Displacement Measuring Interferometry System Design
Stephen Mielke and Mike Holmes

This tutorial is intended for engineers designing precision systems that will use displacement measuring interferometry. The tutorial covers system requirements definition and system design. Particular attention will be given to application-specific DMI measurement uncertainty.

Sources of DMI measurement uncertainty include beam mixing, wavelength instability, index instability, thermal instability, ghost beams, wavelength compensation uncertainty, and beam shearing of distorted wavefronts. The procedure defined by the ISO Guide to the Expression of Uncertainty in Measurement (GUM) is used to evaluate the overall DMI system measurement uncertainty. The presentation is at a system engineering level and assumes that attendees understand the basics of displacement measuring interferometry as taught in the tutorial
"Introduction to Displacement Measuring Interferometry."