ASPE Proceedings, October 25-30, 1998
Hyatt Regency St. Louis at Union Station
St. Louis, Missouri

PDF versions of the abstracts from the 1998 Proceedings are not available. Contact ASPE to purchase a copy of the Proceedings. ASPE does not sell individual abstracts from the Proceedings.

Technical Sessions

Session I
Metrology I
Tuesday, October 27, 1998, 8:30 a.m. - 10:00 a.m.
Session Chair: Dan Luttrell (Corning Inc.)

1. Development of Ultraprecision 3D-CMM Based on 3D Metrology Frame
   H. Shiozawa, Y. Fukutomi, T. Ushioda, S. Yoshimura (Nikon Corporation)
   Metrology/Oral/Abstract/1998 Annual
2. Two-dimensional Stage Self-calibration: Role of Symmetry and Invariant Sets of Points
   M. R. Raugh (Interconnect Technologies Corporation)
   Metrology/Oral/Abstract/1998 Annual
3. Rapid Precision Volumetric Metrology
   A. D. Ducharme, O. Shepherd, G. Wyntjes (Visidyne, Inc.)
   Metrology/Oral/Abstract/1998 Annual
4. Opto-Tactile Sensor for Measuring Small Structures on Coordinate Measuring Machines
   G. Ji, H. Schwenke, E. Trapet (Physikalisch-Technische Bundesanstalt)
   Metrology/Oral/Abstract/1998 Annual

Session II
Process I
Tuesday, October 27, 1998, 10:30 a.m. - 12:00 p.m.
Session Chair: Jeffrey Carr (Lawrence Livermore National Laboratory)

1. Subsurface Damage in Metals Induced by the Ploughing Component of Precision Machining Processes
   R. D. Day, R. Dickerson, C. Maggiore, P. Brooks, R. Springer, B. Carter, D. Hatch (Los Alamos National Laboratory), P. E. Russell (North Carolina State University), and T. Woodward, T. Stark (Materials Analytical Services)
   Process/Oral/Abstract/1998 Annual
2. Ultraprecision Milling of Complex Surface Geometries
   M. Weck, S. Fischer (Fraunhofer-Institut für Produktionstechnologie)
   Process/Oral/Abstract/1998 Annual
3. Chip Dynamics in Diamond Turning
   B. H. Jared, T. A. Dow (North Carolina State University)
   Process/Oral/Abstract/1998 Annual
4. Fabrication of Non-imaging Optical Surfaces
   K. P. Garrard, A. Sohn, T. A. Dow (North Carolina State University), and D. G. Pelka, W. A. Parkyn (Teledyne Lighting and Display Products)
   Process/Oral/Abstract/1998 Annual

Session III
Machine Design I
Tuesday, October 27, 1998, 1:30 p.m. - 3:00 p.m.
Session Chair: David Youden (Eastman Kodak Company)

1. Precision Engineering at Polaroid (Invited Paper)
   W. T. Plummer, J. J. Mader, J. W. Roblee, J. Van Tassell (Polaroid Corporation)
   Machine Design/Oral/Abstract/1998 Annual
2. Friction-based Designing of Kinematic Couplings
   L. C. Hale (Lawrence Livermore National Laboratory)
   Machine Design/Oral/Abstract/1998 Annual
3. Spatial Frequency Domain Error Budget
   D. Krulewich, H. Hauschildt (Lawrence Livermore National Laboratory)
   Machine Design/Oral/Abstract/1998 Annual
4. A Rotary Arm Based Turning Machine for Ophthalmic Lenses
   S. J. Ludwick, D. C. Ma, D. L. Trumper (Massachusetts Institute of Technology)
   Machine Design/Oral/Abstract/1998 Annual

Session IV
Metrology II
Wednesday, October 28, 1998, 8:30 a.m. - 10:00 a.m.
Session Chair: Jeffrey Roblee (Polaroid Corporation)

1. Fundamental Ideas in Measurement Uncertainty (Invited Paper)
   W. T. Estler (National Institute of Standards and Technology)
   Metrology/Oral/Abstract/1998 Annual
2. Application of Laser Feedback Metrology to a Hexapod Test Strut
   M. P. Schmidt-Lange, E. G. Amatucci, A. J. Wavering (National Institute of Standards and Technology)
   Metrology/Oral/Abstract/1998 Annual
3. Symbiotic System of Micro Robot and Coordinate Measuring Machine for Flexible Surface Measurement
   H. Aoyama, M. Chujo (University of Electro-Communications), and G. Egashira (Shizuoka University)
   Metrology/Oral/Abstract/1998 Annual
4. Dimensional Metrology with the NIST Calibrated Atomic Force Microscope
   R. Dixson, R. Köning, T. V. Vorburger, J. Fu (National Institute of Standards and Technology), and V. W. Tsai (University of Maryland)
   Metrology/Oral/Abstract/1998 Annual

Session V
Machine Design II
Wednesday, October 28, 1998, 10:30 a.m. - 12:00 p.m.
Session Chair: Kenneth Blaedel (Lawrence Livermore National Laboratory)

1. Self-contained, Six-axis Positioning, Scanning and Metrology Stage with Active, Sub-nanometer Planarity and Straightness Compensation
   S. Jordan (Polytec/PI, Inc.)
   Machine Design/Oral/Abstract/1998 Annual
2. Active Bearing Preload Control of a High Speed Spindle Using Piezoelectric Actuators
   Chen J-S. (National Chung-Chen University)
   Machine Design/Oral/Abstract/1998 Annual
3. Development of a Nanometer Resolution Constant Velocity Piezoelectric Actuator
   J. C. Fasick (Burleigh Instruments, Inc.), P. F. A. M. van Putten (Delft University of Technology), A. D. Ruxton, D. E. Luttrell, T. A. Dow (North Carolina State University), and D. Youden, K. Falter (Eastman Kodak Co.)
   Machine Design/Oral/Abstract/1998 Annual
4. Enhancing Ballscrew Axial Dynamics
   S. A. Nayfeh, A. H. Slocum (Massachusetts Institute of Technology)
   Machine Design/Oral/Abstract/1998 Annual

Session VI
Processes II
Wednesday, October 28, 1998, 1:30 p.m. - 3:00 p.m.
Session Chair: Thomas A. Dow (North Carolina State University)

1. Ultraprecision Grinding of Optical Materials (Invited Paper)
   Y. Namba (Chubu University)
   Processes/Oral/No Abstract Available/1998 Annual
2. Hologram Diffraction Grating of Glass with Triangular Grooves Fabricated by Sacrificial Mask FAB Etching
   M. Nakao, S. Tanaka, K. Ishii, Y. Hatamura (The University of Tokyo)
   Processes/Oral/Abstract/1998 Annual
3. Wavelet Based Contouring Algorithm for Sub-millimeter Diameter Optics
   P. M. Shanbhag, M. R. Feinberg, T. G. Bifano, G. Sandri, M. N. Horenstein, S. C. Fawcett (Boston University)
   Processes/Oral/Abstract/1998 Annual
4. Machining Beryllium Spheres and Shells for Ignition Capsule Applications
   L. Salzer, R. D. Day, N. Elliott, L. R. Foreman, R. W. Margevicius, M. Salazar, J. Townsend (Los Alamos National Laboratory)
   Processes/Oral/Abstract/1998 Annual

Session VII
Polishing
Thursday, October 29, 1998, 8:30 a.m. - 10:00 a.m.
Session Chair: Irving Stowers (Lawrence Livermore National Laboratory)

1. Why Silicon is Hard (Invited Paper)
   J. Gilman (University of California at Los Angeles)
   Polishing/Oral/No Abstract Available/1998 Annual
2. The Effect of Slurry Film Thickness Variation in Chemical Mechanical Polishing (CMP)
   Y. Moon, D. A. Dornfeld (University of California at Berkeley)
   Polishing/Oral/Abstract/1998 Annual
3. Precision Optics Fabrication Using Magnetorheological Finishing
   D. Golini, P. Dumas, W. Kordonski, S. Hogan (QED Technologies), and S. Jacobs (University of Rochester)
   Polishing/Oral/Abstract/1998 Annual
4. “Ductile Mode” Machining of Ferroelectric Materials
   P. A. Beltrão, A. E. Gee, J. Corbett, R. W. Whatmore, C. A. Goat, S. A. Impey (Cranfield University)
   Polishing/Oral/Abstract/1998 Annual

Session VIII
Machine Design III
Thursday, October 29, 1998, 10:30 a.m. - 12:00 p.m.
Session Chair: Brad Damazo (National Institute of Standards and Technology)

1. Accuracy Optimization of Machine Tools Under Acceleration Loads for the Demands of High-speed-machining
   F. Rehsteiner, S. Weikert (Swiss Federal Institute of Technology), and Z. Rak (Silesian Technical University)
   Machine Design/Oral/Abstract/1998 Annual
2. Precision Control of Planar Magnetic Levitator
   W-J. Kim (SatCon Technology Corporation), and D. L. Trumper (Massachusetts Institute of Technology)
   Machine Design/Oral/Abstract/1998 Annual
3. Experimental Studies on Magnetic Force Pre-Loaded Static Air Bearings
   Z. Shang, P. Greene, S. Campbell (Dover Instrument Corporation)
   Machine Design/Oral/Abstract/1998 Annual
4. A Magnetically Guided Precision Drive with 6 Degrees of Freedom
   S. Kovalev, E. Saffert, E. Kallenbach, C. Schäffel (Technical University of Ilmenau)
   Machine Design/Oral/Abstract/1998 Annual

Session IX
Precision Grinding
Thursday, October 29, 1997, 1:30 p.m. - 3:00 p.m.
Session Chair: Anthony E. Gee (Cranfield University)

1. Effect of Modulation on Single Grit Scratch Tests
   W. Qu, M. H. Miller, A. Chandra (Michigan Technological University)
   Precision Grinding/Oral/Abstract/1998 Annual
2. Vitreous Bond CBN High Speed and High Material Removal Rate Grinding of Ceramics
   A. J. Shih, M. B. Grant, T. M. Yonushonis (Cummins Engine Company, Inc.), and T. O. Morris, S. B. McSpadden (Oak Ridge National Laboratory)
   Precision Grinding/Oral/Abstract/1998 Annual
3. Chip Formation and Sub-surface Damage in Ductile Mode Grinding of Semiconductors
   E. Uhlmann, H. Engel, C. Paesler (Technical University of Berlin)
   Precision Grinding/Oral/Abstract/1998 Annual
4. New Abrasives Trends in Manufacturing of Silicon Wafers
   M. Tricard (Norton Company), S. Kassir, P. Herron (Strasbaugh), and Z. J. Pei (MEMC Electronics Materials, Inc.)
   Precision Grinding/Oral/Abstract/1998 Annual

Session X
Novel Processes
Thursday, October 29, 1998, 3:30 p.m. - 5:00 p.m.
Session Chair: Frederick Parsons (Federal Products Company)

1. Precision Machining with Femtosecond Laser Pulses (Invited Paper)
   M. Perry (Lawrence Livermore National Laboratory)
   Novel Processes/Oral/No Abstract Available/1998 Annual
2. Design and Characterization of a Linear Position Transducer Based on Giant Magneto Resistance (GMR) Effect
   I. Tchertkov (MICROCOSM Technologies, Inc.) and D. Christy, F. Parsons (Federal Products Company)
   Novel Processes/Oral/Abstract/1998 Annual
3. Combining Pneumatic and Optical Vibration Isolation for Optimal Performance of an Artificial Star
   E. Acworth (Stanford University)
   Novel Processes/Oral/Abstract/1998 Annual

Poster Session I
Tuesday, October 27, 1998, 3:30 p.m. - 5:00 p.m.
Session Chair: Michele H. Miller (Michigan Technological University)

PROCESSING -- MACHINING

1. Planarization of BGA Devices Prior to Electronic Testing
   A. Balakrishnan, A. H. Slocum (Massachusetts Institute of Technology)
   Processing - Machining/Poster/Abstract/1998 Annual
2. Investigation of the Diamond Machinability of Newly Developed Hard Coatings
   E. Brinksmeier, W. Preuß, R. Malz (Universität Bremen)
   Processing - Machining/Poster/Abstract/1998 Annual
3. Experiences in Micro-milling and Micro-drilling
   B. N. Damazo, M. A. Davies, B. Dutterer, M. D. Kennedy (National Institute of Standards and Technology)
   Processing - Machining/Poster/Abstract/1998 Annual
4. Mechanical Microprofiling Mechanisms of Advanced Ceramics
   H. H. Gatzen, L. P. Ruhbach (Hannover University)
   Processing - Machining/Poster/Abstract/1998 Annual
5. Ultraprecision Machining of Metal Matrix Composites
   N. P. Hung, Z. W. Zhong, G. W. Yeow, T. C. Tan (Nanyang Technological University)
   Processing - Machining/Poster/Abstract/1998 Annual
6. Vibration Cutting Method of OD-Blade with Atomized Working Fluid
   K. Ishikawa, H. Suwabe, M. Uneda (Kanazawa Institute of Technology)
   Processing - Machining/Poster/Abstract/1998 Annual
7. Transmission Electron Microscopy of Ultraprecision Al-Mg Alloy Machined Surface
   T. Kaneeda, K. Morimoto (Okayama University of Science), S. Yokomizo (Industrial Technology Center of Okayama Prefecture), and I. Tsukuda (Showa Aluminum Co., Ltd.)
   Processing - Machining/Poster/Abstract/1998 Annual
8. Development of a High-performance Laser-guided Deep-hole Boring Tool: Optimal Determination of Reference Origin for Precise Guiding
   A. Katsuki, H. Onikura, T. Sajima, T. Takei, D. Thiele (Kyushu University)
   Processing - Machining/Poster/Abstract/1998 Annual
9. Diamond Turning Figure Control by In-process Measurement
   T. Kohno, S. Kohno, D. Saito, T. Yazawa (Tokyo Metropolitan Institute of Technology)
   Processing - Machining/Poster/Abstract/1998 Annual
10. Surface Roughness Valuation of Si Wafers by Diamond Turning
    H. Murai, Y. Yokota, T. Kaneeda (Okayama University of Science), and M. Kerstan, P. O. Hahn (Wacker Silitronic AG)
    Processing - Machining/Poster/Abstract/1998 Annual
11. Fast Tool Servo System and its Application to Three-dimensional Fine Surface Figures
    Y. Okazaki (Mechanical Engineering Laboratory, AIST)
    Processing - Machining/Poster/Abstract/1998 Annual
12. Application of Polynominal Discriminant Function Data for Training Artificial Neural Network in Tool Wear Monitoring
    S. Purushothaman (SRM Engineering College), and Y. G. Srinivasa (Indian Institute of Technology)
    Processing - Machining/Poster/No Abstract Available/1998 Annual
13. Influence of Coolant Temperature on Surface Finish in Turning Operation
    K. Sadashivappa, E. S. Prakash (Bapuji Institute of Engineering and Technology), and M. Singaperumal (Indian Institute of Technology)
    Processing - Machining/Poster/Abstract/1998 Annual
14. Microstructure Grooves Less Than 50 mm Wide Cut with Ground Hard Metal Micro End Mills
    T. Schaller, L. Bohn, D. Scherhaufer, K. Schubert (Forschungszentrum Karlsruhe GmbH)
    Processing - Machining/Poster/Abstract/1998 Annual
15. Examination of Surface Location Error Due to Phasing of Cutter Vibrations
    T. Schmitz, J. C. Ziegert (University of Florida)
    Processing - Machining/Poster/Abstract/1998 Annual
16. Thermal Aspect of Micro to Nano Scale Metal Cutting
    S. Shimada (Osaka University), T. Inamura, N. Takezawa (Nagoya Institute of Technology), and N. Ikawa (Osaka Electro-Communication University)
    Processing - Machining/Poster/Abstract/1998 Annual
17. Precision Machining by Hard Turning
    H. K. Tönshoff, C. Borbe (University of Hannover)
    Processing - Machining/Poster/Abstract/1998 Annual
18. Re-sharpening Endmill Side-edge on a Machining Center
    Y. Usui, S. Miyazawa (Mechanical Engineering Laboratory, AIST,MITI), J-H. Lee (Korea Polytechnic University), and C. Endo, H. Akematsu, Y. Sakurai (Takashima Sangyo Co., Ltd.)
    Processing - Machining/Poster/Abstract/1998 Annual
19. Brittle-ductile Transition Behavior in Diamond Turning of Single Crystal Silicon Using Straight-nosed Tools
    J. Yan, K. Syoji, T. Kuriyagawa, H. Suzuki (Tohoku University)
    Processing - Machining/Poster/Abstract/1998 Annual

PROCESSING -- GRINDING

1. Ultraprecision Machining of Copper-Beryllium Alloys
   N. P. Hung, C. M. Fann, S. W. Lim, C. K. Leong (Nanyang Technological University)
   Processing - Grinding/Poster/Abstract/1998 Annual
2. Grinding Force Criteria in Shear-mode Grinding
   K. Imai, H. Hashimoto (Kanagawa Institute of Technology)
   Processing - Grinding/Poster/Abstract/1998 Annual
3. Influence of Phase Transition on Cutting Depth and Chip Thickness Limits in Ductile Machining of Silicon
   R. G. Jasinevicius, J. G. Duduch, A. J. Vieira Porto (Universidade de São Paulo), and A. E. Gee (Cranfield University)
   Processing - Grinding/Poster/Abstract/1998 Annual
4. The Improvement of Form Accuracy by High Pressure Air Jet in Slot Grinding
   S. W. Lee, Y. C. Lee, H. D. Jeong (Pusan National University), and H. Z. Choi (Korea Institute of Industrial Technology)
   Processing - Grinding/Poster/Abstract/1998 Annual
5. Precision Grinding of Micro Aspherical Surface--Feasibility Study of 250 mm Aspherical Grinding
   H. Suzuki, T. Kitajima, S. Okuyama, (National Defense Academy of Japan), and K. Syoji, T. Kuriyagawa, J. Yan (Tohoku University)
   Processing - Grinding/Poster/Abstract/1998 Annual
6. Elliptical Vibration Grinding with an Ultrasonic Motor
   K. Suzuki (Nippon Institute of Technology), and T. Uematsu, T. Makizaki (Toyama Prefectural University)
   Processing - Grinding/Poster/Abstract/1998 Annual
7. Rapid Prototyping -- Its New Possibility of Manufacturing of Grinding Wheel
   T. Tanaka, Y. Isono, H. Shindoh, Y. Ishizaki (Ritsumeikan University)
   Processing - Grinding/Poster/Abstract/1998 Annual
8. Fine Grinding of Engineering Ceramics as Substitution for Double-side Lapping
   H. K. Tönshoff, R. Egger (University of Hannover), V. v. Mackensen (Peter Wolters Werkzeugmaschinen GmbH), and D. Preising (Diamant Werkzeuge GmbH Hameln)
   Processing - Grinding/Poster/Abstract/1998 Annual
9. In-process-dressing of Fine Diamond Wheels for Tool Grinding
   H. K. Tönshoff, T. Friemuth (University of Hannover)
   Processing - Grinding/Poster/Abstract/1998 Annual

PROCESSING -- POLISHING

1. Manufacture of Microstructures by Ultrasonic Lapping
   E. Brinksmeier, W. Preuß, J. Schmütz (Universität Bremen)
   Processing - Polishing/Poster/Abstract/1998 Annual
2. A Polishing System for Aspherical Surface Generation
   S-H. Chang, H-Y. Lin, T-C. Wu (Mechanical Industry Research Laboratories, Industrial Technology Research Institute)
   Processing - Polishing/Poster/Abstract/1998 Annual
3. New Approach to Smoothing of Diamond -- Tribochemical Polishing of Diamond with Some Soft Powders
   K. Horio, M. Hyohdoh, T. Kasai (Saitama University)
   Processing - Polishing/Poster/Abstract/1998 Annual
4. Influence of the Abrasive Content and Grain Size on Ultra Smoothness Polishing of Glass Magnetic Disk Substrate
   H. Yasui, Y. Takeda, M. Ochi, M. Saeki, A. Hosokawa (Kumamoto University), and K. Sato (Kyushu Matsushita Electric Company, Ltd.)
   Processing - Polishing/Poster/Abstract/1998 Annual
5. Dry Polishing of Si Wafer by BaCO3 Abrasive Disk and its Machining Mechanism
   N. Yasunaga, (Tokai University), and Y. Yamamoto, M. Ishizuka, S. Tanaka (Sumitomo-Osaka Cement Company, Ltd.)
   Processing - Polishing/Poster/Abstract/1998 Annual

PROCESSING -- NOVEL

1. Rapid 3D Microstructure Fabrication by Using Excimer Laser Micromachining with Image Processing
   Technologies
   H. Y. Chou, S. B. Chang, F. Lin, C. R. Yang, R. Lou, W. K. Kuo, C. J. Chen, W. H. Huang (National Science Council)
   Processing -Novel/Poster/Abstract/1998 Annual
2. Evolution of Diffractive Phase Grating Sidewall Slopes
   H. E. Fawcett, S. C. Fawcett, J. Pitkiewicz, E. Sayers (MicroE, Inc.)
   Processing -Novel/Poster/Abstract/1998 Annual
3. Combined Hardening and Brazing for Dimensionally Stable Assembly
   L. Fay, H. D. Tran (University of New Mexico)
   Processing -Novel/Poster/Abstract/1998 Annual
4. Application Potential of Photosensitive Glasses
   K. Feindt (Technical University of Ilmenau)
   Processing -Novel/Poster/Abstract/1998 Annual
5. Atomic Scale Cutting Process -- 3D MD Analyses and SPM Observation
   Y. Isono, T. Tanaka (Ritsumeikan University)
   Processing -Novel/Poster/Abstract/1998 Annual
6. Rapid Tooling Using Metal Fiber Reinforced Epoxy
   H. D. Jeong, W. B. Bae, P. S. Kim (Pusan National University)
   Processing -Novel/Poster/Abstract/1998 Annual
7. Laser Drawing System Using Focused and Unfocused Beams for Manufacturing Large Diameter Zone-plates
   K. Kamiya, T. Nomura, H. Miyashiro, T. Yoshida, S. Okuda (Toyama Prefectural University), and H. Tashiro, K. Yoshikawa (Toyama University)
   Processing -Novel/Poster/Abstract/1998 Annual
8. Micro Parts and Structures Fabricated by Laser Sintering Using Powder Tapes
   K. Maekawa, Y. Yokoyama, I. Ohshima (Ibaraki University)
   Processing -Novel/Poster/Abstract/1998 Annual
9. Precision Machining of Arrayed Fiber Ends for a Bare Optical Fiber Connector
   S. Matsui, K. Matsunaga, F. Ohira, K. Koyabu, S. Asakawa, M. Kobayashi, M. Usui (NTT Opto-electronics Laboratories)
   Processing -Novel/Poster/Abstract/1998 Annual
10. Quartz Chip Laboratory for Chemistry, Biochemistry and Quantum Mechanics
    M. Nakao, K. Matsumoto, T. Ohoi, Y. Murai, H. Hirayama, Y. Hatamura (The University of Tokyo)
    Processing -Novel/Poster/Abstract/1998 Annual
11. Compact Portable Air Jet Gun for Thermal Cutting of Plate Glass
    K. Sadashivappa, E. S. Prakash (Bapuji Institute of Engineering and Technology), M. Singaperumal (Indian Institute of Technology)
    Processing -Novel/Poster/Abstract/1998 Annual
12. Development of a Shape Generation System Using the Layered Fabrication Method
    K. Shirai, Y. Kobayashi (Nihon University)
    Processing -Novel/Poster/Abstract/1998 Annual
13. Formation of Rainbow Patterns on Die and Mold Surfaces by Micro-indentation Method
    K. Suzuki, Y. Shishido (Nippon Institute of Technology), H. Fukatsu (Tokyo Metropolitan College of Technology), T. Uematsu (Toyama Prefectural University), and Y. Uehara (San Seimitsu Kako Lab.)
    Processing -Novel/Poster/Abstract/1998 Annual
14. A New Micro EDM Technique for Fine Complicated Hole with Triangular Section Electrode
    Y. Uno, A. Okada, Y. Okamoto, K. Watanabe (Okayama University), S. Okada (Chugoku National Industrial Research Institute), and Y. Yamada (KASEN USA Corporation)
    Processing -Novel/Poster/Abstract/1998 Annual
15. Characteristics of Titanium Alloys in Micro Electro-discharge Machining
    C-T. Yang, H-M. Chow, T. C. Wu (Mechanical Industrial Research Laboratories/Industrial Technology Research Institute)
    Processing -Novel/Poster/No Abstract Available/1998 Annual

EQUIPMENT/MACHINES -- NOVEL SYSTEMS

1. The Design and Manufacturability of an Optic Array with Micron and Micro-radian Tolerances
   for a 30-year System Life Span
   R. L. Hibbard, M. Norton, P. Wegner (Lawrence Livermore National Laboratory)
   Equipment-Machines-Novel Systems/Poster/Abstract/1998 Annual
2. Fabrication of a High Speed Mobile Micromechanism for Curved Small-diameter Pipes
   S. Kato, K. Ohtsuki (Nippon Institute of Technology)
   Equipment-Machines-Novel Systems/Poster/Abstract/1998 Annual
3. The Fabrication and Testing of Optics for EUV Projection Lithography
   J. S. Taylor, G. E. Sommargren, D. W. Sweeney, R. M. Hudyma (Lawrence Livermore National Laboratory)
   Equipment-Machines-Novel Systems/Poster/Abstract/1998 Annual
4. Design Overview of a Prototype Large Aperture Deformable Mirror for the National Ignition Facility
   S. E. Winters, T. Arnold, E. S. Bliss, J. Bergum, M. A. Kartz, J. T. Salmon, C. J. Stolz, B. M. Van Wonterghen, P. J. Wegner, C. Weinzapfel, W. Whistler, R. A. Zacharias (Lawrence Livermore National Laboratory)
   Equipment-Machines-Novel Systems/Poster/Abstract/1998 Annual
5. Design of Micro-optical Connector and Novel Robot Hand for Precise Operation in a Fiber Cross-connect System
   J. Yamaguchi, K. Kaneko, Y. Nishida (NTT Opto-electronics Laboratories)
   Equipment-Machines-Novel Systems/Poster/Abstract/1998 Annual

EQUIPMENT/MACHINES -- CONTROLS

1. Neural Network Controllers for Magnetostrictive Actuator
   J. C. Campos Rubio (Universidade Federal de Minas Gerais), F. G. Santoro, J. G. Duduch, A. J. Vieira Porto (Universidade de São Paulo), and A. E. Gee (Cranfield University)
   Equipment-Machines-Controls/Poster/Abstract/1998 Annual
2. Performance Evaluation of Commercial Motion Control Boards
   B. N. Damazo (National Institute of Standards and Technology)
   Equipment-Machines-Controls/Poster/Abstract/1998 Annual
3. Positioning Accuracy of SCARA-type Manipulator and a Method of Error Compensation
   S. Fukada (Shinshu University)
   Equipment-Machines-Controls/Poster/Abstract/1998 Annual
4. Condition Monitoring of Stacked Piezoelectric Actuator Using Induced Charge
   K. Furutani, N. Mohri (Toyota Technological Institute), and M. Urushibata (Koito Manufacturing Company, Ltd.)
   Equipment-Machines-Controls/Poster/Abstract/1998 Annual
5. Linear Frequency Response Testing of Microservos Using (Non-linear) Multifringe Interferometric Position Measurement
   A. E. Gee, P. A. Beltrão, J. Corbett, R. W. Whatmore (Cranfield University)
   Equipment-Machines-Controls/Poster/Abstract/1998 Annual
6. Displacement to Frictional Load Characteristics of Plain Bearing Guideway Systems and Motion Analysis of NC Machine Tools
   A. Kanai, F. Inaba, T. Ishii, N. Okamoto (Ashikaga Institute of Technology), and M. Miyashita (Nano-Tec Associates)
   Equipment-Machines-Controls/Poster/Abstract/1998 Annual
7. Ultraprecision Positioning System for Servo Motor-piezo Actuator Using the Dual Servo Loop and Digital Filter Implementation
   D. S. Lee, J. H. Pahk, H. J. Pahk (Seoul National University)
   Equipment-Machines-Controls/Poster/Abstract/1998 Annual
8. Development of a Thermal Error Measurement/Correction System for the 5 DOF Spindle Thermal Deformations in CNC Machine Tools
   S. W. Lee, H. J. Pahk (Seoul National University)
   Equipment-Machines-Controls/Poster/Abstract/1998 Annual
9. The Time Optimal Control of One-servo Actuator with Long Stroke and High Precision
   S-Q. Lee, Y. Kim, D-G. Gweon (Korea Advanced Institute of Science and Technology)
   Equipment-Machines-Controls/Poster/Abstract/1998 Annual
10. Machining Error Compensation of External Cylindrical Grinding Using Thermally Actuated Rest
    J-R. Seo, S-M. Kim, S-K. Lee (Kwangju Institute of Science and Technology)
    Equipment-Machines-Controls/Poster/Abstract/1998 Annual
11. Compensation of Nonlinear Friction for High Precision Positioning in the Ball Screw Driven Slide System
    W. Shim, P. I. Ro (North Carolina State University)
    Equipment-Machines-Controls/Poster/Abstract/1998 Annual
12. Eigenstructure Assignment Techniques for Precision Motion Control
    P. K. Subrahmanyan, D. L. Trumper (Massachusetts Institute of Technology)
    Equipment-Machines-Controls/Poster/Abstract/1998 Annual

Poster Session II
Wednesday, October 28, 1998, 3:30 p.m. - 5:00 p.m.
Session Chair: Steven C. Fawcett (Muse Associates)

EQUIPMENT/MACHINES -- DESIGN AND TESTING

1. The In-orbit Refocusing Mechanism for the Meteosat Second Generation Weather Satellites
   B. C. Braam, P. Verhoeff, H. A. van Mierlo, J. Hopman, W. P. van Werkhoven (TNO Institute of Applied Physics)
   Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
2. Modeling, Design and Testing of Friction Drive Transmission Couplings
   M. Bonis, Y. Alayli (University of Technology of Compiegne), and M. Spatz (Technische Universität Braunschweig)
   Equipment-Machines-Design and Testing/Poster/No Abstract Available/1998 Annual
3. A New Hybrid Air-spindle with Permanent Magnetic Bearing Incorporated for High Motion Accuracy and High Stiffness
   X. Cui, T. Takenouchi, O. Horiuchi, J. Ikeno (Toyohashi University of Technology)
   Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
4. On-machine Measurement of Angular Motion of a Spindle
   W. Gao (University of North Carolina at Charlotte), and T. Takahara, S. Kiyono (Tohoku University)
   Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
5. Three-degree-of-freedom Optic Mount for Extreme Ultravioet Lithography
   H. Tajbakhsh, L. Hale, T. Malsbury, S. Jensen, J. Parker (Lawrence Livermore National Laboratory)
   Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
6. The High Precision Linear Motion Table with a Novel Rare Earth Permanent Magnet Biased Magnetic Bearing Suspension
   D-C. Han, H-J. Ahn, S-H. Lee, O-S. Kim (Seoul National University), and I-H. Park, I-B. Chang (Kangwon National University)
   Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
7. Development of a Precise Positioning Stage Traveling on Micro-pitch Racks
   S. Honda (Tokyo Metropolitan Institute of Technology)
   Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
8. Surface Self-compensated Linear and Rotary Hydrostatic Bearings
   N. R. Kane, A. H. Slocum (Massachusetts Institute of Technology)
   Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
9. Shakedown Characterization of an Instrument for Nanocutting and Nanoindenting
   M. J. Klopfstein, D. A. Lucca, E. A. Misawa (Oklahoma State University), and R. J. Hocken, S. Balasubramaniam (University of North Carolina at Charlotte)
   Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
10. Design of a Thermal Gradient Attenuator
    K. M. Lawton, S. R. Patterson (University of North Carolina at Charlotte)
    Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
11. Pushing the Thermal Limit in Linear Motors
    M. K. Liebman, D. L. Trumper (Massachusetts Institute of Technology)
    Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
12. The Dimensional Stability of Lightly-loaded Expoxy Joints
    S. Patterson, V. G. Badami, K. M. Lawton (University of North Carolina at Charlotte), and H. Tajbakhsh (Lawrence Livermore National Laboaratory)
    Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual
13. New Structured Air Bearings with Complex Thin Channels without Nozzles
    M. Weck, H. Oezmeral (Fraunhofer-Institut für Produktionstechnologie)
    Equipment-Machines-Design and Testing/Poster/Abstract/1998 Annual

EQUIPMENT/MACHINES -- ANALYSIS AND MODELING

1. A Surface Current Density Model of Magnetic Suspension for Optical Pickup Heads
   M. G. Lee, D-G. Gweon, H. Jung (Korea Advanced Institute of Science and Technology), and K. Lee, C. Chae (Daewoo Electronics)
   Equipment-Machines-Analysis and Modeling/Poster/Abstract/1998 Annual
2. Evaluation of Thermal Compensation Models on a Machining Center
   C. D. Mize (Tetra Precision Inc.), J. C. Ziegert (University of Florida), and K. S. Smith (University of North Carolina at Charlotte)
   Equipment-Machines-Analysis and Modeling/Poster/Abstract/1998 Annual
3. Experimental Analysis of Friction and Wear Characteristics of Ceramics Under No-lubrication Plane-plane Contact Conditions
   K. Mizuhara, N. Ozawa (Mechanical Engineering Laboratory, AIST, MITI)
   Equipment-Machines-Analysis and Modeling/Poster/Abstract/1998 Annual
4. Sealing Effects on Leakage Flow of Oil Mist Lubrication for High Speed Spindles
   B. C. Na (Korea Automotive Technology Institute), K. J. Chun (Korea Institute of Industrial Technology), and D.-C. Han (Seoul National University)
   Equipment-Machines-Analysis and Modeling/Poster/Abstract/1998 Annual
5. Derivation of Machine Tool Error Model for 3 Axes Vertical Machining Center Using Rigid Body Kinematics
   A. C. Okafor, Y. M. Ertekin (University of Missouri-Rolla)
   Equipment-Machines-Analysis and Modeling/Poster/Abstract/1998 Annual
6. Modeling Nonlinear Behavior in a Piezoelectric Actuator
   H. Richter, E. Misawa, D. A. Lucca, H. Lu (Oklahoma State University)
   Equipment-Machines-Analysis and Modeling/Poster/Abstract/1998 Annual
7. An Experimental Investigation into Thermal Spindle Growth Under Load
   A. K. Sharma (The Boeing Company), and S. R. Patterson (University of North Carolina at Charlotte)
   Equipment-Machines-Analysis and Modeling/Poster/Abstract/1998 Annual
8. A Contribution to Synthetization Errors Models of Machine Tools
   D. P. Vieira Sato (Assoc. de Escolas Reunidas de São Carlos), and R. M. Martínez Orrego, B. Di Giacomo (Universidade de São Paulo)
   Equipment-Machines-Analysis and Modeling/Poster/Abstract/1998 Annual
9. Optimization-based Concept Design of a Machining Center
   B-C. Wu, S. C. C. Hung, G-S. Young (Industrial Technology Research Institute)
   Equipment-Machines-Analysis and Modeling/Poster/Abstract/1998 Annual

METROLOGY -- INSTRUMENT DESIGN & TESTING

1. High Precision Measurement of Torque in Small Stirred Vessels
   G. Ascanio Gasca, C. García-Segundo, E. Galindo (Universidad Nacional Autónoma de México)
   Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual
2. Position Measurement on Machine Tools: By Linear Encoder or Ballscrew and Rotary Encoder?
   J. Braasch, A. Eberherr (Heidenhain Corporation)
   Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual
3. Six Degrees of Freedom Error Measuring Device for Linear Motion of Slides
   S-C. Chung (Hanyang University)
   Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual
4. Design and Testing of a Capacitance Probe Calibrator
   B. R. Knapp, E. R. Marsh (The Pennsylvania State University), D. Arneson, M. Liebers (Professional Instruments Company), and D. Martin (Lion Precision)
   Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual
5. High-precision Diameter Measurement of Ring and Plug Gages Using a New Comparator
   M. Neugebauer, F. Lüdicke (Physikalisch-Technische Bundesanstalt)
   Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual
6. Design and Control of a Precision Three-axis Stage for AFM Scanner
   J. Y. Shim, H. Chung, D-G. Gweon (Korea Advanced Institute of Science and Technology)
   Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual
7. Frequency Response of Stylus Probes
   G. Singh (Federal Products Company), and S. T. Smith (University of North Carolina at Charlotte)
   Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual
8. Development of a Metrology Instrument for Mapping the Crystallographic Axis in Large Optics
   R. L. Hibbard, R. B. Michie, M. D. Summers, L. W. Liou (Lawrence Livermore National Laboratory)
   Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual
9. Vector Touch Sensor Probe
   S. Woody, S. T. Smith (University of North Carolina at Charlotte)
   Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual
10. Development of a Virtual Gauging System for Cylindrical Coordinate Measuring Machines
    X. Zhang, A. D. Cole (Adcole Corporation)
    Metrology - Instrument Design and Testing/Poster/Abstract/1998 Annual

SURFACE METROLOGY

1. Optic Fibers Profilometer for Diamond Machined Surfaces Characterization
   Y. Alayli, M. Bonis, D. Wang, P. Revel, H. Khanfir (Compiegne University of Technology)
   Surface Metrology/Poster/Abstract/1998 Annual
2. Solid-avoiding and Richardson Tiling in Surface Metrology
   C. A. Brown (Surfract), and K. A. Nucifora, M. F. Luchini, T. S. Bergstrom (Worcester Polytechnic Institute)
   Surface Metrology/Poster/Abstract/1998 Annual

METROLOGY - FORM AND GEOMETRIC

1. Master Axis of Rotation for Spindle Measurement
   R. D. Grejda, E. R. Marsh (The Pennsylvania State University), D. Arneson, M. Liebers (Professional Instruments Company, Inc.), and D. Martin (Lion Precision)
   Metrology - Form and Geometric/Poster/Abstract/1998 Annual
2. 3-D Surface Contouring by a Digital Fringe Projection Technique
   P. S. Huang, F. Jin, F-P. Chiang (SUNY at Stony Brook)
   Metrology - Form and Geometric/Poster/Abstract/1998 Annual
3. In-situ Orthoginality Alignment of Plane Mirror Interferometers
   S-W. Kim, T-H. Keem (Korea Advanced Institute of Science and Technology)
   Metrology - Form and Geometric/Poster/Abstract/1998 Annual
4. 3-D Volumetric Error Calibration/Correction System for Parametric Errors in CNC Machine Tools Using a Kinematic Ball Bar
   Y. S. Kim (SNU Precision Company), and H. J. Pahk (Seoul National University)
   Metrology - Form and Geometric/Poster/Abstract/1998 Annual
5. The Master Axis Method for Spindle Error Motion Calibration
   M. J. Liebers, D. D. Oss (Professional Instruments Company, Inc.), and T. P. Sheridan (Lorien Consultants Group)
   Metrology - Form and Geometric/PosterNo /Abstract Available/1998 Annual
6. Vertical Machining Center Accuracy Characterization Using Laser Interferometer
   A. C. Okafor, Y. M. Ertekin (University of Missouri-Rolla)
   Metrology - Form and Geometric/Poster/Abstract/1998 Annual
7. Errors in the Probe Offset Vectors of Multiple Probe Orientations in CMM Measurements
   S. Moon, Y. L. Shen (George Washington University)
   Metrology - Form and Geometric/Poster/Abstract/1998 Annual
8. Short Term Repeatability of Measurements of a Glass Polygon
   S. K. Smith (Air Force Metrology and Calibration Program)
   Metrology - Form and Geometric/Poster/Abstract/1998 Annual
9. Characterization of Hydraulic Pistons with Form Error by Confocal Microscope
   G. Udupa, M. Singaperumal, R. S. Sirohi (Indian Institute of Technology)
   Metrology - Form and Geometric/Poster/Abstract/1998 Annual
10. Absolute Calibration of Nanoradian Angle Sensor
    S. Zhang, S. Kiyono (Tohoku University), Y. Uda (Nikon Corporation)
    Metrology - Form and Geometric/Poster/Abstract/1998 Annual

METROLOGY--ANALYSIS & MODELING

1. A Method for the Measurement of Nonlinearity in Heterodyne Interferometry
   V. G. Badami, S. R. Patterson (University of North Carolina at Charlotte)
   Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
2. Functional Digital Filtering for the 3-D Topography Measurement Using a Confocal Scanning Laser Microscope
   S. Hara, K. Yanagi, S. Matsuo (Nagaoka University of Technology)
   Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
3. Hysteresis Compensation of AFM by Preisach Model
   H. Jung, J. Y. Shim, D-G. Gweon (Korea Advanced Institute of Science and Technology)
   Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
4. Simulation of a Cylindrical Interferometer for Comparison to Stylus Measurement Techniques
   P. D. Knight, Jr., S. R. Patterson (University of North Carolina at Charlotte)
   Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
5. Finite Element Modeling of a Roundness Measuring Instrument
   W. Li (Birmingham University), and F. R. Hall (Wolverhampton University)
   Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
6. Model for CMM Testing by LMS
   V. Majstorovic (Faculty of Mechanical Engineering - Belgrade), and J. Hodolic, M. Stevic (Faculty of Engineering - Novi Sad)
   Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
7. A Reduced Synthetization Model for Virtual CMM
   R. M. Martínez Orrego, B. Di Giacomo (Universidade de São Paulo), and D. P. Vieira Sato (Assoc. de Escolas Reunidas São Carlos)
   Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
8. Artifact Probing for Machine Tool and Process Diagnosis
   J. R. R. Mayer, R. Andrian, G. M. Cloutier, C. Fortin (École Polytechnique de Montréal), and T. Luong (Pratt and Whitney of Canada, Inc.)
   Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
9. Distribution-free Statistical Methods for Analyzing Linear Tolerance Accumulation
   E. P. Morse (Cornell University)
   Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
10. Analysis Error Depending on Amount of Shear in Lateral Shearing Interferometry
    S. Okuda, T. Nomura, K. Kamiya, H. Miyashiro (Toyama Prefectural University), and K. Yoshikawa, H. Tashiro (Toyama University)
    Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
11. Dynamic Error Characterization of a Scanning Probe CMM
    P. H. Pereira, R. J. Hocken, A. Muralidhar (University of North Carolina at Charlotte)
    Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
12. Performance Testing and Uncertainty Analysis of Multiple Tip Probing on Coordinate Measuring Machines
    J. Salsbury, J. Raja (University of North Carolina at Charlotte)
    Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
13. Comparison of Simple Closure and Dual Closure Measurement Techniques on a Glass Polygon
    S. K. Smith (Air Force Metrology and Calibration Program)
    Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
14. NIST Microform Calibration -- How does it Benefit U.S. Industry?
    J. F. Song, T. V. Vorburger (National Institute of Standards and Technology)
    Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual
15. A General Algorithm for Phase Shifting Interferometry Using Lissajous Figure
    Y. Wang (Hutchinson Technology, Inc.), and K. S. Moon (Michigan Technological University)
    Metrology - Analysis and Modeling/Poster/Abstract/1998 Annual