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2009 Annual Meeting Oral Presentations

Table of Contents

Session I - Commodization of Precision - Challenges and Opportunities

Session II - Design of Precision Machines and Instruments I

Session III - Dimensional Metrology

Session IV - Applications of Precision Engineering in Manufacturing I

Session V - Optics and Interferometry

Session VI - Grinding, Polishing and Lapping

Session VII - Novel Technologies

Session VIII - Design of Precision Machines and Instruments II

Session IX - Applications of Precision Engineering in Manufacturing II

Session I
Commodization of Precision - Challenges and Opportunities
Tuesday, October 6, 2009, 8:30 am - 10:00 am
Session Chair: Pradeep K. Subrahmanyan (RAPT Industries, Inc.) and Thomas A. Dow (North Carolina State University)

  1. Advances in Areal Density for Disk Drives (Invited Paper)
    New, R. (Hitachi Global Storage Technologies)
  2. A Short History of Diamond Machining (Invited Paper)
    Marsilius, N. M. (Moore Tool Company, Inc.)
  4. Nanotechnology (Invited Paper)
    Teague, C. (National Nanotechnology Coordination Office)

Session II
Design of Precision Machines and Instruments I
Tuesday, October 6, 2009, 10:30 am - 12:00 pm
Session Chair: Mark A. Stocker (Cranfield Precision) and Eric S. Buice (Delft University of Technology)

  1. Development of a Novel, Ultra-precision Spindle
    Bauza, M. B.; Woody, S. C. (InsituTec, Inc.); and Smith, S. T. (University of North Carolina at
    Charlotte)
  2. Design of a Six Degree of Freedom Nanopositioner for Use in Massively Parallel Probe-based Nanomanufacturing
    DiBiasio, C. M.; Culpepper, M. L. (Massachusetts Institute of Technology)
  3. Quick-repeat Coupling: A Repeatable Work-holding Fixture for Ultra-precision Turning and Grinding Machines
    Hale, L. C.; Martin, G. L.; Chung, C. A.(Innovative Machine Solutions, LLC)
  4. Prototype of a Planar Guided Milling Machine for High Precision Applications
    Jaumann, S.; Weikert, S.; Wegener, K (inspire AG)
  5. Elastic Element Showing Low Stiffness Loss at Large Deflection
    Brouwer, D. M.; Meijaard, J. P.; Jonker, J. B. (University of Twente)

Session III
Dimensional Metrology
Wednesday, October 7, 2009, 8:30 am - 10:00 am
Session Chair: Eric R. Marsh (The Pennsylvania State University) and Kate M. Medicus (Mitutoyo Research Center Europe)

  1. Volumetric Error Mapping Techniques for the NIST M48 Coordinate Measuring Machine
    Stoup, J. R.; Faust, B. S. (National Institute of Standards and Technology)
  2. Realization of Isara 400: A Large Measurement Volume Ultra-precision CMM
    Donker, R. L.; Widdershoven, I.; Brouns, D.; Spaan, H. A. M. (IBS Precision Engineering BV)
  3. The Measurement of Dimensional Metrology
    Smythe, R. A. (R. A. Smythe Management Consultants)
  4. The Spherical Profilometer Polaris 3D
    Sohn, A.; Garrard, K. P.; Dow, T. A. (North Carolina State University)
  5. Full Five Degree-of-freedom Error Characterization of Ultra-precision Spindles Using the
    Multiprobe Method
    Knapp, B. R.; Arneson, D. A. (Professional Instruments Company, Inc.); and Marsh, E. R.; Sommer,
    E. J. (The Pennsylvania State University)

Session IV
Applications of Precision Engineering in Manufacturing I
Wednesday, October 7, 2009, 10:30 am - 12:00 pm
Session Chair: Jeffrey W. Roblee (AMETEK-Precitech, Inc.) and Bradley H. Jared (Sandia National Laboratories)

  1. Design of a Precision Transfer Line for Dip-Pen Nanolithography
    Slocum Jr., A. H.; Culpepper, M. L (Massachusetts Institute of Technology)
  2. Manufacturing of Freeforms with Well Defined Reference Structures
    Gebhardt, A.; Scheiding, S.; Risse, S.; Steinkopf, R. (Fraunhofer Institute for Applied Optics and Precision Engineering - IOF)
  3. MEMS Kinematic Clamp for Repeatable Precision Alignment
    Chan, M. W.-J.; McCoy, C. D.; Wodin-Schwartz, S.; Warren, C. G.; Vijayaraghavan, A. (University of
    California - Berkeley)
  4. Ultra-planar Electrostatic Chucks Based on CTE Materials for Lithography and Metrology
    Risse, S.; Kalkowski, G.; Peschel, T.; Harnisch, G.; Müller, S.; Eberhardt, R. (Fraunhofer Institute for Applied Optics and Precision Engineering IOF)

Session V
Optics and Interferometry
Wednesday, October 7, 2009, 1:30 pm - 3:00 pm
Session Chair: Vivek G. Badami (Zygo Corporation) and Jonathan D. Ellis (Delft University of Technology)

  1. Compact, Multi-channel, Fiber-based Absolute Distance Measuring Interferometer System
    Badami, V. G.; Deck, L. L.; Fletcher, C. D.; Selberg, L. A.; Winkowski, D. O.; Egashira, Y.; Redlitz, K. (Zygo Corporation)
  2. A Study of Modulated Interference Laser Encoder – New Approach for a High Resolution and High Stability Position Measurement System
    Makinouchi, S.; Imai, T.; Watanabe, A. (Nikon Corporation); Ohara, T. (Nanowave Inc.); and Takahashi, M.; Wakui, S. (Tokyo University of Agriculture and Technology)
  4. Real-time Periodic Error Compensation with Low/Zero Velocity Parameter Updates
    Schluchter, C.; Chu, D. C. (Agilent Technologies, Inc.); and Ganguly, V.; Schmitz, T. L. (University of Florida)
  5. Compact, Nanometer-resolution, Fiber-optic Encoder
    Tobiason, J. D.; Zwilling, A. M.; Emtman, Casey E. (Micro Encoder, Inc.); Takahashi, T.; Kawada, H. (Mitutoyo Corporation)

Session VI
Grinding, Polishing and Lapping
Wednesday, October 7, 2009, 5:00 pm - 6:30 pm
Session Chair: Byron R. Knapp (Professional Instruments Company, Inc.) and Michele H. Miller (Michigan Technological University)

  1. Testing Quantum Dots as a Means of Assessing Subsurface Damage in Polished Glass
    Williams, W. B.; Mullany, B. A.; Moyer, P. J.; Parker, W. C. (University of North Carolina at Charlotte);
    and Randles, M. H. (Northrop Grumman Synoptics)
  2. Creating Extreme Subsurface Integrity by Laser-induced Material Self-Organization
    Yan, J.; Muto, S.; Kuriyagawa, T. (Tohoku University)
  3. Cross Crown Nanogrinding of a Chiplet for a Slider with an Integrated Microactuator (SLIM)
    Gatzen, H. H.; Cvetkovic, S. (Leibniz Universitaet Hannover)
  4. Flexible Polishing with Bounded Grains for Complex Ceramic Endoprostheses
    Denkena, B.; de Leon, L.; van der Meer, M.; Turger, A. (University of Hannover)

Session VII
Novel Technologies
Thursday, October 8, 2009, 8:30 am - 10:00 am
Session Chair: Henny A. M. Spaan (IBS Precision Engineering BV) and Stephen J. Ludwick (Aerotech, Inc.)

  1. Dynamic Design for Improved Control
    van Eijk, J. (Technical University of Delft)
  2. MR Fluid Activated Spherical Joint for Precision Orientation Control
    Telleria, M. J.; Panas, R.; Culpepper, M. L. (Massachusetts Institute of Technology)
  3. Magnetic Levitation for Precision Motion with Only Two Off-the-shelf Linear Motors and a Novel Passive Magnetic Bearing Design: Modeling and Control Challenges
    Nguyen, H.T.; Steinbuch, M. (Eindhoven University of Technology); and Angelis, G. Z.; Molenaar, E.; Sahin Nomaler, F.; Stoutjesdijk, H. (Philips Applied Technologies)
  5. Fabrication of Pt/C Multilayer-Coated Thin Foil Mirrors for Hard X-Ray Telescope Loaded in ASTRO-H Satellite
    Namba, Y.; Cao, G.; Shinozaki, A. (Chubu University); and Kunieda, H.; Ogasaka, Y.; Yamashita, K. (Nagoya University)

Session VIII
Design of Precision Machines and Instruments II
Thursday, October 8, 2009, 10:30 am - 12:00 pm
Session Chair: Keith Carlisle (Lawrence Livermore National Laboratory) and Deming Shu (Argonne National Laboratory)

  1. Synthesis of Multi-Axis Serial Flexure Systems
    Hopkins, J. B.; Culpepper, M. L. (Massachusetts Institute of Technology)
  2. Noise Reduction and Disturbance Rejection at the Sub-Nanometer Level
    Overcash, J. L.; Hocken, R. J.; Stroup Jr., C. G. (University of North Carolina at Charlotte)
  4. Calculating Thermal Location and Component Errors on Machine Tools
    Mayr, J. (Institute of Machine Tools and Manufacturing (IWF)); and Ess, M.; Weikert, S.; Wegener, K. (inspire AG)

Session IX
Applications of Precision Engineering in Manufacturing II
Thursday, October 8, 2009, 1:30 pm - 3:00 pm
Session Chair: David D. Gill (Sandia National Laboratories) and Luis A. Aguirre (3M Company)

  1. Optical and Fiducial Fabrication with a Fast Long Range Actuator
    Chen, Q.; Dow, T. A.; Garrard, K. P.; Sohn, A. (North Carolina State University)
  3. Machine Tool Performance Requirements Associated With Modulated Tool-Path Chip Breaking
    Barkman, W. E.; Babelay, E. F. (Applied Technologies); Smith, K. S.; Woody, B. A.; Tursky, D. A.; Assaid, T.S. (University of North Carolina at Charlotte); and Adams, D. J. (Moore Nanotechnology Systems)
  4. Influence of Machining Parameters and Tool Geometry on the Quality of Information Carrying Microstructures
    Denkena, B.; de Leon, L.; Steinbrenner, I. (Leibniz Universität Hannover)
  5. Metallographic Orientation Effects on Burr Formation in Machining Oxygen-free Copper Using Single Crystalline Diamond Micro-tools
    Ding, X.; Lim, G. C.; Liu, Y. C; Shaw, K. C.; Zheng, H. Y. (Singapore Institute of Manufacturing Technology (SIMTech)); and Butler, D. L. (Nanyang Technological University)
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