ASPE Proceedings, November 9-14, 1996
Monterey Conference Center and Doubletree Hotel at Fisherman's Wharf
Monterey, CA

PDF versions of the abstracts from the 1996 Proceedings are not available. Contact ASPE to purchase a copy of the Proceedings. ASPE does not sell individual abstracts from the Proceedings.

Technical Sessions

Session I
Nanometer Positioning
Monday, November 11, 1996
8:30 a.m.- 10:00 a.m.
Session Chair: H. Frank van Beek (Delft University of Technology)

1. Positioning Performance of a Maglev Fine Positioning System
   J. B. Wronosky, T. G. Smith, J. D. Jordan, J. R. Darnold (Sandia National Laboratories)
   Nanometer Positioning/Oral/Abstract/1996 Annual
2. Design and Characterization of Nanometer Precision Mechanisms
   Y. Xu, P. D. Atherton, M. McConnell (Queensgate Instruments Ltd.)
   Nanometer Positioning/Oral/Abstract/1996 Annual
3. A Piezo-driven TEM Stage with Subnanometer Position Stability
   H. van der Wulp, H. F. van Beek (Delft University of Technology)
   Nanometer Positioning/Oral/Abstract/1996 Annual
4. Ultraprecise Traveling Slider for Fabrication of DVD Glass Master
   J. Nishida, N. Kikuiri, N. Uchida, N. Takasu (Toshiba Corporation)
   Nanometer Positioning/Oral/Abstract/1996 Annual

Session II
Nanometer Instrumentation
Monday, November 11, 1996
10:30 a.m. - 12:00 p.m.
Session Co-chairs: Anthony E. Gee (Cranfield University) and Andrew J. Hazelton (Nikon Research Corporation of America)

1. An Electrodynamic Microactuator for the Aligning of an Optical Fibre with an Integrated Position Sensor
   T. Frank (Technical University of Ilmenau)
   Nanometer Instrumentation/Oral/Abstract/1996 Annual
2. Observations of Contact Measurements Using a Resonance Based Touch Sensor
   M. Vidic, S. M. Harb (Coventry University), and S. T. Smith (University of North Carolina at Charlotte)
   Nanometer Instrumentation/Oral/Abstract/1996 Annual
3. Novel Linear Encoder Incorporating Incremental Optical and Absolute Capacitive Encoders
   S. A. Hogan, K. G. Masreliez (Micro Encoder Inc.)
   Nanometer Instrumentation/Oral/Abstract/1996 Annual
4. A New Design for a High Speed Spindle
   M. Weck, S. Fischer (Fraunhofer-Institut für Produktionstechnologie), P. Holster (Philips Research Labs), K. Carlisle (Cranfield Precision Ltd.), and Y. Chen (Carl Zeiss)
   Nanometer Instrumentation/Oral/Abstract/1996 Annual

Session III
Ultraprecision Machining
Monday, November 11, 1996
3:30 p.m. - 5:00 p.m.
Session Chair: Richard L. Rhorer (National Institute of Standards and Technology)

1. Precision Grinding of Brittle Materials: The ASPE 1996 Topical Meeting - Summary and Review (Invited Paper)
   R. O. Scattergood (N. C. State University)
   Ultraprecision Machining/Oral/Abstract/1996 Annual
2. Diamond Machining of the 3m Reflector of the KOSMA Submillimeter Telescope by a Single-point Fly-cutting Process
   E. Brinksmeier, W. Preuss (University of Bremen)
   Ultraprecision Machining/Oral/Abstract/1996 Annual
3. The Effect of Spindle Perturbations on the Quality of Precision Grinding
   K. L. Blaedel, J. S. Taylor (Lawrence Livermore National Laboratory)
   Ultraprecision Machining/Oral/Abstract/1996 Annual
4. Possible Mechanism of Crack Initiation in Micromachining of Silicon
   S. Shimada (Osaka University), T. Inamura, N. Takezawa (Nagoya Institute of Technology), Y. Onchi (MIZUHO Co., Ltd.), and T. Sata (Toyota Technological Institute)
   Ultraprecision Machining/Oral/Abstract/1996 Annual

Session IV
Novel Processing
Tuesday, November 12, 1996
8:30 a.m. - 10:00 a.m.
Session Chair: Michele H. Miller (Michigan Technological University)

1. Precision Manufacturing of Compact Disc Master Stampers
   T. G. Bifano, H. Caggiano (Boston University), and P. Bierden (Prism Corporation)
   Novel Processing/Oral/Abstract/1996 Annual
2. A Tabletop Factory to Fabricate Micro Machines, “Nano Manufacturing World”
   M. Nakao, Y. Hatamura (The University of Tokyo)
   Novel Processing/Oral/Abstract/1996 Annual
3. In-situ Slurry Film Measurements for Various Chemical-mechanical Polishing Pad Materials
   J. Levert, F. Mess, S. Danyluk, R. Salant (Georgia Institute of Technology), and L. Cook (Rodel, Inc.)
   Novel Processing/Oral/Abstract/1996 Annual
4. Three-dimensional Profile Generation by Dot-matrix Method Using Miniaturized Electrode Feeding Devices
   K. Furutani, T. Enami, N. Mohri (Toyota Technological Institute)
   Novel Processing/Oral/Abstract/1996 Annual

Session V
Advances in Interferometry
Tuesday, November 12, 1996
1:30 p.m. - 3:00 p.m.
Session Co-chair: Michael Downs (National Physical Laboratory) and Lowell P. Howard (National Institute of Standards and Technology)

1. Industrial Inspection Interferometer Having a Large Equivalent Wavelength (Invited Paper)
   P. de Groot (Zygo Corporation)
   Advances in Interferometry/Oral/Abstract/1996 Annual
2. Application of Liquid Crystal Panel as Diffraction Grating to Zone-plate Interferometer
   K. Kamiya, T. Nomura, H. Miyashiro (Toyama Prefectural University), and K. Yoshikawa, H. Tashiro (Toyama University)
   Advances in Interferometry/Oral/Abstract/1996 Annual
3. Wavelength-shift Interferometry: Using a Dither to Improve Accuracy
   J. A. Stone, A. Stejskal, L. P. Howard (National Institute of Standards and Technology)
   Advances in Interferometry/Oral/Abstract/1996 Annual
4. Angle Measurement Using X-ray Moiré Fringes
   N. O. Krylova, D. G. Chetwynd, D. K. Bowen (University of Warwick)
   Advances in Interferometry/Oral/Abstract/1996 Annual

Session VI
Nanometrology
Tuesday, November 12, 1996
3:30 p.m. - 5:00 p.m.
Session Chair: David Grigg (Digital Instruments Inc.)

1. Scanning Probe Microscopes for Dimensional Length Measurements
   K. Hasche, L. Koenders, K. Thiele, G. Wilkening (Physikalisch Technische Bundesanstalt)
   Nanometrology/Oral/Abstract/1996 Annual
2. Toward Accurate Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated Atomic Force Microscope
   R. Dixson, T. Vorburger, P. Sullivan (National Institute of Standards and Technology), and V. W. Tsai (University of Maryland)
   Nanometrology/Oral/Abstract/1996 Annual
3. Measurements of the Surface Roughness of Ground Silicon Wafers by Cross-sectional TEM
   H. Murai, S. Kasaishi, T. Kaneeda (Okayama University of Science), Y. Yokota (Natural Science Research Institute), and P. O. Hahn, M. Kerstan, D. Helmreich (Wacker Silitronics)
   Nanometrology/Oral/Abstract/1996 Annual
4. Fabry-Perot Interfeometry for Small Displacement Metrology
   L. P. Howard, F. Scire, J. A. Stone (National Institute of Standards and Technology)
   Nanometrology/Oral/Abstract/1996 Annual
5. A Metrological Three-axis Translator and its Application for Constant Force Profilometry
   V. G. Badami, S. R. Patterson, S. T. Smith (University of North Carolina at Charlotte)
   Nanometrology/Oral/Abstract/1996 Annual

Session VII
Controls and Sensors
Wednesday, November 13, 1996
8:30 a.m. - 10:00 a.m.
Session Chair: Dan Luttrell (3M Company)

1. Modeling and Control of Hysteresis in a Piezoceramic Actuator
   P. Ge, M. Jouaneh (University of Rhorer Island)
   Controls and Sensors/Oral/Abstract/1996 Annual
2. Implementation of an Acoustic Emission Proximity Detector for Use in Generating Glass Optics
   M. A. Piscotty, J. S. Taylor, K. L. Blaedell (Lawrence Livermore National Laboratory)
   Controls and Sensors/Oral/Abstract/1996 Annual
3. Adaptive Pole-zero Cancellation in Grinding Force Control
   H. E. Jenkins, T. R. Kurfess (Georgia Institute of Technology)
   Controls and Sensors/Oral/Abstract/1996 Annual
4. Diamond Point Tool Force Measurement in a Production Environment
   J. Schaefer (Texas Instruments, Inc.), C. Arcona, T. A. Dow, K. Falter, G. M. Moorefield II (North Carolina State University), and R. L. Rhorer (Los Alamos National Laboratory)
   Controls and Sensors/Oral/Abstract/1996 Annual

Session VIII
Machine Tool Metrology
Wednesday, November 13, 1996
1:30 p.m. - 3:00 p.m.
Session Chair: Joseph Drescher (UTC-Pratt & Whitney)

1. Using Chebyshev Norms for Estimating Machine Tool Error Parameters (Invited Paper)
   H. Tajbakhsh, Z. Abadin, P. M. Ferreira (University of Illinois at Urbana-Champaign)
2. A 5-degree-of-freedom Laser System for Rapid Machine Volumetric Error Measurement and Compensation
   Q. Ma, X. Chu, K. Lau (Automated Precision, Inc.)
   Machine Tool Metrology/Oral/Abstract/1996 Annual
3. Laser Measurement Instrument for Fast Calibration of Machine Tools
   P. S. Huang, Y. Li (SUNY Stony Brook)
   Machine Tool Metrology/Oral/Abstract/1996 Annual
4. Practical Thermal Error Correction for CNC Machine Tools - An Introduction and Application to Thermal Error Correction Techniques
   J. P. Allen, S. R. Postlethwaite, D. G. Ford (The University of Huddersfield)
   Machine Tool Metrology/Oral/Abstract/1996 Annual

Session IX
Industrial Metrology
Wednesday, November 13, 1996
3:30 p.m. - 5:00 p.m.
Session Chair: Kirsten M. Carr (Ford Research Laboratory)

1. Methodologies for the Evaluation of Systematic Form Deviations for Inside-diameter Cylindrical Features and Their Relationship to Process Variables
   R. P. Henke, R. M. Cassou, K. D. Summerhays (University of San Francisco), J. M. Baldwin (Sandia National Laboratories/Livermore), and C. W. Brown (Allied Signal Aerospace)
   Industrial Metrology/Oral/Abstract/1996 Annual
2. Best Fit Transformation and Uncertainty Analysis in Computational Metrology
   H-T. Yau (National Chung-Cheng University)
   Industrial Metrology/Oral/Abstract/1996 Annual
3. Uncertainty of the Coordinate Measurement Process Due to Unwanted Asperities
   J. G. Salsbury (University of North Carolina at Charlotte)
   Industrial Metrology/Oral/Abstract/1996 Annual
4. Three-dimensional Metrology Frame for Precision Application
   J. F. Cuttino, K. S. Hubbard, M. J. Prather (The University of Alabama)
   Industrial Metrology/Oral/Abstract/1996 Annual
5. Assessment of Plateau Honed Surface Texture Using Wavelet Transform
   S. Liu, J. Raja, H. Sannareddy (University of North Carolina at Charlotte)
   Industrial Metrology/Oral/Abstract/1996 Annual

Poster Session I
Tuesday, November 12, 1996
10:30 a.m. - 12:00 p.m.

NEW METROLOGY DEVICES

1. Nanometric Measurement by Optical Interferometry
   M. J. Downs, J. W. Nunn (National Physical Laboratory)
   New Metrology Devices/Poster/Abstract/1996 Annual
2. Study on a Novel Method for Reflective Index Compensation of Laser Measuring System on Ultraprecision Machine Tools
   Fang, F. (Tianjin University)
   New Metrology Devices/Poster/Abstract/1996 Annual
3. Determination of Straight Line Profiles by Using Angularly Displaced CCD with Pixel Output Interpolation
   R. Jablonski (Shizuoka University)
   New Metrology Devices/Poster/Abstract/1996 Annual
4. The Development of Non-contact 3D Profile Measurement Technique with Parallel Projection Beams
   S-J. Lee, T-J. Fan (Yuan-Ze Institute of Technology)
   New Metrology Devices/Poster/Abstract/1996 Annual
5. A Method to Analyze Zone-plate Interferograms by Using Nematic Liquid Crystal
   T. Nomura, K. Kamiya, H. Miyashiro (Toyama Prefectural University), and K. Yoshikawa, H. Tashiro, H. Onnagawa, H. Okada (Toyama University)
   New Metrology Devices/Poster/Abstract/1996 Annual
6. Straightedge Metrology in a Wet Environment
   S. B. Peirce, D. B. DeBra (Stanford University)
   New Metrology Devices/Poster/Abstract/1996 Annual
7. Machining Virtual Test Parts
   T. Schmitz, J. C. Ziegert (University of Florida)
   New Metrology Devices/Poster/Abstract/1996 Annual
8. A Microfabricated Magnetic Field Sensor Based on Giant Magnetoresistant Material
   W. Wang, E. Ma, C. K. Malek (Louisiana State University)
   New Metrology Devices/Poster/Abstract/1996 Annual
9. Error Analysis by Simulation for a Fiber Based Non-contact Measurement Probe
   Y. Yang, K. Yamazaki (University of California at Davis)
   New Metrology Devices/Poster/Abstract/1996 Annual
10. Micro-volume Defects Measuring System Based on Digital Image Processing Measuring Technique
    You, Z., Yang, R., Chen, J. (Tsinghua University)
    New Metrology Devices/Poster/Abstract/1996 Annual
11. A Study on High-accuracy Laser Interferometric Measurement of Micro-angle
    Zhu, H., Wang, H., Liu, H. (Tianjin University)
    New Metrology Devices/Poster/Abstract/1996 Annual

SURFACE ROUGHNESS

1. Stylus Drag Forces on Lubricated Surfaces
   D. G. Chetwynd, L. A. J. Davis (University of Warwick)
   Surface Roughness/Poster/Abstract/1996 Annual
2. Development of Dual Servo STM
   K. Mitsui (Keio University), and T. Goto (Mitsubishi Heavy Industries, Ltd.)
   Surface Roughness/Poster/Abstract/1996 Annual

SURFACE SHAPE AND FIGURE

1. Direct Comparative Length Measurement Between Regular Crystalline Lattice and SEM Standard Grating Using Dual Tunneling Unit STM
   M. Aketagawa, K. Takada, S. Sasaki, S. Suzuki (Nagaoka University of Technology), and Y. Nakayama (Hitachi Ltd.)
   Surface Shape and Figure/Poster/Abstract/1996 Annual
2. Cylindricity -- More Than Just a Number?
   P. Castle (Rank Taylor Hobson, Inc.)
   Surface Shape and Figure/Poster/Abstract/1996 Annual
3. Optical Polygon Calibration with a He-Ne Laser
   R. Díaz, R. Nava (Universidad Nacional Autónoma de México)
   Surface Shape and Figure/Poster/Abstract/1996 Annual
4. Nano-metrology of Roundness and Spindle Error
   W. Gao, S. Kiyono, T. Sugawara (Tohoku University)
   Surface Shape and Figure/Poster/Abstract/1996 Annual
5. Spindleless Sphericity Measurement with Nanometer Accuracy
   E. A. Gleason, Jr. (Bal-tec Division), H. Schwenke (Physikalisch-Technische Bundesanstalt)
   Surface Shape and Figure/Poster/Abstract/1996 Annual
6. Assessment of Drill Point Geometry by Genetic Algorithm and Steepest Gradient Method
   L. Hazra, R. Nakamura, H. Kato (Chiba University), T. Kuroda (Kisarazu National College), and. Y. Tsuchiya, I. Sakuma (Fujita Works)
   Surface Shape and Figure/Poster/Abstract/1996 Annual
7. Transmission Electron Microscopy of Precision Machined Surface
   T. Kaneeda, D. Higashi (Okayama University of Science), and S. Yokomizo (Industrial Technology Center of Okayama Prefecture)
   Surface Shape and Figure/Poster/Abstract/1996 Annual
8. Statistical Methods for Process Identification by Surface Classification Using Vision Approach
   M. B. Kiran, B. Ramamoorthy, V. Radhakrishnan (Indian Institute of Technology)
   Surface Shape and Figure/Poster/Abstract/1996 Annual
9. High Accuracy Technique of SPM Measurement
   S. Kiyono, M. Satoh, T. Nanjyo, W. Gao (Tohoku University)
   Surface Shape and Figure/Poster/Abstract/1996 Annual
10. A 120mm X 120mm Area Photomask Metrology Standard with an Absolute Accuracy of 60nm
    M. B. McCarthy (National Physical Laboratory), and A. E. Gee (Cranfield University)
    Surface Shape and Figure/Poster/Abstract/1996 Annual
11. Image Processing Research for Non-contact Measurement
    M. T. Mostafavi, S. Pragalsingl (University of North Carolina at Charlotte)
    Surface Shape and Figure/Poster/Abstract/1996 Annual
12. Flatness and Levelness Measurement System for Big Surfaces
    R. Nava, S. Padilla, B. Valera (Universidad Nacional Autónoma de México)
    Surface Shape and Figure/Poster/Abstract/1996 Annual
13. New NIST-certified Length Microscale
    J. Potzick (National Institute of Standards and Technology)
    Surface Shape and Figure/Poster/Abstract/1996 Annual
14. Height Calibration of Atomic Force Microscopes Using Silicon Atomic Step Artifacts
    V. W. Tsai, E. D. William (University of Maryland at College Park), T. V. Vorburger, R. Silver, R. Dixson (National Institute of Standards and Technology), and J. Schneir (Tencor Instruments)
    Surface Shape and Figure/Poster/Abstract/1996 Annual
15. Evaluating Form Error of Spherical Surfaces Using Confocal Microscope
    G. Udupa, M. Singaperumal, R. S. Sirohi, M. P. Kothiyal (Indian Institute of Technology)
    Surface Shape and Figure/Poster/Abstract/1996 Annual

COORDINATE METROLOGY MACHINES

1. Thermal Errors Calibration and Modeling of a Cylindrical Grinding Machine
   B. DiGiacomo (Uiniversidade de Sao Paulo), P. H. Pereira (University of North Carolina at Charlotte), and A. J. Abackerli (Universidade Metodista de Piracicaba)
   Coordinate Metrology Machines/Poster/Abstract/1996 Annual
2. Substitute Geometry Fitted from Position and Surface Normal Information
   R. Edgeworth, R. G. Wilhelm (University of North Carolina at Charlotte)
   Coordinate Metrology Machines/Poster/Abstract/1996 Annual
3. Modeling and Simulation of a Parallel Architecture Five-axis Coordinate Measuring Machine
   B. Jokiel, Jr., J. C. Ziegert (University of Florida)
   Coordinate Metrology Machines/Poster/Abstract/1996 Annual
4. Effect of Sample Point Density on Measurements of Cylindrical Features Using Coordinate Measuring Machine
   A. C. Okafor, D. Mehrotra (University of Missouri-Rolla)
   Coordinate Metrology Machines/Poster/Abstract/1996 Annual
5. The Effect of Circular Groove on Flatness Error of Metal Mirror Caused by Chucking Force
   N. Ozawa, K. Mizuhara (Mechanical Engineering Laboratory, AIST, MITI), and S. Kawabe (Precision Technology Research Institute of Nagano Prefecture)
   Coordinate Metrology Machines/Poster/Abstract/1996 Annual
6. Sampling Plan for Point-to-point Probe Performance Test on Coordinate Measuring Machines (CMMs)
   Y. Shen, S. Moon (George Washington University)
   Coordinate Metrology Machines/Poster/Abstract/1996 Annual
7. A Robust Pretravel Model for Kinematic Touch Trigger Probes in Coordinate Metrology
   Y. Shen, M. E. Springer (George Washington University)
   Coordinate Metrology Machines/Poster/Abstract/1996 Annual
8. Calibration Methods for Dual Probe CMMs
   B. P. Vishwas, R. G. Wilhelm (University of North Carolina at Charlotte)
   Coordinate Metrology Machines/Poster/Abstract/1996 Annual
9. Evaluation of Elliptical Profiles and its Application in Cylinder Measurement by CMMs
   Y. Wang, K. S. Moon, J. W. Sutherland (Michigan Technological University)
   Coordinate Metrology Machines/Poster/Abstract/1996 Annual
10. Investigation of Error Motions of Aerostatic Spindles
    M. Weck, M. F. Soltani (Fraunhofer-Institut für Produktionstechnologie)
    Coordinate Metrology Machines/Poster/Abstract/1996 Annual
11. Surface Approximation and Automatic Generation of Complex Geometric Model from Laser Scan Data
    H-T. Yau, J-S. Chen (National Chung-Cheng University)
    Coordinate Metrology Machines/Poster/Abstract/1996 Annual

MACHINE TOOL METROLOGY

1. Machine Tool Accuracy Characterization Using Telescopic Ballbar and Laser Interferometer
   A. C. Okafor, Y. Ertekin (University of Missouri-Rolla)
   Machine Tool Metrology/Poster/Abstract/1996 Annual
2. A New Technique for Volumetric Error Calibration of CNC Machine Tools Incorporating the Ball Bar Measurement and the Three-dimensional Volumetric Error Model
   H. J. Pahk, J. H. Moon (Seoul National University)
   Machine Tool Metrology/Poster/Abstract/1996 Annual
3. Analysis of Tool Trajectories (2D Tool Paths) in Machine Tools
   F. Rehsteiner, S. Weikert (Swiss Federal Institute of Technology)
   Machine Tool Metrology/Poster/Abstract/1996 Annual

DESIGN I

1. Comparison of Control Strategies for Piezoelectric and Magnetostrictive Micropositioning Devices for Ultraprecision Machining
   J. C. Campos Rubio, J. G. Duduch, A. J. Vieira Porto (Universidade de Sao Paulo), and A. E. Gee (Cranfield University)
   Design I/Poster/Abstract/1996 Annual
2. A Study on Feeding Control Mechanism Analysis of Industrial Lock Stitch Sewing Machine
   K. J. Chun, D. Y. Shin (Korea Academy of Industrial Technology)
   Design I/Poster/Abstract/1996 Annual
3. Piezoelectric Microactuator Including Compliant Mechanism
   D. Enke, T. Gerlach (Technical University of Ilmenau)
   Design I/Poster/Abstract/1996 Annual
4. Design of a Large Displacement Flexural Bearing for Concentric Cylinders
   C. J. Finlayson, J. F. Cuttino (The University of Alabama)
   Design I/Poster/Abstract/1996 Annual
5. Microscopic Behavior of Leadscrew-nut System and its Improvement
   S. Fukada (Shinshu University)
   Design I/Poster/Abstract/1996 Annual
6. Recent Advancements in Piezoelectric Stepping Motors
   D. Henderson, D. Jensen, P. Piccirilli (Burleigh Instruments, Inc.)
   Design I/Poster/Abstract/1996 Annual
7. A Long-range Scanning Stage Design (The LORS Project)
   M. L. Holmes (University of North Carolina at Charlotte)
   Design I/Poster/Abstract/1996 Annual
8. A Study on a High-precision Linear Motion Table with Magnetic Bearing Suspension
   Y. Joung (Samsung Electronics Co.), I-B. Chang (Kangwon National University), and H-J. Ahn, O-S. Kim, D-C. Han (Seoul National University)
   Design I/Poster/Abstract/1996 Annual
9. Fabrication and Thermal Analysis of a Gas-liquid Phase-change Micro-actuator
   S. Kato, S. Hosoi (Nippon Institute of Technology)
   Design I/Poster/Abstract/1996 Annual
10. Load-dependent Behaviour in PTFE-glass Slideways
    A. F. Monterio, D. G. Chetwynd (University of Warwick)
    Design I/Poster/Abstract/1996 Annual
11. Micro-dynamics of a Slide Mechanism Using Rolling Elements
    Y. Okazaki (Mechanical Engineering Laboratory, AIST), and S. Sasaki, R. Murata (Science University of Tokyo)
    Design I/Poster/Abstract/1996 Annual
12. Characterization of an Air Bearing for Mixing Studies of Bioprocesses
    J. M. Patiño, R. Vázquez, G. Ascanio (Universidad Nacional Autónoma de México), and E. Galindo, L. Serrano-Carreón (Instituto de Biotecnología)
    Design I/Poster/Abstract/1996 Annual

Poster Session II
Wednesday, November 13, 1996
10:30 a.m. - 12:00 p.m.

CONTROLS

1. Submicrometer Overshoot Control of Rapid and Precise Positioning
   S. B. Chang (Precision Instrument Development Center of National Science Council)
   Controls/Poster/Abstract/1996 Annual
2. Torsional Compliance in Grinding Chatter
   R. D. Entwistle, B. J. Stone (The University of Western Australia)
   Controls/Poster/Abstract/1996 Annual
3. Closed-loop Control of a Magnetic Servo-Levitated Fast-Tool Servo System
   H. M. Gutierrez, P. I. Ro (North Carolina State University)
   Controls/Poster/Abstract/1996 Annual
4. Performance Evaluator for Open Architecture NC Boards
   M. Hatakeyama, S. Ueno (Technical Research Institute of Japan Society for the Promotion of Machine Insdustry)
   Controls/Poster/Abstract/1996 Annual
5. Fabrication of Surface Perturbations on Inertial Confinement Fusion Targets
   B. H. Jared, T. A. Dow, K. P. Garrard, G. M. Moorefield II (North Carolina State University), and C. Barnes, R. D. Day, D. J. Hatch, L. J. Salzer, G. Rivera (Los Alamos National Laboratory)
   Controls/Poster/Abstract/1996 Annual
6. Autonomous Cutting Parameter Regulation by Using an Adaptive Modeling and Genetic Algorithms
   T. J. Ko, H. S. Kim (Yeungnam University)
   Controls/Poster/Abstract/1996 Annual
7. Development of a Thin Brittle Filter Insertion Machine for Optical WDM
   K. Kudo, F. Ohira, K. Koyabu, M. Matsunaga (Nippon Telegraph and Telephone Corporation)
   Controls/Poster/Abstract/1996 Annual
8. Multi-sensor Monitoring on Cold Form Tapping of Large Diameter Internal Threads in High Strength Steel
   Ma, P., Wang, M. (Nanjing University)
   Controls/Poster/No Abstract Available/1996 Annual
9. Autonomous Acquisition of a Shared Machining Condition Database in an Open CNC Environment
   M. Mitsuishi, H. Okabe, M. Hashiguchi, K. Tanaka, T. Nagao (The University of Tokyo)
   Controls/Poster/Abstract/1996 Annual
10. Review of Developments in Sensors for Untended Machining
    A. C. Okafor, A. Ukpong (University of Missouri-Rolla)
    Controls/Poster/Abstract/1996 Annual
11. Integrated Electrodynamic Multicoordinate Drives _ Modern Components for Intelligent Motions
    C. Schaffel, E. Saffert, E. Kallenbach (Technical University of Ilmenau)
    Controls/Poster/Abstract/1996 Annual
12. Design of a Long Range Fast Tool Servo System Using Magnetic Servo Levitation
    B. A. Stancil, P. I. Ro (North Carolina State University)
    Controls/Poster/Abstract/1996 Annual
13. A Neural Network-based Real-time Compensation Technique for Frequency Output Sensor Arrays
    G. Y. Tian, Z. X. Zhao, R. W. Baines (University of Derby)
    Controls/Poster/Abstract/1996 Annual
14. Development of NC Program Evaluator for Higher Machining Productivity
    X. Yan, K. Shirase, M. Hirao, T. Yasui (Kanazawa University)
    Controls/Poster/Abstract/1996 Annual

PROCESSING

1. Local Lapping System to Obtain Wide and Flat Surface with Actively Controlled Force Sensor
   K. Matsumoto, M. Nakao, Y. Hatamura (The University of Tokyo)
   Processing/Poster/Abstract/1996 Annual
2. Dynamic Friction Polishing of Diamond with a Steel Disc Rotating at High Speed
   K. Suzuki, K. Abe, A. Ide (Nippon Institute of Technology), T. Uematsu (Toyama Prefectural University), and Y. Seki (De Beers Industrial Diamond Division)
   Processing/Poster/Abstract/1996 Annual
3. Three-body Abrasive Wear Characteristics Under Reciprocating Motion of CFRP in Vibrating Environment
   S. Teraoka (Kanazawa Technical College), and K. Ishikawa, T. Nakagawa (Kanazawa Institute of Technology)
   Processing/Poster/Abstract/1996 Annual
4. Surface Integrity of Polished Infrared Optics and Glass
   V. C. Venkatesh, W. K. Chee, K. H. Tan (Nanyang Technological University), and K. L. Pey, A. Trigg (Institute of Microlectronics)
   Processing/Poster/Abstract/1996 Annual

DIAMOND TURNING

1. Burr and Shape Distortion in Micro-grooving of Optical Components
   J-H. Ahn, H-S. Lim (Pusan National University), and. D. A. Dornfeld (University of California at Berkeley)
   Diamond Turning/Poster/Abstract/1996 Annual
2. A Tool Force Model for Diamond Turning
   C. Arcona, T. A. Dow (North Carolina State University)
   Diamond Turning/Poster/Abstract/1996 Annual
3. Effect of Grain Orientation and Grain Boundaries on the Surface Topography of Diamond Turned OFHC Copper
   E. Brinksmeier, W. Preuss, O. Reimer, J. Schmütz (University of Bremen)
   Diamond Turning/Poster/Abstract/1996 Annual
4. Design and Application of In-process Acoustic Sensors for Maximum Sensitivity -- Methods and an Example in Diamond Tooling
   J. Daniel, D. A. Dornfeld (University of California at Berkeley)
   Diamond Turning/Poster/Abstract/1996 Annual
5. Development of a Micro-cutting/Testing System Under Scanning Electron Microscope
   M. Mitsuishi, N. Sugita, T. Nagao, Y. Hatamura (The University of Tokyo)
   Diamond Turning/Poster/Abstract/1996 Annual
6. Holographic Testing of Diamond Turned Aspherics. How Well Does it Work?
   C. Stenton (Hughes ELCAN Optical Technologies)
   Diamond Turning/Poster/Abstract/1996 Annual
7. Ultraprecision Metal Cutting Process Monitoring Using Acoustic Emission
   J. Tang, X. Chen, D. A. Dornfeld (University of California at Berkeley)
   Diamond Turning/Poster/Abstract/1996 Annual

MATERIALS

1. Controlled Microcutting Tests on Semiconductor Silicon Crystals
   B. V. Tanikella, R. O. Scattergood (North Carolina State University)
   Materials/Poster/Abstract/1996 Annual

NOVEL MANUFACTURING PROCESSES

1. Patterning Submicrometer Features Using Masked, Broad Beam Ion Machining
   H. E. Caggiano, T. G. Bifano (Boston University)
   Novel Manufacturing Processes/Poster/Abstract/1996 Annual
2. Nanogrinding
   H. H. Gatzen, J. C. Maetzig (Hanover University)
   Novel Manufacturing Processes/Poster/Abstract/1996 Annual
3. Effect of Vibration Using Ultrasonic and Low Frequency Vibrations on Grooving Process for Hard and Brittle Materials
   K. Ishikawa, H. Suwabe, M. Uneda (Kanazawa Institute of Technology)
   Novel Manufacturing Processes/Poster/Abstract/1996 Annual
4. Precision Trimming of Large GFRP Parts Using a Mobile Robot with Onboard Grinder
   Y. Nasu, N. Kouda, K. Mitobe, T. Kuroda, K. Shibata (Yamagata University)
   Novel Manufacturing Processes/Poster/Abstract/1996 Annual
5. Thermal Cutting of Plate Glass
   K. Sadashivappa, M. Singaperumal (Indian Institute of Technology), and C. S. Bhaskar Dixit (Bapuji Institute of Engineering and Technology)
   Novel Manufacturing Processes/Poster/Abstract/1996 Annual
6. Precision Polishing of Optical Fiber Connector
   H. Suzuki, K. Syoji (Tohoku University), and S. Kodera, S. Hasegawa (Mitsubishi Electric Corporation)
   Novel Manufacturing Processes/Poster/Abstract/1996 Annual

GRINDING

1. In-process Detection of Ductile-brittle Transition in High Speed Scratching of Glass-Theory and Experiment
   J. Daniel, D. Dornfeld (University of California at Berkeley)
   Grinding/Poster/Abstract/1996 Annual
2. On-line Diameter Measurement of Grinding Wheel Using Acoustic Emission
   W. Dong, L. Annecchino, J. Webster (University of Connecticut)
   Grinding/Poster/Abstract/1996 Annual
3. Development of Vibration Cutting Using OD-Blade
   K. Ishikawa, H. Suwabe, M. Uneda (Kanazawa Institute of Technology)
   Grinding/Poster/Abstract/1996 Annual
4. Prospective of Fractal Application in Grinding
   X. M. Liu, G. Q. Cai, H. W. Zheng (Northeastern University), D. L. Ma (Liao ning Industrial Art School), and Q. Y. Wen (Shen yang Donghang Mechanical & Electrical Technology Institute)
   Grinding/Poster/Abstract/1996 Annual
5. Grinding Characteristics of Plasma-sprayed Ceramics
   K. Narayanasamy (Indian Institute of Technology), and S. Gowri (Karnataka Regional Engineering College)
   Grinding/Poster/Abstract/1996 Annual
6. The Effect of Ultrasonic Vibration on the Grinding of Brittle Materials
   W. Qu, M. H. Miller (Michigan Technological University)
   Grinding/Poster/Abstract/1996 Annual
7. Development of Grinding Models for Brittle Materials
   K. W. Sharp, R. O. Scattergood (North Carolina State University)
   Grinding/Poster/Abstract/1996 Annual
8. High-efficiency Mirror Finishing Characteristics of Ceramics with Extremely Fine Grit Diamond Wheels
   X-J. Wang (Tokyo Emix Corporation), K. Syoji, T. Kuriyagawa (Tohoku University)
   Grinding/Poster/Abstract/1996 Annual
9. Shear-mode Grinding Force Criteria in Grinding Silicon Wafers with Cup Wheels
   Y. Yoshida (Tokyo Diamond Tool), P. Nan (Northeastern University), K. Imai, Y. Ogita, H. Hashimoto (Kanagawa Institute of Technology), S. Sekita, K. Iida (Shibayama Kikai), and N. Tsuda (Tokai University)
   Grinding/Poster/Abstract/1996 Annual
10. Cryogenic Grinding of Brittle Materials
    H. Yu, S. Terashima, N. Morita, Y. Yoshida (Chiba University)
    Grinding/Poster/Abstract/1996 Annual
11. The Plastic Zone Formation in Alumina Associated with Ultraprecision Grinding
    I. Zarudi (The University of Sydney)
    Grinding/Poster/Abstract/1996 Annual

SLIDEWAY MATERIALS

1. Frictional Characteristics of Linear Plain Bering Guideways and Motion Controllability of Numerically Controlled Slide
   A. Kanai, M. Miyashita S. Hatai, M. Yoshida (Ashikaga Institute of Technology)
   Slideway Materials/Poster/Abstract/1996 Annual
2. Tribology of Hard Bearing Coatings
   A. P. Santavy, R. O. Scattergood (North Carolina State University)
   Slideway Materials/Poster/Abstract/1996 Annual

DESIGN II

1. Non Isotropy of Young’s Modulus of Elasticity in Very Thin Metal Sheets
   P. V. Pistecky (Delft University of Technology)
   Design II/Poster/Abstract/1996 Annual
2. High Precision X-Y-q Micropositioning Stage Using a Monolithic Flexure-pivoted Linkage
   J-W. Ryu, D-G. Gweon (KAIST)
   Design II/Poster/Abstract/1996 Annual
3. Innovations in the Design and Development of Ultraprecision Machines -- Lightweight and Ultrastiff Single Point Diamond Turning Machine with Submicron Machining Accuracy
   J. P. M. B. Vermeulen, P. C. J. N. Rosielle, P. H. J. Schellekens (Eindhoven University of Technology)
   Design II/Poster/Abstract/1996 Annual
4. Straightness Errors of Rectangular Beams Caused by Ambient Air Temperature Gradients
   K. L. Wasson (Aesop, Inc.), and A. H. Slocum, J. H. Lienhard (Massachusetts Institute of Technology)
   Design II/Poster/Abstract/1996 Annual