| Abstract
ID |
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2001 |
| Title |
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Analysis and Performance of a Parallel-axis Flatness Measuring Instrument |
| Category |
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Metrology: Instrumentation, Design & Testing |
| Primary
author |
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| Organization |
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| Content |
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This paper describes the design, analysis and performance of a flatness inspection instrument to measure workpieces with up to one millimeter departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nanometer on a Ø75 mm workpiece. This paper presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond-turned workpieces. |
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