ASPE 2008 Spring Topical Meeting

ASPE 2008 Spring Topical Meeting Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment April 7 & 8, 2008 Berkeley, California Lawrence Berkeley National Laboratory Meeting Co-Chairmen: Technical Committee: John S. Taylor Lawrence Livermore National Laboratory Chris J. Evans Zygo Corporation Jan van Eijk Delft University of Technology Pete Fitsos Lawrence Livermore National Lab.   Stephen J. Ludwick Aerotech, Inc.   Robert-Han Munnig Schmidt Delft Univ. of Technology   Senajith B. Rekawa Lawrence Berkeley National Lab.   Marcel J. M. Renkens Philips Applied Technologies   Jeffrey W. Roblee AMETEK - Precitech, Inc.   David L. Trumper Massachusetts Institute of Technology   Marek Zywno KLA-Tencor General Information The objective of this meeting is to provide an informal atmosphere of technical exchange. The conference will be held at the Building 66 Auditorium on the campus of the Lawrence Berkeley National Laboratory in Berkeley, California. Berkeley Lab is a multidisciplinary national laboratory located on a hillside directly above the campus of the University of California at Berkeley. The site encompasses 183 acres which overlook both the campus and the San Francisco Bay. The address is 1 Cyclotron Road, Berkeley CA 94720. To make the Lab easily accessible, the Lab has its own shuttle service that takes people around the site and to downtown Berkeley and the BART station there. Parking spaces are difficult to find at the Lab and anyone wishing to arrive by car will need to prearrange for a parking permit. Please contact the ASPE office for further information by telephone: (919) 839-8444 or by email: erika_layne@aspe.net. Additional driving and transportation information is also available on the LBNL website at: http://www.lbl.gov/Workplace/Transportation.html Meeting Registration LAWRENCE BERKELEY NATIONAL LABORATORY: In accordance with security guidelines for both international and US citizens, all conference participants will have to complete all the required fields (as indicated with an asterisk) of the Conference Registration Form. In addition, all conference registrations must be received at ASPE headquarters on or before April 1, 2008 in order to be processed by Lawrence Berkeley National Lab. US Citizens Must provide Full Name and statement of citizenship (checked box). Non US Citizens (International Visitors) and Green Card Holders Must provide Full Name, Country of Citizenship, and Country of Birth. NOTE: Citizens of, or individuals born in certain sensitive countries as identified by the U.S. State Department, will regrettably not be able to participate in the Spring Topical Meeting due to the short conference registration period and the fact that the security clearance process normally requires four to six months. In the unlikely event that this regulation should apply, the participant will be notified immediately by ASPE headquarters and all registration funds will be returned immediately, if applicable. Print Meeting Registration Form Here (PDF)   Print Meeting Program Here (PDF)   Hotel Accommodations If you are planning to attend the ASPE Spring Topical meeting, we urge you to make your hotel reservations right away. We have reserved a room block at the Durant Hotel, which is within easy walking distance of the Berkeley Lab shuttle bus. The room rates are US$ 133.00 per night for Queen size, US$ 143.00 for King size, and US$ 163.00 for Double (two beds), and include continental breakfast. In addition there is a 12% occupancy tax. The group rate cutoff date is March 14, 2008. After that date the Hotel cannot guarantee availability and space is limited, so please make your reservation before the cut-off date. Guaranteed reservations can be canceled up to 24 hours before the day of arrival to avoid cancellation penalties. You can use the following address or telephone numbers for your reservations (the Hotel does not offer on-line reservation service): Hotel Durant 2600 Durant Avenue Berkeley, CA 94704 Toll Free: (800) 238-7268 Telephone: (510) 845-8981 Fax: (510) 486-8336 Email: durantreservations@jdvhospitaligy.com Website: http://www.jdvhotels.com/durant Please use one of the following identification codes to receive the group rates: "ASPE Conference" and/or booking code "J70000" As we expect excellent participation, advance registration and early room booking are strongly advised. Hotel check-in time after 3:00 p.m. (15:00 hrs). Check-out time before 12:00 p.m. (12:00 hrs). Children 17 years and under stay free with an accompanied adult. Late departure fee is available at half day charge if before 6:00 p.m. (18:00 hrs). After 6:00 p.m. it will be a full day charge. Rollaway bed is available at a charge of USD 10 per day. Crib is complimentary. CAR PARKING at the Hotel: Self parking is available at a charge of US$ 16.00 per night. No valet parking available. NOTE: Since parking space is somewhat limited, we suggest that you check with the Hotel front desk for their latest parking rules. Parking & Transportation PARKING AT LAWRENCE BERKELEY LAB The ASPE Spring Topical Meeting will take place in the Building 66 Auditorium on the Campus of the Lawrence Berkeley National Laboratory. Conference participants who are driving to LBNL and are parking their cars on-site, will have to check in at the Strawberry Gate to be cleared for admittance and to receive their parking permit. Please click here to obtain a (pdf) of the Directions to LBNL Parking. BLUE SHUTTLE BUS You can pick up the Blue Shuttle bus at many locations. Once on board please show the shuttle permit to the driver. Shuttle permits are being emailed from LBNL during the week of March 31 to April 5. Please be on the lookout for them! You will need the pass to get around and in and out of the Campus. You can obtain a shuttle bus schedule by visiting http://www.lbl.gov/Workplace/Facilities/Support/Busses/off-site.html You can also get additional visitor information on the LBL website at http://www.lbl.gov/Workplace/Transportation.html Because of the limited parking available on LBNL Campus site, visitors are encouraged to use public and other transportation options whenever available. We strongly suggest that you use the BLUE Laboratory Shuttle Bus. Conference participants wishing to use the shuttle bus service will need to obtain an official email stating that they are allowed to ride the bus free of charge (show email to the bus driver). If you need such an email (we highly recommend it) please contact ASPE headquarters. The Laboratory provides onsite shuttle service (see the map and schedule of the on-site shuttle service) for its 130-acre site in the Berkeley Hills as well as off-site service from the Lab to nearby areas. On weekdays, the Lab provides free off-site shuttle service for visitors and employees alike. The principal off-site shuttle operates from 6:30 a.m. to 6:50 p.m. Buses run every ten minutes up until 5:50 p.m. when they run at 20 minute intervals. For details, see the map and schedule of the off-site shuttle service. The off-site shuttle service starts at the main Lab shuttle bus stop at Building 65, and travels along the perimeter of the University of California at Berkeley campus to the Berkeley BART station, and back to the Lab. Another off-site shuttle provides express service to and from the Rockridge BART station at select commute hours. You can be picked up by the shuttle at any of the designated stops, where you'll find a sign indicating a Berkeley Lab bus stop. A useful stop for many people is the one in front of the Berkeley BART station, which is located on Center Street at the northwest corner of Shattuck Avenue and Center Street. Just get onto the shuttle like everyone else: If the driver asks you for identification, just say that you are a guest of a Lab activity and show them the special email. Once at the Lab, the shuttle stops at the main Lab shuttle bus stop at Building 65, where you can catch an onsite bus to anywhere at the Lab. If it is essential for you to bring a car and park, a special parking permit will have to be arranged. Please contact the ASPE office with your request. NOTE: We highly recommend that you pre-register for the conference and make the necessary arrangements for shuttle bus or parking. If for some reason that is impossible, on the date of the conference you will have to check in at the Security Office of the Main Gate, inform the attending personnel of your intention to participate in the ASPE Meeting and after appropriate security checks, you will be escorted to the conference site. Transportation to the Hotel: From San Francisco International Airport: BayPorter Express Private Airport Shuttle: Bay Area Toll Free: (877) 467-1800 or (415) 467-1800 outside the Bay Area. Online reservations and boarding instructions: http://www.bayporter.com. The fare from/to San Francisco International Airport is $29.00 each way, and $25.00 to/from Oakland International Airport. Taxi: Cost of taxicab rides is approximately $60.00 one-way as it includes a bridge toll fee. BART (Bay Area Rapid Transit): Available from the airport to Downtown Berkeley for US$ 5.90 (one way). From there you will need to take a taxi to the Hotel at an approximate cost of US$ 5.00. Web site: http://www.bart.gov/index.asp Driving Directions to Hotel: From Oakland International Airport: Follow Hegenberger Road to highway 880 North. As you approach downtown Oakland, follow the signs to highway 80 East, towards Sacramento. Exit on University Avenue. Take University up to Shattuck Avenue and take a right on Shattuck, then a left on Durant Ave. Drive up Durant 6 blocks. We are located on the right hand side, on the corner of Bowditch and Durant. From San Francisco International Airport: Take highway 101 North towards San Francisco. Once you are in San Francisco, follow the signs to the Oakland/San Francisco Bay Bridge (80 East). Cross the Bridge and continue on 80 East towards Sacramento. Exit on University Avenue. Take University up to Shattuck Avenue and take a right on Shattuck, then a left on Durant Ave. Drive up Durant 6 blocks. We are located on the right hand side, on the corner of Bowditch and Durant. For additional driving instructions from Interstate 5 (Los Angeles), from Walnut Creek/ Highway 24, from San Jose, or from Sacramento please check the Hotel Durant website at http://www.jdvhotels.com/durant. For additional information please contact: American Society for Precision Engineering 301 Glenwood Ave., Suite 205, Raleigh, NC 27603 P.O. Box 10826, Raleigh, NC 27605-0826 Phone (919) 839-8444, or Fax (919) 839-8039 www.aspe.net

Call for Papers (pdf) General Info. Meeting Registration Meeting Program (pdf) Hotel Accommodations Parking & Transportation Templates & Guidelines