| Abstract
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2875 |
| Title |
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Compact, multi-channel, fiber-based absolute distance measuring interferometer system |
| Category |
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Optics and Interferometry |
| Primary
author |
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| Organization |
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| Content |
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A new compact, multi-channel, fiber-based, high-accuracy, low drift, absolute distance measuring interferometer system is described. This system combines high-accuracy displacement measurement capability with absolute distance measurement. The latter capability provides the ability to establish a highly repeatable (~0.5 nm) position datum, e.g. for use in establishing a 'home' position. The system is designed for demanding applications requiring a multitude (~60) of thermally passive, electrically immune, compact sensors with an extremely long mean time between failures (MTBF) and exceptional long-term drift performance (a few nm/year). The system is designed to operate over a range of 500 µm with a displacement measuring uncertainty (k=2) of 4 parts per million, i.e., 2 nm over the full range.
The operating principle, construction and performance of this system are described in this paper.
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