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| 2006 Tutorials |
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| Sunday, October 15, 2006 8:00 a.m. to 12:00 p.m. Interferometric Form Metrology for Precision
Machined Surfaces Interferometric form metrology is a powerful tool for form measurement of precision-machined surfaces. Precision surfaces find use in application areas that range from optics to automotive components. This tutorial assumes no background in optics and is intended to provide an overview of techniques based on interferometry at a very basic level. The target audience for this tutorial is intended to be practicing engineers from other disciplines interested in learning about the application of interferometry to the measurement of form. Only knowledge of basic physics will be assumed. The tutorial includes the basics of interferometry starting with the phenomenon of interference. The first part of the tutorial will address the application of normal incidence interferometry to the metrology of optical quality surfaces, including the basic principles behind the measurement of aspheres. Form metrology of parts produced by more traditional metalworking processes such as grinding, lapping, etc., using grazing incidence interferometry will also be discussed. The basic principles of common interferometers will be discussed. Applications that will be discussed include the measurement of flats, spheres, aspheres and cylindrical surfaces.
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