ASPE Proceedings, September 23-28, 1990
Riverside Convention Center
Rochester, New York
PDF versions of the abstracts from the 1990 Proceedings are not available.
Contact ASPE to purchase a copy of the Proceedings. ASPE does not sell
individual abstracts from the Proceedings.
Technical Sessions
Session I
Tuesday, September 25, 8:00 - 9:45
Session Chair: Robert Hocken, UNC-Charlotte
- New Trends and Challenges in Optical Lithography (Invited Paper)
John Bruning (GCA Corp.)
Precision Engineering/Oral/Abstract/1990 Annual
- Optically Based Atomic Force Microscope that Adapts to Commercial
Scanning Tunneling Microscope Head
Robert Day, Lonnie A. Theye (LANL) and Phil Russell (N. C. State University)
Precision Engineering/Oral/Abstract/1990 Annual
- Co-Focal Micro-Raman Probe of Residual Stresses and Subsurface
Damage in Glass
Ronald G. Sparks and M. A. Paesler (N. C. State University)
Precision Engineering/Oral/Abstract/1990 Annual
- Three Dimensional Contouring on a N/C Grinder
Dean Ketelsen, W. C. Kittrell and Robert Parks (University of Arizona),
Lianzhen Shao (Tucson Optical Research Corp.)
Precision Engineering/Oral/Abstract/1990 Annual
Session II
Tuesday, September 25, 10:15 - 12:00
Session Chair: Kiyoshi Iizuka, Research Development Corporation of Japan
- The Generation of Aspheric Surfaces on Thermal Imaging Materials
on a 4-Axis Machining Center
Vellore c. Venkathes and C. P. Tan (Tennessee Tech Univ)
Precision Engineering/Oral/Abstract/1990 Annual
- Architectures and Algorithms for Computer Control of High Precision
Machine Tools
Robert Fornaro, K. P. Garrard and L. W. Taylor (N. C. State University)
Precision Engineering/Oral/Abstract/1990 Annual
- Machining Non-Axisymmetric Optics
Dan Luttrell (Rank Taylor Hobson)
Precision Engineering/Oral/Abstract/1990 Annual
- Sub-Angstrom, Vertical Resolution, 3D Surface Profiling
Frank Demarest and Robert Smythe (Zygo Corp.)
Precision Engineering/Oral/Abstract/1990 Annual
Session III
Tuesday, September 25, 1:30 - 3:15
Session Chair: Irving Stowers, LLNL
- Micro Mechanical Systems (Invited Paper)
William Trimmer (AT&T Bell Labs)
Precision Engineering/Oral/Abstract/1990 Annual
- Design of Active Vibration Control System
Kazuyoshi Katayama, Yoshinori Takahashi, Nobuyoshi Murai (Takenaka Corp.)
Precision Engineering/Oral/Abstract/1990 Annual
- A 0.25 Micrometer Optical Projection Printer for IC Lithography
A. Grenville, R. S. Hsieh, and R. F. W. Pease (Stanford Univ.), D. A.
Markle (Ultratech Stepper) and G. Owen (Hewlett Packard)
Precision Engineering/Oral/Abstract/1990 Annual
- The Chemistry of Glass Polishing
Lee Cook (Galileo Electro-Optics)
Precision Engineering/Oral/Abstract/1990 Annual
Session IV
Tuesday, September 25, 3:45 - 5:30
Session Chair: Ronald O. Scattergood, N. C. State University
- An Experimental Procedure for Studying Diamond Turning Chip Mechanics
Richard Rhorer (LANL), Don A. Lucca (Oklahoma State University)
Precision Engineering/Oral/Abstract/1990 Annual
- Surface Studies of Diamond Machined Polymers
Jeffrey Carr and Claudius Feger (IBM Research)
Precision Engineering/Oral/Abstract/1990 Annual
- Diamond Turning of Non-Symmetric Laser Optics
M. Weck and M. Pyra (Fraunhofer Inst.)
Precision Engineering/Oral/Abstract/1990 Annual
- Step Height Measurements with a Phase-Shifting Interference Microscope
A. W. Haratman and Ted Vorburger (NIST)
Precision Engineering/Oral/Abstract/1990 Annual
Session V
Wednesday, September 26, 8:00 - 9:45
Session Chair: Graham Siddall, Tencor Instruments
- Revolution in E-Ray Optics
N. M. Ceglio (LLNL)
Precision Engineering/Oral/Abstract/1990 Annual
- Mechanics of Material Removal in Diamond Turning
Scott Blackley and R. O. Scattergood (N. C. State University)
Precision Engineering/Oral/Abstract/1990 Annual
- Application of Hydrostatic Bearings in Spindle Systems for High
Precision Machining
M. Weck and U. Bottger (Fraunhofer Institut)
Precision Engineering/Oral/Abstract/1990 Annual
- Molecular Dynamics Model of the Orthogonal Cutting Process
Irving Stowers and James Belak (LLNL)
Precision Engineering/Oral/Abstract/1990 Annual
Session VI
Wednesday, September 26, 10:00 - 12:00
Session Chair: Mark Gerchman, Rank Taylor Hobson
- Recent Developments in the Quality in Automation Project
A. Donmez, Ted Vorburger, F. Rudder, K. Yee and R. Gavin (NIST)
Precision Engineering/Oral/Abstract/1990 Annual
- Some Recent Developments in the Analysis and Interpretation of
Surface Topography
Paul Scott (Rank Taylor Hobson)
Precision Engineering/Oral/Abstract/1990 Annual
- Error Modeling and Correction of a Laser Tracker
John Patten, John Grant, Paul Tullar and Robert Hocken (UNC-Charlotte)
Precision Engineering/Oral/Abstract/1990 Annual
- Diamond Turning of Non-Rotationally Symmetric Surfaces
T. A. Dow (N. C. State University) and P. J. Falter (Westinghouse)
Precision Engineering/Oral/Abstract/1990 Annual
Session VII
Thursday, September 27, 8:00 - 9:45
Session Chair: Alexander Slocum, CUPE
- Precision Engineering in Mass Data Storage Devices (Invited Paper)
D. B. Bogy (Univesity of CA at Berkeley)
Precision Engineering/Oral/Abstract/1990 Annual
- Dynamics Analysis and Control of a Precision Slide with Coulomb
Friction and Stiction
Paul I. Ro and Roy S. Colby (N. C. State University)
Precision Engineering/Oral/Abstract/1990 Annual
- Computer-Controlled Off-Axis Optical Fabrication
Timothy Wilson (Eastman Kodak)
Precision Engineering/Oral/Abstract/1990 Annual
Session VIII
Thursday, September 27, 10:00 - 12:00
Session Chair: Robert Polvani, NIST
- The Specification of Glancing Incidence Mirrors in Terms of System
Performance
E. L. Church (USA ARDEC) and P. Z. Takacs (Brookhaven National Lab)
Precision Engineering/Oral/Abstract/1990 Annual
- Analytical Photon Scanning Tunneling Microscopy
Patrick J. Moyer, C. E. Johnson, M. A. Paesler (N. C. State University),
R. c. Reddick and R. J. Warmack, T. L. Ferrell (Oak Ridge National Lab)
Precision Engineering/Oral/Abstract/1990 Annual
- Comparison of Optical and Mechanical Measurements of Surface Finish
Thomas Lettieri, Aaron Kiely, Lin-Xiang Cao and Theodore Vorburger (NIST)
Precision Engineering/Oral/Abstract/1990 Annual
- Ultra Precision Stylus Profilometry for Large Optical Components
Peter B. Leadbeater, W. J. Willis-Moren, P. A. McKeown (Cranfield)
Precision Engineering/Oral/Abstract/1990 Annual
Session IX
Thursday, September 27, 1:30 - 3:15
Session Chair: Thorsten Bispink, Fraunhofer Institut
- Overview of the Advanced X-ray Astrophysics Facility (AXAF) (Invited
Paper)
Leon Van Speybroeck (Smithsonian Astrophysical Observatory)
Precision Engineering/Oral/Abstract/1990 Annual
- Scanning Tunneling Microscopy Bit-Making for Use in High Density
Memory Chip Applications
Jimmie A. Miller and Robert Hocken (UNC-Charlotte)
Precision Engineering/Oral/Abstract/1990 Annual
- Cutting and Surface Planing of Diamond Film by YAG Laser
Shinichi Tezuka, Naoto Ohtake and Masanori Yoshikawa (Tokyo Inst.)
Precision Engineering/Oral/Abstract/1990 Annual
- Optics Fabrication for a Multi-megajoule, Solid State Inertial
Confinement Fusion (ICF) Laser
J. S. Taylor and John E. Marion (LLNL)
Precision Engineering/Oral/Abstract/1990 Annual
Session X
Thursday, September 27, 3:45 - 5:30
Session Chair: Robert Donaldson, LLNL
- A Nanometer Digital Interferometric Control for a Stop-Start Grating
Ruling Engine
Robert Wiley, Semyon Zheleznyak, Jeffrey Olson, Erwin Loewen and John
Hoose (Milton Roy Co.)
Precision Engineering/Oral/Abstract/1990 Annual
- Extension of the 1-D Critical Depth of Cut Model for Brittle Materials
to 3-D Contour Grinding
Steven Fawcett and T. A. Dow (N. C. State University)
Precision Engineering/Oral/Abstract/1990 Annual
- Implementation of Open Loop Control Techniques for High Speed
Micropositioning in a Single Diamond Turning Process
Hakan Ozisik and R. F. Keltie (N. C. State University)
Precision Engineering/Oral/Abstract/1990 Annual
- Design of Centerless Grinding Machine for Ductile Mode Grinding
of Brittle Materials
J. Yoshioka (NUTR KK), M. Miyashita and A. Kanai (Ashikaga Inst. of
Tech.) M. Daito (Nissin Machine KK), F. Hashimoto (The Timken Research)
Precision Engineering/Oral/Abstract/1990 Annual
Poster Session
- Measuring the Spatial Frequency Response of an Optical Surface
Profiler
Joseph Bietry and R. Anthony Auriemma (Chapman Instruments)
Precision Engineering/Poster/Abstract/1990 Annual
- Coordinate Measuring Machine Sampling Techniques and Algorithms
Gregory Caskey, K. Chen, Y. Hari, D. Palanivelu, R. Wilson, J. Yang
and R. Hocken (UNC-Charlotte)
Precision Engineering/Poster/Abstract/1990 Annual
- The Cutting of Polygon Mirror with First Korean Diamond Flycutting
M/C
H. A. Choi, H. S. Yu, J. U. Jeon, H. D. Jeong and N. B. Yim (Korean
Institute of Science & Technology)
Precision Engineering/Poster/Abstract/1990 Annual
- Spatial Resolution Limits of an Optical Profiler
Katherine Creath (WYKO Corp.)
Precision Engineering/Poster/Abstract/1990 Annual
- Reducing Sub-Surface Damage in the Grinding of Glass
Doug Depiero and Thomas Bifano (Boston University)
Precision Engineering/Poster/Abstract/1990 Annual
- Surface/Tool Relationships in Diamond Turned Copper
Josephy Drescher and Thomas A. Dow (N. C. State University)
Precision Engineering/Poster/Abstract/1990 Annual
- Hysteresis in Piezoelectric Actuators: Implications for Precision
Servo Design
J. Duduch and Anthony E. Gee (Cranfield Institute of Technology)
Precision Engineering/Poster/Abstract/1990 Annual
- Nanometer Positioning Using Micro-Dynamics of Rolling Guide
Shigeru Futami, Akihiro Furutani and Shoichiro Yoshida (Research Development
Corp. of Japan)
Precision Engineering/Poster/Abstract/1990 Annual
- Circumferential and Inner Diameter Metrology of Advanced X-Ray
Aetrophysical Facility (AXAF) Optics
Thomas Gordon (Hughes Danbury Optical Systems)
Precision Engineering/Poster/Abstract/1990 Annual
- Ultra Precision Aspherical Lens Processing Machine
Keishi Kubo, H. Nagano, S. Dubota, S. Yochida, M. Takahashi, K. Matsumura,
S. Ueda (Matsushita Electric Industrial Co.)
Precision Engineering/Poster/Abstract/1990 Annual
- A Portable Non-Recirculating Temperature Enclosure
Dan Luttrell (Rank Taylor Hobson, Inc.)
Precision Engineering/Poster/Abstract/1990 Annual
- Absolute Laser Refractometer
Hans-Peter Meiser, D. Frolich, and . Meiser (Spindler & Hoyer)
Precision Engineering/Poster/Abstract/1990 Annual
- Fast Tool Servo Implementation for Diamond Turning
Michele Miller and Thomas A. Dow (N. C. State University)
Precision Engineering/Poster/Abstract/1990 Annual
- Micro Grinding at an Ultra-High Speed Region
Shouro Mochida, M. Takahashi and S. Ueda (Matsushita Electric Industrial
Co.)
Precision Engineering/Poster/Abstract/1990 Annual
- Application of a Novel Two Step Digital Control Algorithm for
Precision Actuation
Hakan Ozisik, Thomas G. Bifano and Thomas A. Dow (N. C. State University)
Precision Engineering/Poster/Abstract/1990 Annual
- Precision Engineering Aspects of the PATS Project
Richard Rhorer (LANL), Wayne Hobson and Jeff Jarosz (Moore Special Tool
Co.)
Precision Engineering/Poster/Abstract/1990 Annual
- Evaluation of Silicon Wafer Polishing Pads
Yamato Samitsu (Nippon Steel Corp.), Nobuo Yasunaga, Takahumi Yoshida,
Takashi Ohmoto and Sadamu Horie (NSCE Electron Corp.)
Precision Engineering/Poster/Abstract/1990 Annual
- Chip Formation in Single Point Diamond Turning
M. C. Shaw (AZ State Univ.), H. G. Shafer and M. Adler (Corning)
Precision Engineering/Poster/Abstract/1990 Annual
- Use of Lasers in Nanomaterial Synthesis
Peter Strutt (University of Connecticut)
Precision Engineering/Poster/Abstract/1990 Annual
- Study on the Polishing of Diamond by Metallic Plate
Hitoshi Tokura, Masanori Yoshikawa and Cheng-Feng Yang (Tokyo Institute
of Technology)
Precision Engineering/Poster/Abstract/1990 Annual
- Measurement and Compensation of Guideway Errors by a Laser Doppler
Displacement Meter
Charles Wang (Optodyne, Inc.)
Precision Engineering/Poster/Abstract/1990 Annual
- Stiffness Characteristics of Externally Pressurized Gas Bearings
Junming Wang, P. H. J. Schellekens and A. C H. van der Wolf (Eidenhover
University of Technology)
Precision Engineering/Poster/Abstract/1990 Annual
- Dynamic Simulations as a Design Tool for Precision Machine Tool
Installations
Scott A. Woodard and Gerald Hegarty (Fabreeka International, Inc.)
Precision Engineering/Poster/Abstract/1990 Annual
- Newly Developed Electron Beam Lithography System for Fabricating
High Accuracy Concentric Circle Patterns with Large Diameter
Yuji Yamazaki, K. Nakamura, T. Sasaoka, M. Mitsui, H. Murao, T. Maeda,
H. Goto, S. Ogata and T. Yamashita (Omron Corp.)
Precision Engineering/Poster/Abstract/1990 Annual
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