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| 2006 Tutorials |
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| Sunday, October 15, 2006 1:30 p.m. to 5:50 p.m. Fine Motion Mechanisms Generation and transmission of mechanical motions are well-served at ranges of millimeters with resolutions in 10s of µm. However, when the placement resolution required is ~1µm or less, activities tend to become applications’-specialized with distinct ‘local’ cultures. This tutorial looks into fundamentals and to cross-referencing design-techniques for potential use in alternative sectors. As well as general ultra-precision machining technology, applications include optics-manufacture, surface measurement, IT device applications (such as scanning, disc storage and fiber optics), spectroscopy, instrumental astronomy, microscopy (optical and scanning probe), horology and seismometry The design, function, application and manufacture of a device, instrument or a machine embrace principles which can be used to identify commonality with other areas. Examples of motion requirements will be overviewed from defining requirements and kinematic considerations. In traditional motion-elements, recurrent penalties of friction and wear will be examined and observations offered to mitigate their effects on fine motion generation and control plus alternatives. Techniques for improving the performance of prismatic planar guide-ways will be considered including load-offset, fluid or flexure support and multi-element 'elastic averaging'. Rectilinear motion, its reduction and rotary conversion will be examined from the micro-scale viewpoint. Examples of spring-strip levers, electrical and piezoelectric actuation, steppers and hydraulic actuators and motions will be considered. Complementary dual fine motion and long range actuators will be considered using examples including tool servos, wafer-steppers and rotating tilt-controlled face-plates. A formal approach to multi-degree-of-freedom effects in fine motion mechanisms will be considered which enables potential for 'parasitic' motion to be identified and its effects considered in the context of the application/function. This tutorial is designed to offer insights for mechanical designers, instrument engineers and those working at the precision mechanical/electronic interface. It is aimed at applications-engineers and designers involved with fine motions and also at recent entrants to the field.
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