 2000, 10:45 a.m.- 12:30 p.m.
Session Co-Chairs: Vivek G. Badami (Tropel Corporation) and Andrew D. Woodfin (University of North Carolina at Charlotte)

1. A Giant Magneto Resistive (GMR) Eddy Current Sensor for Use as a Zero Width Coordinate Measuring Machine Probe (Invited Paper)
   S. T. Smith, T. Dogaru (University of North Carolina-Charlotte)
   CMM Metrology/Oral/Abstract/2000 Annual
2. A New Design for a Three-dimensional Measurement Probe
   A. Sohn, T. A. Dow, E. A. Marino (North Carolina State University)
   CMM Metrology/Oral/Abstract/2000 Annual
3. Development of a Special CMM for Dimensional Metrology on Microsystem Components
   U. Brand, T. Kleine-Besten, H. Schwenke (Physikalish-Technische Bundesanstalt)
   CMM Metrology/Oral/Abstract/2000 Annual
4. Design and Testing of a High Speed, 5-DOF, Coordinate Measuring Machine with Parallel Kinematic Structure
   J. C. Ziegert (University of Florida)
   CMM Metrology/Oral/Abstract/2000 Annual

Session V
Precision Fabrication I – Manufacturing
Wednesday, October 25, 2000, 4:00 p.m. – 5:30 p.m.
Session Co-Chairs: A. E. Gee (Cranfield University) and Alex Sohn (North Carolina State University)

1. Multi-layered Circuit Board Precisely Pressed/Damascened on Glass Plates*
   M. Nakao, J. Kumaki, K. Matsumoto, Y. Hatamura (The University of Tokyo)
   Precision Fabrication I - Manufacturing/Oral/NO ABSTRACT AVAILABLE/2000 Annual
2. Production of a Raleigh-Taylor Instability Target*
   R. D. Day, N. Elliot, J. Elliot, V. Gomez, T. Pierce, D. Hatch, G. Rivera, E. Armijo, P. Gobby, M. Brooks, B. Hennike, L. Rodriguez, J. Bartos (Los Alamos National Laboratory)
   Precision Fabrication I - Manufacturing/Oral/NO ABSTRACT AVAILABLE/2000 Annual
3. Bending Deflections Due to Scribe-induced Residual Stresses
   B. Austin, B. Love, T. A. Dow, J. Eischen, R. O. Scattergood (North Carolina State University)
   Precision Fabrication I - Manufacturing/Oral/Abstract/2000 Annual
4. Investigations on the Tool Plate Preparation for Nanogrinding
   H. H. Gatzen, H. Siekmann (Hanover University)
   Precision Fabrication I - Manufacturing/Oral/Abstract/2000 Annual

Session VI
Micro/Mezo
Thursday, October 26, 2000, 8:30 a.m. – 10:15 a.m.
Session Co-Chairs: Jeffrey W. Carr (Lawrence Livermore National Laboratory), and Bradley H. Jared (Corning, Incorporated)

1. Micro Mechanical Manufacturing Processes – Capabilities and Barriers*
   J. Hillesheim, R. Heitkamp (Remmele Engineering)
   Micro - Mezo/Oral/NO ABSTRACT AVAILABLE/2000 Annual
2. Microfactory and a Design Evaluation Method for Miniature Machine Tools
   N. Mishima, K. Ashida, T. Tanikawa, H. Maekawa, K. Kaneko, M. Tanaka (Mechanical Engineering Laboratory, AIST, MITI)
   Micro - Mezo/Oral/Abstract/2000 Annual
3. Performance Evaluation of a Parallel Cantilever Biaxial Micropositioning Stage*
   E. G. Amatucci, N. G. Dagalakis, J. A. Kramar, F. E. Scire (National Institute of Standards and Technology)
   Micro - Mezo/Oral/NO ABSTRACT AVAILABLE/2000 Annual
4. NC Micro-lathe to Machine Micro-parts
   Y. Okazaki, (Mechanical Engineering Laboratory, AIST), and T. Kitahara (Shonan Institute of Technology)
   Micro - Mezo/Oral/Abstract/2000 Annual

Session VII
Precision Fabrication II – Fluidics
Thursday, October 26, 2000, 10:45 a.m. – 12:30 p.m.
Session Co-Chairs: Thomas A. Dow and Kenneth P. Garrard (North Carolina State University)

1. Microfluidic Control Using MEMS (Invited Paper)*
   J. Collier, D. Wroblewski, T. G. Bifano (Boston University)
   Precision Fabrication II - Fluidics/Oral/NO ABSTRACT AVAILABLE/2000 Annual
2. Precision Generation of Optical Elements Using Drop-on-demand Technology
   H.-J. Trost, W. R. Cox, C. Guan, D. J. Hayes, R. Hoenigman, D. B. Wallace (MicroFab Technologies, Inc.)
   Precision Fabrication II - Fluidics/Oral/Abstract/2000 Annual
3. Nano-positional Detection Using Laser Trapping Probe for Microparts
   Y. Takaya, S. Takahashi, T. Miyoshi (Osaka University)
   Precision Fabrication II - Fluidics/Oral/Abstract/2000 Annual
4. Rapid Prototyping of Microfluidic Components
   W. C. Jackson, W. Leger, G. P. Lopez, H. D. Tran, (University of New Mexico)
   Precision Fabrication II - Fluidics/Oral/Abstract/2000 Annual

Session VIII
Precision Fabrication III – Cutting
Thursday, October 26, 2000, 2:00 p.m. – 3:30 p.m.
Session Co-Chairs: James F. Cuttino (University of North Carolina at Charlotte), and Don A. Lucca (Oklahoma State University)

1. Dynamic Forces and Energy Dissipation in Vibration Diamond Cutting of Copper
   E. E. Brinksmeier, J. J. Schmütz (University of Bremen)
   Precision Fabrication III - Cutting/Oral/Abstract/2000 Annual
2. Characteristics of Micro Groove Machining for the Mold of PDP Barrier Ribs
   H.-D. Jeong, I.-H. Cho, S.-C. Jeong, J.-M. Park (Pusan National University)
   Precision Fabrication III - Cutting/Oral/Abstract/2000 Annual
3. Chipping of Sintered Cutting Tools – Mechanism and its Prediction
   K. Uehara (Toyo University), J. Herai (Kiriu Machine Mfg. Co. Ltd.), and T. Ishikawa (Mikasa Sangyo Co. Ltd.)
   Precision Fabrication III - Cutting/Oral/Abstract/2000 Annual
4. The Effects of Fluids on the Deformation and Ductile-to-Brittle Transition of Silicon
   J. A. Patten, S. V. Mumford (University of North Carolina-Charlotte)
   Precision Fabrication III - Cutting/Oral/Abstract/2000 Annual

Poster Sessions
Tuesday, October 24, 2000, 4:00 p.m. – 5:30 p.m.
Wednesday, October 25, 2000, 2:00 p.m. – 3:30 p.m.
Session Chair: Andrew D. Woodfin (University of North Carolina at Charlotte)

PROCESSES

Machining

1. Diamond Micro-machining of Steel Using Electrolysis
   J.-H. Ahn, H.-S. Lim, S.-M. Son (Pusan National University)
   Processes - Machining/Poster/Abstract/2000 Annual
2. Three-dimensional Machining of Optical Quality Surfaces
   M. A. Cerniway, T. A. Dow (North Carolina State University)
   Processes - Machining/Poster/Abstract/2000 Annual
3. Which of the Material Properties Dominates Surface Roughness of Diamond Turned Plastics
   K. Horio, M. Nabeshima (Saitama University)
   Processes - Machining/Poster/Abstract/2000 Annual
4. An Optimization of Ball-end Mill Geometry for High Speed Machining
   N.-K. Kim, S.-C. Chung (Hanyang University)
   Processes - Machining/Poster/Abstract/2000 Annual
5. Proposal of Magnetic-field Assisted Cutting for Improvement of Machinability
   F. Nakano (Olympus Co. Ltd.), K. Yanagihara, Y. Tani (The University of Tokyo), H. Yamaguchi (Utsunomiya University), and Y. Kanda (Toyo University)
   Processes - Machining/Poster/Abstract/2000 Annual
6. Ductile-regime Turning of Brittle Materials by Single Point Diamond
   I. Ogura, Y. Okazaki (Mechanical Engineering Laboratory, AIST)
   Processes - Machining/Poster/Abstract/2000 Annual
7. High Speed Machining of Deep Groove by Using Slender End Mills*
   H. Onozuka, Y. Asakawa, M. Sawa, Y. Maeda, M. Kikuchi, Y. Koguchi (Hitachi, Ltd.)
   Processes - Machining/Poster/NO ABSTRACT AVAILABLE/2000 Annual
8. Diamond Turning of CaF2 for Nanometric Surface
   J. Yan, K. Syoji, T. Kuriyagawa, K. Tanaka (Tohoku University), and H. Suzuki (Toyohashi University of Technology)
   Processes - Machining/Poster/Abstract/2000 Annual
9. Ultraprecision Cutting of ?-ß Titanium Alloy*
   H. Yasui, S. Sakamoto, M. Kawada, S. Kondo (Kumamoto University), and A. Hosokawa (Kanazawa University)
   Processes - Machining/Poster/NO ABSTRACT AVAILABLE/2000 Annual

Grinding

1. Investigation of a Novel Tool Concept for Ductile Grinding of Optical Glass
   E. Brinksmeier, R. Malz, W. Preuß (University of Bremen)
   Processes - Grinding/Poster/Abstract/2000 Annual
2. Micro Crack-free Scratching of Silicon Under External Hydrostatic Pressure
   N. Chandrasekaran, R. Komanduri (Oklahoma State University), and M. Yoshino, T. Aoki (Tokyo Institute of Technology)
   Processes - Grinding/Poster/Abstract/2000 Annual
3. Investigation of the Surface Integrity of Precision Machined Single Crystal Silicon
   C. L. Chao (Tam-Kang University), K. J. Ma, S. C. Sheu (Chung-Cheng Institute of Technology), and H. Y. Lin, F. Y. Chang (MIRL, Industrial Technology Research Institute)
   Processes - Grinding/Poster/Abstract/2000 Annual
4. Thermal Effects in Vibration Assisted Grinding
   P. Chen, W. Qu, M. H. Miller (Michigan Technological University), and A. Chandra (Iowa State University)
   Processes - Grinding/Poster/Abstract/2000 Annual
5. Investigations on the Coolant Supply in Precision Dicing
   H. H. Gatzen, J. Zeadan (Hanover University)
   Processes - Grinding/Poster/Abstract/2000 Annual
6. Effects of Crystallographic Orientation on Tool Wear and Machining Forces in Silicon
   R. D. Grejda, E. R. Marsh (The Pennsylvania State University)
   Processes - Grinding/Poster/Abstract/2000 Annual
7. Static Modeling of Grinding Wheel
   H.-S. Lee, K. Sadasue, Y. Ito, T. Wakabayashi (Nihon University)
   Processes - Grinding/Poster/Abstract/2000 Annual
8. The Grindability of Stainless Steel Using ULID (Ultrasonic In-process Dressing) Method
   S.-W. Lee, H.-D. Jeong (Pusan National University), and H.-Z. Choi (Korea Institute of Industrial Technology)
   Processes - Grinding/Poster/Abstract/2000 Annual
9. Ductile Regime Nanocutting of Silicon Nitride
   J. A. Patten, R. Fesperman (University of North Carolina-Charlotte), and W. Gao (Tohoku University)
   Processes - Grinding/Poster/Abstract/2000 Annual

Polishing, Lapping and ECM

1. Lapping of Ceramics Using Metallic-abrasive Lapping Tools*
   A. Barylski (Technical University of Gdánsk)
   Processes - Polishing, Lapping and ECM/Poster/NO ABSTRACT AVAILABLE/2000 Annual
2. Fine Grinding and Mechano-chemical Polishing for Brittle Hard-disk Substrate Manufacturing*
   F.-Y. Chang, H.-Y. Lin, T.-C. Wu (MIRL, Industrial Technology Research Institute)
   Processes - Polishing, Lapping and ECM/Poster/NO ABSTRACT AVAILABLE/2000 Annual
3. Particulate Dynamic Action of a Polishing Lap
   A. E. Gee, D. F. Williams (Cranfield University)
   Processes - Polishing, Lapping and ECM/Poster/Abstract/2000 Annual
4. Fracture Strength Evaluation of Semiconductor Silicon Wafering Process Induced Damage
   S.-M. Jeong, S.-E. Park, H.-L. Lee (Yonsei University), and H.-S. Oh (Posco-Huls Co., Ltd.)
   Processes - Polishing, Lapping and ECM/Poster/Abstract/2000 Annual
5. Study of Dimensional Limitations of Electro-chemical Micro-machining
   J. Kozak, K. P. Rajurkar (University of Nebraska-Lincoln)
   Processes - Polishing, Lapping and ECM/Poster/Abstract/2000 Annual
6. Electrochemical Polishing of Indium Tin Oxide Film*
   C.-C. Tsai (National Central University), and F.-Y. Chang, H.-Y. Lin, T.-C. Wu (MIRL/ITRI)
   Processes - Polishing, Lapping and ECM/Poster/NO ABSTRACT AVAILABLE/2000 Annual
7. Optical Fabrication in the Optics Research Group
   H. van Brug, S. M. Booij (Delft University of Technology), R.-J. M. van der Bijl (DeCOS, TNO/TPD), and O. W. Fähnle (FISBA-Optik AG)
   Processes - Polishing, Lapping and ECM/Poster/Abstract/2000 Annual

Manufacturing (Precision Mass Production)

1. Precision Replication of Optics
   D. D. Gill, T. A. Dow, A. Sohn (North Carolina State University)
   Processes - Manufacturing (Precision Mass Production)/Poster/Abstract/2000 Annual
2. Development of One-stop Machining System for ?300 Silicon Wafer
   L. Zhou, H. Eda, H. Nakano, R. Kondo, J. Shimizu (Ibaraki University), and K. Watanabe (Hitachi Via-Mechanics Pte., Ltd.)
   Processes - Manufacturing (Precision Mass Production)/Poster/Abstract/2000 Annual

Non-Conventional Processes

1. Knowledge Management for Process Diagnostics and Improvement
   S. H. Bui, J. Raja (University of North Carolina-Charlotte)
   Processes - Non-Conventional/Poster/Abstract/2000 Annual
2. Maskless Laser Patterning of Metal Lines from Metal Powders
   H. Hidai, H. Tokura (Tokyo Institute of Technology)
   Processes - Non-Conventional/Poster/Abstract/2000 Annual
3. Novel Grinding Tools for Machining Precision Micro Parts of Hard and Brittle Materials
   H.-W. Hoffmeister, A. Wenda (Technical University of Braunschweig)
   Processes - Non-Conventional/Poster/Abstract/2000 Annual
4. A Novel Polymer Processing Assisted by Infrared Radiation to Attain a High Precision Transcription
   Y. Kurosaki, K. Sato (University of Electro-Communications)
   Processes - Non-Conventional/Poster/Abstract/2000 Annual
5. A Study on Fabrication and Application of Micro Tool by Using High Speed Chemical Etching
   J.-M. Park, S.-H. Kim, S. C. Jeong, H.-D. Jeong, J. W. Park, Y.H. Moon (Pusan National University)
   Processes - Non-Conventional/Poster/Abstract/2000 Annual
6. Non-straight Profile Cutting on Glass Using Hot Air Jet*
   E. S. Prakash, K. Sadashivappa (Bapuji Institute of Engineering and Technology), V. Joseph (University BDT College of Engineering ) and M. Singaperumal (Indian Institute of Technology)
   Processes - Non-Conventional/Poster/NO ABSTRACT AVAILABLE/2000 Annual
7. Development of Surface Texture Creation Device for Microscopic Areas Using AFM Stylus*
   K. Shirai, Y. Kobayashi (Nihon University)
   Processes - Non-Conventional/Poster/NO ABSTRACT AVAILABLE/2000 Annual
8. Wire EDM Slicing of Monocrystalline Silicon Ingot
   Y. Uno, A. Okada, Y. Okamoto (Okayama University), and T. Hirano (Toyo Advanced Technologies Co., Ltd.)
   Processes - Non-Conventional/Poster/Abstract/2000 Annual

EQUIPMENT, MACHINES & INSTRUMENTS

Design and Testing

1. Focused Ion Beam Shaped Micro-cutting Tools for Fabricating Curvilinear Features
   D. P. Adams (Sandia National Laboratories), and M. J. Vasile, Y. N. Picard (Louisiana Tech University)
   Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
2. Design of a Linear High Precision Ultrasonic Piezoelectric Motor
   M. G. Bauer, T. A. Dow (North Carolina State University)
   Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
3. Affordable, Compact, Research Single Point Diamond Turning Machine
   A. D. Bohart, P. Collins, S. Faulk, C. Halvorson, M. McClellan, K. Shillito (Schafer Corporation)
   Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
4. New Technology and Novel Design Make Sub-micron Production Practical
   M. Clarke, M. G. Pierse, M. M. W. Knuefermann, R. F. J. Read (Cranfield Precision)
   Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
5. A Non-contact Linear Motion System and Its Application
   R. S. Cortesi, A. H. Slocum (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
6. High Stiffness Air Bearing Design and Experiments for CMP Machines
   P. Greene, Z. Shang, D. Bittner (Dover Instrument Corporation)
   Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
7. Development of a Linear Motor Drive Testbed and Initial Thermal Behavior Results
   K. Harper, B. N. Damazo, A. Donmez (National Institute of Standards and Technology)
   Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
8. Design of a Piezo Actuator for Cryogenic Environments
   M. D. Heinrich, T. A. Dow (North Carolina State University)
   Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
9. Incident Angle Auto-alignment of Ellipsometer Using Precision 3-Axis Stage with Kinematic Coupling
   J.-H. Jeong, S.-L. Park, D.-G. Gweon (Korea Advanced Institute of Science and Technology)
   Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
10. Characterization of Porous Graphite Air Bearings
    B. R. Knapp, B. P. O’Connor, E. R. Marsh (The Pennsylvania State University)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
11. Cast Monolithic Hydrostatic Journal Bearings
    M. S. Kotilainen, A. H. Slocum (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
12. Development of a Spherical Motor Manipulated by Four Wires
    H. Nagasawa, S. Honda (Tokyo Metropolitan Institute of Technology)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
13. Fabrication of an In-pipe Mobile Microrobot with the 3D Steering Mechanism*
    M. Ono, S. Kato, M. Shirakawa, T. Hamano (Nippon Institute of Technology)
    Equipment, Machines & Instruments - Design and Testing/Poster/NO ABSTRACT AVAILABLE/2000 Annual
14. Application of Design of Experiment Techniques to Estimate CMM Measurement Uncertainty
    A. Piratelli Filho (University of Brasilia), and B. Di Giacomo (University of São Paulo)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
15. System Modeling and Identification of a Precision Fast Tool Servo System
    S. Rakuff, J. Cuttino (University of North Carolina-Charlotte), and D. Schinstock (Tulsa University)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
16. Investigations Into Spindle Error Motions Using a Modified Loading Device
    A. K. Sharma (The Boeing Company), and S. R. Patterson (University of North Carolina-Charlotte)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
17. Precision Radial Magnetic Bearing
    T. Shinshi, C. Iijima, X. Zhang, K.-B. Choi, K. Sato, A. Shimokohbe (Tokyo Institute of Technology)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
18. High-Speed Metal Bellows Earthworm-type In-pipe Microrobot
    M. Shirakawa, M. Ono, S. Kato (Nippon Institute of Technology)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
19. Kinematic Couplings for Pallets in Flexible Assembly Systems
    R. R. Vallance (University of Kentucky), and A. H. Slocum (Massachusetts Institute of Technology)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
20. Evaluation of Machine Tool Contouring Accuracy at High Feed Rates
    C. P. Wang, R. Griffin (Optodyne, Inc.), and M. Omari, D. Ajao (General Motors Corporation)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
21. A Lathe Tool Translator for Form Error Reduction in Diamond Turning
    S. C. Woody, S. T. Smith (University of North Carolina-Charlotte)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual
22. Experimental Study on Motion Accuracy of CNC Machine Tool with Ball Screw Drive System*
    K. Yamazaki, Y. Kawahara, Y. Kagawa, J. Liu (University of California, Davis), J. Braasch (Johannes Heidenhain GmbH), and M. Fujishima, M. Mori (Mori Seiki Co., Ltd.)
    Equipment, Machines & Instruments - Design and Testing/Poster/NO ABSTRACT AVAILABLE/2000 Annual
23. Air Bearing Design Optimization
    F. Zhao, C. A. Andersson, J. R. Singh, C. Emmons (M Cubed Technologies, Inc.)
    Equipment, Machines & Instruments - Design and Testing/Poster/Abstract/2000 Annual

Controls

1. Intelligent Controller for Magnetostrictive Micro-positioning Device for Ultra-Precision
   J. C. Campos Rubio (Federal University of Minas Gerais), J. G. Duduch, A. V. Porto (University of São Paulo), F. G. Santoro (A.U.R.A., Inc. – Cerro Tololo Inter-American Observatory), and A. E. Gee (Cranfield University)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2000 Annual
2. Optimal Parameter Turning of Feed Drive Systems to Minimize Quadrant Protrusion Errors
   M.-S. Kim, S.-C. Kim, S.-C. Chung (Hanyang University)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2000 Annual
3. Rapid Calibration of Cutting Force Control System Using Motor Currents in End Milling Processes
   S.-C. Kim, S.-C. Chung (Hanyang University)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2000 Annual
4. Sub-milliKelvin On-off Temperature Controller
   K. M. Lawton, S. R. Patterson (University of North Carolina-Charlotte), and V. G. Badami (Tropel Corporation)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2000 Annual
5. Multipoint Temperature Control Using Thermoelectric Modules
   J. Ouyang, P.-T. Ton-Nu, H. D. Tran (University of New Mexico), and P.-T. Ton-Nu (Intel Corporation)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2000 Annual
6. Error Calibration and Real Time Compensation System for the Chip Mounting Machine Using the Kinematic Ball Bar
   H. J. Pahk, J. H. Kim, C. H. Lee, J. H. Moon (Seoul National University)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2000 Annual
7. Integrated Real Time Compensation System for Thermally Induced Volumetric Errors in Commercial CNC Machine Tools
   H. J. Pahk, S. W. Lee, S. Kim, S. W. Yoon (Seoul National University)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2000 Annual
8. Development of the Standard Application Program Interface (API) for Open FA Controller in Japan
   S. Ueno (Technical Research Institute of JSPMI), H. Inoue (FANUC Ltd.), S. Chino (Mitsubishi Electric Corp.), Y. Hoshino (MAKINO Milling Machine Co., Ltd.), and M. Uneme (MORI SEIKI Co. Ltd.)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2000 Annual
9. The Control of Six Degree-of-Freedom Magnetically Suspended Stage
   C. Wang (University of North Carolina-Charlotte)
   Equipment, Machines & Instruments - Controls/Poster/Abstract/2000 Annual

Analysis and Modeling

1. Real Time Estimation of Temperature Distribution in a Ball Screw System Using Observer and Adaptive Algorithm
   J.-Y. Ahn, T.-H. Kim, S.-C. Chung (Hanyang University)
   Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/2000 Annual
2. Rapid Machine Design
   E. Bamberg, A. H. Slocum (Massachusetts Institute of Technology)
   Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/2000 Annual
3. A Correlation Analysis Between Micro-waviness of Magnetic Disk Surface and Electromagnetic Conversion Characteristics at the Head/Disk Interface
   S. Hara, T. Oosone (Nagaoka University of Technology)
   Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/2000 Annual
4. Development of an Independent Real-time Position Feedback Device for CNC Machining Operations
   B. Jokiel, Jr., L. F. X. Bieg, M. Ensz (Sandia National Laboratories)
   Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/2000 Annual
5. Hybrid Simulation and Experimental Method of Uncertainty Analysis
   J. G. Salsbury (Mitutoyo America Corporation)
   Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/2000 Annual
6. Effect of Laminating Period of Ceramics Superlattice Coating Film on its Mechanical Properties
   S. Shimada, H. Takai (Osaka University), and H. Tanaka, N. Ikawa (Osaka Electro-Communication University)
   Equipment, Machines & Instruments - Analysis and Modeling/Poster/Abstract/2000 Annual
7. Wear Behavior of Different Mating Parts*
   J. Shivakumar, K. Sadashivappa, Y. Vrushabhendrappa, K. V. Jayadevappa (Bapuji Institute of Engineering and Technology)
   Equipment, Machines & Instruments - Analysis and Modeling/Poster/NO ABSTRACT AVAILABLE/2000 Annual

Micro-Electro-Mechanical Systems and Nanotechnology

1. Automatic Surface Damage Exploring and Repairing System by Precise Micro Robots
   H. Aoyama, S. Miyamoto (University of Electro-Commu-nications-Tokyo)
   Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/Abstract/2000 Annual
2. Simulation for Laser Trapping on Arbitrary Shaped Particles*
   J. Bai, Y. Takaya, T. Miyoshi, S. Takahashi (Osaka University)
   Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/NO ABSTRACT AVAILABLE/2000 Annual
3. Development of a Miniature Posture Device Carved into a Parallel Linkage*
   Y. Funaki, S. Honda (Tokyo Metropolitan Institute of Technology)
   Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/NO ABSTRACT AVAILABLE/2000 Annual
4. Fabrication of an In-pipe Microrobot Movable in Sheep’s Small Intestine
   S. Kato, H. Akita, K. Miyajima, T. Sugaya, Y. Kasai, N. Kato (Nippon Institute of Technology)
   Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/Abstract/2000 Annual
5. Self-alignment of Microparts Using Liquid Surface Tension – Examination of the Alignment Characteristics
   K. Sato, K. Ito, S. Hata, A. Shimokohbe (Tokyo Institute of Technology)
   Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/Abstract/2000 Annual
6. Micro Multi-point Sheet Electrode for Auditory Brainstem Implant
   H. Takahashi, T. Ejiri, M. Nakao, K. Matsumoto, Y. Hatamura, N. Nakamura, K. Kaga (The University of Tokyo), and T. Herve (Grenoble University)
   Equipment, Machines & Instruments - MEMS and Nanotechnology/Poster/Abstract/2000 Annual

Novel Systems

1. Design of a Precision Electro Discharge Micro Milling Machine
   K.-F. Hii, X. Zhao, R. R. Vallance (University of Kentucky)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2000 Annual
2. The New Long Range Multi-axis Nanopositioner Using Inertial Slider/Walking Method
   J. Y. Shim, H. Chung, D.-G. Gweon (Korea Advanced Institute of Science and Technology)
   Equipment, Machines & Instruments - Novel Systems/Poster/Abstract/2000 Annual

METROLOGY

Instrumentation, Design and Testing

1. New Artifacts for Calibration of Large CMMs
   M. Bartscher, K. Busch, M. Franke, H. Schwenke, F. Wäldele (Physikalisch-Technische Bundesanstalt)
   Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
2. A Method of Optimal Design for Minimization of Force Ripple in Long Stroke Precision Linear Actuator with BLPMM
   M. J. Chung, M. G. Lee, S. Q. Lee, D.-G. Gweon (Korea Advanced Institute of Science and Technology)
   Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
3. A High Precision Linear Measuring System
   T. B. Eom, J. W. Han (Korea Research Institute of Standards and Science)
   Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
4. Development of an Ultraprecise Positioning Stage Traveling on a Grating
   S. Honda (Tokyo Metropolitan Institute of Technology)
   Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
5. Development of a Measuring Instrument for Grinding Wheel Peripheral Shapes
   M. Izumi, H.-S. Lee, T. Wakabayashi (Nihon University), and S. Inoue (Makino Seiki Co., Ltd.)
   Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
6. Analysis of PZT Tube Scanner Motion Using Newly Designed Sensing Mechanism
   H. Jung, J. Y. Shim, D.-G. Gweon (Korea Advanced Institute of Science and Technology)
   Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
7. Comparative Analysis of Halbach and Conventional Linear Motors for Precision Positioning and High Speed Control
   M. G. Lee, M. J. Chung, S. Q. Lee, D.-G. Gweon (Korea Advanced Institute of Science and Technology)
   Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
8. Form and Length Measurements Using of a Modified Commercial Form Measuring Instrument
   F. Lüdicke, O. Jusko, H. Reimann (Physikalish-Technische Bundesanstalt)
   Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
9. Development of Long Depth of Focus Optical Microscopy Using Software-confocal Method and its Application to 3-D Profile Measurement
   K. Mitsui, T. Uno (Keio University)
   Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
10. A Micro Coordinate Measurement System with Virtual Contact Probe
    K. W. Ng, K. S. Moon, C. R. Friedrich (Michigan Technological University), and Z. K. Ling (Ford Motor Co.)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
11. Enhancements to the Pellissier H5 Hydrostatic Level
    D. H. Parker, J. W. Shelton, B. Radcliff (The National Radio Astronomy Observatory)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
12. A Detachable Step Gage for the Calibration of Vertical Machining Centers and Bridge Type Coordinate Measuring Machines
    A. R. Sousa, C. A. Schneider (Federal University of Santa Catarina)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
13. The Design and Use of a Precision Bearing Analyzer
    V. C. Vigliano, E. R. Marsh (The Pennsylvania State University)
    Metrology - Instrumentation, Design and Testing/Poster/Abstract/2000 Annual
14. A Capacitance Type Slope Angle Sensor*
    S. Zhang, S. Kiyono, M. Mito (Tohoku University)
    Metrology - Instrumentation, Design and Testing/Poster/NO ABSTRACT AVAILABLE/2000 Annual

Surface and Subsurface

1. A Convolved Multi-Gaussian Probability Distribution for Surface Topography Applications
   J. D. Cogdell (The Timken Company)
   Metrology - Surface and Subsurface/Poster/Abstract/2000 Annual
2. Subsurface Microstructure Effects on Frequency Characteristics of Polished Quartz Oscillator Discs
   T. Kaneeda, Y. Yokota, D. Nishiyama, (Okayama University of Science), T. Miyawaki (Wakou Kikou Co., Ltd.), and S. Yokomizo
   (Okayama Prefecture Office, Industry Development Division)
   Metrology - Surface and Subsurface/Poster/Abstract/2000 Annual
3. Surface Topography Analysis of Silicon Wafers by a Chromameter
   G. Udupa, B. K. A. Ngoi (Nanyang Technological University)
   Metrology - Surface and Subsurface/Poster/Abstract/2000 Annual

Form and Geometry

1. Error Budget by Constraints
   S. K. Eisenbies, R. J. Hocken (University of North Carolina-Charlotte)
   Metrology - Form and Geometry/Poster/Abstract/2000 Annual
2. A Study on Model Building of Free-form Curves
   Feng G., Zhang G., Xie Z., Wang C. (Tianjin University)
   Metrology - Form and Geometry/Poster/Abstract/2000 Annual
3. On-Machine Profile and Straightness Measurement of a Linear Slide
   E. H. K. Fung, S. M. Yang (The Hong Kong Polytechnic University)
   Metrology - Form and Geometry/Poster/Abstract/2000 Annual
4. Self-calibration for 2-Dimensional Precision Stages Based on Circle Closure Principle
   X. Lu, H. D. Tran (University of New Mexico)
   Metrology - Form and Geometry/Poster/Abstract/2000 Annual
5. Shape Error Measurement of a Parabolic Mirror Using the Ray Tracing and the Fringe Scanning Method
   T. Nomura, K. Kamiya, S. Okuda, K. Yamazaki (Toyama Prefectural University), and H. Tashiro, K. Yoshikawa (Toyama University)
   Metrology - Form and Geometry/Poster/Abstract/2000 Annual
6. Profile Tolerance Zones with Control Points
   T. M. K. Pasupathy, R. G. Wilhelm (University of North Carolina-Charlotte), and G. A. Hetland (Hutchinson Technologies Ltd.)
   Metrology - Form and Geometry/Poster/Abstract/2000 Annual
7. Precision Interferometer Measurement of Ultrahigh Precision Grate Base
   S. Peng (Chinese Academy of Science)
   Metrology - Form and Geometry/Poster/Abstract/2000 Annual
8. Accurate Profile Measurement by an Interferometer
   X-F. Qiang, W. Gao, S. Kiyono (Tohoku University)
   Metrology - Form and Geometry/Poster/Abstract/2000 Annual
9. A Method for Non-contact Measurement for Free-form Surfaces Based on CMM
   Xu Y., Zhang G., Xie Z., Feng G., Wang C., (Tianjin University)
   Metrology - Form and Geometry/Poster/Abstract/2000 Annual
10. In-process Roundness Measurement System for Cylindrical Machine Parts of Small Diameter with Run-out Error Compensation
    R. Yamada (Nagaoka National College of Technology), and T. Takei, K. Yanagi (Nagaoka University of Technology)
    Metrology - Form and Geometry/Poster/Abstract/2000 Annual
11. Automatic Measurement of Large Surface Planeness*
    Zhang J., Lei T., Chen Y. (Academy of Machinery Science & Technology)
    Metrology - Form and Geometry/Poster/NO ABSTRACT AVAILABLE/2000 Annual

Analysis and Modeling

1. A Proposed Method for Dimensional Metrology of Non-rigid Objects
   K. L. Blaedel, D. W. Swift (Lawrence Livermore National Laboratory), H. Tajbakhsh (ETEC Systems, Inc.), S. R. Patterson (University of North Carolina-Charlotte), and D. C. Thompson (Production Technology Inc.)
   Metrology - Analysis and Modeling/Poster/Abstract/2000 Annual
2. Data Filtering Using Measured Surface Normals
   R. Edgeworth (Intel Corporation), and R. G. Wilhelm (University of North Carolina-Charlotte)
   Metrology - Analysis and Modeling/Poster/Abstract/2000 Annual
3. Plate Calibration Methods for Two-dimensional Stages*
   J. Fu, R. J. Hocken (University of North Carolina-Charlotte), G. X. Zhang (Tianjin University)
   Metrology - Analysis and Modeling/Poster/NO ABSTRACT AVAILABLE/2000 Annual
4. Comparison Study of Areal Functional Parameters for Rough Surfaces
   X. Q. Jiang, L. Blunt, K. J. Stout (The University of Huddersfield)
   Metrology - Analysis and Modeling/Poster/Abstract/2000 Annual
5. An Accurate and Robust Stereo Algorithm with a Variable Window for Measurement of 3D Shapes
   G.-B. Kim, S.-C. Chung (Hanyang University)
   Metrology - Analysis and Modeling/Poster/Abstract/2000 Annual
6. Volumetric Error Identification and Measured Data Correction for On-machine Measurement and Inspection Systems
   K.-D. Kim, S.-C. Chung (Hanyang University)
   Metrology - Analysis and Modeling/Poster/Abstract/2000 Annual
7. The Interaction of Measuring Errors and Workpiece Errors in Feature Evaluation Algorithms
   E. P. Morse (University of North Carolina-Charlotte), and J. G. Salsbury (Mitutoyo America Corporation)
   Metrology - Analysis and Modeling/Poster/Abstract/2000 Annual
8. A Novel Practical Approach to Cylindricity Evaluation: An Experimental Report
   G. Singh (Mahr Federal), O. Devillers (INRIA), and F. P. Preparata (Brown University)
   Metrology - Analysis and Modeling/Poster/Abstract/2000 Annual
9. An Artificial Intelligent Measuring Sequence Path Planning for CMM
   Wu Y., Liu S., Zhang G. (Tianjin University)
   Metrology - Analysis and Modeling/Poster/Abstract/2000 Annual

Optics and Interferometry

1. Investigation of Subsurface Damage of II-VI Semiconductors Using Photoluminescence
   D. W. Hamby, D. A. Lucca (Oklahoma State University)
   Metrology - Optics and Interferometry/Poster/Abstract/2000 Annual
2. Second Order Distortion of Grazing Incidence Interferometric Measurements
   P. D. Knight, Jr., S. R. Patterson (University of North Carolina-Charlotte)
   Metrology - Optics and Interferometry/Poster/Abstract/2000 Annual
3. Compensation of Phase Change Upon Reflection in White Light Interferometry
   M.-C. Park, S.-W. Kim (Korea Advanced Institute of Science and Technology)
   Metrology - Optics and Interferometry/Poster/Abstract/2000 Annual
4. A Compact Interferometric Surface Characterization Device
   A. D. Woodfin, F. Farahi, R. J. Hocken (University of North Carolina-Charlotte)
   Metrology - Optics and Interferometry/Poster/Abstract/2000 Annual
5. Dual Mode Phase Measurement of Heterodyne Optical Interferometry
   N.-B. Yim, M.-S. Kim, S.-W. Kim (Korea Advanced Institute of Science and Technology)
   Metrology - Optics and Interferometry/Poster/Abstract/2000 Annual