| Abstract
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2040 |
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WTHDRAWN (8/6/06) Synthesis of the Nano-controller for High-speed Nano-precision Air Bearing Stages |
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Equipment, Machines & Instruments: Mechatronics |
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| Content |
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Motion control is essentially required in the general automation, robotics, semiconductor manufacturing, machine tool, medical and packaging industries, etc. Many processes involving sub-micron resolution and control are applied to the measurement, manufacture and control of large, macro and/or micro components of optical, MEMS and/or semiconductor devices. Lithography, MEMS fabrication and flat-panel display (FPD) fabrication are three representative examples of nanofabrication processes. Ultra-precision machining such as cutting, grinding and superfinishing are required to provide nano-precision surfaces such as ultra-precision bearings, spindles, memory disks, mirrors and lens for optical systems, and so on. Flip chip assembly, assembly of micro-machines and –robots, inspection of FPDs, scanning probe microscopy, scanning electron microscope, and atomic force microscope require nano-level motion control as well.
This paper proposes an architecture and design methodology of a high speed multi-axis nano-controller. Design methods of nano and high speed motion control algorithms, geometrical error compensation, human and machine interface, and IT-based digital interface (Field bus, CAN, etc.) technique between the controller, amplifiers and I/O devices are described.
After fabricating a nano-stage equipped with air bearings, linear motors and the developed nano-controller, optimal tuning of the control system is conducted according to the previously devised integrated design methodology. Ripple velocity compensation is performed through adaptive feedforward compensation. Feedforward controllers and disturbance observers are included in the controller to increase the robustness of the nano-controller against frictions and disturbances.
In order to verify the performance of the developed system, circular motion errors and positioning errors are measured according to various operating conditions. Through the geometric error compensation, ±200 nm positioning accuracy, maximum velocity of 2m/s, maximum acceleration of 5g, and positioning stability of ±1 count (±10 nm) are achieved.
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