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| 2006 Tutorials |
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| Sunday, October 15, 2006 1:30 p.m. to 5:50 p.m. Displacement Measuring Interferometry (DMI)
Systems The tutorial begins with a review of basic concepts including interferometry, system resolution, measurement limitations and the basic components of a heterodyne displacement measuring interferometer system. Discussion of the instrumentation concentrates on displacement measuring interferometer (DMI) applications, including various optical configurations that may be used for static and/or dynamic measurements. Finally we shift our focus to the more practical matter of application-specific DMI measurement uncertainty. Sources of DMI measurement uncertainty include beam mixing, wavelength instability, index instability, thermal instability, ghost beams, wavelength compensation uncertainty, and beam shearing of distorted wavefronts. The procedure defined by the ISO Guide to the Expression of Uncertainty in Measurement (GUM) is used to evaluate the overall DMI system measurement uncertainty. The presentation is at a system engineering level and assumes that attendees have some understanding of opto-mechanical systems and of basic statistics.
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