| Abstract
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2876 |
| Title |
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Validation of the performance of a high-accuracy compact interferometric sensor |
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Design of Precision Machines and Instruments |
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| Content |
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This paper describes the validation of the performance of a new high-accuracy, multi-channel, fiber-based, low drift, absolute distance measuring interferometric sensor system. The system was designed for demanding applications requiring thermally passive, electrically immune, compact sensors with an extremely long mean time between failures (MTBF). The system is designed to operate over a range of 500 µm with a displacement measuring uncertainty (k=2) of 4 parts per million, i.e., 2 nm over the full range.
The main focus of this paper is the metrology used to validate the displacement measurement performance of the system, in particular the uncertainty associated with the measurement of displacement. The performance of the system under test (SUT) is compared to a conventional displacement measuring interferometer (DMI) system. Uncertainty contributors in the validation metrology system are minimized through a compact metrology loop and Abbè error compensation. The design of the validation metrology is driven by a comprehensive uncertainty budget, with resulting displacement uncertainties at the part per million (ppm) level. A detailed description of the setup and uncertainty budget are provided along with measurement results.
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