Norfolk Marriott Waterside Hotel and Waterside Convention Center
Norfolk, VA

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Keynote Address
Tuesday, October 7, 1997
8:30 a.m. - 9:30 a.m.
Session Chair: Don A. Lucca (Oklahoma State University)

1. Precision Engineering in LIGO
   D. Coyne (California Institute of Technology)

Session I
Metrology I
Tuesday, October 7, 1997
10:00 a.m. - 12:00 p.m.
Session Chair: Anthony E. Gee (Cranfield University)

1. AFM Based Nanoindentation as a Probe of Nanomechanics (Invited Paper)
   P. Russell, K. F. Jarausch (North Carolina State University) and J. E. Houston (Sandia Nat’l Laboratories)
   Metrology/Oral/Abstract/1997 Annual
2. Potentials of X-tended View SEMs--Environment for the Micro Manufacturing World
   S. Klein (Fachhochschule Lübeck), and M. Klein (VISITEC Microtechnik GmbH)
   Metrology/Oral/Abstract/1997 Annual
3. Interferometric Measurement of Absolute Dimensions of Cylindrical Surfaces
   A. W. Kulawiec, J. F. Fleig, J. H. Bruning (Tropel Corporation)
   Metrology/Oral/Abstract/1997 Annual
4. Multi-step Form Metrology: Principles and Applications to the LIGO Pathfinder Optics
   C. J. Evans, W. T. Estler (Nat’l Institute of Standards and Technology), P. J. Sullivan (KLA-Tencor), R. E. Parks (Optical Perspectives Group), and L. Shao (Tucson Optical Research Corporation)
   Metrology/Oral/Abstract/1997 Annual
5. Complex Surfaces -- Applications and Generation by Diamond Machining
   E. Brinksmeier, W. Preuß (University of Bremen)
   Metrology/Oral/Abstract/1997 Annual

Session II
Metrology II
Wednesday, October 8, 1997
8:00 a.m. - 9:45 a.m.
Session Chair: Dan E. Luttrell (Corning, Inc.)

1. Self-calibration of Interference Microscopes
   M. Kanai, W. Gao, I. Ogura, S. Kiyono (Tohoku University)
   Metrology/Oral/Abstract/1997 Annual
2. A Model for Visualization of Roller Bearing Error Motion
   W. Holzhauer (The Timken Company)
   Metrology/Oral/Abstract/1997 Annual
3. Geometric Error Calibration of Multi-axis Machines Using an Auto-alignment Laser Interferometer
   J. S. Chen (National Chung Cheng University)
   Metrology/Oral/Abstract/1997 Annual
4. Precision Profile Measurement of Aspheric Surfaces by Improved Ronchi Test
   S. W. Kim, H. J. Lee (Korea Advanced Institute of Science and Technology), and S. E. Lim (Samsung Electronics)
   Metrology/Oral/Abstract/1997 Annual
5. Surface and Form On-machine Metrology/Correction System for Ultraprecision Machining and Grinding
   G. Malkin (Precitech, Inc.)
   Metrology/Oral/Abstract/1997 Annual

Session III
CMMs
Wednesday, October 8, 1997
10:15 a.m. - 11:45 a.m.
Session Chair: Frederick G. Parsons (Federal Products Company)

1. Development of Non-contact Measuring for 3D Micro Pattern in Semiconductor Wafer Using
   a New Optical Probe Implementing a High Performance Optical Window
   H. J. Pahk, W. J. Ahn (Seoul National University), and S. W. Cho (Halla Optical Engineering)
   CMM/Oral/Abstract/1997 Annual
2. Development of a 2D Probing System with Nanometer Resolution
   W. O. Pril, K. G. Struik, P. H. J. Schellekens (Eindhoven University of Technology)
   CMM/Oral/Abstract/1997 Annual
3. The Calculation of CMM Measurement Uncertainty via the Method of Simulation by Constraints
   S. Phillips, B. Borchardt, D. Sawyer, W. T. Estler, D. Ward, K. Eberhardt, M. Levenson, M. McClain (Nat’l Institute of Standards and Technology), and B. Melvin, (ICAMP, Inc.) T. Hopp (ZigZag Inc.) and Y. Shen (G.W. University)
   CMM/Oral/Abstract/1997 Annual
4. Thermal Responses of Coordinate Measuring Machines
   C. Nickels, T. Charlton (Brown & Sharpe Manufacturing Company)
   CMM/Oral/Abstract/1997 Annual

Session IV
Cutting and Grinding
Wednesday, October 8, 1997
1:30 p.m. - 3:30 p.m.
Session Chair: Michele H. Miller (Michigan Technological University)

1. Research Challenges and Directions in Precision Machining of Hardened Steels (Invited Paper)*
   M. A. Davies, Y. K. Chou, C. J. Evans (Nat’l Institute of Standards and Technology)
   Cutting and Grinding/Oral/Abstract/1997 Annual
2. Precision Engineering and Statistics: Is There Any Common Ground?
   R. L. Rhorer (Nat’l Institute of Standards and Technology), and J. L. Rhorer (Iowa State University)
   Cutting and Grinding/Oral/Abstract/1997 Annual
3. Ultraprecision Grinding of High Aspect Ratio Microparts
   H. H. Gatzen, J. C. Maetzig, L. P. Ruhbach (Hanover University)
   Cutting and Grinding/Oral/Abstract/1997 Annual
4. Direct Fabrication of Deep X-ray Lithography Masks by Micromechanical Milling
   C. Friedrich (Michigan Technological University), P. Coane, J. Goettert (Louisiana Tech University), and N. Gopinathin (Read-Rite, Inc.)
   Cutting and Grinding/Oral/Abstract/1997 Annual
5. The Mechanism of Material Removal in Grinding and Polishing Silicon Mono-crystals on the Nanometer Scale
   L. C. Zhang, H. Tanaka, I. Zarudi (The University of Sydney)
   Cutting and Grinding/Oral/Abstract/1997 Annual
6. A Basic Study on Nanometer Cutting of Brittle Materials
   K. Asamoto, K. Furutani, N. Mohri (Toyota Technological Institute)
   Cutting and Grinding/Oral/Abstract/1997 Annual

Session V
Precision Positioning Systems
Thursday, October 9, 1997
8:00 a.m. - 10:00 a.m.
Session Chair: Andrew J. Hazelton (Nikon Research Corporation of America)

1. High-precision Magnetic Levitation Stage for Photolithography (Invited Paper)
   W. J. Kim, D. L. Trumper (Massachusetts Institute of Technology)
   Precision Positioning Systems/Oral/Abstract/1997 Annual
2. A Long Range Scanning Stage (The LORS Project)
   M. L. Holmes, R. J. Hocken (University of North Carolina at Charlotte), and D. L. Trumper (Massachusetts Institute of Technology)
   Precision Positioning Systems/Oral/Abstract/1997 Annual
3. A 3 DOF Z-tilts Micro Positioning System Using Electromagnetic Actuators with Air Bearings
   S. Q. Lee, D. G. Gweon (Korea Advanced Institute of Science and Technology)
   Precision Positioning Systems/Oral/Abstract/1997 Annual
4. A 1/100 Machine Tool to Fabricate 1/100 Micro Parts
   K. Ishii, M. Nakao, Y. Hatamura (The University of Tokyo)
   Precision Positioning Systems/Oral/Abstract/1997 Annual
5. Assembly of Micro Systems in a Large-chamber Scanning Electron Microscope
   M. Weck, J. Hümmler, B. Petersen (Fraunhofer-Institute for Production Technology IPT)
   Precision Positioning Systems/Oral/Abstract/1997 Annual

Invited Papers
Emerging Technologies
Thursday, October 9, 1997
10:30 a.m. - 11:30 a.m.
Session Chair: Wanjun Wang (Louisiana State University)

1. Review of Non-destructive Measuring Methods for the Assessment of Surface Integrity (Invited Paper)
   G. Goch, B. Schmitz, M. Reigl, P. Sprongl, R. Ritter (University of Ulm)
   Emerging Technologies/Oral/Abstract/1997 Annual

Session VI
Controls
Thursday, October 9, 1997
1:30 p.m. - 3:00 p.m.
Session Chair: James F. Cuttino (The University of Alabama)

1. Six Axis Active Vibration Isolation and Payload Reaction Force Compensation System
   M. Williams (Integrated Solutions Inc.), and P. Subrahmanyan, D. L. Trumper (Massachusetts Institute of Technology)
   Controls/Oral/Abstract/1997 Annual
2. Compensation of Dynamic Vibrations and Spindle-Runout
   M. Weck, R. Hilbing (Fraunhofer-Institute of Production Technology IPT)
   Controls/Oral/Abstract/1997 Annual
3. In-process Active Balancing of High-speed Machine Tools*
   S. W. Dyer (Balance Dynamics Corporation)
   Controls/Oral/Abstract/1997 Annual
4. A New Zero-stiffness Magnetic Bearing for Vibration Isolation
   G. J. P. Nijsse, J. W. Spronck, M. H. A. Leenders, H. F. van Beek (Delft University of Technology)
   Controls/Oral/Abstract/1997 Annual
5. Mechatronic Analysis and Design of High-precision Drives
   E. Kallenbach, E. Saffert, C. Schäffel (Technical University of Ilmenau), P. Maißer, H. Freudenberg (Technical University of Chemnitz-Zwickau), and J. Lückel, W. Kuhlbusch (University-GH Paderborn)
   Controls/Oral/Abstract/1997 Annual

Session VII
Novel Processes
Thursday, October 9, 1997
3:30 p.m. - 5:00 p.m.
Session Chair: Thomas Dow (North Carolina State University)

1. Current and Future Possibilities of Non-contact Nano Machining by Combination of Laser with
   Scanning Probe Technology (Invited Paper)
   K. Dickmann, J. Jersch (Fachhochschule Muenster)
   Novel Processes/Oral/Abstract/1997 Annual
2. Thermal Effects of Broad Beam Neutral Ion Machining
   H. E. Fawcett (MicroE), and T. G. Bifano, D. Wroblewski (Boston University)
   Novel Processes/Oral/Abstract/1997 Annual
3. Near-field Photolithography to Realize High Resolution Smaller Than Light Wavelength
   S. Tanaka, M. Nakao, Y. Hatamura (The University of Tokyo)
   Novel Processes/Oral/Abstract/1997 Annual
4. High Efficiency Fine Boring in Single Crystalline Silicon Ingot by Electrical Discharge Machining
   Y. Uno, A. Okada, Y. Okamoto (Okayama University), and Y. Yamada (KASEN USA Corp.)
   Novel Processes/Oral/Abstract/1997 Annual
5. Micro Devices Produced by Micro Robots
   H. Aoyama (University of Electro-Communications), and K. Mizutani, T. Miura, K. Murakami, F. Iwata (Shizuoka University)
   Novel Processes/Oral/Abstract/1997 Annual

Poster Session
Tuesday, October 7, 1997
3:30 p.m. - 5:00 p.m.

METROLOGY

1. Virtual Reality Applied to Precision Manufacturing
   R. Wilhelm, S. Patterson, D. Schmidt, K. Nagalla, B. Sethupathi, J. Kroll, O. Martin, N. Li (University of North Carolina at Charlotte)
   Metrology/Poster/Abstract/1997 Annual

SCANNING PROBE MICROSCOPY

1. A Tapping Stylus for Surface Topographical Measurement Using a Quartz Fork Resonator
   T. Hatsuzawa (Tokyo Institute of Technology)
   Scanning Probe Microscopy/Poster/Abstract/1997 Annual

MACHINE TOOL METROLOGY

1. Rotary Axis Metrology
   J. C. Ziegert, B. Sanders (University of Florida)
   Machine Tool Metrology/Poster/Abstract/1997 Annual
2. Linear Displacement Accuracy: A Comparison of National Standards
   S. Badrawy, T. Schmitz (University of Florida), and D. Bernhard (Boeing Commercial Airplane Group)
   Machine Tool Metrology/Poster/Abstract/1997 Annual
3. Second Order Terms Influence in Mathematical Models of Machine Tools Considering the Machine Temperature State
   B. Di Giacomo, D. P. Vieira Sato, R. M. Martinez Orrego (University of São Paulo)
   Machine Tool Metrology/Poster/Abstract/1997 Annual
4. A New Error Separation Method for Measuring Angular Motion of a Spindle
   W. Gao, S. Kiyono (Tohoku University)
   Machine Tool Metrology/Poster/Abstract/1997 Annual
5. Rapid Machine Volumetric Error Measurement and Compensation by a 5-Degree-of-freedom Laser System
   X. Chu, Q. Ma, K. Lau (Automated Precision, Inc.)
   Machine Tool Metrology/Poster/Abstract/1997 Annual
6. Assessment of Machine Tool Accuracy Using ISO “Guide to the Expression of Uncertainty in Measurement” (GUM)
   J. D. Drescher (UTC-Pratt & Whitney)
   Machine Tool Metrology/Poster/Abstract/1997 Annual
7. A Model of the Tracking Errors of a Machine Tool Slideway
   C. M. Daniel, J. W. Sutherland, W. W. Olson (Michigan Technological University)
   Machine Tool Metrology/Poster/Abstract/1997 Annual

COORDINATE MEASURING MACHINES

1. Engineering Applications of Geometric Metrology
   M. J. Kaiser (Wichita State University)
   Coordinate Measuring Machines/Poster/Abstract/1997 Annual
2. A Study on Auto-measurement System of Coordinate Measuring Machine
   Wang J., Liu S., Li Z., Zhang G. (Tianjin University)
   Coordinate Measuring Machines/Poster/Abstract/1997 Annual
3. A Laser Tracking Interferometer Based on a New Servo System
   Fu J., Ding Y., Zhang G. (Tianjin University)
   Coordinate Measuring Machines/Poster/Abstract/1997 Annual
4. Form Error Assessment: Error Separation Method for the Calibration of Free-form Surfaces by Means of Coordinate Measuring Machines
   D. Feautrier, P. Bourdet (LURPA, Ecole Normale Supérieure de Cachan)
   Coordinate Measuring Machines/Poster/Abstract/1997 Annual
5. Geometric Form Evaluation of Cone Based on the Minimum Zone Criteria
   H. M. Kim (University of Michigan), and B. C. Lee (Korea Advanced Institute of Science and Technology)
   Coordinate Measuring Machines/Poster/Abstract/1997 Annual
6. An Efficient Calibration Technique for CMM Machines
   S. J. Lee (Yuan-Ze Institute of Technology), and Y. L. Pan, C. M. Chang (Chung-Shan Institute of Science and Technology)
   Coordinate Measuring Machines/Poster/Abstract/1997 Annual
7. Applications of Surface Normal Measurements to Coordinate Metrology
   R. Edgeworth, R. G. Wilhelm (University of North Carolina at Charlotte)
   Coordinate Measuring Machines/Poster/Abstract/1997 Annual
8. Application of a Probe Pretravel Model in CMM Measurements
   Y. Shen, S. Moon (George Washington University)
   Coordinate Measuring Machines/Poster/Abstract/1997 Annual

SURFACE FINISH AND FORM

1. Optimizing the Phase Shift Steps for the Least-squares Algorithm in Phase Shift Interferometry
   for Engineering Surface Measurement
   Y. Wang, K. S. Moon (Michigan Technological University)
   Surface Finish and Form/Poster/Abstract/1997 Annual
2. Study on Computational Geometry Approach to Minimum Circumscribed Circle
   Liu S-G., Yang F., Ma X-H. (Tianjin University)
   Surface Finish and Form/Poster/Abstract/1997 Annual
3. Repeatability and Calibration of a Grazing Incidence Cylindrical Interferometer
   P. D. Knight, Jr., S. R. Patterson (University of North Carolina at Charlotte)
   Surface Finish and Form/Poster/Abstract/1997 Annual
4. Development of a Roundness Profile Measurement System for Precision Rollers by V-block Method
   K. Mitsui, K. Goho, (Keio University) A. Hayashi (Nano Corporation)
   Surface Finish and Form/Poster/Abstract/1997 Annual
5. A Method to Decouple the Compound Effect of Machine Error and Free-form Geometric Characteristics
   G. Lee, J. Mou (Arizona State University)
   Surface Finish and Form/Poster/Abstract/1997 Annual
6. Systematic Error Removal in Interferometric Measurements of Cylindrical Form
   J. F. Fleig (Tropel Corporation), and D. P. McClimans (Inti Electronics)
   Surface Finish and Form/Poster/Abstract/1997 Annual
7. Information Content in Surface Metrology for Functional Correlations
   C. A. Brown, P. Hoch (Worcester Polytechnic Institute)
   Surface Finish and Form/Poster/Abstract/1997 Annual
8. An In-line Digital Filtering Algorithm for Surface Roughness Profiles
   S. Hara (Nagaoka Univeristy of Technology), and T. Tsukada, K. Sasajima (Tokyo Institute of Technology)
   Surface Finish and Form/Poster/Abstract/1997 Annual
9. Noise-insensitive Phase Unwrapping in Phase Shift Laser Interferometric Surface Measurement
   Y. Wang, K. S. Moon (Michigan Technological University)
   Surface Finish and Form/Poster/Abstract/1997 Annual

SENSORS/NEW INSTRUMENTS

1. Traceable Diameter Measurements of Thin Wires
   O. Jusko, H. Bosse, G. Frase, F. Lüdicke (Physikalisch-Technische Bundesanstalt), and W. Tang (Harbin Institute of Technology)
   Sensors-New Instruments/Poster/Abstract/1997 Annual
2. High Precision Straight Motion and Measurement Technique Applying Optical Datum
   Mu Y., Wan D. A. (Tongji University), and Lin. E. (Shanghai JiaoTong University)
   Sensors-New Instruments/Poster/Abstract/1997 Annual
3. System for the Measurement of Corneal Shape by Laser Deflectometry
   R. Díaz, A. Caballero, A. Muñiz, L. Ruíz, G. Ascanio (National University of Mexico)
   Sensors-New Instruments/Poster/Abstract/1997 Annual
4. Electrodeposition of Superconductor Thin Film and the Magnetoresistance Characterization for Magnetic Field Sensing Application
   A. Natarajan, W. Wang, E. Ma, (Louisiana State University), and R. N. Bhattacharya (National Renewable Energy Laboratory)
   Sensors-New Instruments/Poster/Abstract/1997 Annual
5. Evaluation of Thermistors as a Reference for Local Temperature Control
   K. M. Lawton, S. R. Patterson (University of North Carolina at Charlotte)
   Sensors-New Instruments/Poster/Abstract/1997 Annual
6. Investigation of Nonlinearity in High Accuracy Heterodyne Laser Interferometry
   V. G. Badami, S. R. Patterson (University of North Carolina at Charlotte)
   Sensors-New Instruments/Poster/Abstract/1997 Annual
7. Interferometric Measurement of Surface Microstructure in Engine Cylinder Walls
   D. J. Aziz (WYKO Corporation), and M. Kramer (General Motors Corporation)
   Sensors-New Instruments/Poster/Abstract/1997 Annual
8. Development of a Sophisticated Michelson-type Laser Interferometer Utilizing an Optical Thin Film for the Constant Phase Difference
   K. Miyazawa (Union Tool Co.), and K. Yanagi, S. Mishina (Nagaoka University of Technology)
   Sensors-New Instruments/Poster/Abstract/1997 Annual
9. A New Method for Dynamic Balancing of Digital Head Drum (Ø 21.7 mm)
   Joe, Y-U, Yang, Y-W, Lee, J-K (DAEWOO Electronics Co., Ltd.)
   Sensors-New Instruments/Poster/Abstract/1997 Annual
10. Lateral Shearing Interferometer by Using Zone Plates
    T. Nomura, K. Kamiya, H. Miyashiro, S. Okuda (Toyama Prefectural University), and H. Tashiro, K. Yoshikawa, (Toyama University)
    Sensors-New Instruments/Poster/Abstract/1997 Annual
11. Fiber Optic Displacement Transducer with Nanometer Resolution Using AC-modulation
    D. Wang, Y. Alayli, M. Bonis, J. C. Henrio (Universitè de Technologie de Compiègne)
    Sensors-New Instruments/Poster/Abstract/1997 Annual
12. Nanometer Level Autofocus Air Gauge
    T. Thomas, C. Hamaker, J. Martyniuk, G. Mirro (Etec Systems, Inc.)
    Sensors-New Instruments/Poster/Abstract/1997 Annual

CONTROLS

1. Compensation of Hysteresis and Coupling Effect of Tube Scanner for Atomic Force Microscope
   J. Y. Shim, H. Jung, D. G. Gweon (Korea Advanced Institute of Science and Technology)
   Controls/Poster/Abstract/1997 Annual
2. Study on High Precision Cutting by Workpiece Referred Form Accuracy Control System--A Proposition of Double MTS Method
   N. Ohno, T. Yazawa, T. Kohno (Tokyo Metropolitan Institute of Technology), and Y. Uda (Nikon Corporation)
   Controls/Poster/Abstract/1997 Annual
3. Design of a Linear Voice Coil Actuator for Fast Tool Servo Applications
   W. Greene, D. E. Schinstock (The University of Alabama)
   Controls/Poster/Abstract/1997 Annual
4. Intelligent 3D-Free-Form Surface Cutting Toward High Precision and High Efficiency
   M. Mitsuishi, M. Hashiguchi, Z. Kiriyama, J. Li, T. Nagao (The University of Tokyo)
   Controls/Poster/Abstract/1997 Annual

MACHINING

1. New Biarc Interpolation for Ultra-precision Aspheric Surface Machining
   M. Y. Yang, T. M. Lee (Korea Advanced Institute of Science and Technology), and J. Y. Lee, T. H. Kim, J. Y. Ha (Daewoo Heavy Industry)
   Machining/Poster/Abstract/1997 Annual
2. Cutting Temperature and its Effect to Sub-surface Damage in Diamond Turning
   K. Horio, T. Kasai, K. Sekiguchi (Saitama University)
   Machining/Poster/Abstract/1997 Annual
3. Experimental Investigation of Surface Roughness in Ultra Precision Cutting of a Plastic
   M. Saeki, H. Yasui, A. Hosokawa, S. Kondo (Kumamoto University)
   Machining/Poster/Abstract/1997 Annual
4. Effects of Round-nosed Tools on Chatter in Diamond Turning
   A. Schaut, E. Marsh (The Pennsylvania State University)
   Machining/Poster/Abstract/1997 Annual
5. Microcutting Phenomena of Monocrystalline Silicon with Large Nose Radius Diamond Tool
   A. Kanai, F. Inaba, M. Miyashita, R. Kato, T. Yokotsuka, S. Fujita, (Ashikaga Institute of Technology), and M. Daito (Nissin Machine Works)
   Machining/Poster/Abstract/1997 Annual
6. Side Burr Generation Model in Micro-Grooving
   J. H. Ahn, H. S. Lim (Pusan National University)
   Machining/Poster/Abstract/1997 Annual
7. On High Quality Turned Silicon Surfaces
   F. Z. Fang, V. C. Venkatesh (Nanyang Technological University)
   Machining/Poster/Abstract/1997 Annual
8. Morphology and Topography of Chip Produced by Diamond Turning of Al-Mg Alloy for Mirrors
   R. G. Jasinevicius, A. J. Vieira Porto, J. G. Duduch (University of São Paulo)
   Machining/Poster/Abstract/1997 Annual
9. Chip Dynamics in Diamond Turning
   B. H. Jared, T. A. Dow (North Carolina State University)
   Machining/Poster/Abstract/1997 Annual

GRINDING

1. Combined Model of Ceramics Grinding
   L. Yin, I. D. Marinescu (Kansas State University), and T. Matsuo (Kumamoto University)
   Grinding/Poster/Abstract/1997 Annual
2. A Self-deformable Face Grinding Machine to Realize Some 0.1 µm Flatness for 8-inch Substrates
   M. Nakao, Y. Takashima, K. Ohta, Y. Hatamura (The University of Tokyo)
   Grinding/Poster/Abstract/1997 Annual
3. A Local Grinding System for Wide and Flat Surface with a 3-Axis Negative Compliance Device
   K. Matsumoto, M. Nakao, Y. Hatamura (The University of Tokyo)
   Grinding/Poster/Abstract/1997 Annual
4. Experimental Verification of a Grinding Chatter Model
   B. R. Knapp, E. R. Marsh (The Pennsylvania State University)
   Grinding/Poster/Abstract/1997 Annual
5. A Model for Self-dressing of Resin Bound Grinding Wheels
   T. S. Kakumanu, M. H. Miller (Michigan Technological University)
   Grinding/Poster/Abstract/1997 Annual
6. The Effect of Workpiece Modulation on Surface Quality
   W. Qu, M. H. Miller (Michigan Technological University)
   Grinding/Poster/Abstract/1997 Annual
7. Grinding with Directionally Aligned SiC Whisker Wheel--Loading-free Grinding
   K. Yamaguchi (Nagoya University), I. Horaguchi (Toyota College of Technology), and Y. Sato (Aichi Industrial Research Institute)
   Grinding/Poster/Abstract/1997 Annual
8. An Application of 40 kHz Ultrasonic Vibration to Shear-mode Grinding of Silicon Wafers
   Y. Yoshida (Tokyo Diamond Tool), K. Imai, H. Hashimoto (Kanagawa Institute of Technology), Z. N. Sun (Harbin Institute of Technology), and Y. S. Lu (Northeastern University)
   Grinding/Poster/Abstract/1997 Annual
9. Surface and Subsurface Structure of Alumina After Ductile-mode Grinding
   I. Zarudi, L. C. Zhang (The University of Sydney)
   Grinding/Poster/Abstract/1997 Annual
10. In-process EDM Truing to Generate Complex Contours on Metal-bond, Superabrasive Grinding Wheels for Precision Grinding Structural Ceramics
    M. A. Piscotty, P. J. Davis, T. T. Saito, K. L. Blaedel, L. Griffith (Lawrence Livermore National Laboratory)
    Grinding/Poster/Abstract/1997 Annual

POLISHING

1. Figure Correction for Rotary Asymmetric Error by Linearly Arranged Segmented Pressurizing
   Polishing Machine
   K. Horio, T. Kasai, A. Matsuse (Saitama University)
   Polishing/Poster/Abstract/1997 Annual
2. Fabrication of New Collimating Optical Fibers Using Glass Slit-microferrules
   K. Koyabu, F. Ohira (NTT Opto-electronics Laboratories)
   Polishing/Poster/Abstract/1997 Annual
3. Rotating Lapping Machine with a Pneumatic Bearing Supported Lap
   G. Ascanio, C. Cava, R. Chicurel, R. Nava (National University of Mexico), and R. Reséndiz (DIBYASA)
   Polishing/Poster/Abstract/1997 Annual
4. Surface Contamination of Abrasive During Lapping
   A. Barylski (Technical University of Gdansk)
   Polishing/Poster/Abstract/1997 Annual

MODELING

1. Model-based Precision Machining Simulation for the Prediction of Tool Life
   K. Maekawa (Ibaraki University)
   Modeling/Poster/Abstract/1997 Annual
2. An Orthogonal Cutting Stability Model with Variable Delay Length Due to Tool Motion
   T. B. O’Reilly, E. R. Marsh (The Pennsylvania State University)
   Modeling/Poster/Abstract/1997 Annual
3. Fuzzy Logic Modeling of Electrolytic Grinding Process
   K. G. R. Koteswara Rao, G. Kuppuswamy (Indian Institute of Technology)
   Modeling/Poster/Abstract/1997 Annual
4. An Adaptive Method for Predicting Residual Stresses Associated with Grinding Induced Phase Transformation
   M. Mahdi, L. C. Zhang (The University of Sydney)
   Modeling/Poster/Abstract/1997 Annual

NOVEL/OTHER PROCESSES

1. Transient Response of Wire Electrode in Wire Electrical Discharge Machining
   H. Yamada, N. Mohri, K. Furutani (Toyota Technological Institute), and T. Magara (Mitsubishi Electric Corporation)
   Novel and Other Processes/Poster/Abstract/1997 Annual
2. Three-dimensional Micro Forming Using Metal Jet
   K. Yamaguchi, K. Sakai, T. Yamanaka, T. Hirayama (Nagoya University)
   Novel and Other Processes/Poster/Abstract/1997 Annual

DESIGN

1. Fabrication and Thermal Analysis of a Bellows Type Gas-liquid Phase-change Micro-actuator
   S. Kato, T. Shintani (Nippon Institute of Technology)
   Design/Poster/Abstract/1997 Annual
2. Miniaturized Positioning Device for Precise Rotary Motion by Use of Piezoelectric Actuators
   P. Dörrer (Fraunhofer Institute for Applied Optics and Precision Engineering)
   Design/Poster/Abstract/1997 Annual
3. Dynamic Accuracy Monitoring for the Comparison and Optimization of Fast Axis Feed Drives
   O. Zirn (Mikron SA Agno), and S. Weikert (IWF-ETH)
   Design/Poster/Abstract/1997 Annual
4. Design and Characterization of Nanometer Precision Mechanisms
   Y. Xu, P. D. Atherton, P. Rhead, T. R. Hicks, M. McConnell (Queensgate Instruments, Ltd.)
   Design/Poster/Abstract/1997 Annual
5. Preload Control in Ball Screw Using Piezoelectric Actuators
   S. Fukada (Shinshu University)
   Design/Poster/Abstract/1997 Annual
6. Thin, Light-weight, Compact Pick-up Actuator for High Precision, Fast Access CD-ROM Devices
   S. M. Kim, D. G. Gweon (Korea Advanced Institute of Science and Technology)
   Design/Poster/Abstract/1997 Annual
7. A Long Stroke and Ultraprecision XYq Stage Using Simple Linear DC Servo Actuators
   S. Q. Lee, D. G. Gweon (Korea Advanced Institute of Science and Technology)
   Design/Poster/Abstract/1997 Annual
8. Function Related Tolerance Theory and its Application to Needle-bar Motion Mechanism in a Sewing Machine
   K. J. Chun, D. Y. Shin (Korea Institute of Industrial Technology)
   Design/Poster/Abstract/1997 Annual
9. A Study on Performance Improvement of Non-contact Type Seals for High Speed Spindle
   B. C. Na (Korea Automotive Technology Institute), K. J. Chun (Korea Institute of Industrial Technology), and D. C. Han (Seoul National University)
   Design/Poster/Abstract/1997 Annual
10. An End Effector Using Parallel Mechanism for Scanning Electrical Discharge Machining
    K. Furutani, K. Shibatani, N. Itoh, N. Mohri (Toyota Technological Institute)
    Design/Poster/Abstract/1997 Annual
11. Self Calibration for Hexapod Coordinate Measuring Machine
    C. C. Huang, J. C. Ziegert (University of Florida)
    Design/Poster/Abstract/1997 Annual
12. Three Parameter Solution of Time-varying Thermal Errors
    T. Gim, J. Corbett, A. E. Gee (Cranfield University)
    Design/Poster/Abstract/1997 Annual
13. Relative Tolerances and Simplicity in High Precision Micro Drive Design
    A. Birkicht (Roulements Miniatures SA), and J N. Perkins (RMB Miniature Bearings, Inc.)
    Design/Poster/Abstract/1997 Annual
14. Load Capacity of an Externally Pressurized Air Bearing Used in Measuring the Power Drawn in Stirred Tanks
    D. Palomino, G. Robles, G. Ascanio, E. Galindo (National University of Mexico)
    Design/Poster/Abstract/1997 Annual
15. Design of an Ultra Low Speed Straight Motion System Based on a High Viscosity Fluid Bearing
    J. W. Spronck, P. F. A. M. van Putten, G. J. P. Nijsse (Delft University of Technology)
    Design/Poster/Abstract/1997 Annual
16. Comparison of Carbon Fiber, Alumina Ceramic and Aluminum Beams
    A. J. Devitt, N. Sotiropoulos, J. Radice (New Way Machine Components, Inc.)
    Design/Poster/Abstract/1997 Annual
17. Estimation of Thermal Contact Resistance by Electrical Contact Resistance Measurement
    K. Mizuhara, N. Ozawa (AIST, MITI)
    Design/Poster/Abstract/1997 Annual
18. Design of a Second Generation Nanometric Cutting Instrument
    R. Hocken, R. Namperumal, P. Pereira, J. Lovingood, R. Edgeworth, A. Sharma, M. Holmes, B. Muralikrishnan (University of North Carolina at Charlotte)
    Design/Poster/Abstract/1997 Annual
19. A Flexible Alignment Fixture for the Fabrication of Replication Mandrels
    J. F. Cuttino, D. E. Schinstock, M. W. Todd (The University of Alabama)
    Design/Poster/Abstract/1997 Annual
20. Low Cost Metrology of 6-Degree-of-freedom, Millimeter-range Stages
    Y. Wu, J. F. Cuttino (The University of Alabama)
    Design/Poster/Abstract/1997 Annual
21. Development of a Long Range, Traction Drive Fast Tool Servo for Diamond Turning Applications
    M. W. Todd, J. F. Cuttino (The University of Alabama)
    Design/Poster/Abstract/1997 Annual
22. FAUST and WAGNER: Machine Design and Process Simulation
    O. W. Fähnle, (TNO Institute of Applied Physics), and H. van Brug, C. J. van der Laan, H. J. Frankena (Delft University of Technology)
    Design/Poster/Abstract/1997 Annual
23. Micropositioning of Linear Motion Table with Magnetic Bearing Suspension
    O. S. Kim, H. J. Ahn, D. C. Han (Seoul National University), Y. Joung (Samsung Electronics Co.), and I. B. Chang (Kangwon National University)
    Design/Poster/Abstract/1997 Annual

EDUCATION

1. The Machinist’s Role in a Modern High-precision Manuacturing Enterprise
   R. L. Rhorer, N. R. Copeland, C. W. Brooks, B. S. Dutterer (Nat’l Institute of Standards and Technology)
   Education/Poster/Abstract/1997 Annual