2006 Technical Sessions Short Abstracts

2006 Technical Sessions Short Abstracts

Table of Contents

Optics & Interferometry * Fabrication * Thermal Considerations * Metrology I * Metrology II * Machining * Nanotechnology * Design

Session I
Optics & Interferometry
Tuesday, October 17, 2006, 8:30 AM - 10:00 AM
Session Chair: Senajith B. Rekawa (Lawrence Berkeley National Laboratory) and Allen Y. Yi (The Ohio State University)

Precision Interferometric Metrology (Invited Paper)
Evans, C. J. (Zygo Corporation)
Phase-Shifting Diffraction Interferometer for Inspecting NIF Ignition-Target Shells
Montesanti, R. C.; Johnson, M. A.; Mapoles, E. R.; Atkinson, D. P.; Hughes, J. D.; Reynolds, J.L.
(Lawrence Livermore National Laboratory
A 1 m Swing-Arm Profilometer for Large Telescope Mirror Elements
King, C. W.; Callender, M.; Efstathiou, A.; Gee, A. E. (University College, London); Walker, D.
(University College, London / Zeeko Ltd.); and Lewis, A. J.; Oldfield, S.; Steel, R. (UK National
Physical Laboratory
Thin Film Extraction from Scanning White Light interferometry
Mansfield, D. I. (Taylor Hobson, Ltd.)

Session II
Fabrication
Tuesday, October 17, 2006, 10:30 AM - 12:00 PM
Session Chair: Michele H. Miller (Michigan Technological University) and Bradley H.
Jared (3M Precision Optics)

Reactive Atom Plasma (RAP) Processing of Optical Surfaces
Subrahmanyan, P. K.; Gardopee, G.; Chang, A. (RAPT Industries, Inc.)
Two-dimensional encoder with picometer resolution using multi-tunneling-probes scanning
tunneling microscope and regular crystalline surface
Aketagawa, M.; Honda, H.; Ishige, M.; Chaikool, P. (Nagaoka University of Technology)
Manufacturing the Dragonfly Eye Multi-layer, Compound Optic Array
Gill, D. D.; Sweatt, W.; Claudet, A. A.; Adams, D. P.; Vasile, M. J.; Hodges, V. C. (Sandia National Laboratories)
Dynamic Coupling Force Compensation for Direct Drives in Machine Tools
Zirn, O.; Hoos, A. (FH Giessen-Friedberg); and Hiller, B. (Huebner GmbH, Berlin)

Session III
Thermal Considerations
Wednesday, October 18, 2006, 8:30 AM - 10:00 AM
Session Chair: Hans-Jochen Trost (MicroFab Technologies, Inc.) and Don L. Martin
(Lion Precision)

Design, Construction and Operation of the TWIST Detector (Invited Paper)
Henderson, R. S. (TRIUMF, Canada)
In-situ Calibration of Temperature Compensation Systems Using Differential Length
Measurements
Salsbury, J. G.; Inloes, M. (Mitutoyo America Corporation)
High-stability Temperature Control for Laser Interferometer Space Antenna (LISA)
Higuchi, S.; DeBra, D. B.; Lauben, D. (Stanford University)
Sub-millidegree-stability Air Thermal Control for a Large-volume Lithography Enclosure
Zhao, Y.; Trumper, D. L.; Schattenburg, M. L. (Massachusetts Institute of Technology)

Session IV
Metrology I
Wednesday, October 18, 2006, 10:30 AM - 12:00 PM
Session Chair: Thomas A. Dow (North Carolina State University) and Keith Carlisle (Lawrence Livermore National Laboratory)

An Overview of the Latest Metrology Advances at NPL
Leach, Richard (National Physical Laboratory)
Moment of Inertia Measurement Using a Five-Wire Torsion Pendulum and Optical Sensing
Swank, A. J.; Hardham, C. T.; Sun, K.-X.; .DeBra, D. B. (Stanford University)
Self-calibration for Rotary Encoders Mounted on Air-bearing Spindles
Lu, X. (The University of British Columbia); and Trumper, D. L. (Massachusetts Institute of
Technology)
Rapid High Resolution Absolute 2-D Encoding by Digital Imaging of a Mathematically
Generated Three-tone Target
Chu, D.; Trujillo, H.; Whitney, E.; Young, J. (Agilent Technologies, Inc.)

Session V
Metrology II
Wednesday, October 18, 2006, 3:30 PM - 5:00 PM
Session Chair: Byron R. Knapp (Olympic Precision, Inc.) and Richard C. Montesanti
(Lawrence Livermore National Laboratory)

Utraprecision Microscale Hole Scanning Metrology
Bauza, M. B.; Woody, S. C. (InsituTec, Inc.); and Smith, S. T.; Hocken, Ro J. (University of North Carolina at Charlotte)
Ring Gauge for Evaluation of CMM Dynamics
Garrard, K. P.; Dow, T. A.; Folkert, K. F. (North Carolina State University)
Speckle Correlation Method for 3D-Deflection Measurement of the Tactile-Optical Microprobe
Wissmann, M.; Schwenke, H. I.; Neuschaefer-Rube, U. (Physikalisch-Technische Bundesanstalt
(PTB))
Enhanced Capabilities of the NIST Fiber Probe for Micro Feature Metrology
Muralikrishnan, B.; Stone Jr., J. A.; Stoup, J. R. (National Institute of Standards and Technology)

Session VI
Machining
Thursday, October 19, 2006, 8:30 AM - 10:00 AM
Session Chair: Vivek G. Badami (Zygo Corporation) and Stefan Rakuff (GE Global
Research)

Tunable, Ultrasonic, Vibration Assisted Diamond Turning
Overcash, J. L.; Cuttino, J. F. (University of North Carolina-Charlotte)
Modeling of Vibration in Single-Point Diamond Turning
Sohn, A.; Dow, T. A. (North Carolina State University)
Optimizing Machining Processes for Precision: An Example Using Calculated Cutting Forces
Rhorer, R. L. (National Institute of Standards and Technology)
A Comparative Study of Part Error Contributors in High-speed Machining
Canning, Jacqueline Suzanne; University of Florida; Zapata, Raul Enrique; University of Florida;
Ziegert, John C.; University of Florida; Schmitz, Tony L.; University of Florida

Session VII
Nanotechnology
Thursday, October 19, 2006, 10:30 AM - 12:00 PM
Session Chair: Alex Sohn (North Carolina State University) and Anthony E. Gee
(University College, London)

Characterization of Nano-structured Materials Using FIB and STEM Techniques (Invited Paper)
Jarausch, K. (Hitachi High Technologies America)
A Mechanism for Creating Variable Nanometer Gaps
Ma, H.; Slocum, A. H. (Massachusetts Institute of Technology
Optical Near-field Directed Patterning of Submicron-sized Particles
Morii, H.; Ooi, T.; Tsuchiya, K.; Hamaguchi, T.; Nakao, M. (The University of Tokyo)
Development of a Nano-stereolithography System Using Evanescent Light for Submicron
Fabrication
Kajihara, Y.; Takeuchi, T.; Takahashi, S.; Takamasu, K. (The University of Tokyo)

Session VIII
Design
Thursday, October 19, 2006, 1:30 PM - 3:00 PM
Session Chair: Pradeep K. Subrahmanyan (RAPT Industries, Inc.) and Mark A. Stocker
(Corning Incorporated)

Design and Modeling of a Precision 6 Degrees-of-freedom MEMS-based Parallel Kinematic
TEM Sample Manipulator
Brouwer, D. (University of Twente)
Moving-magnet Planar Actuator with Integrated Active Magnetic Bearing
Jansen, J. W.; van Lierop, C. M. M.; Lomonova, E. A.; Vandenput, A. J. A. (Eindhoven University of Technology)
Design of a Robot-based Detector Manipulator for a Hard X-ray Nanoprobe Instrument System*
Shu, D.; Maser, J.; Holt, M.; Preissner, C.; Lai, B.; Vogt, S.; Winarski, R.; Stephenson, G. B. (Argonne National Laboratory)
Seven-axis Tester with Servo-controlled Fly-height for Magnetic Recording Metrology
Crawford, T. M. (University of South Carolina); van de Veerdonk, R. J. M.; Bedillion, M. D.; Koelmans,W. ; Langzettel, A. K. (Seagate Research); O'Connor, B. P.; Novotnak, R. (Aerotech, Inc.); and Lane, B. (Key Technologies, Inc.)

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