ASPE 2005 Annual Meeting

ASPE 20th Annual Meeting Sunday - Friday, October 9 to 14, 2005 Marriott Norfolk Waterside Hotel and Norfolk Convention Center Norfolk, Virginia Meeting Chair: Vivek G. Badami Corning Tropel Corporation Technical Topic Areas: Applications of Precision Engineering in Manufacturing, Precision Fabrication and Assembly, Design of Precision Machines and Instruments, Control of Precision Machines and Processes, Machine Tool Metrology, Dimensional Metrology, Ultraprecision Machining, Grinding, Polishing, and Lapping, Design and Fabrication of Structured Surfaces, Micro-Electromechanical Devices, Nanotechnology, Optics, Optical Metrology and Interferometry, Scanning Probe Microscopy, Surface Metrology, Novel Equipment and Processes, Measurement Uncertainty and Biomedical Engineering. The 2005 American Society for Precision Engineering Annual Meeting, held at the Marriott Norfolk Waterside Hotel and Convention Center, will provide a forum for presentation and discussion of the latest technical information and achievements in precision engineering. The meeting will introduce new concepts, processes, equipment, and products while highlighting recent advances in precision measurement, design, control, and fabrication. The program includes a series of oral presentations and poster paper presentations, tutorials on precision engineering topics, exhibits displaying the state-of-the-art in precision engineering products and research, a commercial session for industrial presentations, an open forum, social events, and tours of local precision engineering facilities Keynote Speaker Timothy A. Brunner Monday, October 10, 6:30 p.m. “Lithography for Building Chips in the 21st Century” Current lithography exposure tools are miracles of precision engineering, where wafers are moved at speeds of hundreds of mm/sec with positional control in the nm range. They are the heart of modern chip-building processes, and must confront many difficult challenges. Not only must the lithographic process resolve the minimum patterns, but the control of critical dimensions must be maintained despite the inescapable variations of focus and exposure dose across the wafer. Tight overlay error must be maintained, and exquisitely complex patterns must be printed with high yield. Finally, the overall cost of the process must be acceptable, a requirement strongly linked to the throughput of the exposure tool. These considerations will illuminate the challenges and opportunities for future lithographic methods. In particular, water immersion lithography is emerging as a genuine manufacturing method. Timothy A. Brunner has been working in the area of optical lithography since 1981, with particular interests in advanced image formation, simulation, process control, metrology techniques and interdisciplinary aspects of lithography. He received his B.A. from Carleton College in 1975 and his doctorate from MIT in 1980, both in physics. He then worked on the measurement of lithographic tool performance at Perkin-Elmer Corp and on amorphous silicon TFT processes at Xerox PARC. In 1988, he joined the research staff of IBM, and currently works in the Advanced Lithography Dept. at the IBM Semiconductor Research and Development Center(SRDC). Dr. Brunner is a member of SPIE, IEEE and the Optical Society of America. He served as the executive chair of the 1997 and 1998 SPIE Microlithography Symposia, and was named an SPIE Fellow in 2003. He has published extensively, and holds roughly 20 patents in the area of optical lithography. Meeting Registration On-site registration will begin on Saturday afternoon, October 8, from 4:00 - 7:00 p.m. and continue each day from 7:00 a.m. to 6:00 p.m. We strongly encourage early registration, however, to take advantage of the “early bird” rate, and to avoid delays during the conference. ASPE is now accepting registration forms (PDF) and the early registration deadline is September 7, 2005; after that date, a higher conference fee will be charged. U.S. participants can pay by company or personal check, or by credit card. Overseas participants may pay by credit card (we accept both MasterCard and VISA) or with U.S. dollars, traveler's checks, by draft on a U.S. bank, or with an international money order. If payment is made by transfer from a foreign bank, please include a copy of the transfer order. Checks should be made payable to ASPE (American Society for Precision Engineering). ASPE policy requires that all attendees including members, non-members, authors, and session chairpersons pay the appropriate registration fees. The registration fee includes technical sessions, refreshment breaks, lunches, reception, the dinner, hospitality hours and admission to the exhibits. In addition, all full-week participants receive a copy of the Conference Proceedings on CD ROM, as well as a complimentary year 2006 ASPE membership. Proceedings books may be ordered separately and ahead of time on the Conference Registration form. Two full days of tutorials are being held on Sunday and Monday, October 9 and 10. Tutorial fees will be charged separately. A description of the tutorials can be found here. Confirmations ASPE will send you a confirmation of your registration and payment of conference, tutorial(s), tour and guest fees. A final receipt will be available upon check-in at the on-site Registration Desk. Refunds Conference fee is refundable (less a $50.00 handling fee for regular participants and $25.00 for students) only when registration is cancelled in writing and received at ASPE headquarters 10 days before the meeting. For “tutorials only” registrations, the same cancellation rules and dates will apply (with a $20.00 cancellation fee per regular tutorial, and $10.00 per tutorial for students). Passport Requirements IMPORTANT INFORMATION REGARDING TRAVEL PASSPORTS TO USA: On May 17, the US Department of Homeland Security issued a reminder that, as of June 26, 2005, travelers visiting from 27 "visa waiver" countries will be required to have machine-readable passports in order to enter the United States. These passports must contain a bar code that can be swiped by United States Customs and Border Protection officers "to confirm the passport holder's identity quickly and obtain other information about the holder typically found on a passport's inside cover." Anyone planning on traveling to the U.S. from the 27 visa waiver countries should check with their passport-issuing authority to make sure they have a machine-readable passport. Please be aware that some travelers from some of these nations have valid passports but they have not been renewed and do not include a machine-readable bar code. These travelers will need to acquire a new, machine-readable passport by June 26 or before their date of travel to the USA. A full list of the visa-waiver countries includes: Andorra Australia Austria Belgium Brunei Denmark Finland France Germany Iceland Ireland Italy Japan Liechtenstein Luxembourg Monaco The Netherlands New Zealand Norway Portugal San Marino Singapore Slovenia Spain Sweden Switzerland United Kingdom For more detailed information please go to the US Department of State Travel Information web page: http://travel.state.gov/visa/temp/without/without_1990.html Exhibition Each year at the Annual Meeting, a technical exhibition is open to all fully registered conference participants. This exhibit showcases many precision engineering products and services from companies and organizations. The exhibitors range from tool manufacturers to suppliers to research institutions and is an excellent venue to gain exposure to international precision engineering professionals. If your organization is interested in exhibiting at the 2005 ASPE Annual Meeting, please contact ASPE at 919-839-8444. Click here for an Exhibitor Package. Current and past exhibitors include ADE Phase Shift, ADE Technologies, Inc., A. G. Davis / AA Gage, A.L.M.T. Corporation, Accura Technics, L.L.C., Acteron Corporation, Advance Hivot, Aerotech, Inc., Alson E. Hatheway, Inc., AlumiPlate, Inc., Anorad, Automated Precision, Inc., BalaDyne Corporation, Bal-Tec Division of Micro Surface Engineering, Bilz Vibration Technology, Brown & Sharpe Manufacturing Company, Burleigh Instruments, Center for Optics Manufacturing – UR, Center for Precision Metrology – UNCC, Chardon Tool Company, Inc., Charmilles Technologies Corporation, Contour Fine Tooling, Inc., CoorsTek, Inc. – Oregon Operations, Corning Tropel Corporation, Cranfield Precision, Division of Landis Lund, DAC International, Inc., Digital Instruments – Veeco Metrology Group, Dover Instrument Corporation, Elsevier Science Inc., Excel Precision Corporation, Fabreeka International, Inc., Fisba Optik, L.L.C., FRT of America, G2 Engineering, Heidenhain Corporation, Hembrug, B.V., Herzan Industries, Hewlett Packard Company, IntituTec, Inc., K & Y Diamond Ltd., Kriterion, Lanxide Corporation, Lawrence Livermore National Laboratory, Lion Precision, Machine Dynamics Research Lab -- PSU, Mahr Federal, Majestic/Microtool & Instruments, Inc., MicroE, Inc., Metrology Perspectives Group LLC, Micromap Corporation, Minus K Technology, Inc., Mitutoyo America Corporation, Moore Nanotechnology Systems LLC, Moore Tool Company, Inc., National Precision Manufacturing Institute, New Focus, Inc., New Way Precision, Nikon Instrument, Inc., Norton Company, Olympic Precision, Inc., OPTEQ, Optodyne, Inc., Optra, Park Scientific Instruments, Philips CFT, PI (Physik Instrumente) LP, Polytec PI, Inc., Precision Engineering Center – NCSU, Precision Engineering Research Lab – BU, Precision Machining Lab – UNCC, Precision MicroDynamics, Inc., Precision Systems Lab -- GWU, Precitech, Inc., Professional Instruments Co., Inc., QED Technologies, Schott Glass Technologies, Inc., SDL Queensgate, Ltd., SNU Precision Company, Inc, Speedring Systems, Inc., Spindler & Hoyer, Surface Finishes Company, Inc., Techmetals, Inc., Technodiamant USA, Inc., Tencor Instruments, The Timken Company, University of Rochester – Center for Optics Manufacturing, Veeco Metrology Group, Visitec Microtechnik GmbH, WYKO Corporation, Zygo Corporation. Hotel Accommodations In the heart of historic Norfolk, just steps from the vibrant and revitalized waterfront, the stunning and award-winning Norfolk Waterside Marriott Hotel and the Waterside Convention Center provide an exceptional location to immerse yourself in one of America's most important port cities. You'll be within walking distance of museums, shopping, dining, and loads of attractions, and within only 8 miles from Norfolk International Airport. The ASPE group room rate is $129.00 for both single and double occupancy, plus 12.5% room tax (reservations: http://www.stayatmarriott.com/ASPE2005Industry).In addition, a limited number of government rate rooms are available at the current federal per diem rate for registrants with proper means of identification (i.e., employee ID cards, business cards, or government sponsored travel charge card). For reservations go to http://www.stayatmarriott.com/ASPE2005Government. For all rate categories one night's room deposit and credit card numbers are required to guarantee a reservation, and the housing deadline is September 7, 2005; after that date the Hotel cannot guarantee the group rate or space availability. Please make your reservations early. You can also use the following mailing address or telephone and fax numbers: Norfolk Waterside Marriott Hotel 235 E Main Street Norfolk, Virginia 23510 USA Phone: 1-757-627-4200 Fax: 1-757-628-6452 Participants wishing to share a room at the Waterside Marriott Hotel, please contact ASPE Headquarters for a list of names of other individuals who may wish to share as well. Self-parking at the Waterside Garage and Valet parking are available at daily and hourly fees. For additional information please contact ASPE Headquarters. We can be reached by telephone at (919) 839-8444, fax (919) 839-8039, or e-mail at erika_layne@aspe.net or ilka_lee@aspe.net. Schedule Below is a general schedule of events. For a more detailed schedule, click here for a PDF version. Date Event Sun, Oct. 9 Tutorials Mon, Oct. 10 Tutorials Keynote Address Welcome Reception Tues, Oct. 11 Technical Session I Technical Session II Lunch and Committee Meetings Commercial Session Poster Session Hospitality Hour Wed. Oct. 12 Technical Session III Technical Session IV Awards Lunch and Business Meeting Poster Session Technical Session V Hospitality Hour Dinner Banquet at Nauticus Thurs. Oct 13 Technical Session VI Technical Session VII Lunch and Roundtable Discussions Technical Session VIII Fri. Oct. 14 Technical Tours   Norfolk Transportation Information Norfolk International Airport- (ORF) 9 miles West of the Waterside Marriott Hotel Airport Shuttle Norfolk Airport Express operates between Norfolk International Airport and all Hampton Roads cities including Norfolk. Norfolk Airport Express is located outside baggage claim at the booth marked "Airport Express Shuttle Service." Service departs continuously from the airport to all hotels and offers very reasonable rates. The per-person cost is reduced with each additional person traveling in the group. For example: One Person: $19.00 one way and $33.00 round-trip Two Persons: $27.00 one way and $45.00 round-trip Three Persons: $35.00 one way and $65.00 round trip For further information call or write: Norfolk Airport Express Norfolk International Airport Norfolk, VA 23518 Tel: (757) 857-3991 Taxi Service Taxicab service is ready and waiting at Norfolk International Airport. Located just outside the baggage claim lobby, they're ready to leave as soon as your luggage is loaded. Service is provided directly to your destination. Five persons can ride for the price of one as long as they are going to the same destination. The fare is based on the meter for South Hampton Roads and is assessed at a flat rate beyond that region. Payment may be made by cash, and in some instances credit cards and corporate charge accounts are available. Estimated cost is $20.00 (one-way) plus 15% gratuity for the driver. Rental Cars With combined citywide fleets of over 3,000 vehicles, Norfolk International Airport's eight onsite rental car agencies are ready for group or individual needs. The rental car offices are conveniently located in the baggage claim area below the main terminal lobby. • (800) 831-2847 - Avis • (800) 527-0700 - Budget • (800) 800-3665 - Dollar • (800) 736-8222 - Enterprise • (800) 654-3131 - Hertz • (800) 227-7368 - National • (800) 367-2277 - Thrifty Driving Directions from Norfolk International Airport Take airport Exit to Norview. Norview Boulevard to I-64 East to 264 (Norfolk Downtown). Take 264 West to Waterside Drive-Downtown (Exit 9). Turn right on Atlantic Street, and left on Main Street. Self parking is available at the Main Street Garage across from the Hotel. The Marriott also offers valet parking. Parking Waterside Garage 50 Martin's Lane Norfolk, VA 23510 Located on the corner of Waterside Drive and Atlantic Avenue. The garage entrance is located on Atlantic Avenue. Hourly Rates are as follows: 1 hour or any part thereof $ 0.75 2 hours or any part thereof $ 1.50 3 hours or any part thereof $ 2.50 4 hours or any part thereof $ 4.50 5 hours or any part thereof $ 6.50 6 hours or any part thereof $ 8.50 7 hours or any part thereof $ 10.50 8 hours or any part thereof $ 12.50 Maximum up to 24 hours $ 14.00 Lost Ticket $ 14.00 Norfolk Electric Transit (NET) The Norfolk Electric Transit or NET is the premier free transportation link for visitors and shoppers around downtown Norfolk. The NET links Norfolk’s many downtown attractions with parking facilities. On week days the NET makes a total of sixteen stops along a 2.2-mile route throughout the downtown area, beginning at Cedar Grove Parking Lot, running along Granby Street to Main and Water Streets, then to Harbor Park and City Hall, and finally circling back again. The NET weekend route makes a total of nine stops, beginning at Nauticus, running along Waterside Drive to the Festival Marketplace, Harbor Park (during Tides games only), then to the MacArthur Center, Scope, the Harrison Opera House, the Chrysler Museum, and finally circling back again. NET stops are conveniently located and displayed prominently throughout the city. Each air-conditioned bus holds up to 22 passengers and run Monday through Friday from 6:30 a.m until 11:00 p.m. Weekend service is provided from noon until midnight on Saturdays and noon until 8:00 p.m. on Sundays. NET buses run every six to eighteen minutes. During peak hours, additional buses are added. Deadlines August 1, 2005 Four (4) page extended abstract due at ASPE Headquarters for all papers selected for oral and poster presentation. All abstracts received by that date will be included in the Conference PROCEEDINGS book and CD ROM. NOTE: In addition to the extended abstract, authors are encouraged to prepare a full-length paper for possible inclusion in Precision Engineering – Journal of the International Societies for Precision Engineering and Nanotechnology. This paper can be submitted at the Annual Meeting or at any time thereafter. For detailed guidelines consult the Notes for Authors in the journal, or contact ASPE Headquarters. September 7, 2005 Early registration for the ASPE 2005 Annual Meeting ends. Hotel reservation deadline - after this date the Hotel cannot guarantee the group rate or space availability. Organizing and Technical Program Committee: Vivek G. Badami, Chair, Corning Tropel Corporation Georg Aigeldinger, Sandia National Laboratories Hisayuki Aoyama, University of Electro-Communications Thomas A. Dow, North Carolina State University Kenneth P. Garrard, North Carolina State University Anthony E. Gee, University College, London David D. Gill, Sandia National Laboratories Don A. Lucca, Oklahoma State University Stephen J. Ludwick, Aerotech, Inc. Eric R. Marsh, The Pennsylvania State University Kate M. Medicus, University of North Carolina - Charlotte Michele H. Miller, Michigan Technological University Bala Muralikrishnan, Nat’l Inst. of Standards and Technology Tony L. Schmitz, University of Florida Richard M. Seugling, Lawrence Livermore National Laboratories Alexander H. Slocum, Massachusetts Inst. of Technology Alex Sohn, North Carolina State University Pradeep Subrahmanyan, Electro Scientific Industries, Inc. E. Clayton Teague, Nat’l Nanotechnology Coordination Office R. Ryan Vallance, The George Washington University Allen Y. Yi, Ohio State University For additional information please contact: American Society for Precision Engineering 301 Glenwood Ave., Suite 205, Raleigh, NC 27603 P.O. Box 10826, Raleigh, NC 27605-0826 (919) 839-8444, or fax (919) 839-8039 http://www.aspe.net